JPH11170199A - Cutting method for brittle material - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cutting method for a brittle material capable of cutting under a low pressure even in the case where a high pressure is usually required for cutting because a streak for designating a cutting position provided on a brittle material is a small crack. SOLUTION: In a cutting method for a brittle material where a side face of a brittle material on a column is previously provided with a streak to designate a section to be cut, and then a pressure transmitting cylinder made of a material having Young's modules smaller than the brittle material is arranged on the outer periphery of the brittle material, and the pressure is given to the side of the brittle material through the pressure transmitting cylinder to cut the brittle material at a streak position, in applying pressure to the side of the brittle material through the pressure transmitting cylinder, liquid is sealed between the pressure transmitting cylinder and the side provided with the streak for the brittle material.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to silicon, GaAs
The present invention relates to a method for cutting a brittle material such as a compound semiconductor such as s, GaP, and InP, and quartz or an oxide single crystal.

[0002]

2. Description of the Related Art As a method for cutting an object to be cut such as a single crystal or polycrystal such as silicon or glass, a method to cut an object such as a wire saw, an inner peripheral blade or an outer peripheral blade is used. Removal processing to cut by scraping along the surface to be cut, and making a cut at the cut point of the object to be cut, bending, thermal expansion or pressing etc. Is known that a cutting process is performed by applying a stress to a sheet.

[0003] The removal process has a problem that the cutting loss is larger than the splitting process. That is, for example, in the inner peripheral blade cutting, the blade thickness is about 0.3 mm even if it is thin, and the wire thickness is about 0.2 mm even in the wire saw cutting with relatively small cutting loss. The object to be cut is scrapped by the thickness and the thickness of the wire, and the cutting loss is larger than in the case of split processing. Large cutting losses include silicon, sapphire, zirconia,
In the cutting of expensive materials such as quartz, it is a direct cause of high cost. In particular, when cutting thinly, the ratio of the cutting loss becomes larger than that of a thin plate obtained by cutting, and the reduction in yield due to the cutting loss becomes a particular problem. Further, there is a problem that the time required for cutting is longer in the removal processing than in the split processing.

[0004] On the other hand, the split processing requires less time for cutting and less processing loss than the removal processing. However, in the splitting method, in the method of cutting the object by bending, when the object is bent and stress is applied to the cut so that the crack spreads, the crack extends in the direction other than the intended direction. There is a problem that the cut surface is broken or broken and the cut surface is not smooth.

In the method of cutting an object to be cut by thermal expansion, a heating wire is wound along the cut to flow an electric current, or an object having a high temperature is brought into contact with the cut. In addition to the problem that when a stress is applied to the notch due to the thermal expansion of the workpiece, the crack may extend in a direction other than the intended direction, and this method is also used when cutting a workpiece with high thermal conductivity. Has the problem that it cannot be applied.

[0006] As a splitting method which does not have such a defect, a method using pressure as described in JP-B-61-13958 is known. This method will be described with reference to FIG. FIG. 3 shows a cutting apparatus for carrying out this method. In a cylindrical pressure vessel 21, a workpiece 2 having four striations 22 for designating a cutting position is formed.
3 is inserted, and a pressure transmission cylinder 24 is arranged on the outer periphery of the cut material 23. This pressure transmission cylinder 24 is
It is formed of a material having a smaller Young's modulus than the material to be cut 23. O-rings 25 and 25 are arranged between the pressure vessel 21 and the pressure transmission cylinder 24 on both sides of the four streaks 22 that are the cut portions of the material 23 to be cut. A pressurized space 26 is defined by the pressure vessel 21 and the pressure transmission cylinder 24. The pressure vessel 21 is provided with a pressure medium introduction hole 27 for allowing a pressure medium to flow into the pressurized space 26 to apply pressure.

In such an apparatus, when a pressure medium is introduced from the pressure medium introduction hole 27 to pressurize the pressurizing space 26, pressure is applied to the pressure transmission cylinder 24, and further, the pressure transmission cylinder 24 is cut through the pressure transmission cylinder 24. Pressure is applied to the material 23. When the pressure is applied to the side surface in this manner, both the pressure transmission cylinder 24 and the workpiece 23 tend to extend in the axial direction, but the extension of the pressure transmission cylinder 24 having a low Young's modulus is
3, the frictional force is generated between the pressure transmitting cylinder 24 and the workpiece 23, and the workpiece 23 receives tensile tension due to the frictional force. When the pressure applied to the pressurized space 26 becomes equal to or higher than a predetermined pressure, the material 23 to be cut is cut at the position of the streak 22 by this tensile tension.

Here, the streaks 22 are necessary for designating a cutting position. The streaks 22 are applied to a portion to be cut in advance to induce stress concentration to form a cut surface at a desired position. It is provided in.

As a method of forming such a streak,
For example, a method is known in which a rotating body such as an inner peripheral blade or the like on which abrasive grains are fixed is pressed against a workpiece to form a groove, and this is used as a streak. This method has an advantage that the pressure required for cutting can be reduced by forming the groove deeply. However, as shown in FIGS. 4A and 4B, many fine cracks 29 are formed at the bottom of the groove 28,
It is unclear which crack will be the starting point when cutting. Further, the thickness of the rotating body forming the groove is at least about 0.3 mm, and therefore the groove width is at least 0.1 mm.
There is about 3 mm. This has a problem that an error in the cutting position occurs at least 0.3 mm because it is not clear from which position on the bottom of the groove the cutting is to be performed.

On the other hand, as another method of forming the streak,
A pyramid-shaped diamond indenter (Vickers indenter) used in the Vickers hardness tester is pressed against the cut portion to form a depression 30 and a crack 31 as shown in FIGS. 5A and 5B, and the crack is used as a streak. The methods used are known. This method has the advantage that the formation of striations is extremely easy, and furthermore, the cutting starts from a single crack in the direction perpendicular to the axis of the material to be cut, of the two perpendicular cracks 31 that have occurred. Therefore, there is an advantage that the accuracy of the cutting position is extremely high. However,
Since the formed crack is small, there is a problem that the pressure required for cutting the material to be cut is large.

[0011]

As described above, in the former method, since the error in the cutting position occurs at least 0.3 mm, the variation in the thickness of the obtained cut product becomes large, and in the subsequent processing steps and the like. It is desirable to use the latter method which does not have such a problem, since it causes problems such as deterioration of productivity. However, in the latter method, since a high pressure needs to be applied, problems such as an increase in the size of the cutting device occur. The present invention has been made in order to solve the above-mentioned problems. For example, since the striations are small cracks as in the latter method, the conventional method requires high pressure for cutting. Another object of the present invention is to provide a method for cutting a brittle material that enables cutting at a relatively low pressure.

[0012]

Means for Solving the Problems The present invention has been made to solve the above-mentioned problems, and the invention described in claim 1 of the present invention has a cross section to be cut in advance on a side surface of a brittle material on a pillar. Is provided, and then a pressure transmission cylinder made of a material having a Young's modulus smaller than that of the brittle material is arranged on the outer periphery of the brittle material, and pressure is applied to the side surface of the brittle material via the pressure transmission cylinder. In the brittle material cutting method of cutting the brittle material at the position of the streak, when applying pressure to the side surface of the brittle material through the pressure transmission tube, the striation of the pressure transmission tube and the brittle material The method for cutting a brittle material is characterized in that a liquid is sealed between the brittle material and a side surface provided with a brittle material.

As described above, when a pressure is applied to the side surface of the brittle material via the pressure transmission tube, if the liquid is sealed between the pressure transmission tube and the side surface on which the streaks of the brittle material are provided. However, in addition to the above-described tensile force acting on the brittle material, when the pressure is applied to the sealed liquid, the liquid penetrates into the striations and acts to spread the striations. The brittle material can be cut with a small pressure as compared with the case where no material is used.

In this case, as a method for applying pressure to the side surface of the brittle material, as described in claim 2, the brittle material having the pressure transmission cylinder disposed on the outer periphery is inserted into a cylindrical pressure vessel, An airtight holding member is arranged at a position between the pressure vessel and the brittle material and capable of sealing the liquid,
Forming a pressurized space defined by the pressure vessel, the pressure transmitting cylinder and the airtight holding member, and arranging the streak so as to face the pressurized space via the pressure transmitting cylinder, A method in which a pressure is applied to the side surface of the brittle material through the pressure transmission tube by filling a space with a pressure medium and applying pressure can be used.

Further, the present invention is particularly effective when the streaks formed on the brittle material are caused by a Vickers indenter. This has the advantage that the accuracy of the cutting position is extremely high when a streak is formed by a Vickers indenter, but on the other hand, when a brittle material having such a streak is cut due to a small crack. Had a problem that a high pressure was required, but by using the cutting method of the present invention, it becomes possible to perform cutting at a low pressure, and it is possible to take advantage of the advantage of high cutting accuracy. Because you can.

Further, as described in claim 4, the liquid to be sealed is preferably water. Water does not contaminate brittle materials, is low cost, and is easy to handle.

[0017]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described, but the present invention is not limited to these embodiments.

Examples of the brittle material subjected to cutting according to the present invention include compound semiconductors such as silicon, GaAs, GaP, and InP, single crystals or polycrystals of quartz, sapphire or zirconia, various oxide single crystals, Examples of the material include glass and the like, and it is particularly useful for cutting silicon single crystal and synthetic quartz. The brittle material may be cut into any shape as long as it is columnar, according to the present invention, and is particularly suitable for cutting a columnar brittle material.

In the present invention, such a brittle material is provided with a streak for designating a cross section to be cut in advance.
Here, the streak means a notch, a streak, a groove, or the like, and the form thereof is not limited. Examples of the method of forming the streak include a method of forming by pressing a rotating body (for example, an inner peripheral blade and an outer peripheral blade) to which abrasive grains are fixed, a method of pressing a Vickers indenter, and the like. In view of the fact that the advantage of the present invention is that cutting can be performed at a low pressure, it is possible to apply the present invention to a Vickers indenter having a problem that the cutting position has high accuracy but the pressure required for cutting is high. preferable.

The shape of the streak is not particularly limited as long as it has a crack in a direction perpendicular to the axial direction. For example, a cross-like shape formed when a Vickers indenter is used is used. It may be linearly formed as in the case of using a rotating body having fixed abrasive grains, or may be annularly formed along the outer periphery so as to be perpendicular to the axis.

In the present invention, a pressure transmission cylinder made of a material having a Young's modulus smaller than that of the brittle material is arranged around the brittle material. The reason for making the Young's modulus of the pressure transmission cylinder smaller than the Young's modulus of the brittle material is as follows.
When pressure is applied to the pressure transmission cylinder and the brittle material side surface, both the pressure transmission cylinder and the brittle material try to expand in the axial direction, respectively. This is because the elongation is greater than the elongation of the brittle material, so that the brittle material is subjected to tensile tension, and the brittle material is cut at the position of the streak by the tensile tension.

In the present invention, since the liquid is sealed between the pressure transmitting cylinder and the brittle material, a material having a high sealing property to the liquid is preferable as the material of the pressure transmitting cylinder. Although the material of such a pressure transmission cylinder is not particularly limited, for example, acrylic resin or the like is used.

Further, between the pressure transmission cylinder and the brittle material,
It is preferable that a gap of several hundredths of a percent is provided. If the gap is too small, it is difficult to introduce a liquid between the pressure transmission cylinder and the brittle material. Further, in the present invention, as the liquid sealed between the pressure transmission cylinder and the brittle material, any liquid can be used as long as it does not corrode or contaminate the brittle material, but handling is simple. Water is preferably used because of its low cost and distilled water and pure water are particularly preferred.

As a method of introducing such a liquid between the pressure transmitting cylinder and the brittle material, for example, as shown in FIG. 2, one end of a gap 3 between the pressure transmitting cylinder 1 and the brittle material 2 is introduced into the liquid. A method of introducing a liquid into the gap by submerging or capillary action may be used.

In the present invention, the pressure is applied to the side surface of the brittle material into which the liquid has been introduced between the pressure transmitting cylinder and the brittle material via the pressure transmitting cylinder. A feature of the present invention resides in that the liquid is sealed between the transmission cylinder and the side surface on which the streaks of the brittle material are provided.

Hereinafter, a method of cutting the brittle material by applying pressure to the side of the brittle material in a state in which the liquid is sealed between the pressure transmitting cylinder and the side on which the streaks of the brittle material are provided will be described with reference to FIG. explain. FIG. 1 shows only an example of an apparatus for performing the method for cutting a brittle material of the present invention, and the present invention is not limited to the apparatus and the method described below.

In the drawing, reference numeral 4 denotes a cylindrical pressure vessel. The pressure vessel 4 is provided with a pressure medium introduction hole 5 for introducing a pressure medium. A pressurized space forming portion 7 for forming a pressurized space 6 is provided on the inner wall of the pressure vessel 4. One end of the pressurized space forming portion 7 has a large inner diameter and is threaded on the inner wall. A fastener fixing portion 8 is formed, and the inside diameter of the other end is narrowed by one step from the pressurized space forming portion 7.

The brittle material 2 provided with four striations 9 is inserted into the pressure vessel 4. This brittle material 2
A pressure transmission cylinder 1 is disposed on the outer periphery of the cylinder, and a liquid is introduced into a gap 3 between the pressure transmission cylinder 1 and the brittle material 2. Cylindrical spacers 10, 10 are arranged between both ends of the pressurized space forming portion 7 and the brittle material 2. O-rings 11, which are airtight holding members, 11 are arranged. 4 above
One streak 9 is arranged so as to be located between the O-rings 11, 11.

In this state, the fastener 12 is inserted into the fastener fixing portion 8 and rotated, so that O
The ring 11 can be tightened, so that the pressurized space 6 defined by the pressurized space forming portion 7, the O-rings 11 and 11, and the pressurized space 6 defined by the pressure transfer tube 1 are airtight, and the pressure transfer tube 1 and the brittle material 2 Both ends of the gap 3 between them are also pressed by the O-rings 11 and 11, and the gap 3 is also sealed.
Then, a pressure medium is introduced into the airtight pressure space 6 from a pressure device (not shown) through the pressure medium introduction hole 5 to apply pressure. In this case, the pressure medium may be water or another liquid, or a gas such as compressed air.

As a result, pressure is applied to the side surface of the pressure transmission cylinder 1, and further pressure is applied to the side surface of the brittle material 2 via the pressure transmission cylinder 1. At this time, since the Young's modulus of the pressure transmission cylinder 1 is smaller than the Young's modulus of the brittle material 2, the axial elongation is larger in the pressure transmission cylinder 1 than in the brittle material 2, so that the brittle material 2 has a tensile tension. Join. At the same time, the liquid sealed in the gap 3 between the pressure transmitting cylinder 1 and the brittle material 2 penetrates into the four striations 9 and tries to push them apart. By these two functions, the brittle material 2 can be cut even when the pressure applied to the side surface is relatively low.

[0031]

EXAMPLES Examples of the present invention will be shown below, but the present invention is not limited to these examples. Comparative Example In the example shown in FIG. 1, the brittle material 2 was a glass rod having a diameter of 20 mm and a length of 60 mm, and the pressure transmission cylinder 1 was made of acrylic and 40 mm in length. The streak was provided at one location in the center of the side surface of the glass rod as an indentation by a Vickers indenter. The glass rod 2 was inserted into the pressure vessel 4 as shown in FIG. When a pressure medium (water) was introduced into the pressure space 6 through a pressure medium introduction hole 5 from a pressure device (not shown) and the pressure was applied, cutting occurred only when 1600 kgf / cm ² was applied.

(Example) As in the comparative example, a glass rod 2 provided with a streak and provided with a pressure transmission cylinder 1 was placed in distilled water 13 as shown in FIG. It was left to sink, and distilled water 13 was introduced into the gap 3. Such a glass rod is inserted into the pressure vessel 4 as shown in FIG. 1 as in the comparative example, and the pressurized space 6 is formed as in the comparative example.
When cutting was performed, cutting occurred when 500 kgf / cm ² was applied.

The present invention is not limited to the above embodiment. The above embodiment is an exemplification, and has substantially the same configuration as the technical idea described in the scope of the claims of the present invention. It is included in the technical scope of the invention.

For example, in the description of the above embodiment,
The method for sealing the liquid between the pressure transmitting cylinder and the side surface on which the streaks of the brittle material are provided is described by using two O-rings, which are airtight holding members, to provide two gaps between the pressure transmitting cylinder and the brittle material. Although it is a method of sealing by closing each end,
The present invention is not limited to this, and is not limited to the O-ring, and any air-tight holding member and any liquid sealing method using the same can be used as long as the liquid can be sealed in the gap between the pressure transmission cylinder and the brittle material. It may be. In addition, the method of applying pressure to the brittle material side surface was performed using a cylindrical pressure vessel, but the present invention is not limited to using such a cylindrical pressure vessel, Any method may be used as long as pressure is applied to the side surface of the brittle material.

[0035]

According to the present invention, a brittle material having a streak provided on the side surface and a pressure transmitting cylinder disposed on the outer periphery is subjected to brittleness at the position of the striation by applying pressure to the side surface through the pressure transmitting cylinder. In the method of cutting a brittle material that cuts a material, when applying pressure to the side surface of the brittle material, the brittle material whose liquid is sealed between the pressure transmission cylinder and the side surface on which the streaks of the brittle material are provided. Since it is a cutting method, when pressure is applied to the brittle material side surface via the pressure transmission cylinder side surface, the sealed liquid penetrates into the striations and acts to spread it out, so that the liquid is It can be cut at a lower pressure compared to unsealed ones. Therefore, for example, since a streak such as an indentation by a Vickers indenter is a small crack, cutting can be performed with a low pressure even when a high pressure is normally required for cutting.

[Brief description of the drawings]

FIG. 1 is a sectional view showing an example of a pressure load device used in a cutting method according to the present invention.

FIG. 2 is an explanatory diagram showing an example of a method of introducing a liquid into a gap between a pressure transmission cylinder and a brittle material in the cutting method of the present invention.

FIG. 3 is a sectional view of a pressure load device used in a conventional cutting method.

FIG. 4 is a plan view (A) showing the shape of a streak formed by pressing a rotating body on which abrasive grains are fixed, and a cross-sectional view (B) showing a state of a crack at that time.

FIGS. 5A and 5B are a plan view showing a shape of a streak formed by an indentation by a Vickers indenter and a cross-sectional view showing a state of a crack at that time.

[Explanation of symbols]

1 ... pressure transmission cylinder, 2 ... brittle material, 3
... gap, 4 ... pressure vessel, 5
... pressure medium introduction hole, 6 ... pressurized space, 7 ...
Pressurized space forming part, 8… Fastener fixing part, 9
… Streak, 10… Spacer, 11
… O-ring, 12… Fastener, 13…
Distilled water, 21 ... pressure vessel, 22 ...
Streak, 23 ... cut material, 24 ... pressure transmission cylinder, 25 ... O-ring, 26 ... pressurized space, 27 ... pressure medium introduction hole, 28 ...
Groove, 29 ... crack, 30 ... hollow, 31 ... crack.

Claims (4)

[Claims] 1. A side surface of a brittle material on a pillar is provided with a streak for designating a cross section to be cut in advance, and a pressure transmission cylinder made of a material having a Young's modulus smaller than the brittle material is arranged on the outer periphery of the brittle material. Then, in the brittle material cutting method of cutting the brittle material at the streak position by applying pressure to the side surface of the brittle material through the pressure transmission cylinder,
When pressure is applied to the side surface of the brittle material via the pressure transmission tube, a liquid is sealed between the pressure transmission tube and the side surface on which the streaks of the brittle material are provided. Cutting method for brittle materials. 2. A method of applying pressure to a side surface of the brittle material, comprising: inserting the brittle material having the pressure transmitting cylinder disposed on an outer periphery thereof into a cylindrical pressure vessel; The airtight holding member is disposed at a position where the liquid can be sealed, and a pressurized space defined by the pressure vessel, the pressure transmission cylinder and the airtight holding member is formed, and the streak is formed in the pressurized space. The pressure transmitting cylinder is disposed so as to face the pressure transmitting cylinder, and a pressure medium is filled in the pressurizing space and pressure is applied to apply pressure to the side surface of the brittle material through the pressure transmitting cylinder. The method for cutting a brittle material according to claim 1, wherein: 3. The method for cutting a brittle material according to claim 1, wherein the streak is formed by a Vickers indenter. 4. The method for cutting a brittle material according to claim 1, wherein the liquid is water.