JPH11188604A - Wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To increase work cutting efficiency without complicating the device by changing the cutting path of a wire. SOLUTION: A wire 10 for cutting a work 26 is wound round annular grooves 161, 171 of a first processing roller 16 and a second processing roller 17, respectively. Ellipses, which from the annular shape of the annular groove 161, 171, possess four long or short symmetrical lines in rotation major and minor axes) A1, A2, B1, B2 extending from the centers of rotation C1, C2 to the annular grooves 161, 171. The annular grooves 161, 171 are linearly symmetrical with respect to the lines passing the symmetrical lines in rotation A1, A2, B1, B2. The rotational phase of the first processing roller 16 differs by 90 from that of the second processing roller 17, although both rollers 16, 17 rotate at the same speed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw for cutting a brittle material such as a semiconductor material, a magnetic material, and a ceramic with a wire.

[0002]

2. Description of the Related Art Generally, in a wire saw of this type, a wire is run while being spirally wound at a predetermined pitch between a plurality of processing rollers. A slurry containing abrasive grains is supplied onto the traveling wire. Then, in this state, the work is pressed against the wire, and the work is cut into a wafer. The efficiency of cutting the work is increased by increasing the amount of slurry supplied between the wire and the work.

In an apparatus disclosed in Japanese Patent Application Laid-Open No. 8-99262, a pair of groove rollers (processing rollers referred to in the present application) are used.
An auxiliary roller disposed therebetween is brought into contact with the wire, and the rotation of the auxiliary roller causes the wire to move in a direction in which the wire comes into contact with the workpiece and in a direction in which the wire separates. JP-A-8-
In the apparatus disclosed in Japanese Patent No. 229800, the processing roller is swung by a link mechanism or a crank mechanism to impart a tilting movement to the wire. The movement of the wire in these conventional devices contributes to increasing the amount of slurry supplied between the wire and the work.

[0004]

SUMMARY OF THE INVENTION Japanese Patent Application Laid-Open No. 8-99262
In the apparatus disclosed in Japanese Patent Application Publication No. H10-260, measures such as transmitting the rotational force of the groove roller to the auxiliary roller to ensure the rotation of the auxiliary roller for moving the wire in the direction in which the wire comes into contact with the workpiece and the direction in which the wire is separated from the work are taken. is necessary. However, the installation of such a rotational force transmission mechanism causes the device to be complicated and increases the cost.

In the apparatus disclosed in Japanese Patent Application Laid-Open No. 8-229800, a link mechanism or a crank mechanism and a supporting mechanism for a swinging processing roller complicate the apparatus and increase the cost.

SUMMARY OF THE INVENTION It is an object of the present invention to improve the efficiency of cutting a workpiece by changing a wire cutting path without complicating the apparatus.

[0007]

To achieve the object, the present invention provides a method of winding a wire around a path of a plurality of processing rollers so as to surround the plurality of processing rollers.
The invention of claim 1 is directed to a wire saw in which a wire is caused to travel by rotation of the plurality of processing rollers, and a workpiece is cut by crossing a traveling direction of the workpiece with a traveling path of the wire. The first processing roller and the second processing roller adjacent to and in contact with the cutting path of the wire in the region to be cut are rotated at the same speed with the rotation center immovable, and the cutting path is moved in the direction of the traveling path of the workpiece. The first processing roller and the second processing roller are displaced reciprocally, and the path length of the envelope path of the wire surrounding the first processing roller and the second processing roller is made substantially constant. The roller peripheral shape was set.

[0008] The length of the envelope path of the wire surrounding the first processing roller and the second processing roller rotating at the same speed is substantially constant, and the cutting path is directed in the direction of the traveling path of the workpiece. Reciprocate. Therefore, the slurry easily enters between the wire and the work, and the cutting efficiency is improved. Since the reciprocation of the cutting branch of the wire in the direction of the traveling path of the work is caused only by the rotation of the processing roller without the rotation center, the apparatus is not complicated.

According to the second aspect of the present invention, at least two and even numbers of rotational symmetry lines are provided starting from the rotation center of the processing roller and extending to the circumference of the path of the processing roller with which the wire is in contact. Using a processing roller having a path circumferential shape having a different length, the rotational phase of the first processing roller and the second processing roller adjacent to and in contact with the wire cutting path in the area for cutting the work is adjusted. The first processing roller and the second processing roller are displaced, and are rotated at the same speed with the rotation center immovable, so that the cutting path is reciprocated in the traveling direction of the work.

The first processing roller and the second processing roller having the rotational symmetry line described above are rotated at the same speed while shifting the rotation phase. By shifting the rotation phase, the cutting path reciprocates in the direction of the workpiece traveling path while making the length of the envelope path of the wire surrounding the first processing roller and the second processing roller substantially constant. Can be done.

According to the third aspect of the invention, the number of the processing rollers is an even number, the path peripheral shape of the processing rollers is elliptical, and the number of the first processing rollers and the second processing rollers is small. The rotation phase was shifted by 90 °.

The ellipse has two long rotational symmetry lines and two short rotational symmetry lines at 90 ° intervals. By shifting the rotational phase of the first processing roller and the second processing roller having a path peripheral shape of an ellipse by 90 °, the wire surrounding the first processing roller and the second processing roller is rotated. The cutting path can be reciprocated in the direction of the work traveling path while keeping the path length of the envelope path substantially constant.

In the invention of claim 4, each of the processing rollers is driven by a motor, and is driven synchronously with each other. There is an effect that the rotation of each processing roller can be reliably synchronized.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a first embodiment of the present invention will be described with reference to FIGS.

As shown in FIG. 1, a cutting mechanism 12, a reel mechanism 13 for feeding or winding the wire 10 and a column 14 are provided on a frame 11. A first processing roller 16 for driving and a second processing roller 17 for guide are supported on the front surface of the support 15 of the cutting mechanism 12. The first processing roller 16 and the second processing roller 17 have the same shape and the same size. The wire 10 for cutting the work 26 is wound around both the rollers 16 and 17 so as to surround the first processing roller 16 and the second processing roller 17.

As shown in FIG. 2, a large number of annular grooves 161 and 171 are formed on the outer peripheral surfaces of the rollers 16 and 17 at a predetermined pitch. The cross-sectional shapes of the first processing roller 16 and the second processing roller 17 are elliptical, and
1,171 is also an ellipse. The rotation centers C1 and C2 of the first processing roller 16 and the second processing roller 17 are the centers of the ellipses. The wire 10 has an annular groove 16 around the path.
1,171. First processing roller 1
6 is rotationally driven by a processing motor 18. The rotational driving force of the first processing roller 16 that is rotationally driven by the processing motor 18 is transmitted to the second processing roller 17 via the wound wire 10 of the two processing rollers 16 and 17. . Therefore, both the processing rollers 16 and 17 rotate at the same speed, and the wire 10 travels in one direction.

A plurality of guide rollers 201, 202, 211, 212, 221, 222, and 2 are provided on the front surface of the column 14.
31, 32, 381, 382 and the tension adjusting mechanism 19 are supported. The wire 10 fed from the reel mechanism 13 is guided by the guide roller 192 and the guide rollers 201, 211, 221, 231, 381 on the dancer arm 191 constituting the tension adjusting mechanism 19 while the first processing roller 16 and the second Is spirally wound around the annular grooves 161 and 171 of the processing roller 17. The wire 10 wound around the first processing roller 16 and the second processing roller 17 is
2, 232, 222, 212, 202 and the dancer arm 193 constituting the tension adjusting mechanism 19 are wound around the reel mechanism 13 while being guided by guide rollers 194. The wire 10 has weights 195 and 19
6 is maintained at a predetermined tension by the rotation load of the dancer arms 191 and 193 to which the dancer 6 is attached.

A pair of slurry supply pipes 24 are provided on the frame 11. The slurry supply pipe 24 supplies a slurry containing abrasive grains on the wire 10 between the first processing roller 16 and the second processing roller 17.

A work supporting mechanism 25 is provided on the side of the column 14.
Are supported so as to be able to move up and down. The work support mechanism 25 that supports the work 26 moves up and down by the forward and reverse operation of the motor 27. With the lowering of the work supporting mechanism 25, the work 26 crosses the cutting path Lc of the wire 10 between the first processing roller 16 and the second processing roller 17, and the work 26 travels on the cutting path Lc. Is pressed against the wire 10. The chain line W in FIG. The traveling wire 10 cuts the pressed work 26 by the lapping action of the abrasive grains contained in the slurry, and the work 26 is sliced into a number of wafers having a predetermined thickness.

FIGS. 3 (a), 3 (b), 3 (c) and 3 (d)
The two rollers 1 are arranged so as to surround the first processing roller 16 and the second processing roller 17 adjacent to and in contact with the cutting path Lc.
The state where the path of the wire 10 wound around the annular grooves 161 and 171 of the rollers 6 and 17 is viewed in the axial direction of the rotation centers C1 and C2 of the rollers 16 and 17 is shown. An ellipse, which is an annular shape of the annular grooves 161 and 171 serving as a path circumference, has four rotational symmetry lines A1, A2, B1 and B2 starting from the rotation centers C1 and C2 and reaching the annular grooves 161 and 171. The symmetry lines A1, A2 and the short rotational symmetry lines B1, B2 are alternately positioned at 90 ° intervals. Annular grooves 161 and 171
Is axisymmetric with respect to a line passing through the rotational symmetry lines A1, A2, B1, and B2. The rotation phase of the first processing roller 16 and the rotation phase of the second processing roller 17 are shifted by 90 °.

FIG. 3B shows a state in which both rollers 16, 17 have been rotated by 45 ° from the state of FIG. 3A, and FIG.
FIG. 3B shows a state in which both rollers 16, 17 have been rotated by 45 ° from the state shown in FIG. FIG. 3D shows a state in which both rollers 16, 17 have been rotated by 45 ° from the state of FIG.
FIG. 3A shows a state in which both rollers 16, 17 are moved from the state of FIG.
This shows a state in which it is rotated by 5 °.

In the first embodiment, the following effects can be obtained. (1-1) The path of the wire 10 as viewed in the direction of the center axes C1 and C2 of the rollers 16 and 17 is an envelope surrounding the annular grooves 161 and 171 of the rollers 16 and 17. Such an envelope path L is shown in FIGS. 3 (a), (b), (c),
The cutting path Lc changes as shown in FIG.
Reciprocate in the direction of the traveling path W, that is, in the vertical direction.
In addition, the first processing roller 16 and the second processing roller 17
The path length of the envelope path L of the wire 10 surrounding the above is substantially constant. The reciprocating tilt change of the cutting path Lc and the substantially constant path length of the envelope path L are obtained by setting the rotational phase of the first processing roller 16 and the second processing roller 17 having a path peripheral shape of an ellipse to 90 °. Obtained by shifting. Such an action is provided only by the rotation of the processing rollers 16, 17 holding the rotation centers C1, C2 immovably, so that the apparatus is not complicated.

Next, FIGS. 4A and 4B and FIG.
A second embodiment (a) and (b) will be described. The device configuration is the same as in the first embodiment. The first processing roller 28 and the second processing roller 29 in this embodiment have the same shape and the same size, and annular grooves 283 and 293 are formed on the peripheral surfaces of both rollers 28 and 29. The circumferential shape of the annular grooves 283 and 293 is
Two first arcs 281, 29 centered at 1302
1 and two second arcs 282 and 292 having centers at the vertices 303 and 304 of the regular square 30 are alternately arranged. The peripheral shapes of the first processing roller 28 and the second processing roller 29 are the same as the peripheral shapes of the annular grooves 283 and 293. Center of rotation C3, C of both rollers 28, 29
4 is the center of the square 30. First circular arcs 281, 2
The radius of 91 is larger than the radius of the second arcs 282, 292.

The annular shapes of the annular grooves 283 and 293 which are the circumference of the path are formed by starting at the rotation centers C3 and C4.
Four rotational symmetry lines A3, A4, B3 leading to 3,293
It has B4, and the long rotational symmetry lines A3, A4 and the short rotational symmetry lines B3, B4 are alternately positioned at 90 ° intervals. The annular grooves 283 and 293 are provided with rotational symmetry lines A3, A4, B3 and B
Line symmetrical with respect to the line passing through 4. The rotation phases of the first processing roller 28 and the second processing roller 29 are shifted by 90 °.

FIG. 4B shows a state in which both rollers 28 and 29 are rotated by 45 ° from the state of FIG. 4A, and FIG.
FIG. 4B shows a state in which both rollers 28 and 29 are rotated by 45 ° from the state shown in FIG. FIG. 5B shows a state in which both rollers 28 and 29 are rotated by 45 ° from the state of FIG.
FIG. 5A shows a state in which both rollers 28 and 29 are moved from the state shown in FIG.
This shows a state in which it is rotated by 5 °.

The second embodiment has the following advantages. (2-1) The path of the wire 10 as viewed in the direction of the rotation centers C3 and C4 of the rollers 28 and 29 becomes an envelope that surrounds the annular grooves 281 and 291 of the rollers 28 and 29. Such an envelope path L1 is shown in FIGS. 4A and 4B and FIG.
The cutting path Lc changes as shown in (a) and (b), and reciprocates in the direction of the traveling path W of the work 26. Also, the first
The path length of the envelope path L1 of the wire 10 surrounding the processing roller 28 and the second processing roller 29 is substantially constant. The reciprocating tilt change of the cutting path Lc and the substantially constant length of the path of the envelope path L1 are the same as those of the first path 281 and the second path 282 and the second path 282 and the second path 282. It is obtained by shifting the rotation phase of the first processing roller 28 and the second processing roller 29 by 90 °. Such an action is caused by the rotation centers C3, C4
Is provided only by the rotation of the processing rollers 28 and 29, which keeps immovable, so that the apparatus is not complicated.

Next, FIGS. 6A and 6B and FIG.
A third embodiment (a) and (b) will be described. The device configuration is the same as in the first embodiment. The first processing roller 31 and the second processing roller 32 in this embodiment have the same shape and the same size, and annular grooves 313 and 323 are formed on the peripheral surfaces of both rollers 31 and 32. The circumferential shape of the annular grooves 313 and 323 is the vertex 33 of the equilateral triangle 33.
Three first arcs 31 centered at 1,332,333
1,321 and vertices 331,332,3 of the equilateral triangle 33
The shape is such that three second arcs 312 and 322 having a center at 33 are alternately arranged. The circumferential shapes of the first processing roller 31 and the second processing roller 32 are also annular grooves 313, 3
23 has the same shape as the circumferential shape. The rotation centers C5 and C6 of the rollers 31 and 32 are the centers of the equilateral triangle 33. First
Of the arcs 311 and 321 of the second arc 312 and 3
22 is larger than the radius.

The annular shapes of the annular grooves 313 and 323, which are the circumference of the path, are formed by starting from the rotation centers C5 and C6.
Six rotational symmetry lines A5, A6, A7,
It has B5, B6, B7 and long rotational symmetry lines A5, A6
A7 and the short rotational symmetry lines B5, B6, B7 are alternately positioned at intervals of 60 °. The annular grooves 313 and 323 are line-symmetric with respect to a line passing through the rotational symmetry lines A5, A6, A7, B5, B6, and B7. The rotation phases of the first processing roller 31 and the second processing roller 32 are shifted by 60 °.

FIG. 6B shows a state in which both rollers 31, 32 have been rotated by 30 ° from the state of FIG. 6A, and FIG.
FIG. 6B shows a state in which both rollers 31, 32 are rotated by 30 ° from the state shown in FIG. FIG. 7B shows a state in which both rollers 31, 32 are rotated by 30 ° from the state of FIG.
FIG. 7A shows a state in which both rollers 31, 32 are changed from the state shown in FIG.
This shows a state in which it is rotated by 0 °.

According to the third embodiment, the following effects can be obtained. (3-1) The path of the wire 10 as viewed in the direction of the rotation centers C5 and C6 of the rollers 31 and 32 is an envelope surrounding the annular grooves 311 and 321 of the rollers 31 and 32. Such an envelope path L2 is shown in FIGS. 6A and 6B and FIG.
The cutting path Lc changes as shown in (a) and (b), and reciprocates in the direction of the traveling path W of the work 26. Also, the first
The path length of the envelope path L2 of the wire 10 surrounding the processing roller 31 and the second processing roller 32 is substantially constant. The reciprocating tilt change of the cutting path Lc and the substantially constant length of the path of the envelope path L2 are the same as those having a path peripheral shape obtained by combining two types of arcs, that is, a first arc 311, 321 and a second arc 312, 322. It is obtained by shifting the rotation phase of the first processing roller 31 and the second processing roller 32 by 60 °. Such an action is caused by the rotation centers C5 and C6.
Is brought about only by the rotation of the processing rollers 31 and 32 that keeps immovable, so that the apparatus does not become complicated.

Next, FIGS. 8A and 8B and FIG.
A fourth embodiment (a) and (b) will be described. The device configuration is the same as in the first embodiment. The first processing roller 34 and the second processing roller 35 in this embodiment have the same shape and the same size, and annular grooves 341 and 351 are formed on the peripheral surfaces of both rollers 34 and 35. The circumferential shape of the annular grooves 341 and 351 is such that the arcs 342 and 352 and the straight lines 343 and 353 are equiangular (45 ° in the present embodiment).
And the first processing roller 34
The circumferential shape of the second processing roller 35 is also annular groove 341,
351 has the same shape as the circumferential shape. Both rollers 34, 35
Are the centers of the circular arcs 343, 353.

The annular shapes of the annular grooves 341 and 351 which are the circumferences of the paths are formed by starting from the rotation centers C7 and C8.
It has 16 rotational symmetry lines A8 and B8 reaching 1,351, and the long rotational symmetry line A8 and the short rotational symmetry line B8 are alternately positioned at a ratio of three to one. Annular grooves 341 and 351
Is axisymmetric with respect to a line passing through the rotational symmetry lines A8 and B8. First processing roller 34 and second processing roller 35
Are rotated by 45 °.

FIG. 8B shows a state where both rollers 34 and 35 have been rotated by 22.5 ° from the state shown in FIG.
FIG. 8A shows two rollers 34 and 35 from the state of FIG.
This shows a state rotated by 2.5 °. FIG. 9 (b) is the same as FIG. 9 (a)
8A shows a state where both rollers 34 and 35 are rotated by 22.5 °, and FIG. 8A shows a state where both rollers 34 and 35 are rotated 22.5 ° from the state shown in FIG. 9B.

The following effects are obtained in the fourth embodiment. (4-1) The path of the wire 10 as viewed in the direction of the rotation centers C7 and C8 of the rollers 34 and 35 becomes an envelope surrounding the annular grooves 341 and 351 of the rollers 34 and 35. Such an envelope path L3 is shown in FIGS. 8A and 8B and FIG.
The cutting path Lc changes as shown in (a) and (b), and reciprocates in the direction of the traveling path W of the work 26. Also, the first
The path length of the envelope path L3 of the wire 10 surrounding the processing roller 34 and the second processing roller 35 is substantially constant. The reciprocating tilt change of the cutting path Lc and the substantially constant path length of the envelope path L3 are determined by the first polygon having a regular polygonal path peripheral shape.
Is obtained by shifting the rotation phase between the processing roller 34 and the second processing roller 35 by 45 °. Since such an action is provided only by the rotation of the processing rollers 34 and 35 that hold the rotation centers C7 and C8 immovably,
The device is not complicated.

As shown in FIGS. 10A and 10B, a first processing roller 34 and a second processing roller 35 are provided.
The fifth embodiment in which the rotation phase of the above is shifted by 22.5 ° is also possible.

In the present invention, as shown in FIGS. 11A and 11B, there is also a sixth embodiment in which the rotation phases of the first processing roller 16 and the second processing roller 17 are not shifted. It is possible. In the sixth embodiment, the cutting path Lc only reciprocates in parallel without tilting.
The amount of slurry supplied between the wire and the wire 10 is ensured in the same manner as in the above embodiments. In addition, the length of the path circumference is constant.

In the present invention, each processing roller may be driven to rotate by, for example, attaching a processing motor to each processing roller, and the processing rollers may be driven synchronously with each other. In this case, there is an effect that the rotation of each processing roller can be reliably synchronized.

In the present application, a line which starts from the rotation center of the path circumference of the processing roller and reaches the path circumference, and whose path circumference is axisymmetric with respect to a line passing through this line, is referred to as a rotational symmetry line. Define.

The inventions other than those described in the claims which can be grasped from the above embodiment will be described below. (1) The path peripheral shape of the first processing roller and the second processing roller is a shape in which arc portions and linear portions are alternately arranged at equal angular intervals. Item 2. The wire saw according to item 1. (2) The path peripheral shape of the first processing roller and the second processing roller is a shape in which first arcs and second arcs each having a center at a vertex of a square are alternately arranged. 3. The wire saw according to claim 1, wherein rotation phases of the first processing roller and the second processing roller are shifted by 90 °. 4. (3) The path peripheral shape of the first processing roller and the second processing roller is a shape in which first arcs and second arcs having centers at the vertices of an equilateral triangle are alternately arranged. 3. The wire saw according to claim 1, wherein rotation phases of the first processing roller and the second processing roller are shifted by 60 °. 4.

[0040]

As described above in detail, according to the present invention, the first first wire adjacent to the wire cutting path in the region where the workpiece is cut is contacted.
The processing roller and the second processing roller are rotated at the same speed with the rotation center immovable to reciprocate the cutting path in the direction of the work path, and the first processing roller and the second processing roller Since the path peripheral shapes of the first processing roller and the second processing roller are set so that the path length of the envelope path of the wire surrounding the processing roller is substantially constant, the apparatus becomes complicated. It is possible to improve the efficiency of cutting the workpiece by changing the cutting path of the wire without causing the problem.

[Brief description of the drawings]

FIG. 1 is a front view showing a first embodiment.

FIG. 2 is a perspective view of a main part.

FIGS. 3A, 3B, 3C, and 3D are schematic cross-sectional views of a main part illustrating a change in a cutting path.

FIGS. 4A and 4B are schematic cross-sectional views of a main part illustrating a change in a cutting path according to a second embodiment.

FIGS. 5A and 5B are schematic cross-sectional views of a main part illustrating a change in a cutting path according to a second embodiment.

FIGS. 6A and 6B are front views of a main part for explaining a change in a cutting path according to a third embodiment.

FIGS. 7A and 7B are schematic cross-sectional views of a main part illustrating a change in a cutting path according to a third embodiment.

FIGS. 8A and 8B are schematic cross-sectional views of a main part illustrating a change in a cutting path according to a fourth embodiment.

FIGS. 9A and 9B are schematic cross-sectional views of a main part illustrating a change in a cutting path according to a fourth embodiment.

FIG. 10 is a schematic cross-sectional view of a main part showing a fifth embodiment.

11A and 11B are schematic cross-sectional views of a main part, illustrating a change in a cutting path according to a sixth embodiment.

[Explanation of symbols]

Reference numeral 10: wire, 16, 28, 31, 34: first processing roller, 17, 29, 32, 35: second processing roller, 161, 171, 283, 293, 313, 32
3, 341, 351: annular groove around the path, 26: workpiece, Lc: cutting path, C1 to C8: rotation center, L, L1
L3: Envelope path.

Claims (4)

[Claims] 1. A wire is wound around a path of the plurality of processing rollers so as to surround the plurality of processing rollers and spirally wound, and the wire is run by rotation of the plurality of processing rollers. In a wire saw configured to cut a work by intersecting a traveling path of the work with a traveling path of the wire, a first processing roller and a second processing roller that are adjacent to a cutting path of a wire in a region where the work is cut are adjacent to each other. Rotating the processing roller with the rotation center immovable and at the same speed to reciprocate the cutting path in the direction of the work travel path;
The path peripheral shape of the first processing roller and the second processing roller was set so that the path length of the envelope path of the wire surrounding the processing roller and the second processing roller was substantially constant. Wire saw. 2. The apparatus has at least two and even numbers of rotational symmetry lines extending from the rotation center of the processing roller to the circumference of the path of the processing roller with which the wire contacts, and has different lengths of adjacent rotational symmetry lines. The first and second processing rollers adjacent to each other in contact with the cutting path of the wire in the area for cutting the workpiece are shifted by using the processing rollers having the circumferential shape of the path. 2. The wire saw according to claim 1, wherein the processing roller and the second processing roller are rotated at the same speed without being fixed at the center of rotation so as to reciprocate the cutting path in the traveling direction of the work. 3. The number of the processing rollers is an even number,
The path circumferential shape of the processing roller is elliptical, and the rotation phase of the first processing roller and the second processing roller is 90 °.
3. The wire saw according to claim 2, wherein the wire saw is offset. 4. The processing roller according to claim 1, wherein each of the processing rollers is driven by a motor and driven synchronously with each other.
The wire saw according to any one of the above.