JPH1131600A5 - - Google Patents

Info

Publication number
JPH1131600A5
JPH1131600A5 JP1997200893A JP20089397A JPH1131600A5 JP H1131600 A5 JPH1131600 A5 JP H1131600A5 JP 1997200893 A JP1997200893 A JP 1997200893A JP 20089397 A JP20089397 A JP 20089397A JP H1131600 A5 JPH1131600 A5 JP H1131600A5
Authority
JP
Japan
Prior art keywords
surface treatment
treatment apparatus
power source
central electrode
plasma surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997200893A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1131600A (ja
JP3813313B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP20089397A priority Critical patent/JP3813313B2/ja
Priority claimed from JP20089397A external-priority patent/JP3813313B2/ja
Publication of JPH1131600A publication Critical patent/JPH1131600A/ja
Publication of JPH1131600A5 publication Critical patent/JPH1131600A5/ja
Application granted granted Critical
Publication of JP3813313B2 publication Critical patent/JP3813313B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP20089397A 1997-07-09 1997-07-09 プラズマ表面処理装置 Expired - Lifetime JP3813313B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20089397A JP3813313B2 (ja) 1997-07-09 1997-07-09 プラズマ表面処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20089397A JP3813313B2 (ja) 1997-07-09 1997-07-09 プラズマ表面処理装置

Publications (3)

Publication Number Publication Date
JPH1131600A JPH1131600A (ja) 1999-02-02
JPH1131600A5 true JPH1131600A5 (enExample) 2005-01-20
JP3813313B2 JP3813313B2 (ja) 2006-08-23

Family

ID=16432014

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20089397A Expired - Lifetime JP3813313B2 (ja) 1997-07-09 1997-07-09 プラズマ表面処理装置

Country Status (1)

Country Link
JP (1) JP3813313B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100462772B1 (ko) * 2002-12-02 2004-12-23 에이치아이티 주식회사 플라즈마를 이용한 세정장치
FR2938120B1 (fr) * 2008-10-31 2011-04-08 Commissariat Energie Atomique Procede de formation d'une couche monocristalline dans le domaine micro-electronique

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