JPH1130595A5 - - Google Patents

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Publication number
JPH1130595A5
JPH1130595A5 JP1998115827A JP11582798A JPH1130595A5 JP H1130595 A5 JPH1130595 A5 JP H1130595A5 JP 1998115827 A JP1998115827 A JP 1998115827A JP 11582798 A JP11582798 A JP 11582798A JP H1130595 A5 JPH1130595 A5 JP H1130595A5
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JP
Japan
Prior art keywords
data
shape
point cloud
actual
predetermined
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JP1998115827A
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English (en)
Japanese (ja)
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JP4015270B2 (ja
JPH1130595A (ja
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Priority claimed from US08/850,673 external-priority patent/US5848115A/en
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Publication of JPH1130595A publication Critical patent/JPH1130595A/ja
Publication of JPH1130595A5 publication Critical patent/JPH1130595A5/ja
Application granted granted Critical
Publication of JP4015270B2 publication Critical patent/JP4015270B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP11582798A 1997-05-02 1998-04-27 物体の実際の形状を予定の形状と比較する方法 Expired - Fee Related JP4015270B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/850,673 US5848115A (en) 1997-05-02 1997-05-02 Computed tomography metrology
US08/850673 1997-05-02

Publications (3)

Publication Number Publication Date
JPH1130595A JPH1130595A (ja) 1999-02-02
JPH1130595A5 true JPH1130595A5 (enExample) 2005-08-11
JP4015270B2 JP4015270B2 (ja) 2007-11-28

Family

ID=25308817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11582798A Expired - Fee Related JP4015270B2 (ja) 1997-05-02 1998-04-27 物体の実際の形状を予定の形状と比較する方法

Country Status (3)

Country Link
US (1) US5848115A (enExample)
EP (1) EP0875751A1 (enExample)
JP (1) JP4015270B2 (enExample)

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* Cited by examiner, † Cited by third party
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