JPH11230727A - Shape measuring apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a shape measuring apparatus by which a shape is measured so as to be suitable for a measuring purpose, by a method wherein the optical transmittance of filters constituting a two-dimensional filter is controlled individually and the intensity of light used to illuminate an object to be shape-measured is made different according to a place in such a way that a specific place is illuminated to be especially bright or that a specific place is illuminated to be especially dark. SOLUTION: The surface of an object 56 to be shape-measured is irradiated, via a two-dimensional filter 58, a semitransparent mirror 59 and a lens 60, with light which is radiated from a light source 57. Reflected and returned light from the surface of the object 56 is incident on the light receiving face of a CCD camera 61 via the lens 60 and the semitransparent mirror 59, and the surface of the object 56 is imaged so as to be measured three-dimensionally. The optical transmittance of respective filters for the two-dimensional filter 58 can be controlled individually. The intensity of the light which illuminates the object 56 to be shape-measured is made different according to a place, in such a way that a specific place is illuminated to be especially bright, or that a specific place is illuminated to be especially dark. As a result, a shape is measured.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a shape measuring apparatus for three-dimensionally measuring a shape using light.

[0002]

2. Description of the Related Art FIG. 17 is a conceptual diagram of a first conventional example of a shape measuring apparatus. In FIG. 17, 1 is a shape measurement object, 2 is a light source that emits uniform illumination light downward, 3 is a half mirror disposed below the light source 2, and 4 is a lens disposed below the half mirror 3. 5 and 5 are CCD cameras.

The first conventional example of the shape inspection apparatus irradiates illumination light emitted from a light source 2 onto the surface of a shape measurement object 1 via a half mirror 3 and a lens 4 to thereby form the shape measurement object 1.
Lens 4 and half mirror 3
Then, the light is incident on the light receiving surface of the CCD camera 5 through the CCD, and the surface of the shape measuring object 1 is imaged by the CCD camera 5 to three-dimensionally measure the surface shape of the shape measuring object 1.

The shape measuring apparatus of the first conventional example measures the shape of a bump formed on a semiconductor chip, the shape of a via hole formed on a printed wiring board being manufactured by a build-up method, and the like. Used in

FIG. 18 is a schematic perspective view showing an example of a semiconductor chip on which bumps are formed. In FIG. 18, reference numeral 7 denotes a chip main body, and 8 denotes a solder formed in a matrix on the element forming surface of the chip main body 7. It is a bump made of a ball.

Such a semiconductor chip is mounted on a printed wiring board by bonding the bumps 8 to electrodes formed on the printed wiring board at one time.
In order to perform the bonding with high accuracy, the diameter and height of the bump 8 must be accurately formed. Therefore, it is necessary to measure the diameter and height of the bump 8 before bonding the bump 8. In this case, for example, the shape measuring device of the first conventional example is used.

FIG. 19 is a schematic partial sectional view showing an example of a printed wiring board being manufactured by the build-up method. In FIG. 19, reference numeral 10 denotes a core material, and 11 denotes an upper part of the core material 10. The formed conductive layer, 12 is the conductive layer 11
Is an insulating layer formed in the upper portion of the substrate, and 13 is a via hole formed in the insulating layer 12.

The via hole 13 is formed to connect the lower conductive layer 11 and an upper conductive layer (not shown). At the bottom of the via hole 13, the conductive layer 11 has a predetermined value or more. Therefore, it is necessary to three-dimensionally measure the shape of the bottom of the via hole 13 before forming the upper conductive layer. In this case, for example, FIG.
The shape measuring device of the first conventional example shown in FIG. 7 is used.

FIG. 20 is a conceptual diagram of a shape measuring apparatus according to a second conventional example. The shape measuring apparatus of the second conventional example is constituted by a confocal microscope. In FIG. 20, reference numeral 15 denotes a shape measuring object, 16 denotes a point light source, and 17 denotes a point light source by narrowing down light emitted from the point light source 16. This is a lens that forms an image on the surface of the shape measurement target 15.

Reference numeral 18 denotes a half mirror for reflecting the reflected return light from the shape measuring object 15, and 19 denotes a pinhole 20 for controlling the passage of the reflected returning light from the shape measuring object 15 reflected by the half mirror 18. Is a pinhole plate, and 21 is a CCD camera.

The shape measuring apparatus of the second conventional example generates a point light source image formed on the surface of the shape measuring object 15 every time the optical system or the shape measuring object 15 is moved by a predetermined distance in the optical axis direction. By scanning, the pinhole 20 is moved in accordance with the scanning position of the point light source image, and only the reflected return light of the point light source image having no defocus is completely passed through the pinhole 20 to obtain the shape measurement target. It measures 15 surface shapes.

FIG. 21 is a conceptual diagram of a third conventional example of a shape measuring apparatus. The shape measuring apparatus of the third conventional example uses a light cutting method. In FIG. 21, reference numeral 23 denotes a shape measuring object, 24 denotes a measuring table on which the shape measuring object 23 is mounted, and 2 denotes a measuring table.
5 is a slit light source that emits slit light 26, 27 is a lens that collects reflected light from the shape measuring object 23 and the measuring table 24, 28 is a CCD camera, and 29 is a CCD camera 2.
8 is a light receiving surface.

The shape measuring apparatus of the third prior art projects a slit light 26 emitted from a slit light source 25 onto a shape measuring object 23 and a measuring table 24, and the shape measuring object 23
30A of the reflection line 30 formed on the measuring table 24 and the measuring table 24
31A and 32A of reflection lines 31 and 32 formed on
Is formed on the light receiving surface 29 of the CCD camera 28, and the height of the shape measurement object 23 is measured from the positional relationship between the reflection line image 30A and the reflection line images 31A and 32A.

[0014]

FIG. 22 to FIG. 25 show FIG.
FIG. 22 is a view for explaining a problem of the shape measuring device of the first conventional example shown in FIG. 7, and FIG. 22 shows a part of a printed wiring board which is a shape measuring object; And 38 are wirings made of copper which should not be short-circuited and formed on the insulating substrate 36, and 39 is a copper projection which short-circuits the wirings 37 and 38.

FIG. 23 is a view showing a reflected light signal obtained when the surface shape of the printed wiring board shown in FIG. 22 is measured along the measurement imaginary line 40 using the shape measuring device of the first conventional example. , P2, and P3 of the reflected light signal correspond to the wiring 37, the protrusion 39, and the wiring 38, respectively.

As described above, when the shape measuring device of the first conventional example is used to measure the surface shape of the printed wiring board shown in FIG. 22, the intensity of the reflected light signal at the wirings 37 and 38 is strong, and the insulating substrate 36 The reflected light signal of the portion becomes weak, and it is possible to distinguish between the wirings 37 and 38 and the insulating substrate 36. However, since the protrusion 39 is thin, the amount of reflected light is small, and therefore, the intensity of the reflected light signal is weakened. However, there is a problem that the projection 39 may not be detected.

FIG. 24 is a schematic partial sectional view showing a part of the printed wiring board in the course of being manufactured by the build-up method. In FIG. 24, reference numeral 42 denotes a core material, and 43 denotes an upper part of the core material 42. The formed conductive layer, 44 is the conductive layer 4
Reference numeral 45 denotes an insulating layer formed on the upper portion of the insulating layer 3 and via holes formed in the insulating layer 44.

FIG. 25 is a diagram showing the intensity of the reflected light of the light 46 applied to the bottom of the via hole 45 and the intensity of the reflected light of the light 47 and 48 applied to the periphery of the via hole 45.
0 indicates the intensity of the reflected light of the light 46, and the two-dot chain lines 51 and 52 indicate the intensity of the reflected light of the light 47 and 48, respectively.

As described above, when the shape measuring device of the first conventional example is used to measure the shape of the bottom of the via hole 45 formed in the printed wiring board shown in FIG. Is reflected by the reflected light of the lights 47 and 48 radiated to the peripheral portion of the via hole 45. Therefore, the S / N ratio of the reflected light signal is reduced, and highly accurate measurement cannot be performed. There was a problem that.

In the shape measuring apparatus of the second conventional example shown in FIG. 20, it is necessary to move the pinhole 20 in correspondence with the scanning position of the point light source image formed on the surface of the shape measuring object 15. However, there is a problem that the pinhole 20 cannot be moved at a high speed, and thus the measurement speed cannot be increased.

In the medical field, for example, as shown in FIG. 26, a shape measurement method using the light section method is used to measure a change in shape of a swelling 54 formed on the surface of the skin.
In the field of human body measurement, application to human (face) identification, personal identification, and word reading by mouth shape measurement as shown in FIG. 27 has been considered.

However, in the shape measuring apparatus of the third conventional example which performs shape measurement by the light cutting method, only the slit light 26 in a fixed direction can be emitted, and the shape measuring object is directed from the optimum direction. However, there has been a problem that it is not possible to project a slit light or to project a projection pattern having a shape suitable for the shape of a shape measurement target, and therefore, it is not possible to perform highly accurate shape measurement.

In view of the foregoing, it is a first object of the present invention to provide a shape measuring apparatus capable of performing optimal illumination and performing shape measurement suitable for a measuring purpose. A second object of the present invention is to provide a shape measuring device comprising a confocal microscope capable of measuring a surface shape of an object at high speed, and to easily and highly accurately measure a shape by a light cutting method. It is a third object to provide a shape measuring device capable of performing such operations.

Further, a fourth object of the present invention is to provide a shape measuring apparatus capable of measuring the inclination angle of the surface of a shape measuring object at a high speed so that the shape measuring object can be detected. A fifth object is to provide a shape measuring device capable of easily determining whether or not an object is an object.

[0025]

According to a first aspect of the present invention, there is provided a shape measuring apparatus comprising a light source and a plurality of filters capable of individually controlling light transmittance in a two-dimensional manner. Illuminating means for illuminating a shape measurement object with light transmitted through the two-dimensional filter, the illumination means having a two-dimensional filter arranged in the optical path of light emitted from the light source, and a shape measurement object And observation means for observing the surface of the object.

According to the first aspect of the present invention, by individually controlling the light transmittance of the filters constituting the two-dimensional filter, a particular place is illuminated particularly bright or a particular place is made particularly dark. Since the intensity of light for illuminating the shape measurement target such as illuminating can be made different depending on the location, the shape measurement target can be optimally illuminated according to the measurement purpose.

[0027] In the present invention, the second invention (the shape measuring device according to claim 2) is arranged on the optical path of light emitted from the light source so as to be able to face the light source and the object to be measured. An objective lens and a plurality of shutters whose opening and closing states can be individually controlled are arranged two-dimensionally, and are arranged on the optical path of light emitted from the light source and on the imaging surface of the objective lens. It has a two-dimensional shutter and observation means for observing reflected return light from the shape measurement object via the two-dimensional shutter.

According to the second aspect of the present invention, since the two-dimensional shutter is disposed on the optical path of the light emitted from the light source and on the image plane of the objective lens, for example, When one of the shutters is opened, an image of the shutter that has been opened can be formed on the shape measurement target side.

Here, depending on the position of the shape measurement object in the optical axis direction, the image of the shutter in the open state is formed on the surface of the shape measurement object without being out of focus. The shutter image formed on the surface of the shape measurement target is formed without defocusing on the part of the shutter in the open state, and the light forming this shutter image is transmitted through the shutter in the open state. It will pass almost completely.

On the other hand, depending on the position of the object to be measured in the optical axis direction, the image of the shutter in the open state is formed out of focus on the surface of the object to be measured. Since the out-of-focus shutter image is formed on the surface of the shutter, the light forming the out-of-focus shutter image hardly passes through the shutter in the open state.

In the present invention, in the second invention,
By selectively opening the shutters one by one or each of a plurality of shutters that are separated so that the passing light does not interfere with each other, the surface of the shape measurement object is obtained by a shutter image. Can be scanned at high speed.

That is, according to the second aspect of the present invention, the two-dimensional shutter has a point light source and a pinhole,
A confocal microscope that can move a point light source including a shutter and a pinhole at high speed can be configured.

Therefore, each time the position of the shape measurement object in the optical axis direction is changed, the surface of the shape measurement object is scanned with the shutter image, and reflected return light from the shape measurement object passing through the two-dimensional shutter is reflected. Observe and obtain a shutter image without defocus, that is, find the scanning position and the position of the shape measurement object in the optical axis direction when strong return light can be observed through the two-dimensional shutter. Thus, three-dimensional measurement of the surface shape of the shape measurement target can be performed at high speed.

In the present invention, the third invention (the shape measuring device according to claim 3) is arranged on the optical path of the light emitted from the light source so as to be able to face the light source and the object to be measured. The objective lens and a plurality of shutters whose opening and closing states can be individually controlled are two-dimensionally arranged, and on the optical path of the light emitted from the light source, at the focal position on the imaging surface side of the objective lens. It is provided with a two-dimensional shutter arranged and observation means for observing reflected return light from the shape measurement object via the two-dimensional shutter.

According to the third aspect of the present invention, since the two-dimensional shutter is disposed on the optical path of the light emitted from the light source at the focal position on the image forming surface side of the objective lens, the two-dimensional shutter emits light from the light source. Of the light emitted, the light that passes through the two-dimensional shutter and is irradiated from the objective lens onto the shape measurement target becomes light parallel to the optical axis.

Here, when the surface of the shape measuring object is orthogonal to the optical axis, the return light reflected from the surface of the shape measuring object is also parallel to the optical axis. It can be observed by observation means via

On the other hand, when the surface of the shape measurement object is not orthogonal to the optical axis, the return light reflected from the surface of the shape measurement object has an inclination with respect to the optical axis. Therefore, the light enters the shutters other than the shutter that is always open.

Therefore, a predetermined shutter of the two-dimensional shutter is always opened, and the shutters other than the shutter that is always opened are selectively opened in order, so that the reflected return light from the object to be measured passes. Is confirmed by the observation means, the inclination angle of the surface of the shape measuring object can be measured at high speed.

According to a fourth aspect of the present invention, a shape measuring apparatus is configured by two-dimensionally arranging a light source and a plurality of shutters whose opening and closing states can be individually controlled.
A two-dimensional shutter that controls the passage of light emitted from the light source to form a projection pattern, and that projects a projection pattern onto the shape measurement target; and observes the surface of the shape measurement target. It has observation means.

According to the fourth aspect of the present invention, a projection pattern of various shapes can be formed by individually controlling the open / close states of the shutters constituting the two-dimensional shutter. Thus, when measuring the shape of the shape measurement target, a projection pattern suitable for the surface shape of the shape measurement target can be projected.

According to a fifth aspect of the present invention, in the fourth aspect, the first aspect of the shape measuring object which can be observed when the projection pattern is projected on the shape measuring object in the fourth aspect. A first image storage means for storing an image of the shape measurement object, a second image storage means for storing a second image of the shape measurement object that can be observed when the projection pattern is not projected on the shape measurement object, The image processing apparatus further includes a difference image calculation unit that calculates a difference image between the first image stored in the image storage unit and the second image stored in the second image storage unit.

According to a fifth aspect of the present invention, as in the fourth aspect, a projection pattern suitable for the surface shape of the shape measurement target when measuring the shape of the shape measurement target by the light-section method. Can be projected, and the influence of environmental illumination can be removed to obtain an image using only the projection pattern.

According to a sixth aspect of the present invention (a shape measuring apparatus according to the sixth aspect), a light source and a plurality of shutters whose opening and closing states can be individually controlled are two-dimensionally arranged.
A first two-dimensional shutter arranged in front of the light source and a plurality of shutters whose opening and closing states can be individually controlled are two-dimensionally arranged, and arranged in front of the first two-dimensional shutter. A second two-dimensional shutter, and observation means for observing light passing through the second two-dimensional shutter.

According to the sixth aspect of the present invention, for example,
In the case where the observation image of the shape measurement target is displayed as a positive image on the first two-dimensional shutter and the dictionary image of the second two-dimensional shutter is displayed as a negative image,
When the observation image of the shape measurement object matches the dictionary image, the light that has passed through the first two-dimensional shutter is blocked by the second two-dimensional shutter, and the observation image of the shape measurement object is obtained. Does not match the dictionary image, some or all of the light that has passed through the first two-dimensional shutter passes through the second two-dimensional shutter.

Therefore, an observation image of the shape measurement object is displayed on one of the first and second two-dimensional shutters, a dictionary image is displayed on the other of the first and second two-dimensional shutters, and the observation image is a positive image. By displaying as a negative image when displaying as a negative image and displaying as a positive image when displaying an observed image as a negative image, the shape of the shape measurement object can be measured in comparison with the dictionary image.

[0046]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIGS.
The first to seventh embodiments of the present invention will be described.

First Embodiment FIGS. 1 to 3 FIG. 1 is a conceptual diagram of a first embodiment of the present invention. In FIG.
Reference numeral 56 denotes a shape measurement target, 57 denotes a light source that emits uniform illumination light in a downward direction, and 58 denotes a matrix in which pixels whose light transmittance can be individually controlled are arranged in a matrix as a filter. Is a two-dimensional filter composed of a projection-type liquid crystal display panel arranged in a.

Reference numeral 59 denotes a half mirror disposed below the two-dimensional filter 58 at an angle of 45 degrees with the two-dimensional filter 58, reference numeral 60 denotes a lens disposed below the half mirror 59, and reference numeral 61 denotes a CCD camera.

In the first embodiment of the present invention configured as described above, the light emitted from the light source 57 is applied to the surface of the shape measurement object 56 via the two-dimensional filter 58, the half mirror 59, and the lens 60. The irradiated and reflected return light from the surface of the shape measuring object 56 is incident on the light receiving surface of the CCD camera 61 via the lens 60 and the half mirror 59, and the surface of the shape measuring object 56 is imaged by the CCD camera 61. The surface shape of the shape measurement object 56 is three-dimensionally measured.

Here, since the light transmittance of each filter of the two-dimensional filter 58 can be individually controlled, the printed wiring board shown in FIG. When measuring the surface shape along the measurement virtual line 40, the CAD 3
The portions other than the portions 7 and 38 can be illuminated brighter than the portions of the wirings 37 and 38. In this case, FIG.
A reflected light signal as shown by a solid line 63 can be obtained. A broken line 64 indicates the intensity of the reflected light signal in the case of the conventional example shown in FIG.

Here, of the reflected light signal 63, P1, P
The portions P2 and P3 correspond to the portions of the wiring 37, the protrusion 39, and the wiring 38, respectively. Thus, according to the first embodiment of the present invention, the intensity of the reflected light signal at the portion of the protrusion 39 is obtained. Is increased, and the projection 39 which could not be detected in the case of the first conventional example can be detected.

Also, using the first embodiment of the present invention,
When measuring the shape of the bottom of the via hole 45 of the printed wiring board shown in FIG. 24, by using CAD data,
The intensity of light applied to the peripheral portion of the via hole 45 can be eliminated. In this case, a reflected light signal as shown in FIG. 3 can be obtained.

In other words, the reflected light of the light applied to the bottom of the via hole 45 is not covered by the reflected light of the light applied to the peripheral portion of the via hole 45, and the S / N ratio of the reflected light signal is improved. Can be achieved.

As described above, according to the first embodiment of the present invention, by individually controlling the light transmittance of each filter constituting the two-dimensional filter 58, a specific place can be illuminated particularly brightly or a specific place can be illuminated. Since the intensity of the light illuminating the shape measurement object 56 can be made different depending on the location, for example, by illuminating the shape measurement object 56 particularly darkly, the shape measurement object 56 is optimally illuminated according to the measurement purpose In addition, shape measurement suitable for the measurement purpose can be performed.

Second Embodiment FIG. 4 FIG. 4 is a conceptual diagram of a second embodiment of the present invention. In FIG.
66 is a shape measurement object, 67 is a light source that emits uniform illumination light in the horizontal direction, and 68 is a half mirror that reflects light emitted in the horizontal direction from the light source 67 downward.

Reference numeral 69 denotes a two-dimensional shutter composed of a projection type liquid crystal display panel disposed below the half mirror 68 as a shutter capable of individually controlling the open / close state of each pixel. This is a shutter (shutter matrix).

An imaging lens 70 is disposed below the two-dimensional shutter 69, an imaging lens 71 is disposed above the half mirror 68, and a CCD camera 72 is disposed above the imaging lens 71. It is. The two-dimensional shutter 69 is arranged on the optical path of the light emitted from the light source 67 and on the imaging plane of the imaging lens 70.

In the second embodiment of the present invention configured as described above, the uniform illumination light emitted in the horizontal direction from the light source 67 is reflected downward by the half mirror 68, and is vertically reflected by the two-dimensional shutter 69. To the two-dimensional shutter 69
The light passing through is irradiated on the surface of the shape measurement target 66 via the imaging lens 70.

The return light reflected from the surface of the shape measuring object 66 enters the two-dimensional shutter 69 via the imaging lens 70, and the light passing through the two-dimensional shutter 69 passes through the half mirror 68 The light enters the light receiving surface of the CCD camera 72 via the lens 71.

Here, the two-dimensional shutter 69 is
Is arranged on the image plane of the imaging lens 70 on the optical path of the light emitted from the camera, for example, if any one of the two-dimensional shutters 69 is opened, the image of the shutter in the open state Can be imaged on the surface of the shape measurement object side 66.

Here, depending on the position of the shape measurement object 66 in the optical axis direction, the image of the shutter in the open state is formed on the surface of the shape measurement object 66 without being out of focus. In this case, the shutter image formed on the surface of the shape measurement target 66 is formed without defocusing on the portion of the shutter that is in the open state, and the light that forms this shutter image is in the open state. It will pass almost completely through the shutter.

On the other hand, depending on the position of the shape measuring object 66 in the optical axis direction, the image of the shutter in the open state is
The image is formed out of focus on the surface of the shape measurement object 66,
In this case, an out-of-focus shutter image is formed on the surface of the two-dimensional shutter 69, so that light forming the out-of-focus shutter image hardly passes through the shutter in the open state. Become.

In the second embodiment of the present invention,
By selectively opening the shutters one by one, or alternatively, a plurality of shutters that are separated from each other so that passing light does not interfere with each other, the shape of the shape measurement object 66 can be changed by a shutter image. Although the surface can be scanned, the two-dimensional shutter 69 is constituted by a liquid crystal display panel, so that the shutter to be opened can be selected at high speed.

That is, according to the second embodiment of the present invention, a confocal microscope capable of moving the point light source and the pinhole composed of the shutter at a high speed by using the shutter of the two-dimensional shutter 69 as a point light source and a pinhole. Can be configured.

Therefore, every time the position of the shape measuring object 66 in the optical axis direction is changed, the surface of the shape measuring object 66 is scanned with the shutter image, and the surface of the shape measuring object 66 passing through the two-dimensional shutter 69 is changed. By observing the reflected return light from the CCD camera 72, the three-dimensional measurement of the surface shape of the shape measurement target 66 can be performed at high speed.

Third Embodiment FIGS. 5 to 7 FIG. 5 is a conceptual diagram of a third embodiment of the present invention. In FIG.
74 is a shape measurement object, 75 is a light source that emits uniform illumination light in the horizontal direction, and 76 is a half mirror that reflects light emitted in the horizontal direction from the light source 75 downward.

Reference numeral 77 denotes a two-dimensional shutter composed of a projection type liquid crystal display panel disposed below the half mirror 76; 78, an imaging lens disposed below the two-dimensional shutter 77; The imaging lens 80 arranged above, the C 80 arranged above the imaging lens 79
It is a CD camera.

The two-dimensional shutter 77 is disposed on the optical path of the light emitted from the light source 75 at the focal position on the image plane side of the image forming lens 78, and the space between the two-dimensional shutter 77 and the image forming lens 78 is provided. Is the focal length f of the imaging lens 78.

In the third embodiment of the present invention configured as described above, the uniform illumination light emitted in the horizontal direction from the light source 75 is reflected downward by the half mirror 76 and is vertically reflected by the two-dimensional shutter 77. And the two-dimensional shutter 77
Is irradiated on the surface of the shape measurement object 74 via the imaging lens 78.

The return light reflected from the surface of the shape measurement object 74 is incident on the two-dimensional shutter 77 via the imaging lens 78, and the light passing through the two-dimensional shutter 77 is transmitted to the half mirror 76 and the image forming device. The light enters the CCD camera 80 via the lens 79.

Here, the two-dimensional shutter 77 is
Is located at the focal position on the image plane side of the imaging lens 78 on the optical path of the light emitted from the imaging lens 78, is emitted from the light source 75, passes through the two-dimensional shutter 77, and is subjected to shape measurement from the imaging lens 78. The light applied to the object 74 is light parallel to the optical axis.

Therefore, when any one of the shutters is opened, and when the surface of the shape measurement object 74 is orthogonal to the optical axis, the reflected light reflected from the surface of the shape measurement object 74 is also reduced. The light is parallel to the optical axis and can be observed by the CCD camera 80 through the shutter that has been opened.

On the other hand, when the surface of the shape measurement object 74 is not orthogonal to the optical axis,
The return light reflected from the surface has an inclination with respect to the optical axis, and is incident on a shutter other than the shutter in the open state.

Therefore, for example, as shown in FIG. 6, the central shutter 81 of the two-dimensional shutter 77 is always opened, and the peripheral shutters are moved along the solid line 82, for example.
The open state is selected alternatively.

Here, if the surface of the shape measuring object 74 is not inclined, the central shutter 81 of the two-dimensional shutter 77
The light passing from the imaging lens 78 toward the surface of the shape measurement object 74 after passing through is reflected vertically by the surface of the shape measurement object 74, passes through the central shutter 81 of the two-dimensional shutter 77, and passes through the imaging lens. In this case, the shutter 81 at the center of the two-dimensional shutter 77 is observed by the CCD camera 80 as the shutter through which the reflected return light has passed.

On the other hand, when the surface of the shape measurement object 74 has an inclination, as shown in FIG. 7, the light 83 incident on the shape measurement object 74 is inclined with respect to the optical axis and reflected. Then, the light is condensed by the imaging lens 78, passes through the shutter around the two-dimensional shutter 77,
In this case, the shutter around the two-dimensional shutter 77 is observed by the CCD camera 80 as the shutter through which the reflected return light has passed.

As described above, according to the third embodiment of the present invention, for example, the shutter 8 at the center of the two-dimensional shutter 77 is used.
1 is always in the open state, the peripheral shutters are selectively opened in order, and the position of the shutter through which the return light reflected from the surface of the shape measurement object 74 passes is observed by the CCD camera 80, so that the shape measurement is performed. The inclination angle of the surface of the object 74 can be measured at high speed.

Fourth Embodiment FIGS. 8 to 10 FIG. 8 is a conceptual diagram of a fourth embodiment of the present invention. In FIG.
84 is a shape measurement object, 85 is a light source for emitting uniform illumination light, 86 is a two-dimensional shutter composed of a projection type liquid crystal display panel disposed in front of the light source 85, and 87 is disposed in front of the two-dimensional shutter 86. A lens 88 for condensing light reflected from the surface of the shape measuring object 84;
9 is a CCD for imaging the surface of the shape measuring object 84
Camera.

In the present invention configured as described above,
The light emitted from the light source 85 is applied to the surface of the shape measurement object 84 via the two-dimensional shutter 86 and the lens 87, and the light reflected from the surface of the shape measurement object 84 is transmitted to the CCD via the lens 88. The light enters the light receiving surface of the camera 89, and C
The surface of the shape measurement object 84 is imaged by the CD camera 89, and the surface shape of the shape measurement object 84 is three-dimensionally measured.

Here, in the fourth embodiment of the present invention, since the two-dimensional shutter 86 is disposed in front of the light source 85, by appropriately selecting the shutter to be opened, for example, as shown in FIG. Parallel slit light 9 as shown
A projection pattern 94 composed of 1, 92, 93, and radial slit lights 95, 96, 97, 98 as shown in FIG.
A projection pattern of various shapes, such as a projection pattern 99 made of, can be projected onto the shape measurement target 84 as needed.

Therefore, according to the fourth embodiment of the present invention, when the shape of the shape measuring object 84 is measured by the light cutting method, a projection pattern suitable for the surface shape of the shape measuring object 84 can be projected. Therefore, the shape measurement of the shape measurement object 84 can be performed easily and with high accuracy.

Fifth Embodiment FIGS. 11 to 13 FIG. 11 is a conceptual diagram of a fifth embodiment of the present invention. FIG.
In the figure, 100 is a face to be measured, 101 is a light source for emitting uniform illumination light, and 102 is a projection type liquid crystal display panel for forming a projection pattern disposed in front of the light source 101. A three-dimensional shutter 103 is a lens device capable of controlling the magnification of a projection pattern projected on the shape measurement object 100, and 104 is a CCD camera for imaging the shape measurement object.

Reference numerals 105 and 106 denote image storage devices having a storage capacity for one frame, and 107 denotes a CCD camera 10.
4 is a switch for distributing the image signal output from 4 to the image storage device 105 or the image storage device 106.

Reference numeral 108 denotes a system controller for controlling the entire apparatus, and reference numeral 109 denotes a system controller for calculating a difference between an image stored in the image storage device 105 and an image stored in the image storage device 106 to obtain a difference image. Is a height measurement unit that measures the height of each part of the shape measurement target from the difference image signal output from the difference image calculation circuit 109.

FIG. 12 is a waveform chart for explaining the operation of the fifth embodiment of the present invention. FIG. 12A shows an imaging timing signal provided from the system controller 108 to the CCD camera 104.
Is set to an imaging state when the imaging timing signal = H level, and is set to a non-imaging state when the imaging timing signal = L level.

FIG. 12B shows the two-dimensional shutter 10.
2 shows a projection pattern projection timing signal for controlling the projection timing of the projection pattern according to 2. When the projection pattern projection timing signal = H level, the projection pattern formed by the two-dimensional shutter 102 is projected onto the shape measurement target. And the projection pattern projection timing signal =
In the case of the L level, all the shutters of the two-dimensional shutter 102 are closed, and no projection pattern is formed.

Note that the system controller 108
When the CD camera 104 outputs an image signal obtained when the projection pattern is projected on the shape measurement target, the image signal is transmitted to the image storage device 105 and the CCD camera 104 outputs the image signal.
When outputting the acquired image signal when the projection pattern is not projected on the shape measurement target, the switch 107 is controlled so as to transmit this to the image storage device 106.

In the fifth embodiment of the present invention configured as described above, when the face 100 is used as a shape measurement target, for example, first, the projection pattern formed by the two-dimensional shutter 102 is changed to the lens device 103. Through the face 100
Of the face 100 by the CCD camera 104
Are imaged, and the image signal obtained in this case is stored in the image storage device 105.

In this case, for example, as shown in FIG. 13A, an image in which the image of the face 100 by the projection pattern 113 is superimposed on the image of the face 100 by the environmental illumination is stored in the image storage device 105. Will be.

Next, the face of the face 100 is imaged by the CCD camera 104 in a state where all the shutters of the two-dimensional shutter 102 are closed and the projection pattern is not projected on the face 100, and an image signal obtained in this case is obtained. Image storage device 1
06 is stored. In this case, as shown in FIG. 13B, an image of the face 100 under the environmental illumination is stored in the image storage device 106.

Next, in the difference image calculation circuit 109,
The difference between the image stored in the image storage device 105 and the image stored in the image storage device 106 is calculated,
The difference image signal is transmitted to the height measurement unit 110.
Hereinafter, the same operation is repeated.

That is, in the fifth embodiment of the present invention,
Only when the CCD camera 104 captures an image of an odd frame or an even frame, the two-dimensional shutter 1
The two-dimensional shutter 102 is controlled so as to project the projection pattern of the object 02 on the shape measurement target.

Therefore, when measuring the shape of the face 100, as shown in FIG. 13C, the projection pattern 113 is applied to the image of the face 100 by the environmental illumination shown in FIG.
FIG. 13 shows the image of the face 100
The image of the face 100 by the environmental illumination shown in FIG. 13B is subtracted, and the face 1 by the projection pattern 113 shown in FIG.
Only the image of 00 is obtained.

As described above, according to the fifth embodiment of the present invention, since the two-dimensional shutter 102 is provided, the fourth embodiment of the present invention is used for measuring the shape of the object to be measured by the light cutting method. Similarly to, it is possible to project a projection pattern suitable for the surface shape of the shape measurement object,
Since it is possible to remove the influence of environmental illumination and obtain an image using only the projection pattern, the shape of the shape measurement target can be measured more easily and with higher precision than in the fourth embodiment of the present invention.

Further, only when the CCD camera 104 captures an image of an odd frame or an even frame, the projection pattern by the two-dimensional shutter 102 is projected on the object to be measured. Even when an object moves or changes at high speed, shape measurement can be performed.

Further, since the lens device 103 is provided which can control the magnification of the projection pattern projected on the shape measurement object, a part of the shape measurement object (for example, a nose or a mouth in a face) is provided. When only the projection pattern is projected and enlarged observation is performed, detailed observation can be performed on a part of the shape measurement target.

Sixth Embodiment FIGS. 14 and 15 FIG. 14 is a conceptual diagram of a sixth embodiment of the present invention. FIG.
Reference numeral 115 denotes a light source that emits uniform illumination light, 116 denotes a two-dimensional shutter composed of a projection type liquid crystal display panel disposed in front of the light source 115, and 117 denotes a two-dimensional shutter 116 that is in close contact with the two-dimensional shutter 116. This is a two-dimensional shutter having the same configuration as that of FIG.

Reference numeral 118 denotes a half mirror disposed in front of the two-dimensional shutter 117 at an angle of 45 degrees with the two-dimensional shutter 117, 119 denotes a lens for condensing light transmitted through the half mirror 118, and 120 denotes a lens for the lens 119. Screen arranged on the image plane, 121 is a half mirror 1
Reference numeral 122 denotes a lens that collects the light reflected by 18, and 122 denotes a photodetector that is disposed such that the light receiving surface is located on the image forming surface of the lens 121.

In the sixth embodiment of the present invention configured as described above, for example, as shown in FIG. 15, an observation image 124 of a shape measurement object is input to a two-dimensional shutter 116 as a positive image. The two-dimensional shutter 117 includes:
Dictionary images 125 and 126 for detecting a detection target;
127 and 128 are sequentially input as negative images.

As a result, the image output from the two-dimensional shutter 117 includes an observation image 124, a dictionary image 125,
26, 127, and 128, which are sequentially projected on the screen 120 and incident on the light receiving surface of the photodetector 122.

Here, when the observed image 124 is compared with the dictionary image whose image matches, the light that has passed through the two-dimensional shutter 116 is blocked by the two-dimensional shutter 117, and is projected on the screen 120. The image becomes a dark image, and the photodetector 122 does not detect the incident light.

On the other hand, when comparing the observed image 124 with the dictionary image whose image does not match, the two-dimensional shutter 1
Part or all of the light passing through the two-dimensional shutter 1
17, an image that is partially or entirely bright is projected on the screen 120, and the light detector 122 detects the incident light.

Therefore, according to the sixth embodiment of the present invention, the shape of the object to be measured can be measured by comparing the observed image 124 with the dictionary images 125 to 128. Whether the object is an object can be easily determined.

Seventh Embodiment FIG. 16 FIG. 16 is a conceptual diagram of a seventh embodiment of the present invention. FIG.
Among them, 129 is a light source that emits uniform illumination light, 130 is a two-dimensional shutter composed of a projection type liquid crystal display panel disposed in front of the light source 129, 131 is a lens that forms an image of the two-dimensional shutter 130, and 132 is a lens. This is a two-dimensional shutter having the same configuration as the two-dimensional shutter 130 arranged on the image plane of the lens 131.

Reference numeral 133 denotes a half mirror disposed in front of the two-dimensional shutter 132 at an angle of 45 degrees with the two-dimensional shutter 132; 134, a lens for condensing light transmitted through the half mirror 133; 135, a lens 134; The screen 136 arranged on the image plane is a half mirror 1
A lens 137 for condensing the light reflected by 33 is a photodetector arranged such that a light receiving surface is located on an image forming surface of the lens 136.

In the seventh embodiment of the present invention thus configured, for example, an observation image of a shape measurement object is input as a positive image to the two-dimensional shutter 130, and a detection image is input to the two-dimensional shutter 132. Dictionary images for detecting an object are sequentially input as negative images.

As a result, the image output from the two-dimensional shutter 130 becomes a difference image between the observed image and the dictionary image, and these difference images are sequentially projected on the screen 135 and simultaneously on the light receiving surface of the photodetector 137. Incident.

Here, when comparing the observed image with the dictionary image whose image matches, the light that has passed through the two-dimensional shutter 130 is blocked by the two-dimensional shutter 132 and is projected on the screen 135. The image becomes a dark image, and the light detector 137 does not detect the incident light.

On the other hand, when the observed image is compared with a dictionary image whose image does not match, part or all of the light that has passed through the two-dimensional shutter 130 passes through the two-dimensional shutter 132. The screen 135 is projected with an image that is partially or entirely bright, and the photodetector 1
37 detects incident light.

Therefore, according to the seventh embodiment of the present invention, as in the sixth embodiment of the present invention, the shape of the shape measurement object can be measured by comparing the observed image with the dictionary image. It can be easily determined whether or not the shape measurement target is a detection target.

[0111]

According to the first aspect of the present invention, the shape measuring object is controlled by individually controlling the light transmittance of the filters constituting the two-dimensional filter. Since the intensity of the light for illuminating the object can be made different depending on the place, the shape measurement target can be optimally illuminated according to the measurement purpose, and the shape measurement suitable for the measurement purpose can be performed.

According to the second aspect of the present invention, the shutter of the two-dimensional shutter is a point light source and a pinhole, and the point light source and the pinhole formed by the shutter are moved at a high speed. Since a confocal microscope that can perform the measurement can be configured, the surface shape of the shape measurement target can be measured at high speed.

According to the third aspect of the present invention, according to the third aspect of the invention, a predetermined two-dimensional shutter is always opened, and shutters other than the shutter that is always opened are sequentially selected. By observing the position of the shutter through which the reflected return light from the shape measurement object is transmitted by the observation means, the inclination angle of the surface of the shape measurement object can be measured at high speed.

According to the fourth aspect of the present invention, according to the fourth aspect of the present invention, when measuring the shape of the shape measuring object by the light cutting method, the shape measuring apparatus is suitable for the surface shape of the shape measuring object. Since the projection pattern can be projected, the shape measurement of the shape measurement target can be performed easily and with high accuracy.

According to the fifth aspect of the present invention, according to the fifth aspect of the present invention, as in the fourth aspect, when measuring the shape of the object to be measured by the light cutting method, the shape is measured. The projection pattern suitable for the surface shape of the target object can be projected, and the influence of environmental illumination can be removed to obtain an image using only the projection pattern.
The shape measurement of the shape measurement target can be performed easily and with high accuracy.

According to the sixth aspect of the present invention, the shape of the shape measuring object can be measured by comparing the shape of the shape measuring object with the dictionary image. Whether or not the object is a detection target can be easily determined.

[Brief description of the drawings]

FIG. 1 is a conceptual diagram of a first embodiment of the present invention.

FIG. 2 is a diagram showing a reflected light signal obtained when the surface shape of the printed wiring board shown in FIG. 22 is measured along a measurement virtual line using the first embodiment of the present invention.

FIG. 3 is a diagram showing a reflected light signal obtained when the shape of the bottom of the via hole of the printed wiring board shown in FIG. 24 is measured using the first embodiment of the present invention.

FIG. 4 is a conceptual diagram of a second embodiment of the present invention.

FIG. 5 is a conceptual diagram of a third embodiment of the present invention.

FIG. 6 is a plan view for explaining a control method of a two-dimensional shutter provided in a third embodiment of the present invention.

FIG. 7 is a diagram for explaining the operation of the third embodiment of the present invention.

FIG. 8 is a conceptual diagram of a fourth embodiment of the present invention.

FIG. 9 is a plan view showing an example of a projection pattern that can be formed in the fourth embodiment of the present invention.

FIG. 10 is a plan view showing an example of a projection pattern that can be formed in a fourth embodiment of the present invention.

FIG. 11 is a conceptual diagram of a fifth embodiment of the present invention.

FIG. 12 is a waveform chart for explaining the operation of the fifth embodiment of the present invention.

FIG. 13 is a plan view for explaining the operation of the fifth embodiment of the present invention.

FIG. 14 is a conceptual diagram of a sixth embodiment of the present invention.

FIG. 15 is a diagram for explaining the operation of the sixth embodiment of the present invention.

FIG. 16 is a conceptual diagram according to a seventh embodiment of the present invention.

FIG. 17 is a conceptual diagram of a shape measuring device of a first conventional example.

FIG. 18 is a schematic perspective view showing an example of a semiconductor chip on which bumps are formed.

FIG. 19 is a schematic partial cross-sectional view showing an example of a printed wiring board being manufactured by a built-up method.

FIG. 20 is a conceptual diagram of a shape measuring device of a second conventional example.

FIG. 21 is a conceptual diagram of a shape measuring device of a third conventional example.

FIG. 22 is a schematic perspective view showing a part of the printed wiring board.

FIG. 23 is a diagram showing a reflected light signal obtained when measurement is performed along a measurement virtual line on the printed wiring board shown in FIG. 22;

FIG. 24 is a schematic partial cross-sectional view showing an example of a printed wiring board in the course of being manufactured by the built-up method.

25 is a diagram showing the intensity of reflected light of light applied to the bottom of the via hole of the printed wiring board shown in FIG. 24 and the intensity of reflected light of light applied to the periphery of the via hole.

FIG. 26 is a diagram for explaining a problem of the shape measuring apparatus of the third conventional example.

FIG. 27 is a diagram for explaining a problem of the shape measuring device of the third conventional example.

[Explanation of symbols]

 (FIG. 1) 56 shape measuring object 57 light source 58 two-dimensional filter 59 half mirror 60 lens 61 CCD camera (FIG. 4) 66 shape measuring object 67 light source 68 half mirror 69 two-dimensional shutter 70, 71 imaging lens 72 CCD camera (FIG. 5) 74 Shape measuring object 75 Light source 76 Half mirror 77 Two-dimensional shutter 78, 79 Imaging lens 80 CCD camera (FIG. 14) 115 Light source 116, 117 Two-dimensional shutter 118 Half mirror 119, 121 Lens 120 Screen 122 Light Detector (FIG. 16) 129 Light source 130, 132 Two-dimensional shutter 131, 134, 136 Lens 133 Half mirror 135 Screen 137 Photodetector

Claims (6)

[Claims] 1. A two-dimensional filter comprising: a light source; and a plurality of filters whose light transmittances can be individually controlled, two-dimensionally arranged, and a two-dimensional filter arranged in an optical path of light emitted from the light source. A shape measuring apparatus, comprising: an illuminating unit that illuminates a shape measuring object with light transmitted through the two-dimensional filter; and an observing unit that observes a surface of the shape measuring object. 2. A light source, an objective lens arranged in an optical path of light emitted from the light source so as to be able to face a shape measuring object, and a plurality of open / close states individually controllable. A two-dimensional shutter arranged two-dimensionally on a light path of light emitted from the light source and arranged on an imaging surface of the objective lens; and the shape measurement object via the two-dimensional shutter. An observation device for observing reflected return light from an object. 3. A light source, an objective lens disposed on an optical path of light emitted from the light source so as to be able to face the shape measurement object, and a plurality of open / close states individually controllable. A two-dimensional shutter arranged two-dimensionally, on a light path of light emitted from the light source, a two-dimensional shutter disposed at a focal position on an image forming surface side of the objective lens, via the two-dimensional shutter An observing means for observing reflected return light from the object to be measured. 4. A projection pattern is formed by two-dimensionally arranging a light source and a plurality of shutters whose opening and closing states can be individually controlled, and controlling passage of light emitted from the light source. A shape measuring apparatus, comprising: a two-dimensional shutter; a projection pattern projecting unit for projecting the projection pattern onto a shape measuring object; and an observing unit for observing a surface of the shape measuring object. . 5. A first image storage means for storing a first image of the shape measurement object that can be observed when the projection pattern is projected on the shape measurement object, and wherein the projection is performed on the shape measurement object. A second image storage unit that stores a second image of the shape measurement target that can be observed when a pattern is not projected; a first image that is stored by the first image storage unit; and the second image 5. The shape measuring apparatus according to claim 4, further comprising: a difference image calculating means for calculating a difference image from the second image stored in the storage means. 6. A first two-dimensional shutter, comprising: a light source; and a plurality of shutters whose opening and closing states can be individually controlled. The first two-dimensional shutter is arranged in front of the light source. A plurality of shutters, each of which can be individually controlled, are arranged two-dimensionally, a second two-dimensional shutter arranged in front of the first two-dimensional shutter, and the second two-dimensional shutter And an observing means for observing light passing through the shape measuring device.