JPH11216648A - Grinding apparatus - Google Patents

Grinding apparatus

Info

Publication number
JPH11216648A
JPH11216648A JP2175098A JP2175098A JPH11216648A JP H11216648 A JPH11216648 A JP H11216648A JP 2175098 A JP2175098 A JP 2175098A JP 2175098 A JP2175098 A JP 2175098A JP H11216648 A JPH11216648 A JP H11216648A
Authority
JP
Japan
Prior art keywords
grinding
leaf spring
nozzle
rotation
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2175098A
Other languages
Japanese (ja)
Inventor
Yutaka Kobayashi
裕 小林
Masabumi Nakano
正文 中野
Eiichi Kubota
栄一 久保田
Takuya Sawada
卓矢 澤田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2175098A priority Critical patent/JPH11216648A/en
Publication of JPH11216648A publication Critical patent/JPH11216648A/en
Pending legal-status Critical Current

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  • Jigs For Machine Tools (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

PROBLEM TO BE SOLVED: To keep the flatness and perpendicularity of a surface to be ground even when the axis of rotation of a grinding wheel is not sufficiently parallel to the axis of rotation of a machining head part by using a thin leaf spring as a flexible member. SOLUTION: A machining head part in a grinding apparatus comprises machining head 2, a holding member comprising a leaf spring 3 as a soft and flexible member, a sealing plate 4 and a nozzle holder 5, a leaf spring holder 7 to support these components, an air port 8 for suction and pressurization, and a bearing cover 9 containing a bearing. The leaf spring 3 is formed of a metallic plate, and very thin and flexible, and the thickness of the leaf spring 3 is 0.05 mm in this embodiment. Even when the axis of rotation of the machining head part is slightly inclined to that of the grinding part, the angle of inclination θ between the axis of rotation of the machining head part and the axis of rotation of the grinding part is absorbed by the leaf spring 3, and an end face of the nozzle 10 can be horizontally pressed against the grinding surface of a grinding wheel 11. Grinding can be achieved with excellent accuracy while keeping the flatness and perpendicularity of the nozzle end face.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は精密部品の加工装置
に係り、特に電磁式燃料噴射弁のノズル端面の研削に好
適な研削装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for processing precision parts, and more particularly to a grinding apparatus suitable for grinding a nozzle end face of an electromagnetic fuel injection valve.

【0002】[0002]

【従来の技術】従来の精密部品における研削装置の例と
して、特開平6−320414 号公報に示される。被加工部材
を研磨部材に押し付けるために高剛性のプレートを使用
して加圧する方法がある(以下第1の従来技術とす
る)。
2. Description of the Related Art An example of a conventional grinding apparatus for precision parts is disclosed in Japanese Patent Application Laid-Open No. Hei 6-320414. There is a method in which a workpiece is pressed against a polishing member by using a highly rigid plate (hereinafter referred to as a first conventional technique).

【0003】また、加工量を制御するための例として特
開平9−57613号公報記載のように加工ヘッド部の内部に
変位検出部と検出子を配置し、変位検出部からレーザー
光を発射して変位検出部と検出子の間の距離を測定し
て、被加工部材を加工した時の変位量を検出する方法が
ある(以下、第2の従来技術とする)。
As an example for controlling the amount of processing, a displacement detecting section and a detector are arranged inside a processing head section as described in JP-A-9-57613, and a laser beam is emitted from the displacement detecting section. There is a method of measuring the distance between the displacement detection unit and the detector to detect the amount of displacement when the workpiece is machined (hereinafter referred to as a second conventional technique).

【0004】[0004]

【発明が解決しようとする課題】前述した第1の従来技
術では高剛性のプレートを使用して被加工部材を研削砥
石に押し付けているため、柔軟に研削砥石の研削面に押
し付けることができず、被研削面に平面度や直角度が最
初から出ている被加工部材に使用する場合、研削砥石の
回転軸と被加工部材の回転軸の間に平行度が出ていない
とかえって、被加工部材の平面度や直角度の精度が落ち
る場合がある。
In the first prior art described above, since the workpiece is pressed against the grinding wheel using a highly rigid plate, it cannot be pressed against the ground surface of the grinding wheel flexibly. However, when used on a workpiece that has a flatness or squareness on the surface to be ground from the beginning, the parallelism between the rotation axis of the grinding wheel and the rotation axis of the workpiece does not appear. The accuracy of the flatness and squareness of the member may be reduced.

【0005】また、前述の第2の従来技術は加工ヘッド
部の内部に変位検出部と検出子を配置しているため、加
工ヘッド部が大きくなってしまう。
In the second prior art, since the displacement detector and the detector are arranged inside the processing head, the processing head becomes large.

【0006】さらに、第2の従来技術では被加工部材と
して非常に薄いウェハを対象としているため、研削砥石
の研削面とウェハの被研削面が平行でなくても、検出子
の位置がずれることはほとんど無いので、レーザーの反
射光を検知することができる。
Further, in the second prior art, since a very thin wafer is used as a member to be processed, the position of the detector may be shifted even if the ground surface of the grinding wheel and the ground surface of the wafer are not parallel. Because there is almost no, the reflected light of the laser can be detected.

【0007】しかし、本発明では被加工部材として電磁
式燃料噴射弁のノズルを対象としており、ウェハの厚み
とノズルの高さを比較した場合ノズルのほうがはるかに
高い。そのため、ノズルに対して検出子を使用した場合
研削砥石の研削面とノズルの端面の平行度が違っている
と検出子の位置がずれてしまい、レーザー光が反射して
も検知できない。
However, in the present invention, the nozzle of the electromagnetic fuel injection valve is used as a workpiece, and when the thickness of the wafer is compared with the height of the nozzle, the nozzle is much higher. Therefore, when a detector is used for the nozzle, if the degree of parallelism between the grinding surface of the grinding wheel and the end surface of the nozzle is different, the position of the detector is shifted, and detection is not possible even if laser light is reflected.

【0008】[0008]

【課題を解決するための手段】前述の課題を解決するた
め、本発明による研削装置では、薄い板バネを使用する
ことで、研削砥石の研削面に被加工部材の被研削面を押
し付ける際、研削砥石の回転軸と加工ヘッド部の回転軸
が十分に平行でなくても、柔軟に被研削面を研削砥石の
研削面に押し付けることができ、被研削面の平面度及び
直角度を保つことができるようになった。
In order to solve the above-mentioned problems, a grinding apparatus according to the present invention uses a thin leaf spring to press a ground surface of a workpiece to a ground surface of a grinding wheel. Even if the axis of rotation of the grinding wheel and the axis of rotation of the processing head are not sufficiently parallel, the surface to be ground can be pressed against the surface of the grinding wheel flexibly, and the flatness and squareness of the surface to be ground can be maintained. Is now available.

【0009】しかし、板バネを薄くすることで板バネの
弾性力が小さくなってしまい、被加工部材を研削砥石の
研削面に押し付ける力も小さくなってしまう。そこで、
圧縮空気を加工ヘッド内部へ導入することで、小さくな
った押し付け力を補うことができる。したがって、圧縮
空気の圧力を使用することにより、板バネには均一に圧
力が加わり、研削砥石の研削面に対して均一の押し付け
力で被加工部材を押し付けることができる。
However, when the leaf spring is made thinner, the elastic force of the leaf spring becomes smaller, and the force for pressing the workpiece to the grinding surface of the grinding wheel also becomes smaller. Therefore,
By introducing the compressed air into the processing head, the reduced pressing force can be compensated. Therefore, by using the pressure of the compressed air, the pressure is uniformly applied to the leaf spring, and the workpiece can be pressed with a uniform pressing force against the grinding surface of the grinding wheel.

【0010】また、被研削面を研削砥石に押し付けるの
に圧縮空気の圧力を使用するため、板バネの内側に密閉
板を使用することで圧縮空気がもれるのを防止してい
る。さらに、圧縮空気の圧力を制御することにより、押
し付け力を変化させ、それに応じた研削量を得ることが
できる。
Further, since the pressure of the compressed air is used to press the surface to be ground against the grinding wheel, the leakage of the compressed air is prevented by using a sealing plate inside the leaf spring. Further, by controlling the pressure of the compressed air, the pressing force can be changed, and a grinding amount corresponding to the pressing force can be obtained.

【0011】[0011]

【発明の実施の形態】本発明の実施例を、図をもとに説
明する。図1は本発明の実施例となるノズル端面研削装
置の要部概略断面図である。加工ヘッド部1は加工ヘッ
ド2、柔軟な可撓部材としての板バネ3と密閉板4とノ
ズルホルダ5から成る保持部材6、それらを支える板バ
ネ押え7、吸引や加圧のための空気口8、及びベアリン
グの入ったベアリングカバー9から構成される。加工ヘ
ッド2は上下に分割されており、ベアリングカバー9に
より連結している。ここで、板バネ3は、材質として金
属製の板や、ゴム板など柔軟な可撓部材であればどのよ
うな材質のものでも良い。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a schematic sectional view of a main part of a nozzle end surface grinding apparatus according to an embodiment of the present invention. The processing head unit 1 includes a processing head 2, a holding member 6 including a leaf spring 3 as a flexible member, a sealing plate 4, and a nozzle holder 5, a leaf spring retainer 7 for supporting them, and an air port for suction and pressurization. 8 and a bearing cover 9 containing a bearing. The processing head 2 is divided into upper and lower parts and connected by a bearing cover 9. Here, the leaf spring 3 may be made of any material as long as it is a flexible member such as a metal plate or a rubber plate.

【0012】そして、ノズル10の吸引、及び端面を研
削砥石11の研削面へ押し付けるための圧縮空気の導入
は空気口8を通して行われる。また、加工ヘッド部1は
モータ12につながっており、加工ヘッド2,板バネ
3,密閉板4,ノズルホルダ5及び板バネ押え7はモー
タ12により一定回転数(今回は150rpm で実施)で
回転し、ノズル10は加工ヘッド部1の回転の中心で吸
引される。さらに、加工ヘッド部1,モータ12は直線
運動する駆動機器13に搭載されており、駆動機器13
により加工ヘッド部1は加工ヘッド部1の回軸方向に直
線運動する。
The suction of the nozzle 10 and the introduction of compressed air for pressing the end face against the grinding surface of the grinding wheel 11 are performed through the air port 8. The processing head 1 is connected to a motor 12, and the processing head 2, the leaf spring 3, the sealing plate 4, the nozzle holder 5 and the leaf spring retainer 7 are rotated by the motor 12 at a constant speed (in this case, 150 rpm). Then, the nozzle 10 is sucked at the center of rotation of the processing head 1. Further, the machining head unit 1 and the motor 12 are mounted on a driving device 13 that moves linearly.
As a result, the processing head 1 linearly moves in the direction of the axis of rotation of the processing head 1.

【0013】一方、研削砥石11はモータ12につなが
って研削部15を構成し、研削砥石11はモータ12に
より一定回転数(今回は90rpm で実施)で回転する。
そして、加工ヘッド部1と研削部15は、回転軸方向に
相対しそれぞれの回転軸がずれている状態で配置され、
駆動機器13が直線運動することで、ノズル10の端面
と研削砥石11の研削面が接触する。
On the other hand, the grinding wheel 11 is connected to a motor 12 to constitute a grinding section 15, and the grinding wheel 11 is rotated by the motor 12 at a constant rotation speed (in this case, implemented at 90 rpm).
Then, the processing head unit 1 and the grinding unit 15 are arranged in a state where their respective rotation axes are offset in the rotation axis direction,
The linear movement of the driving device 13 brings the end face of the nozzle 10 into contact with the grinding surface of the grinding wheel 11.

【0014】次にノズル端面の研削工程について説明す
る。先ず、ノズル10を吸引し保持している加工ヘッド
部1は、駆動機器13によりノズル10の端面が研削砥
石11の研削面に接触する位置まで直線運動する。ノズ
ル10の端面が研削砥石11の研削面に接触したところ
で、空気口8を通して圧縮空気を導入して目標研削量に
対する圧力を加工ヘッド部1の内側から板バネ3に加え
る。
Next, the step of grinding the nozzle end surface will be described. First, the processing head unit 1 that sucks and holds the nozzle 10 is linearly moved by the driving device 13 to a position where the end surface of the nozzle 10 contacts the grinding surface of the grinding wheel 11. When the end surface of the nozzle 10 comes into contact with the grinding surface of the grinding wheel 11, compressed air is introduced through the air port 8 to apply a pressure corresponding to a target grinding amount to the leaf spring 3 from the inside of the processing head 1.

【0015】ここで言う“目標研削量に対する圧力”と
は、「一定時間中に加工ヘッド部1や研削砥石11を回
転させてノズル10を目標研削量だけ研削するために、
ノズル10の端面を研削砥石11の研削面に押し付ける
のに必要な圧縮空気の圧力」である。
The term "pressure with respect to the target grinding amount" as used herein means "to rotate the processing head 1 and the grinding wheel 11 during a certain period of time to grind the nozzle 10 by the target grinding amount.
The pressure of the compressed air required to press the end face of the nozzle 10 against the grinding surface of the grinding wheel 11 ”.

【0016】そして、空気口8を通して加工ヘッド部1
の内側から目標研削量に対する圧力で押し付けながら、
加工ヘッド部1及び研削砥石11を一定回転数で一定時
間回転させてノズル10の端面を研削する。なお、研削
時の回転関係の組み合わせは、加工ヘッド部1のみが回
転する場合、研削部15のみが回転する場合、加工ヘッ
ド部1と研削部15の両方が回転する場合、加工ヘッド
部1が自転しながら研削砥石11上を回転する場合等さ
まざまであり、本発明においてはどの組み合わせの場合
でも適用できる。
Then, the processing head 1 is passed through the air port 8.
While pressing with pressure against the target grinding amount from inside the
The end face of the nozzle 10 is ground by rotating the processing head unit 1 and the grinding wheel 11 at a constant rotation speed for a predetermined time. The combination of the rotation relations at the time of grinding is as follows: when only the processing head unit 1 rotates, when only the grinding unit 15 rotates, when both the processing head unit 1 and the grinding unit 15 rotate, the processing head unit 1 There are various cases such as a case where the grinding wheel 11 is rotated while rotating, and the present invention can be applied to any combination.

【0017】一定時間回転させ研削が終了した後、空気
口8を通して再びノズル10を吸引し、駆動機器13に
より元の位置までノズル10を移動させて研削は終了す
る。次に図2を用いて説明する。図2は図1の断面図に
おける作業状態を示した要部概略断面図である。
After the grinding is completed by rotating for a certain period of time, the nozzle 10 is sucked again through the air port 8, and the driving device 13 moves the nozzle 10 to the original position, thereby completing the grinding. Next, a description will be given with reference to FIG. FIG. 2 is a schematic cross-sectional view of a main part showing a working state in the cross-sectional view of FIG.

【0018】前述したように、板バネ3は非常に薄く柔
軟であり、今回は板バネ3の厚みを0.05mm とした。
そのため、図2のように加工ヘッド部1の回転軸と研削
部15の回転軸が多少傾いていても、板バネ3により加
工ヘッド部1の回転軸と研削部15の回転軸の傾きθを
吸収し、ノズル10の端面を研削砥石11の研削面に対
して水平に押し付けることができる。
As described above, the leaf spring 3 is very thin and flexible, and the thickness of the leaf spring 3 was set to 0.05 mm this time.
Therefore, even if the rotation axis of the processing head unit 1 and the rotation axis of the grinding unit 15 are slightly inclined as shown in FIG. It can absorb and press the end face of the nozzle 10 horizontally against the grinding surface of the grinding wheel 11.

【0019】しかし、板バネ3を薄くすることで板バネ
3による押し付け力は小さくなるので、空気口8から圧
縮空気を導入して板バネ3に圧力をかける。板バネ3に
は圧縮空気がもれないように密閉板4が貼り付けられて
いるため、板バネ3には圧縮空気による均一な圧力が加
えられ、この均一な圧力によりノズル10の端面が研削
砥石11の研削面に対して一定の力で押し付けられる。
However, since the pressing force of the leaf spring 3 is reduced by making the leaf spring 3 thinner, compressed air is introduced from the air port 8 to apply pressure to the leaf spring 3. Since the sealing plate 4 is attached to the leaf spring 3 so that no compressed air leaks, a uniform pressure is applied to the leaf spring 3 by the compressed air, and the uniform pressure causes the end face of the nozzle 10 to be ground. The grindstone 11 is pressed against the ground surface with a constant force.

【0020】次に図3を用いて説明する。図3は前述し
た目標研削量に対する圧力において、一定時間を15秒
間とした時のノズル端面の研削量(μm)と圧縮空気の
圧力(kg/cm2)の関係を示したグラフである。ノズル端
面の研削量と圧縮空気の圧力の間には図に見られるよう
に比例関係が存在し、今回のように加工時間が15秒の
場合だけでなく、違った加工時間でも同様の比例関係が
得られる。したがって、加工ヘッド部1や研削砥石11
の回転数及び加工時間を一定にし、圧縮空気の圧力を制
御することによりノズル10の研削量を制御することが
できる。
Next, a description will be given with reference to FIG. FIG. 3 is a graph showing a relationship between the grinding amount (μm) of the nozzle end face and the pressure (kg / cm 2 ) of the compressed air when the predetermined time is set to 15 seconds at the pressure with respect to the target grinding amount. As shown in the figure, there is a proportional relationship between the grinding amount of the nozzle end face and the pressure of the compressed air. Not only when the processing time is 15 seconds as in this case, but also when the processing time is different Is obtained. Therefore, the processing head 1 and the grinding wheel 11
The grinding amount of the nozzle 10 can be controlled by controlling the pressure of the compressed air while keeping the rotation speed and the processing time of the nozzle constant.

【0021】[0021]

【発明の効果】本発明により、電磁式燃料噴射弁のノズ
ル端面を研削砥石の研削面に押し付ける際に板バネと圧
縮空気を使用することで、前記ノズル端面の平面度及び
直角度を保ったまま高精度に研削できる効果が得られ
た。
According to the present invention, the flatness and the squareness of the nozzle end surface are maintained by using a leaf spring and compressed air when pressing the nozzle end surface of the electromagnetic fuel injection valve against the grinding surface of the grinding wheel. The effect of high-precision grinding can be obtained.

【0022】さらに、前記圧縮空気の圧力を制御するこ
とにより前記ノズル端面の研削量も容易に制御すること
ができる。
Further, by controlling the pressure of the compressed air, the grinding amount of the nozzle end surface can be easily controlled.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施例として示した研削装置の要部概
略断面図である。
FIG. 1 is a schematic sectional view of a main part of a grinding device shown as an embodiment of the present invention.

【図2】図1の断面図における作業状態を示す要部概略
断面図である。
FIG. 2 is a schematic cross-sectional view of a main part showing a working state in the cross-sectional view of FIG.

【図3】ノズル端面の研削量と圧縮空気の圧力の関係を
示したグラフである。
FIG. 3 is a graph showing a relationship between a grinding amount of a nozzle end face and a pressure of compressed air.

【符号の説明】[Explanation of symbols]

1…加工ヘッド部、3…板バネ、4…密閉板、8…空気
口、10…被加工物(ノズル)、11…研削砥石、θ…
加工ヘッド部回転軸と研削砥石回転軸のなす角。
DESCRIPTION OF SYMBOLS 1 ... Processing head part, 3 ... Leaf spring, 4 ... Sealing plate, 8 ... Air port, 10 ... Workpiece (nozzle), 11 ... Grinding stone, θ ...
The angle between the processing head part rotation axis and the grinding wheel rotation axis.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 澤田 卓矢 茨城県ひたちなか市大字高場2520番地 株 式会社日立製作所自動車機器事業部内 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Takuya Sawada 2520 Odaiba, Hitachinaka-city, Ibaraki Pref.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】研削砥石に被加工部材を載せて加工ヘッド
で覆い、かつ前記加工ヘッドに圧縮空気を導入して被加
工部材を押圧し、少なくとも前記研削砥石あるいは被加
工部材のいずれかを回転させて被加工部材を研削する装
置において、前記加工ヘッドの先端部と被加工部材間を
可撓部材で気密的に連結したことを特徴とする研削装
置。
1. A workpiece is placed on a grinding wheel and covered with a processing head, and compressed air is introduced into the processing head to press the workpiece, and at least either the grinding wheel or the workpiece is rotated. An apparatus for grinding a workpiece by means of a grinding device, wherein a tip end of the processing head and the workpiece are air-tightly connected by a flexible member.
【請求項2】請求項1記載の研削装置において、可撓部
材として板バネを使用することを特徴とする研削装置。
2. The grinding device according to claim 1, wherein a leaf spring is used as the flexible member.
【請求項3】請求項1記載の研削装置において、気密す
るための密閉板にゴム板を使用することを特徴とする研
削装置。
3. The grinding device according to claim 1, wherein a rubber plate is used as a sealing plate for airtightness.
【請求項4】請求項1記載の研削装置において、圧縮空
気の圧力を変化させることにより、前記被加工部材の研
削量を制御することを特徴とする研削装置。
4. The grinding apparatus according to claim 1, wherein the amount of grinding of the workpiece is controlled by changing the pressure of the compressed air.
JP2175098A 1998-02-03 1998-02-03 Grinding apparatus Pending JPH11216648A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2175098A JPH11216648A (en) 1998-02-03 1998-02-03 Grinding apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2175098A JPH11216648A (en) 1998-02-03 1998-02-03 Grinding apparatus

Publications (1)

Publication Number Publication Date
JPH11216648A true JPH11216648A (en) 1999-08-10

Family

ID=12063753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2175098A Pending JPH11216648A (en) 1998-02-03 1998-02-03 Grinding apparatus

Country Status (1)

Country Link
JP (1) JPH11216648A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114083308A (en) * 2021-10-08 2022-02-25 宝鸡法士特齿轮有限责任公司 Clamping device with adjustable workpiece machining angle

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114083308A (en) * 2021-10-08 2022-02-25 宝鸡法士特齿轮有限责任公司 Clamping device with adjustable workpiece machining angle

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