JPH11206158A - Manufacture for oscillation actuator - Google Patents
Manufacture for oscillation actuatorInfo
- Publication number
- JPH11206158A JPH11206158A JP122298A JP122298A JPH11206158A JP H11206158 A JPH11206158 A JP H11206158A JP 122298 A JP122298 A JP 122298A JP 122298 A JP122298 A JP 122298A JP H11206158 A JPH11206158 A JP H11206158A
- Authority
- JP
- Japan
- Prior art keywords
- elastic body
- manufacturing
- vibration actuator
- joining
- punching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、弾性体と電気機械
変換素子を備える振動アクチュエータの製造方法に関す
るものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a vibration actuator having an elastic body and an electromechanical transducer.
【０００２】[0002]
【従来の技術】図３は、振動アクチュエータの一例を示
す図である。振動アクチュエータ１０は、矩形平板状の
弾性体１１と、この弾性体１１の一方の面に接合され、
電気信号を機械変位に変換する電気機械変換素子である
ＰＺＴなどの圧電素子１２とを備えている。この振動ア
クチュエータ１０は、圧電素子１２に設けられた電極１
３Ａに第１の交流電圧を印加し、電極１３Ｂに前記第１
の交流電圧と位相の異なる第２の交流電圧を印加するこ
とで、弾性体１１に１次の縦振動と４次の屈曲振動を調
和的に発生させる。そして、屈曲振動の腹の位置に生じ
る楕円運動から駆動力を取り出すことができる。このよ
うな振動アクチュエータとしては、「光ピックアップ移
動を目的とした圧電リニア・モータ」（富川義朗氏他：
第五回電磁力関連のダイナミックシンポジウム講演論文
集，第３９３頁〜第３９８頁）において、その構成及び
負荷特性に関する解析結果が詳細に説明されている。2. Description of the Related Art FIG. 3 is a diagram showing an example of a vibration actuator. The vibration actuator 10 is joined to an elastic body 11 having a rectangular flat plate shape and one surface of the elastic body 11,
A piezoelectric element 12 such as PZT, which is an electromechanical conversion element that converts an electric signal into a mechanical displacement. The vibration actuator 10 includes an electrode 1 provided on a piezoelectric element 12.
3A is applied to the electrode 13B and the first AC voltage is applied to the electrode 13B.
By applying a second AC voltage having a different phase from that of the first AC voltage, the first-order longitudinal vibration and the fourth-order bending vibration are generated in the elastic body 11 in harmony. Then, the driving force can be extracted from the elliptical motion generated at the position of the antinode of the bending vibration. Examples of such a vibration actuator include a “piezoelectric linear motor for moving an optical pickup” (Yoshiaki Tomikawa et al .:
In the 5th Electromagnetic Force-Related Dynamic Symposium Lecture Papers, pp. 393-398), the analysis results of the configuration and load characteristics are described in detail.
【０００３】従来、この振動アクチュエータ１０は、弾
性体１１を切削などによって矩形平板状に加圧し、その
後に、圧電素子１２を接着する製造方法が採られてい
た。Conventionally, the vibration actuator 10 employs a manufacturing method in which the elastic body 11 is pressed into a rectangular flat plate by cutting or the like, and then the piezoelectric element 12 is bonded.
【０００４】[0004]
【発明が解決しようとする課題】しかし、前述した従来
の製造方法は、切削による加工時間が長く、振動アクチ
ュエータを大量に生産することが困難であった。本発明
は、加工時間が短く、大量産に適した振動アクチュエー
タの製造方法を提供することを課題とする。However, the conventional manufacturing method described above has a long processing time by cutting, and it has been difficult to mass-produce the vibration actuator. An object of the present invention is to provide a method for manufacturing a vibration actuator which is short in processing time and suitable for mass production.
【０００５】[0005]
【課題を解決するための手段】前記課題を解決するため
に、請求項１の発明は、平板状の弾性体（１１）と、前
記弾性体の一方の面に接合された電気機械変換素子（１
２）とを含む振動アクチュエータを製造する振動アクチ
ュエータの製造方法において、前記弾性体の大きさに板
状の基材を打抜型で打ち抜く打抜工程（Ｓ１０１）と、
前記打抜工程で打ち抜いた弾性体の、前記打抜型と接触
した被加工面に前記電気機械変換素子を接合する接合工
程（Ｓ１０３）と、を備えることを特徴とする振動アク
チュエータの製造方法である。According to a first aspect of the present invention, there is provided an electromechanical transducer (11) comprising a flat elastic body (11) and an electromechanical transducer (11) joined to one surface of the elastic body. 1
2) a vibration actuator manufacturing method for manufacturing a vibration actuator including: (a) a punching step of punching a plate-shaped base material into a size of the elastic body by a punching die (S101);
A joining step (S103) of joining the electromechanical transducer to a surface of the elastic body punched in the punching step, which is in contact with the punching die, (S103). .
【０００６】請求項２の発明は、請求項１に記載された
振動アクチュエータの製造方法において、前記打抜工程
と前記接合工程との間に、前記弾性体の前記電気機械変
換素子を接合する接合面を、平坦に加工する面加工工程
（Ｓ１０２）と、を備えることを特徴とする振動アクチ
ュエータの製造方法である。According to a second aspect of the present invention, in the method of manufacturing a vibration actuator according to the first aspect, the electromechanical transducer of the elastic body is joined between the punching step and the joining step. And a surface processing step (S102) of processing the surface to be flat.
【０００７】請求項３の発明は、請求項２に記載された
振動アクチュエータの製造方法において、前記面加工工
程は、前記接合面を所定の粗さに加工することを特徴と
する振動アクチュエータの製造方法である。According to a third aspect of the present invention, in the method of manufacturing a vibration actuator according to the second aspect, the surface processing step includes processing the joint surface to a predetermined roughness. Is the way.
【０００８】[0008]
【発明の実施の形態】以下、図面等を参照して、本発明
に係る実施形態について、さらに詳しく説明する。な
お、以降の説明は、振動アクチュエータとして、超音波
の振動域を利用する振動アクチュエータを例にとって行
う。図１は、本発明に係る振動アクチュエータの製造方
法を示す工程図、図２は、図１の各工程を示した模式図
である。この実施形態の振動アクチュエータの製造方法
は、図１に示すように、打抜工程Ｓ１０１と、面加工工
程Ｓ１０２と、接合工程Ｓ１０３等とを備えている。Embodiments of the present invention will be described below in more detail with reference to the drawings. In the following description, a vibration actuator using an ultrasonic vibration region will be described as an example of the vibration actuator. FIG. 1 is a process diagram showing a method of manufacturing a vibration actuator according to the present invention, and FIG. 2 is a schematic diagram showing each process of FIG. As shown in FIG. 1, the method for manufacturing a vibration actuator according to this embodiment includes a punching step S101, a surface processing step S102, a joining step S103, and the like.
【０００９】打抜工程Ｓ１０１は、弾性体１１の大きさ
に板状の基材３０をプレス型２１，２２で打ち抜く工程
である。基材３０は、ステンレス，インバー材，エリン
バー材などの難切削金属材料で作製された板状の基材で
ある。この工程は、図２（ａ），（ｂ），（ｃ）に示す
ように、打ち抜き用のプレス型２１，２２を用いて、基
材３０を打ち抜くことによって、弾性体１１Ａを加工す
る。The punching step S101 is a step of punching the plate-like base material 30 to the size of the elastic body 11 by the press dies 21 and 22. The base material 30 is a plate-shaped base material made of a hard-to-cut metal material such as stainless steel, invar material, and elinvar material. In this step, as shown in FIGS. 2 (a), 2 (b) and 2 (c), the elastic body 11A is processed by punching out the base material 30 using punching press dies 21 and 22.
【００１０】このときに、打抜加工された弾性体１１Ａ
は、図２（ｃ）に示すように、プレス型２１に接触した
側の面１１ｃには、バリ１１ａが発生し、また、プレス
型２２に接触した側のコーナー部には、ダレ１１ｂが発
生してしまう。このために、次の面加工工程Ｓ１０２を
施す。At this time, the punched elastic body 11A
As shown in FIG. 2 (c), burrs 11a are generated on the surface 11c on the side in contact with the press mold 21, and sag 11b is generated on the corner on the side in contact with the press mold 22. Resulting in. For this purpose, the following surface processing step S102 is performed.
【００１１】面加工工程Ｓ１０２は、打抜工程Ｓ１０１
の後に、弾性体１１Ａの圧電素子１２を接合する接合面
１１ｃを、平坦に加工する工程である。この工程では、
図２（ｄ），（ｅ），（ｆ）に示すように、プレス型２
３，２４を用いて、バリ１１ａをつぶし、弾性体１１の
片側を略平坦に面加工するようにしている。平坦面にす
る理由は、弾性体１１と圧電素子１２の間に、隙間があ
ると振動がうまく伝わらないので、これを防止するため
である。なお、ダレ１１ｂを無くして、平坦面にするの
は、つぶし量が多く困難である。The surface processing step S102 includes a punching step S101.
Is a step of flattening the joint surface 11c of the elastic body 11A to which the piezoelectric element 12 is joined. In this step,
As shown in FIGS. 2D, 2E, and 2F, the pressing die 2
The burrs 11a are crushed by using 3 and 24, and one side of the elastic body 11 is processed to be substantially flat. The reason why the flat surface is used is to prevent vibration from being transmitted well if there is a gap between the elastic body 11 and the piezoelectric element 12, and to prevent this. In addition, it is difficult to eliminate the sagging 11b and make the surface flat, because the amount of crushing is large.
【００１２】また、弾性体１１と圧電素子１２の接着力
を高めるために、プレス型２３の表面を所望の面粗さに
加工しておき、そのプレス型２３の表面を弾性体１１の
接合面１１ｃに転写することにより、弾性体１４の表面
を所望の表面粗さにするようにしてもよい。In order to increase the adhesive strength between the elastic body 11 and the piezoelectric element 12, the surface of the press mold 23 is processed to a desired surface roughness, and the surface of the press mold 23 is joined to the joint surface of the elastic body 11. By transferring to the surface 11c, the surface of the elastic body 14 may have a desired surface roughness.
【００１３】接合工程Ｓ１０３は、面加工工程Ｓ１０２
で加工した弾性体１１の、打抜型２１と接触した被加工
面（接合面）１１ｃに、圧電素子１２を接着剤によって
接合する工程である。この工程では、図２（ｇ），
（ｈ）に示すように、面加工工程Ｓ１０２で平坦になっ
た側に、圧電素子１２を接着する。以上のような方法に
より、図３に示すような振動アクチュエータ１０を製作
することができる。この実施形態によれば、弾性体の加
工時間が少なくなり、大量に、かつ、安価に振動アクチ
ュエータを製造できる。また、切削加工と比較して、形
状や質量の均一性が高くなる利点がある。The joining step S103 includes a surface processing step S102.
In this step, the piezoelectric element 12 is bonded to the processing surface (bonding surface) 11c of the elastic body 11 that has been processed in step 1 by contacting the punching die 21 with an adhesive. In this step, FIG.
As shown in (h), the piezoelectric element 12 is bonded to the flattened side in the surface processing step S102. With the above-described method, the vibration actuator 10 as shown in FIG. 3 can be manufactured. According to this embodiment, the processing time of the elastic body is reduced, and the vibration actuator can be manufactured in large quantities at low cost. In addition, there is an advantage that the uniformity of the shape and the mass is increased as compared with the cutting process.
【００１４】以上説明した実施形態に限定されることな
く、種々の変形や変更が可能であって、それらも本発明
の均等の範囲内である。例えば、弾性体は、矩形平板状
の例で説明したが、ドーナツ板状のものなどであっても
よい。Various modifications and changes are possible without being limited to the embodiments described above, and these are also within the equivalent scope of the present invention. For example, the elastic body has been described as an example of a rectangular flat plate, but may be a donut plate.
【００１５】[0015]
【発明の効果】以上詳しく説明したように、本発明によ
れば、弾性体の加工時間が少なくなり、大量に、かつ、
安価に振動アクチュエータを製造することができる、と
いう効果がある。As described in detail above, according to the present invention, the processing time of the elastic body is reduced,
There is an effect that the vibration actuator can be manufactured at low cost.
【図１】本発明に係る振動アクチュエータの製造方法を
示す工程図である。FIG. 1 is a process chart showing a method for manufacturing a vibration actuator according to the present invention.
【図２】図１の各工程を示した模式図である。FIG. 2 is a schematic view showing each step of FIG.
【図３】振動アクチュエータの一例を示す概略図であ
る。FIG. 3 is a schematic diagram illustrating an example of a vibration actuator.
１０ 振動アクチュエータ １１，１１Ａ 弾性体 １１ａ バリ １１ｂ ダレ １１ｃ 接合面 １２ 圧電素子 ２１，２２，２３，２４ プレス型 ３０ 基材 Ｓ１０１ 打抜工程 Ｓ１０２ 面加工工程 Ｓ１０３ 接合工程 DESCRIPTION OF SYMBOLS 10 Vibration actuator 11, 11A Elastic body 11a Burr 11b Sag 11c Joining surface 12 Piezoelectric element 21, 22, 23, 24 Press mold 30 Base material S101 Punching process S102 Surface processing process S103 Joining process
Claims (3)
面に接合された電気機械変換素子とを含む振動アクチュ
エータを製造する振動アクチュエータの製造方法におい
て、 前記弾性体の大きさに板状の基材を打抜型で打ち抜く打
抜工程と、 前記打抜工程で打ち抜いた弾性体の、前記打抜型と接触
した被加工面に前記電気機械変換素子を接合する接合工
程と、を備えることを特徴とする振動アクチュエータの
製造方法。1. A vibration actuator manufacturing method for manufacturing a vibration actuator including a flat elastic body and an electromechanical transducer joined to one surface of the elastic body, wherein the size of the elastic body is And a joining step of joining the electromechanical transducer to a surface to be processed of the elastic body punched in the punching step, which is in contact with the punching die. A method for manufacturing a vibration actuator, comprising:
タの製造方法において、 前記打抜工程と前記接合工程との間に、前記弾性体の前
記電気機械変換素子を接合する接合面を、平坦に加工す
る面加工工程と、を備えることを特徴とする振動アクチ
ュエータの製造方法。2. The method for manufacturing a vibration actuator according to claim 1, wherein a joining surface of the elastic body, which joins the electromechanical transducer, is flat between the punching step and the joining step. A method for manufacturing a vibration actuator, comprising: a surface processing step of processing.
タの製造方法において、 前記面加工工程は、前記接合面を所定の粗さに加工する
ことを特徴とする振動アクチュエータの製造方法。3. The method of manufacturing a vibration actuator according to claim 2, wherein in the surface processing step, the bonding surface is processed to a predetermined roughness.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00122298A JP4151099B2 (en) | 1998-01-07 | 1998-01-07 | Manufacturing method of vibration actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00122298A JP4151099B2 (en) | 1998-01-07 | 1998-01-07 | Manufacturing method of vibration actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11206158A true JPH11206158A (en) | 1999-07-30 |
| JP4151099B2 JP4151099B2 (en) | 2008-09-17 |
Family
ID=11495452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP00122298A Expired - Lifetime JP4151099B2 (en) | 1998-01-07 | 1998-01-07 | Manufacturing method of vibration actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4151099B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024014258A1 (en) * | 2022-07-15 | 2024-01-18 | キヤノン株式会社 | Vibration actuator and electronic device |
-
1998
- 1998-01-07 JP JP00122298A patent/JP4151099B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024014258A1 (en) * | 2022-07-15 | 2024-01-18 | キヤノン株式会社 | Vibration actuator and electronic device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4151099B2 (en) | 2008-09-17 |
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