JPH1117392A - Electronic component/mounting device - Google Patents

Electronic component/mounting device

Info

Publication number
JPH1117392A
JPH1117392A JP9165484A JP16548497A JPH1117392A JP H1117392 A JPH1117392 A JP H1117392A JP 9165484 A JP9165484 A JP 9165484A JP 16548497 A JP16548497 A JP 16548497A JP H1117392 A JPH1117392 A JP H1117392A
Authority
JP
Japan
Prior art keywords
electronic component
nozzle
camera
light
observed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9165484A
Other languages
Japanese (ja)
Inventor
Satoshi Tanaka
聖史 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9165484A priority Critical patent/JPH1117392A/en
Publication of JPH1117392A publication Critical patent/JPH1117392A/en
Pending legal-status Critical Current

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  • Supply And Installment Of Electrical Components (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide an electronic component/mounting device that does not produce any noise, which is observed by a camera, even when a nozzle projects from the electronic component in a transfer head for sucking, with vacuum, the electronic component to the lower end of the nozzle and transferring and mounting it to a substrate. SOLUTION: A lower end 12 of a nozzle 10 of a transfer head 1 is formed by a transparent body such as ruby and sapphire. A first light source 6A or a second light source 6B lights up, and an electronic component 4 which is sucked, through vacuum, at the lower end of the nozzle 10 is observed by a lower camera 5. Even when the lower surface of the nozzle 10 projects from the electronic component 4, it cannot be observed by the camera 5 since the lower end 12 is a transparent body, thus accurately recognizing only the electronic component 4.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、電子部品を基板に
移送搭載する電子部品実装装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic component mounting apparatus for transferring and mounting electronic components on a substrate.

【0002】[0002]

【従来の技術】電子部品実装装置は様々な型式のものが
あるが、いずれも移載ヘッドのノズルの下端部に電子部
品を真空吸着して保持し、基板の所定の座標位置に移送
搭載するようになっている。図5は従来の電子部品実装
装置の移載ヘッドの側面図である。移載ヘッド1は、そ
の下部にノズル2を備えており、またその下面には光拡
散板としてのバックプレート3が設けられている。ノズ
ル2はその下端部に電子部品4を真空吸着して保持して
いる。移載ヘッド1の移動路にはカメラ5と実線で示す
光源6が設けられており、光源6の光をノズル2の上部
に設けられた光拡散板としてのバックプレート3へ向っ
て照射し(矢印L1)、光拡散板3を明るく輝かせるこ
とにより電子部品4の黒いシルエットを下方のカメラ5
で観察するようになっている。
2. Description of the Related Art There are various types of electronic component mounting apparatuses. In any of these, an electronic component is vacuum-adsorbed and held at a lower end portion of a nozzle of a transfer head, and is transferred and mounted at a predetermined coordinate position on a substrate. It has become. FIG. 5 is a side view of a transfer head of a conventional electronic component mounting apparatus. The transfer head 1 includes a nozzle 2 at a lower portion thereof, and a back plate 3 as a light diffusing plate is provided at a lower surface thereof. The nozzle 2 holds the electronic component 4 at its lower end by vacuum suction. A camera 5 and a light source 6 indicated by a solid line are provided on the moving path of the transfer head 1, and the light of the light source 6 is emitted toward a back plate 3 as a light diffusion plate provided above the nozzle 2 ( Arrow L1), the black silhouette of the electronic component 4 is lowered by illuminating the light diffusing plate 3 brightly.
To observe.

【0003】図6(a)は従来の電子部品実装装置のカ
メラの視野の画像図であって、Aは視野、4’は電子部
品4のシルエット画像である。電子部品4は小形であ
り、このためノズル2の下面は電子部品4からばり出し
て明るい背景の中に黒いシルエット2’として観察され
る。
FIG. 6A is an image diagram of a field of view of a camera of a conventional electronic component mounting apparatus, where A is a field of view and 4 ′ is a silhouette image of the electronic component 4. The electronic component 4 is small, so that the lower surface of the nozzle 2 protrudes from the electronic component 4 and is observed as a black silhouette 2 ′ in a light background.

【0004】あるいはまた、図5において鎖線で示す下
方位置に光源6を設け、光源6の光をノズル2の下端部
に真空吸着された電子部品4に向って照射し(矢印L
2)、下方のカメラ5で電子部品4を観察していた。図
6(b)はこのときの画像であって、電子部品4の下面
は光を強く反射する鏡面であるので、暗い背景の中に電
子部品4を明るく観察する。
[0005] Alternatively, a light source 6 is provided at a lower position indicated by a chain line in FIG. 5, and the light of the light source 6 is applied to the electronic component 4 vacuum-adsorbed to the lower end of the nozzle 2 (arrow L).
2) The electronic component 4 was observed with the camera 5 below. FIG. 6B shows an image at this time. Since the lower surface of the electronic component 4 is a mirror surface that strongly reflects light, the electronic component 4 is observed brightly against a dark background.

【0005】[0005]

【発明が解決しようとする課題】光拡散板であるバック
プレート3を用いて電子部品4を観察する場合、図6
(a)に示すように電子部品4が小形であるとノズル2
の下面は電子部品4からばり出しやすく、電子部品4の
シルエット4’とノズル2のシルエット2’は一体化し
てカメラ5で観察されるため、ノズル2のシルエット
2’がノイズとなって電子部品4の位置認識を行いにく
いという問題点があった。
When the electronic component 4 is observed using the back plate 3 which is a light diffusion plate, FIG.
If the electronic component 4 is small as shown in FIG.
Is easily exposed from the electronic component 4, and the silhouette 4 'of the electronic component 4 and the silhouette 2' of the nozzle 2 are integrated and observed by the camera 5, so that the silhouette 2 'of the nozzle 2 becomes noise and There is a problem that it is difficult to recognize the position of No. 4.

【0006】また電子部品4に光L2を照射して電子部
品4を観察する場合、図6(b)に示すようにノズル2
の下面も光を強く反射するので、電子部品4とノズル2
の下面は一体ものとして観察され、やはりノズル2がノ
イズとなって電子部品4の位置認識を行いにくいという
問題点があった。
When observing the electronic component 4 by irradiating the electronic component 4 with light L2, as shown in FIG.
Since the lower surface of the nozzle strongly reflects light, the electronic component 4 and the nozzle 2
The lower surface of the electronic component 4 is observed as an integral part, and also has a problem that the nozzle 2 becomes noise and it is difficult to recognize the position of the electronic component 4.

【0007】このような問題点を解決するためには、ノ
ズル2の直径を小さくすればよいのであるが、ノズル2
の直径を小さくすることは加工技術上の限界があり、ま
たノズル2が小さくなるとその強度は低下してたわみを
生じたり、その下面が摩耗しやすいなどの新たな問題点
が生じる。因みに、従来のノズル2はステンレス鋼など
の硬質金属にて作られている。
In order to solve such a problem, the diameter of the nozzle 2 may be reduced.
There is a limit in processing technology to reduce the diameter of the nozzle 2, and when the size of the nozzle 2 is reduced, the strength of the nozzle 2 is reduced to cause bending, and a new problem such as easy wear of the lower surface occurs. Incidentally, the conventional nozzle 2 is made of a hard metal such as stainless steel.

【0008】したがって本発明は、上記従来のノズルの
問題点を解消し,ノズルの下端部に真空吸着された電子
部品の位置認識を正確に行うことができる電子部品実装
装置を提供することを目的とする。
SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide an electronic component mounting apparatus which can solve the above-mentioned problems of the conventional nozzle and can accurately recognize the position of an electronic component vacuum-adsorbed to the lower end of the nozzle. And

【0009】[0009]

【課題を解決するための手段】このために本発明は、移
載ヘッドに備えられたノズルの下端部に電子部品を真空
吸着して基板へ向って移送し、この移送の途中に下方の
カメラにより電子部品を観察して電子部品の位置認識を
行った後、電子部品を基板に搭載する電子部品実装装置
であって、前記ノズルの上部に光拡散板を設けるととも
に、前記ノズルの少なくとも前記カメラの焦点範囲に位
置する部分を透明体により形成し、かつ前記光拡散板に
光を照射する第1の光源と前記ノズルの下端部に真空吸
着された電子部品に光を照射する第2の光源を設けたも
のである。
According to the present invention, an electronic component is vacuum-adsorbed to a lower end of a nozzle provided in a transfer head and transferred toward a substrate. An electronic component mounting apparatus that mounts an electronic component on a substrate after observing the electronic component and performing position recognition of the electronic component by providing a light diffusing plate above the nozzle and at least the camera of the nozzle. A first light source for irradiating light to the light diffusing plate and a second light source for irradiating light to an electronic component vacuum-adsorbed at a lower end of the nozzle; Is provided.

【0010】[0010]

【発明の実施の形態】上記構成の本発明において、電子
部品を黒いシルエットとして観察するときは、第1の光
源から光拡散板へ向って光を照射し、また電子部品を直
接観察するときは、第2の光源から電子部品へ向って光
を照射する。この場合、ノズルの少なくともカメラの焦
点範囲に位置する部分を透明体としているので、ノズル
の下面が電子部品からばり出していてもノズルはカメラ
には観察されず、電子部品のみを正確に認識できる。
BEST MODE FOR CARRYING OUT THE INVENTION In the present invention having the above structure, when observing an electronic component as a black silhouette, light is emitted from the first light source toward the light diffusing plate, and when observing the electronic component directly. And irradiate light from the second light source to the electronic component. In this case, since at least a portion of the nozzle located in the focus range of the camera is made of a transparent material, the nozzle is not observed by the camera even if the lower surface of the nozzle protrudes from the electronic component, and only the electronic component can be accurately recognized. .

【0011】次に、本発明の一実施の形態を図面を参照
して説明する。図1は、本発明の一実施の形態による電
子部品実装装置の全体図、図2は同移載ヘッドの側面
図、図3は同移載ヘッドのノズルの断面図、図4は同カ
メラの視野の画像図である。
Next, an embodiment of the present invention will be described with reference to the drawings. 1 is an overall view of an electronic component mounting apparatus according to an embodiment of the present invention, FIG. 2 is a side view of the transfer head, FIG. 3 is a cross-sectional view of a nozzle of the transfer head, and FIG. It is an image figure of a visual field.

【0012】図1において、1は移載ヘッドであり、そ
の下部にノズル10を有しており、またノズル10の上
部には光拡散板としてのバックプレート3が装着されて
いる。移載ヘッド1はXテーブル9AとYテーブル9B
から成る移動手段に駆動されてパーツフィーダ7と基板
8の間を移動し、パーツフィーダ7に備えられた電子部
品4を基板8の所定の座標位置に移送搭載する。また移
載ヘッド1の移動路の下方には、カメラ5とリング状の
第1の光源6Aおよび第2の光源6Bが設けられてい
る。なお移載ヘッドの移動方式としては、Xテーブル9
AやYテーブル9Bを用いる方式以外にも、ロータリー
ヘッドに沿って回転移動させる方式なども多用されてい
る。
In FIG. 1, reference numeral 1 denotes a transfer head, which has a nozzle 10 below the transfer head, and a back plate 3 as a light diffusion plate is mounted above the nozzle 10. The transfer head 1 has an X table 9A and a Y table 9B.
The electronic component 4 provided in the parts feeder 7 is transferred to and mounted on a predetermined coordinate position of the substrate 8 by being driven by the moving means composed of. A camera 5 and a ring-shaped first light source 6A and a second light source 6B are provided below the moving path of the transfer head 1. As a method of moving the transfer head, the X table 9 is used.
In addition to the method using the A and Y tables 9B, a method of rotating and moving along a rotary head is also frequently used.

【0013】図2において、第1の光源6Aの光L1は
バックプレート3へ向って照射され、バックプレート3
を明るく輝かせることにより、下方のカメラ5で電子部
品4のシルエットを暗く観察する。また第2の光源6B
の光L2はノズル10の下端部に真空吸着された電子部
品4に直接照射され、電子部品4の鏡面である下面で反
射させることにより、下方のカメラ5で暗い背景の中に
電子部品4を明るく観察する。
In FIG. 2, the light L1 of the first light source 6A is radiated toward the back plate 3,
Is brightly illuminated, and the silhouette of the electronic component 4 is observed dark by the camera 5 below. The second light source 6B
Is directly radiated to the electronic component 4 vacuum-adsorbed to the lower end of the nozzle 10 and reflected by the lower surface, which is a mirror surface of the electronic component 4, so that the camera 5 below places the electronic component 4 in a dark background. Observe brightly.

【0014】図2および図3において、ノズル10は上
端部11と、この上端部11に装着された下端部12か
ら成っている。上端部11の直径は下端部12の直径よ
りもかなり大きく、ステンレス鋼などの硬質金属にて作
られている。これに対し、下端部12は光を透過して外
部に拡散する透明体から成っている。下端部12の素材
としては、強度および耐摩耗性が大きく、かつ加工性に
すぐれたものが望ましく、具体的には、ルビーやサファ
イアなどが望ましい。
2 and 3, the nozzle 10 has an upper end 11 and a lower end 12 attached to the upper end 11. As shown in FIG. The diameter of the upper end 11 is considerably larger than the diameter of the lower end 12, and is made of a hard metal such as stainless steel. On the other hand, the lower end portion 12 is made of a transparent body that transmits light and diffuses the light to the outside. As a material of the lower end portion 12, a material having high strength and abrasion resistance and excellent in workability is desirable, and specifically, ruby and sapphire are desirable.

【0015】図1において、移載ヘッド1は、パーツフ
ィーダ7の電子部品4をノズル10の下端部に真空吸着
してピックアップし、基板8へ向って移送するが、その
移送の途中で、カメラ5により電子部品4を下方から観
察し、その位置認識を行う。そして位置認識の結果にし
たがって電子部品4の位置ずれを補正し、基板8の所定
の座標位置に搭載する。
In FIG. 1, the transfer head 1 picks up the electronic component 4 of the parts feeder 7 by vacuum suction at the lower end portion of the nozzle 10 and transfers it to the substrate 8. 5, the electronic component 4 is observed from below, and its position is recognized. Then, the displacement of the electronic component 4 is corrected according to the result of the position recognition, and the electronic component 4 is mounted at a predetermined coordinate position on the substrate 8.

【0016】図4(a)は、第1の光源6Aからバック
プレート3へ光L1を照射した場合のカメラ5の視野A
の画像図である。ノズル10の下端部12は透明体であ
るから、カメラ5には観察されず、明るい背景の中に電
子部品4のみが黒く観察されてそのシルエット4’が入
手される。したがってノズル10の下端部12はノイズ
とはならず、電子部品4の位置認識を正確に行える。
FIG. 4A shows the field of view A of the camera 5 when the light L1 is emitted from the first light source 6A to the back plate 3.
FIG. Since the lower end portion 12 of the nozzle 10 is transparent, it is not observed by the camera 5, but only the electronic component 4 is observed in black on a bright background, and its silhouette 4 'is obtained. Therefore, the lower end 12 of the nozzle 10 does not generate noise, and the position of the electronic component 4 can be accurately recognized.

【0017】また図4(b)は、第2の光源6Bから電
子部品4へ直接光L2を照射した場合の画像図である。
この場合もノズル10の下端部12は透明体であるから
カメラ5には観察されず、光を反射する鏡面の電子部品
4のみが暗い背景の中に明るく観察され、その位置認識
を正確に行える。第1の光源6Aと第2の光源6Bは選
択的に点灯され、上記観察を行う。
FIG. 4B is an image diagram when the light L2 is directly irradiated from the second light source 6B to the electronic component 4.
Also in this case, since the lower end portion 12 of the nozzle 10 is transparent, it is not observed by the camera 5, but only the mirror-reflecting electronic component 4 that reflects light is brightly observed in a dark background, and its position can be accurately recognized. . The first light source 6A and the second light source 6B are selectively turned on to perform the above observation.

【0018】なお図2において、ノズル10の上端部1
1は非透明体であり、この上端部11がカメラ5で観察
されるとノイズになってしまう。そこでカメラ5の焦点
範囲F(図2)には透明体である下端部12のみが位置
するようにし、上端部11は焦点範囲外にして観察され
ないようにする。また下端部12は、その下面が電子部
品4からばり出してもカメラ5で認識されないので、図
3に示すように下端部12の外径Dを大きくしてその強
度や耐摩耗性を大きくすることもできる。また下端部1
2の孔径dの大きさは比較的小径にし、外径Dを大きく
して下端部11の厚さEを肉厚にすることにより、単に
ノズル10の強度が大きくなるだけでなく、小形の電子
部品4だけでなく大形の電子部品も広面積の下面に真空
吸着できるので、電子部品の品種変更にともなうノズル
10の交換頻度も低減できる。
In FIG. 2, the upper end 1 of the nozzle 10
Reference numeral 1 denotes a non-transparent body, and when the upper end portion 11 is observed by the camera 5, it becomes noise. Therefore, only the lower end portion 12 which is a transparent body is positioned in the focal range F of the camera 5 (FIG. 2), and the upper end portion 11 is out of the focal range so as not to be observed. Since the lower end 12 is not recognized by the camera 5 even if the lower surface protrudes from the electronic component 4, the outer diameter D of the lower end 12 is increased as shown in FIG. 3 to increase the strength and wear resistance. You can also. Also the lower end 1
By making the diameter d of the hole 2 relatively small, increasing the outer diameter D and increasing the thickness E of the lower end portion 11, not only the strength of the nozzle 10 is increased, but also the size of the small electron. Since not only the component 4 but also a large-sized electronic component can be vacuum-sucked on the lower surface of a wide area, the frequency of replacement of the nozzle 10 when the type of the electronic component is changed can be reduced.

【0019】[0019]

【発明の効果】本発明によれば、ノズルの少なくともカ
メラの焦点範囲に位置する部分を透明体としているの
で、ノズルの下面が電子部品からばり出していてもカメ
ラには観察されず、電子部品のみを正確に認識できる。
またノズルが電子部品からばり出してもノイズにはなら
ないので、ノズルの外径を大きくし、且つ肉厚にして強
度や耐摩耗性を大きくすることができる。
According to the present invention, since at least the portion of the nozzle located in the focal range of the camera is made of a transparent material, even if the lower surface of the nozzle protrudes from the electronic component, it is not observed by the camera, and the electronic component is not observed. Only can be accurately recognized.
In addition, since noise does not occur even if the nozzle protrudes from the electronic component, the outer diameter and thickness of the nozzle can be increased to increase strength and wear resistance.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施の形態による電子部品実装装置
の全体図
FIG. 1 is an overall view of an electronic component mounting apparatus according to an embodiment of the present invention.

【図2】本発明の一実施の形態による電子部品実装装置
の移載ヘッドの側面図
FIG. 2 is a side view of a transfer head of the electronic component mounting apparatus according to the embodiment of the present invention;

【図3】本発明の一実施の形態による電子部品実装装置
の移載ヘッドのノズルの断面図
FIG. 3 is a sectional view of a nozzle of a transfer head of the electronic component mounting apparatus according to one embodiment of the present invention;

【図4】本発明の一実施の形態による電子部品実装装置
のカメラの視野の画像図
FIG. 4 is an image diagram of a field of view of a camera of the electronic component mounting apparatus according to one embodiment of the present invention;

【図5】従来の電子部品実装装置の移載ヘッドの側面図FIG. 5 is a side view of a transfer head of a conventional electronic component mounting apparatus.

【図6】従来の電子部品実装装置のカメラの視野の画像
FIG. 6 is an image diagram of a field of view of a camera of a conventional electronic component mounting apparatus.

【符号の説明】[Explanation of symbols]

1 移載ヘッド 4 電子部品 5 カメラ 6A 第1の光源 6B 第2の光源 8 基板 10 ノズル 12 下端部 DESCRIPTION OF SYMBOLS 1 Transfer head 4 Electronic component 5 Camera 6A 1st light source 6B 2nd light source 8 Substrate 10 Nozzle 12 Lower end part

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】移載ヘッドに備えられたノズルの下端部に
電子部品を真空吸着して基板へ向って移送し、この移送
の途中に下方のカメラにより電子部品を観察して電子部
品の位置認識を行った後、電子部品を基板に搭載する電
子部品実装装置であって、前記ノズルの上部に光拡散板
を設けるとともに、前記ノズルの少なくとも前記カメラ
の焦点範囲に位置する部分を透明体により形成し、かつ
前記光拡散板に光を照射する第1の光源と前記ノズルの
下端部に真空吸着された電子部品に光を照射する第2の
光源を設けたことを特徴とする電子部品実装装置。
An electronic component is vacuum-adsorbed to a lower end of a nozzle provided in a transfer head and transferred toward a substrate. During the transfer, the electronic component is observed by a camera below and the position of the electronic component is determined. After performing the recognition, an electronic component mounting apparatus for mounting the electronic component on a substrate, wherein a light diffusing plate is provided above the nozzle, and at least a portion of the nozzle located in a focal range of the camera is made of a transparent material. An electronic component mounting, comprising: a first light source formed and irradiating light to the light diffusion plate; and a second light source irradiating light to an electronic component vacuum-adsorbed at a lower end portion of the nozzle. apparatus.
【請求項2】移載ヘッドに備えられたノズルの下端部に
電子部品を真空吸着して基板へ向って移送し、この移送
の途中に下方のカメラにより電子部品を観察して電子部
品の位置認識を行った後、電子部品を基板に搭載する電
子部品実装装置であって、前記ノズルの上部に光拡散板
を設けるとともに、前記ノズルの少なくとも前記カメラ
の焦点範囲に位置する部分を透明体により形成し、かつ
前記光拡散板に光を照射する光源を設けたことを特徴と
する電子部品実装装置。
2. An electronic component is vacuum-adsorbed to a lower end of a nozzle provided in a transfer head and transferred toward a substrate. During the transfer, the electronic component is observed by a camera below and the position of the electronic component is determined. After performing the recognition, an electronic component mounting apparatus for mounting the electronic component on a substrate, wherein a light diffusing plate is provided above the nozzle, and at least a portion of the nozzle located in a focal range of the camera is made of a transparent material. An electronic component mounting apparatus comprising: a light source that is formed and irradiates light to the light diffusion plate.
JP9165484A 1997-06-23 1997-06-23 Electronic component/mounting device Pending JPH1117392A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9165484A JPH1117392A (en) 1997-06-23 1997-06-23 Electronic component/mounting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9165484A JPH1117392A (en) 1997-06-23 1997-06-23 Electronic component/mounting device

Publications (1)

Publication Number Publication Date
JPH1117392A true JPH1117392A (en) 1999-01-22

Family

ID=15813288

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9165484A Pending JPH1117392A (en) 1997-06-23 1997-06-23 Electronic component/mounting device

Country Status (1)

Country Link
JP (1) JPH1117392A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100450572B1 (en) * 2001-02-27 2004-09-30 시바우라 메카트로닉스 가부시키가이샤 Component holding head, component mounting apparatus using same, and component mounting method
WO2014010282A1 (en) * 2012-07-12 2014-01-16 株式会社新川 Die bonder and method for detecting positions of bonding tool and semiconductor die relative to each other

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100450572B1 (en) * 2001-02-27 2004-09-30 시바우라 메카트로닉스 가부시키가이샤 Component holding head, component mounting apparatus using same, and component mounting method
WO2014010282A1 (en) * 2012-07-12 2014-01-16 株式会社新川 Die bonder and method for detecting positions of bonding tool and semiconductor die relative to each other

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