JP4151099B2 - Manufacturing method of vibration actuator - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for manufacturing a vibration actuator including an elastic body and an electromechanical transducer.
[0002]
[Prior art]
FIG. 3 is a diagram illustrating an example of a vibration actuator.
The vibration actuator 10 includes a rectangular plate-like elastic body 11 and a piezoelectric element 12 such as PZT which is an electromechanical conversion element that is joined to one surface of the elastic body 11 and converts an electrical signal into a mechanical displacement. Yes.
The vibration actuator 10 is elastic by applying a first AC voltage to the electrode 13A provided in the piezoelectric element 12 and applying a second AC voltage having a phase different from that of the first AC voltage to the electrode 13B. A primary longitudinal vibration and a fourth-order bending vibration are generated in the body 11 in a harmonic manner. And driving force can be taken out from the elliptical motion which arises in the position of the antinode of bending vibration.
As such a vibration actuator, “Piezoelectric linear motor for the purpose of optical pickup movement” (Mr. Yoshiro Tomikawa et al .: Proceedings of the 5th Electromagnetic Force Related Dynamic Symposium, pages 393-398) The analysis results regarding the configuration and load characteristics are described in detail.
[0003]
Conventionally, the vibration actuator 10 has been manufactured by pressing the elastic body 11 into a rectangular flat plate shape by cutting or the like, and then bonding the piezoelectric element 12.
[0004]
[Problems to be solved by the invention]
However, the above-described conventional manufacturing method has a long processing time by cutting, and it is difficult to produce a large number of vibration actuators.
An object of the present invention is to provide a method for manufacturing a vibration actuator that has a short processing time and is suitable for mass production.
[0005]
[Means for Solving the Problems]
In order to solve the above-mentioned problems, the invention of claim 1 manufactures a vibration actuator including a flat elastic body (11) and an electromechanical transducer (12) joined to one surface of the elastic body. In the method for manufacturing a vibration actuator, the base is formed by bringing a second punching die into contact with a plate-like substrate mounted on the first punching die, and pressing the substrate with the second punching die. A punching step (S101) for punching a material to form the elastic body, and a work piece in which the surface of the press die (23) processed to a predetermined surface roughness is brought into contact with the second punching die of the elastic body By transferring to the surface, the surface to be processed is made to have a predetermined roughness, and at the same time, a surface processing step for processing the burrs generated on the surface to be processed flat, and the elastic body punched in the punching step . The electric machine on the work surface in contact with the punching die 2 A bonding step of bonding without gaps換素Ko (S103), a production method of a vibration actuator comprising: a.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments according to the present invention will be described in more detail with reference to the drawings.
In the following description, a vibration actuator using an ultrasonic vibration region is taken as an example of the vibration actuator.
FIG. 1 is a process diagram showing a method of manufacturing a vibration actuator according to the present invention, and FIG. 2 is a schematic diagram showing each process of FIG.
As shown in FIG. 1, the manufacturing method of the vibration actuator of this embodiment includes a punching step S101, a surface processing step S102, a joining step S103, and the like.
[0009]
The punching step S101 is a step of punching the plate-like base material 30 into the size of the elastic body 11 with the press dies 21 and 22.
The base material 30 is a plate-like base material made of a hard-to-cut metal material such as stainless steel, an invar material, and an elimber material. In this step, as shown in FIGS. 2A, 2B, and 2C, the elastic body 11A is processed by punching the base material 30 using the punching dies 21 and 22.
[0010]
At this time, as shown in FIG. 2C, the punched elastic body 11 </ b> A generates burrs 11 a on the surface 11 c on the side in contact with the press die 21, and contacts the press die 22. The sagging 11b is generated at the corner portion on the side.
For this purpose, the next surface processing step S102 is performed.
[0011]
The surface processing step S102 is a step of processing the joining surface 11c for joining the piezoelectric elements 12 of the elastic body 11A to a flat shape after the punching step S101.
In this step, as shown in FIGS. 2D, 2E, and 2F, the burrs 11a are crushed by using the press dies 23 and 24 so that one side of the elastic body 11 is surface-finished substantially flat. ing. The reason for making the flat surface is to prevent vibrations from being transmitted well if there is a gap between the elastic body 11 and the piezoelectric element 12. Note that it is difficult to eliminate the sag 11b and make it a flat surface because of the large amount of crushing.
[0012]
Further, in order to increase the adhesive force between the elastic body 11 and the piezoelectric element 12, the surface of the press die 23 is processed to a desired surface roughness, and the surface of the press die 23 is transferred to the joint surface 11 c of the elastic body 11. By doing so, you may make it make the surface of the elastic body 14 into desired surface roughness.
[0013]
The joining step S103 is a step of joining the piezoelectric element 12 to the processing surface (joining surface) 11c of the elastic body 11 processed in the surface processing step S102 in contact with the punching die 21 with an adhesive.
In this step, as shown in FIGS. 2G and 2H, the piezoelectric element 12 is bonded to the side flattened in the surface processing step S102.
The vibration actuator 10 as shown in FIG. 3 can be manufactured by the above method.
According to this embodiment, the processing time of the elastic body is reduced, and the vibration actuator can be manufactured in a large amount and at a low cost. Further, there is an advantage that the uniformity of the shape and mass is higher than that of the cutting process.
[0014]
The present invention is not limited to the embodiment described above, and various modifications and changes are possible, and these are also within the equivalent scope of the present invention.
For example, the elastic body has been described as an example of a rectangular flat plate, but may be a donut plate.
[0015]
【The invention's effect】
As described above in detail, according to the present invention, there is an effect that the processing time of the elastic body is reduced, and the vibration actuator can be manufactured in a large amount and at a low cost.
[Brief description of the drawings]
FIG. 1 is a process diagram showing a method of manufacturing a vibration actuator according to the present invention.
FIG. 2 is a schematic diagram showing each step of FIG. 1;
FIG. 3 is a schematic view showing an example of a vibration actuator.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Vibration actuator 11, 11A Elastic body 11a Burr 11b Sag 11c Joining surface 12 Piezoelectric element 21, 22, 23, 24 Press die 30 Base material S101 Punching process S102 Surface processing process S103 Joining process

Claims (1)

In a manufacturing method of a vibration actuator, which manufactures a vibration actuator including a plate-like elastic body and an electromechanical transducer element bonded to one surface of the elastic body,
A second punching die is brought into contact with a plate-like base material mounted on the first punching die, and the base material is pressed by the second punching die, whereby the elastic body is punched out. A punching process to form;
By transferring the surface of the press die processed to a predetermined surface roughness to the processing surface in contact with the second punching die of the elastic body, the processing surface is made to have a predetermined roughness and at the same time A surface processing step of processing the burr generated on the processing surface flatly;
And a joining step of joining the electromechanical conversion element to the work surface in contact with the second punching die of the elastic body punched in the punching step without a gap .

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