JPH11310304A - Cassette box transfer device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the amount of distortion generated in a thin plate such as a glass plate and to improve liquid crystal quality and yield even if a cassette box housing thin plates such as the glass plates are stored in a stacker for a long time. SOLUTION: A transfer device is installed between a carrier truck and a stacker crane having a stacker for transferring a cassette box housing thin plate such as glass plates. In this case, an inclining rotary base 3 having a circular-arc outer side face, supported so as to be inclined and rotated by inclining rotary rollers 22 and 23 arranged in a base and having a cassette box placing platform is inclined and rotated within the range of 90 deg. by an inclination and rotation driving mechanism 25.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the transfer of a cassette box containing a thin plate such as a glass plate, which is installed between a carrier and a stacker crane installed in a stacker in a factory for manufacturing liquid crystals and semiconductors. Particularly, the present invention relates to a cassette box delivery device capable of reducing the amount of bending generated in a thin plate such as a glass plate even when a cassette box containing a thin plate such as a glass plate is stored in a stacker for a long time. It is.

[0002]

2. Description of the Related Art Conventionally, for example, in a liquid crystal manufacturing factory, a glass plate serving as a liquid crystal substrate is stored in a dedicated cassette box in a horizontal direction so as to be transported between production processes and, if necessary, stacked. To be stored temporarily. By the way, in recent years, as the performance of liquid crystal has become higher and more multifunctional, the glass plate serving as a substrate tends to be thinner and larger in size.

[0003]

[Problems to be solved by the invention]
When a thin glass plate and a large-sized glass plate are stored horizontally in a cassette box and stored in a stacker for a long time, the glass plate
Since both ends are supported and housed so as to be bridged, bending (distortion) occurs, which causes a problem that the quality and yield of liquid crystal are reduced.

The present invention has been made in view of the above-mentioned problem of storing a conventional cassette box containing a thin plate such as a glass plate in a stacker for a long time, and keeping a cassette box containing a thin plate such as a glass plate in a stacker for a long time. Even in such a case, an object of the present invention is to provide a cassette box delivery apparatus capable of reducing the amount of bending generated in a thin plate such as a glass plate and improving the quality and yield of liquid crystal.

[0005]

In order to achieve the above object, a cassette box delivery device according to the present invention is installed between a transport trolley and a stacker crane provided in a stacker and accommodates a thin plate such as a glass plate. In a delivery device for delivering a cassette box, a tilt table supported on a base so as to be tiltable, a tilt drive mechanism for tilting the tilt table in a range of approximately 90 °, and a tilt table are formed. And a cassette box mounting table.

The cassette box delivery device is formed of a tilting table supported on a base so as to be tiltable, a tilt drive mechanism for tilting the tilting table within a range of approximately 90 °, and a tilting table. It is composed of a cassette box mounting table, which is installed between the transport trolley and the stacker crane provided in the stacker, so that when the cassette box is transferred between the transport trolley and the stacker crane, By tilting the tilting table within a range of approximately 90 ° by the driving mechanism, the cassette box mounted on the cassette box mounting table formed on the tilting table is tilted by approximately 90 ° together with the tilting table, and the cassette is rotated. A thin plate, such as a glass plate, which has been stored in the box in the horizontal direction, is stored almost vertically in the cassette box, and the cassette box is stored in the stacker in this state. Thereby, the amount of bending generated in a thin plate such as a glass plate when the cassette box is stored in the stacker for a long time can be reduced.

In this case, the outer surface of the tilting base can be formed in an arc shape, and can be tiltably supported via a tilting roller disposed on the base.

Thus, the tilting table can be supported and tilted at a predetermined angle smoothly, and the glass plate or the like housed in the cassette box can be applied without giving a large vibration or impact to a thin plate such as a glass plate. The storage direction of the thin plate can be changed.

Further, in order for the fork to be inserted in two directions substantially perpendicular to the cassette box mounting table and the cassette box while the cassette box is mounted on the cassette box mounting table. Can be formed.

[0010] This makes it possible to smoothly transfer the cassette box between the transport trolley or the stacker crane and the cassette box transfer device using the transfer machine provided with the fork.

Further, the cassette box mounting table is slidably disposed along the guide rail, and the slide table for mounting the cassette box, a slide drive mechanism for the slide table, and make a substantially right angle with the slide table. It can be configured with a stopper.

[0012] Thus, by tilting the tilting table in a state where the slide table on which the cassette box is mounted is slid by the slide table sliding drive mechanism until the cassette box contacts the stopper, It can prevent the cassette box from moving other than tilting, and change the storage direction of the thin plate such as the glass plate stored in the cassette box without giving a large vibration or impact to the thin plate such as the glass plate In addition, since the positioning of the cassette box in the cassette box delivery device can be accurately performed, the delivery of the cassette box between the transport trolley or the stacker crane and the cassette box delivery device can be performed smoothly.

Further, the base for supporting the tilting base can be slidably disposed on the fixed side, and a sliding drive mechanism for the base can be provided.

Thus, the transfer of the cassette box between the carrier or the stacker crane and the cassette box transfer device can be performed more smoothly by using the transfer machine provided with the fork.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a cassette box delivery device according to the present invention will be described below with reference to the drawings.

The cassette box delivery device A is installed between a transport trolley C stopped at a predetermined stop position and a stacker crane SK provided on the stacker S, and a cassette box is provided between the transport trolley C and the stacker crane SK. When the K is transferred, the tilting table 3 is tilted within a range of approximately 90 °, so that the cassette box K mounted on the cassette box mounting table 4 formed on the tilting table 3 (FIG. 5A). ) With the tilting table 3 so that the thin plate G such as a glass plate stored in the cassette box K in a horizontal direction is stored in the cassette box K substantially vertically. (See FIG. 5B) In this state, the cassette box K is to be stored in the stacker S. A base 2 is provided so as to be slidable in the direction of the rocker crane SK, and a tilt base 3 is supported on the base 2 so as to be tiltable in a direction perpendicular to the sliding direction of the base 2. 3, a cassette box mounting table 4 is formed.

In this case, the base 1 is installed horizontally on a floor, a lower portion of the stacker S, etc., and guide rails 11, 11 are laid on an upper portion thereof, and the sliders 12, 12 are laid by the guide rails 11, 11. , The base 2 is slidably supported. A cylinder 13 as a sliding drive mechanism for the base 2, for example, a rodless cylinder is disposed on the base 1 in parallel with the guide rails 11, 11. The table 2 is slid along the guide rail 11. In this case, in order to regulate the sliding range of the base 2, the shock absorber 14 (or stopper) is arranged at a position of the maximum allowable sliding range of the base 2 on the base 1, The piece 15 is brought into contact.

At the upper part of the base 2, gantry 21, 21 is protruded, and tilt rollers 22, 23 are provided at the upper part of the gantry 21, 21.
Is rotatably supported, and the tilt rollers 22,
The tilting table 3 having an outer surface formed in an arc shape is supported to be tiltable via 23. On the outer surface of the tilting table 3,
Two guide rails 31 and 32 formed in an arc shape are arranged in parallel along the outer surface of the arc shape, and the tilt roller 2
Guide 2 and 23. In this case, one of the guide rails 31 is provided with a groove, and in the groove, the tilt roller 22,
23 is fitted to prevent the tilting table 3 from moving in the direction perpendicular to the guide rails 31 and 32,
The other guide rail 32 has a planar shape, and abuts against the tilt rollers 22 and 23 together with the one guide rail 31 so as to support the load of the tilt table 3.

A sprocket wheel 26 (or a sprocket wheel 26 (or a sprocket wheel 26) driven by a motor 25 as a tilt drive mechanism of the tilt table 3 is mounted on a bracket 24 protruding from the base 2 at a substantially intermediate position between the tilt rollers 22 and 23. Gear 33) and a rack 33 in which the sprocket wheel 26 is disposed on the outer surface of the tilting table 3.
And the motor 25 is driven to drive the tilting table 3 through the sprocket wheel 26 and the rack 33.
To tilt. In this case, the rack 33 is configured such that the chain is stretched along the outer surface of the tilting base 3 and both ends of the chain are fixed to the tilting base 3 via chain stoppers 34 and 35. However, an arc-shaped rack formed along the arc-shaped outer surface of the tilting table 3 may be used. The length of the rack 33 defines the maximum tilt angle of the tilt table 3, and the tilt angle of the tilt table 3 can be set arbitrarily within the range of the length of the rack 33.

Thus, the tilting table 3 can be smoothly supported and tilted at a predetermined angle, and the thin plate G such as a glass plate is stored in the cassette box K without giving a large vibration or impact. The direction in which the thin plate G such as a glass plate is stored can be changed.

A cassette box mounting table 4 is formed inside the tilting table 3. This cassette box mounting table 4
The supporting pieces 41, 41 protrude along the edge of the tilting table 3 so as to face each other, and when the tilting table 3 is in a fixed position (the state before tilting) on the supporting pieces 41, 41 ( (See FIG. 1), a receiving table 42 is disposed horizontally, and guide rails 43 are laid along an upper portion of the receiving table 42, preferably along a support piece 41. The slider 4
The slide table 45 is slidably supported via the ports 6 and 46.

The receiving table 42 at one end of the slide table 45
Is provided with a cylinder 47 as a sliding drive mechanism for the slide table 45, and by driving this cylinder 47, the slide table 45 connected via a cylinder rod 47 </ b> L of the cylinder 47 is moved along the guide rail 43. A slide 44 is formed on the support 41 at the other end of the slide base 45 so as to slide.
To be installed. Thereby, the slide table 45 on which the cassette box K is mounted is moved by the cylinder 47 to the
By tilting the tilting table 3 in a state where the cassette box K is slid until it comes into contact with the stopper 44, it is possible to prevent the cassette box K from moving other than tilting. The storage direction of the thin plate G such as the glass plate stored in the cassette box K can be changed without giving a large vibration or impact to the thin plate G, and the positioning of the cassette box K in the cassette box delivery device A can be changed. Because it can be performed accurately,
Alternatively, delivery of the cassette box K between the stacker crane SK and the cassette box delivery device A can be performed smoothly.

The cassette box mounting table 4 has a cassette box K mounted on the cassette box mounting table 4 in two directions substantially perpendicular to each other between the cassette box mounting table 4 and the cassette box K. , For forming a fork of a transfer machine (not shown) of a cassette box K provided on a transport carriage C, a stacker crane SK, or the like. In the position (1), the receiving table 42 and the guide rails 43 are omitted.

The mechanism for tilting the tilting table 3 within a range of about 90 ° is not limited to the mechanism used in the present embodiment. For example, a rocking mechanism including a bearing, a link mechanism, and the like, An arbitrary mechanism combining a drive mechanism including a motor and the like can be adopted.

Hereinafter, the operation of the cassette box delivery apparatus A will be described. A thin plate G such as a glass plate is stored in a horizontal direction in the cassette box K loaded and transferred by the transfer cart C. In this state, the slide table of the cassette box mounting table 4 of the cassette box delivery device A is transferred from the transport vehicle C stopped at a predetermined stop position using, for example, a transfer machine (not shown) mounted on the transport vehicle C. 45 (see FIG. 5A).
After that, by driving the cylinder 47, the slide table 45 on which the cassette box K is placed is slid until the cassette box K contacts the stopper 44, and then the motor 25 is driven. 3 to 9
0 °, more specifically, tilting at an angle slightly smaller than 90 degrees, for example, in the range of 80 to 89 degrees. The tilt angle of the tilt table 3 can be measured by using various sensors and the like, and can be set to an arbitrary value. As a result, the cassette box K mounted on the slide table 45 of the cassette box mounting table 4 formed on the tilting table 3 is mounted on the stopper 44 and is stored in the cassette box K in the horizontal direction. The thin plate G, such as a glass plate, which has been held, is stored in the cassette box K in a substantially upright position.
To move the base 2 to the stacker crane S
Sliding in the direction of K, the cassette box K is mounted on a stacker crane SK using a transfer machine (not shown),
Store it in the stacker S. In this case, by sliding the base 2 in the direction of the stacker crane SK,
The fork of the transfer machine mounted on the stacker crane SK is inserted into the concave portion 49 formed in the cassette box mounting table 4, and the transfer of the cassette box K between the cassette box delivery device A and the stacker crane SK is smoothly performed. That can be done. As a result, the cassette box K can be stored in a stacker in a state in which a thin plate such as a conventional glass plate is horizontally stored in the cassette box and the cassette box is stored in the stacker.
Can be reduced in the thin plate G such as a glass plate when the sheet G is stored in the stacker S for a long time.

The removal of the cassette box K stored in the stacker S is performed by causing the stacker crane SC and the cassette box delivery device A to perform the reverse operation of storing the cassette box K in the stacker S. It can be carried out. In this case, if necessary, the tilting of the tilting table 3 in the reverse direction is omitted, so that the transport trolley C can be thinned to a thin plate G such as a glass
Can be mounted in a state where the cassette box K is stored substantially vertically.

[0027]

According to the cassette box delivery apparatus of the present invention, a tilting table supported on a base so as to be tiltable, a tilt drive mechanism for tilting the tilting table within a range of approximately 90 °, It consists of a cassette box mounting table formed on a tilting table, which is installed between the transport vehicle and the stacker crane provided on the stacker, so that the cassette box can be transferred between the transport vehicle and the stacker crane. At this time, the tilting drive mechanism tilts the tilting table within a range of approximately 90 °, so that the cassette box mounted on the cassette box mounting table formed on the tilting table can be rotated by approximately 90 ° together with the tilting table. Tilt to allow the thin plate such as a glass plate stored horizontally in the cassette box to be stored almost vertically in the cassette box, and store the cassette box in the stacker in this state. Unisuru. As a result, compared to the conventional case where a thin box such as a glass plate is stored in a cassette box in the horizontal direction and the cassette box is stored in the stacker, the glass plate in a case where the cassette box is stored in the stacker for a long time is compared. And the like, the amount of bending generated in a thin plate can be reduced, and the quality and yield of liquid crystal can be improved.

The outer surface of the tilting table is formed in an arc shape,
By tiltably supporting via a tilting roller disposed on the base, the tilting table can be smoothly supported and tilted at a predetermined angle, and large vibrations and shocks can be applied to a thin plate such as a glass plate. The storage direction of a thin plate such as a glass plate stored in a cassette box can be changed without giving the following.

Further, in order for the fork to be inserted in two directions substantially perpendicular to the cassette box mounting table and the cassette box while the cassette box is mounted on the cassette box mounting table. By using the transfer device provided with the fork, the cassette box can be smoothly transferred between the transport trolley or the stacker crane and the cassette box transfer device.

Further, the cassette box mounting table is slidably disposed along the guide rail, and a slide table for mounting the cassette box, a slide drive mechanism for the slide table, and a substantially right angle with the slide table. By using the stopper and the slide base, the tilt base can be tilted while the slide base on which the cassette box is placed is slid by the slide base slide drive mechanism until the cassette box comes into contact with the stopper. Thus, the cassette box can be prevented from moving other than tilting, and the thin plate such as a glass plate is stored in the cassette box without giving a large vibration or impact to the thin plate such as a glass plate. Can be changed, and the positioning of the cassette box in the cassette box delivery device can be performed accurately. The transfer of the cassette box between the car crane and the cassette box delivery device can be smoothly performed.

Further, a transfer base equipped with a fork is provided by disposing a base for supporting the tilting base so as to be slidable with respect to the fixed side and providing a sliding drive mechanism for the base. The cassette box can be more smoothly transferred between the transport trolley or the stacker crane and the cassette box transfer device.

[Brief description of the drawings]

FIG. 1 is a front view showing an embodiment of a cassette box delivery device of the present invention.

FIG. 2 is a side view of the same.

FIG. 3 is a plan view of the same.

FIG. 4 is a side view of the roller support.

FIG. 5 is an explanatory diagram of an operation of the cassette box delivery device.
(A) shows a state before tilting, and (B) shows a state after tilting.

FIG. 6 is an explanatory diagram showing a relationship between a cassette box delivery device, a transport trolley, and a stacker crane provided in a stacker.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Base 11 Guide rail 12 Slider 13 Cylinder (sliding drive mechanism) 14 Shock absorber 15 Protrusion piece 2 Base 21 Mount 22 and 23 Tilt roller 24 Bracket 25 Motor (Tilt drive mechanism) 26 Sprocket wheel 3 Tilt base 31 , 32 guide rail 33 rack 34, 35 chain stopper 4 cassette box mounting table 41 support piece 42 receiving table 43 guide rail 44 stopper 45 slide table 46 slider 47 cylinder (sliding drive mechanism) 47L cylinder rod 48, 49 recess A cassette Box delivery device C Carriage trolley G Thin plate K Cassette box S Stacker SK Stacker crane

Claims (5)

[Claims] 1. A cassette box (K) that is installed between a transport trolley (C) and a stacker crane (SK) provided in a stacker (S) and stores a thin plate (G) such as a glass plate. In the delivery device to be performed, the base (2)
Tilt table (3) supported to be tiltable upward, and tilt table (3)
A tilting drive mechanism (25) for tilting the lens in a range of approximately 90 °,
Cassette box mounting table (4) formed on tilting table (3)
And a cassette box delivery device. 2. The tilting table (3) has an arcuate outer surface and is tiltably supported via tilting rollers (22, 23) disposed on the base (2). The cassette box delivery device according to claim 1, wherein: 3. In a state where the cassette box (K) is mounted on the cassette box mounting table (4), the cassette box mounting table (4) and the cassette box (K) are formed in two directions substantially at right angles. 3. The cassette box delivery device according to claim 1, wherein a concave portion (48, 49) is formed so that a fork can be inserted. 4. A slide table (45) on which a cassette box (K) is mounted, wherein the cassette box mounting table (4) is slidably disposed along a guide rail (43), and a slide table (45). 4. The cassette box delivery device according to claim 1, wherein the cassette box delivery device comprises a slide drive mechanism (47) and a stopper (44) substantially perpendicular to the slide table (45). 5. A base (2) for supporting the tilting table (3),
2. The base according to claim 1, further comprising a slide drive mechanism for slidably mounting the base.
5. The cassette box delivery device according to 2, 3, or 4.