JPH1116875A - Spin treatment device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To surely dry a board in a short time by flow of the air introduced from an introduction hole to an opposition surface between a board and a current plate by arranging a current plate wherein an introduction hole is formed in a central part in opposition to a rotary table and rotating and driving a rotary table for drying a substrate. SOLUTION: A supporting member 38 supports a current plate 34 at a specified height in an inner bottom part of a lower cup 22a and guides an air flow C flowed into an introduction opening 35 along a circumferential direction of a lower side of the current plate 34. The air A introduced into a cup body 21 flows outward radially from a central part of an upper surface of the substrate 20, and flows from a discharge opening 39 to a tank 43 being guided to an inner surface of an inner cup 22c together with the air flow C generated by a rotary table 27. Since the air A introduced from the introduction hole 52 into the cap body 21 functions as drying gas which dries the substrate 20, the substrate 20 can be dried effectively together with centrifugal force by rotation of the board 20.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a spin processing apparatus for drying a substrate while rotating the substrate while holding the substrate on a rotary table.

[0002]

2. Description of the Related Art For example, in a manufacturing process of a liquid crystal display device,
There are a film forming process and a photo process for forming a circuit pattern on a liquid crystal glass substrate (hereinafter abbreviated as a substrate). In these processes, the processing of the substrate and the cleaning are repeatedly performed.

For example, if an exposure process is performed on a substrate,
This substrate is subjected to an etching process, and then an ashing process for removing the resist from the substrate is performed. Next, the operation of cleaning the ashed substrate and then performing the drying process is repeatedly performed.

[0004] The above-mentioned cleaning and drying are continuously performed by a spin processing apparatus. That is, the spin processing device has a cup body whose upper surface is open. A rotating table that holds and rotates the substrate is provided in the cup body, and a cleaning process is performed by spraying a cleaning liquid while rotating the substrate by the rotary table. Instead, the drying process is performed by blowing a dry gas such as clean air or nitrogen.

In order to improve the productivity, it is required to reduce the processing time in each processing step, and it is also required to reduce the processing time in the drying processing step. In order to shorten the processing time of the drying process, it is conceivable to increase the flow rate (speed) of the drying gas blown toward the substrate.

However, when the flow rate of the dry gas blown to the substrate is increased, the flow of the dry gas on the upper surface of the substrate or in the cup body tends to be disturbed. For this reason, there is a risk that the substrate cannot be dried uniformly in a short time, or mist or dust generated during the drying process is not reliably discharged from the inside of the cup and adheres to the substrate.

Further, when the amount of dry gas used increases,
In addition to the fact that the running cost increases in proportion to that, the dry gas exhausted from the cup body can not be exhausted smoothly from the cup body in factories etc. where the exhaust capacity of the dry gas is constant, so that Also, turbulence may occur in the cup body and mist and dust may adhere to the substrate.

[0008]

As described above, when drying the cleaned substrate, simply increasing the amount of the blown dry gas in order to shorten the processing time causes an increase in the flow of the dry gas in the cup body. Disturbance may occur, and the substrate may not be dried uniformly in a short period of time, or mist and dust generated during the drying process may not be reliably discharged from the cup and may adhere to the substrate.

An object of the present invention is to perform a drying process in a short time without using a drying gas exclusively for drying a substrate, and to prevent mist or dust from adhering to the substrate during the drying process. It is an object of the present invention to provide a spin processing device which is free from the problem.

[0010]

According to a first aspect of the present invention, there is provided a spin processing apparatus for drying a substrate by rotating the substrate, wherein a cup having an open upper surface and a central portion of the bottom of the cup are provided. A drive shaft that is inserted into the inside and is rotationally driven by a drive source, a rotary table provided on the drive shaft and holding the substrate and rotating with the drive shaft, and a substrate held by the rotary table. At the center thereof, gas outside the cup body is introduced at a predetermined speed between the surfaces facing the substrate at a predetermined speed by an air flow generated by the rotation of the rotary table. And a plate-shaped rectifying member having an introduction hole.

According to a second aspect of the present invention, in the first aspect of the present invention, the rectifying member is detachably provided on the cup body so as to close the upper opening.
According to a third aspect of the present invention, in the first aspect of the present invention, the rectifying member is provided so as to be capable of adjusting an interval between the rectifying member and a substrate held by the rotating body by a vertical drive mechanism.

According to a fourth aspect of the present invention, in the invention according to any one of the first to third aspects, the rotating table is rotatably driven inside the cup body so that the inside of the cup body is rotated. An inner cup is provided for guiding the airflow generated at the bottom toward the bottom of the cup body, and a discharge port for discharging the airflow is formed at the bottom of the cup body.

According to the first to third aspects of the present invention,
When the rotary table is driven to rotate to dry the substrate, the airflow generated by the rotation causes outside air to be introduced between the opposing surfaces of the substrate and the rectifying member from the introduction hole formed in the rectifying member. The substrate can be reliably dried in a short time by the flow of the outside air.

According to the third aspect of the present invention, the distance between the rectifying member and the substrate can be adjusted by moving the rectifying member up and down by the vertical driving mechanism, so that the outside air introduced between these opposing surfaces can be adjusted. The flow rate can be set.

According to the fourth aspect of the present invention, the airflow generated in the cup body by the rotation of the rotary table is guided toward the bottom by the inner cup provided in the cup body, and is discharged from the discharge port. Therefore, the outside air introduced into the cup body from the introduction hole of the rectifying member can flow smoothly by the airflow formed by the inner cup.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. The spin processing apparatus shown in FIG. 1 is installed in a clean room for cleaning and drying a substrate 20 such as a glass substrate for liquid crystal or a semiconductor wafer.
1 is provided. This cup body 21 is a lower cup 22a,
It is composed of an upper cup 22b and an inner cup 22c. The lower cup 22a has a bowl shape with an open upper surface, and a seal packing 23 is attached to the upper edge thereof.
A through hole 24 is formed in the center of the bottom wall.

The drive shaft 2 of the motor 25 is
6 is inserted and the drive shaft 2 protrudes into the cup body 21.
The upper end of 6 is connected to a disk-shaped connecting member 28 provided on the lower surface of the rotary table 27. A circumferential groove 29 is formed around the lower surface of the connecting member 28.
The upper end of the peripheral wall 24a forming the peripheral edge of the through hole 24 is inserted into the hole.

The through hole 24 in the bottom wall of the lower cup 22a
A shielding ring 31 is provided at the periphery of the connecting member 28 so as to cover the outer peripheral surface of the connecting member 28. Thereby, the substrate 2
As will be described later, the labyrinth structure prevents liquid scattered in the cup body 21 from drying the motor 25 through the through-hole 24 when the 0 is dried.

A plurality of support pins 32 and a plurality of guide pins 33 located radially outward from the support pins 32 are provided on the upper surface of the rotary table 27 at predetermined intervals in the circumferential direction. I have. The support pins 32 support the lower surface of the substrate 20 supplied to the upper surface of the rotary table 27, and the guide pins 33 engage with the outer peripheral surface of the substrate 20,
0 is prevented from moving on the rotating table 27.

A rectifying plate 34 formed of a conductive material in a ring shape is disposed on the inner bottom of the lower cup 22a so as not to be charged. A plurality of inlets 35 are formed in the current plate 34 at predetermined intervals in the circumferential direction. A guide plate 36 is provided at a portion of the inlet 35 on the upper surface of the current plate 34. This guide plate 36
Is formed by bending a portion located on the upper surface side of the inlet 35 at a predetermined angle.

That is, the guide plate 36 is connected to the rotary table 2.
7 is rotated so as to rotate in a predetermined direction, so that the airflow C generated in the same direction as the rotation direction is bent so as to easily flow into the introduction port 35. In other words, the inlet 3
The guide plate 36 and the guide plate 36 form an introduction portion 37 that opens in a direction in which the air flow C generated by the rotation of the rotary table 27 is introduced.

On the lower surface of the rectifying plate 34, supporting members 38 each formed by bending a band-like plate into a V-shape in a portion corresponding to every other inlet 35 in the circumferential direction.
(Detailed shapes are not shown). The support member 38 supports the straightening plate 34 at a predetermined height at the inner bottom of the lower cup 22a, and guides the air flow C flowing into the introduction port 35 along the circumferential direction on the lower surface side of the straightening plate 34. It is supposed to.

A discharge port 39 is formed at the bottom of the lower cup 22a at a position corresponding to the introduction port 35 where the support member 38 is not provided. An outlet body 40 is connected to each outlet 39. Discharge body 40
Is connected to a discharge pipe 41, and each discharge pipe 41 is connected to a tank 43.
Is in communication with The tank 43 separates gas and liquid from the cup body 21 and discharges them to a predetermined location. The tank 43 is filled with gas cleanly.
An exhaust pump (not shown) for dissipating the heat to the outside of the system is connected.

The upper cup 22b is detachably attached to the upper end of the lower cup 22a. The upper cup 22b has a ring shape in which a portion corresponding to the rotary table 27 is open, and a lower end thereof is liquid-tight and detachably attached to a packing 23 provided on an upper edge of the lower cup 22a. An engaging portion 44 is formed to be freely engaged.

The inner cup 22c has a ring shape in which the outer peripheral surface is formed into a convex curved surface, and the lower end thereof is connected to a holding ring 45 having a crank-shaped cross section attached to the inner peripheral portion of the upper cup 22b. Are held together. That is, the inner cup 22c is provided so as to cover the peripheral portion of the rotary table 27. Accordingly, the air flow C generated by the rotation of the rotary table 27 is transferred to the inner cup 2.
It is guided by the inner surface of 2c and flows toward the bottom of the lower cup 22a.

On the open upper surface of the upper cup 22b,
A lid 51 as a rectifying member having a flange formed on its peripheral edge to engage with the outer peripheral surface of the upper cup 22b is detachably provided. An introduction hole 52 having a predetermined diameter is formed in a radially central portion of the lid 51.

In the cup 21, the rotary table 2
The rotation of 7 generates an air flow C. When the air flow C flows from the outlet 39 to the tank 43, the flow causes a negative pressure in the cup 21. Thereby, outside air A is introduced into the cup body 21 from the introduction hole 52 of the lid body 51. The outside air A flows into the central portion of the upper surface of the substrate 20, flows radially outward along the upper surface of the substrate 20 by the air flow C generated by the centrifugal force of the rotating table 27, and is discharged from the outlet 39. Will be done.

Next, a description will be given of a case where the substrate 20 supplied to the rotary table 27 is dried by the spin processing apparatus having the above configuration. From the upper cup 22b to the lid 51
Is removed and the wettable substrate 20 which has been cleaned by the cleaning liquid is supplied to the rotary table 27. The lid 51 closes the opening of the upper cup 22b.
The attachment and detachment of the lid 51 to and from the upper cup 22b may be performed manually or automatically.

Then, the motor 25 is energized to rotate the rotary table 27. As a result, a centrifugal force acts on the cleaning liquid attached to the substrate 20, and the cleaning liquid is scattered radially outward from the upper surface of the substrate 20 by the centrifugal force, and the substrate 20 is dried. The cleaning liquid removed from the substrate 20 is dropped on the inner surface of the inner cup 22c and discharged from the inlet 35 of the rectifying plate 34 provided on the inner bottom of the lower cup 22a to the tank 43 through the outlet 39 and the outlet pipe 41. Is done.

On the other hand, if the rotary table 27 is driven to rotate, the centrifugal force at that time causes the air to flow radially outward from the center of the substrate 20 in the same direction as the rotation direction of the rotary table 27. A stream C is generated. The air flow C generated by the rotation of the rotary table 27 is guided downward by the inner peripheral surface of the inner cup 22c as shown by an arrow in FIG. 1, and flows downward to the introduction portion 37 opened in the flow direction. Inflow. That is, the air flow C is guided by the guide plate 36 bent and raised at a predetermined angle with respect to the flow direction, and flows into the introduction port 35 formed in the rectifying plate 34.

The air flow C that has flowed into the inlet 35 is
4 flows along the supporting member 38 on the lower surface, flows out from the discharge port 39, passes through the discharge pipe 41, and is radiated to the outside of the clean room through the tank 43 via the exhaust pump (not shown).

The rotation of the rotary table 27 causes the air flow C
Is generated, at least a portion on the upper surface side of the substrate 20 in the cup body 21 becomes negative pressure due to the air flow. Thereby, the outside air A is introduced from the introduction hole 52 of the lid 51 that closes the opening of the upper cup 22b.

The outside air A introduced into the cup 21 flows radially outward from the center of the upper surface of the substrate 20, and together with the air flow C generated by the rotation of the rotary table 27, the inner surface of the inner cup 22c. And flows from the discharge port 39 to the tank 43.

Accordingly, since the outside air A introduced into the cup body 21 from the introduction hole 52 acts as a drying gas for drying the substrate 20, the substrate 20 is efficiently dried in combination with the centrifugal force caused by rotation. Will be.

Further, the air flow C generated by the rotation of the rotary table 27 and the outside air A introduced from the introduction hole 52 are smoothly guided along the inner surface of the inner cup 22c to the lower cup 22a and exhausted. .

Therefore, turbulence does not easily occur in the cup 21, and the mist generated in the cup 21
Even if dust such as fine particles contained in the cleaning liquid adheres to the inner surface of the cup body 21 in the cleaning step before the drying process, the dust soars and re-adheres to the substrate 20. Is prevented.

The flow rate of the outside air A introduced into the cup body 21 is determined if the rotation speed of the rotary table 27 is constant.
It can be set according to the size of the introduction hole 52. Therefore, the inner diameter of the introduction hole 52 is changed,
By changing the number of 2 or the like, various conditions that affect the drying speed of the substrate 20, such as the flow rate of the outside air and the position of introduction into the cup 21, can be set.

Since the spin processing device is installed in a clean room, the outside air introduced into the cup 21 from the introduction hole 52 of the lid 51 hardly contains dust.

Table 1 below shows that the rotational speed of the rotary table 27 is set to 1600 rpm, and the upper opening of the upper cup 22b is
The substrate 20 is closed in a state in which the cover 51 is provided with a 50 mm introduction hole 52 and in an open state without being closed by the cover 51.
The comparison of the drying state when the drying process was performed. The outer dimensions of the rotary table 27 are 500 mm, and the inner diameter at the open end of the upper cup 22b is 700 mm.

The holding time in Table 1 is based on the rotation table 2
This is the time when the motor 7 was rotated at the rotation speed after the rotation speed reached 1600 rpm. In addition, the dry state is a result confirmed by visual observation.

[0041]

[Table 1]

As can be seen from Table 1, when the lid 51 was provided, the substrate 20 was surely dried even if the holding time was 5 seconds. On the other hand, when the lid 51 was not provided, the substrate 20 was not reliably dried until the holding time was 10 seconds, and the substrate 20 was surely dried by setting the holding time to 15 seconds.

From the above, it has been confirmed that the provision of the lid 51 can significantly reduce the drying time of the substrate 20 as compared with the case where the lid 51 is not provided. In addition, since the drying can be performed without using a drying gas exclusively for drying, the running cost is hardly required, and it is economical.

FIG. 3 shows a second embodiment of the present invention. The same parts as those of the spin processing apparatus shown in FIG. That is, the rectifying member provided in the spin processing device of the present embodiment is
Instead of the lid 51 of the embodiment, a disc-shaped rectifying plate 61 having a diameter equal to or larger than the diagonal size of the substrate 20 is provided, and a central portion of the rectifying plate 61 has a predetermined inner diameter. An introduction hole 62 is provided.

The rectifying plate 61 is disposed so as to face the substrate 20 held by the rotary table 27, and has a vertical drive mechanism 63.
Thus, the motor is driven in a vertical direction indicated by an arrow in FIG.

That is, the vertical drive mechanism 63 has a base plate 64 fixedly provided at a predetermined position. On the upper surface of the base plate 64, a gantry 65 is erected. This stand 6
5, a screw shaft 67 whose upper and lower ends are rotatably supported by bearings 66 and a guide shaft 68 to which the upper and lower ends are fixed are provided in parallel with each other.

The lower end of the screw shaft 67 projects from the bearing 66, and the end is connected to the rotating shaft 72 of the motor 71 via a joint 69. The motor 71 is held by a bracket 73 provided on the lower surface of the base plate 64,
The control unit (not shown) is driven in the normal rotation direction and the reverse rotation direction.

A nut 74 is screwed onto the screw shaft 67, and a slider 75 is slidably provided on the guide shaft 68. The nut 74 and the slider 75 are connected. Therefore, when the motor 71 is operated and the screw shaft 67 is driven to rotate, the nut body 74 moves up and down along the screw shaft 67 in accordance with the rotation direction. It is supposed to.

The slider 75 has an L-shaped arm 7.
6 are connected to each other. The tip of the arm 76 is connected to one end of the upper surface of the current plate 61.
Accordingly, the arm body 76 moves up and down integrally with the slider 75, and the rectifying plate 61 interlocks with the movement, whereby the facing distance between the rectifying plate 61 and the substrate 20 can be adjusted. I have.

In the spin processing apparatus having the above configuration, when the substrate 20 is subjected to the drying process, first, the vertical drive mechanism 63 is used.
The opposing distance between the rectifying plate 61 and the substrate 20 is set by the setting. Then, the motor 25 is operated to rotate the rotary table 27 together with the substrate 20. When the substrate 20 is rotated, the cleaning liquid attached to the substrate 20 is scattered by centrifugal force, so that the substrate 20 is dried.

On the other hand, if the rotating table 27 is rotated,
Due to the centrifugal force at that time, as shown by arrow C in FIG.
In the same direction as the rotation direction of the substrate 20, an airflow is generated from the central portion of the substrate 20 to the peripheral portion. Since the air flow C causes a negative pressure between the opposing surfaces of the substrate 20 and the rectifying plate 61, the space between the opposing surfaces is introduced by an arrow D in FIG. Outside air is introduced as shown. The outside air D flows radially outward from the center of the upper surface of the substrate 20, and is guided by the inner surface of the inner cup 22 c together with the airflow C generated by the rotation of the rotary table 27, from the outlet 39 to the tank 43. Flows.

Therefore, according to this embodiment, since the outside air D acts as a drying gas for drying the substrate 20, similarly to the first embodiment, the substrate 20 can be efficiently moved by the centrifugal force acting thereon. It can be dried.

The rectifying plate 61 can be positioned vertically by the vertical driving mechanism 63, that is, the distance between the rectifying plate 61 and the substrate 20 can be set. Therefore, even if the size of the substrate 20 is changed and the centrifugal force generated by the rotation of the substrate 20 is changed, by adjusting the facing distance between the substrate 20 and the rectifying plate 61, the substrate 20 and the rectifying plate 61 are adjusted. Can be maintained at a constant flow rate of the outside air D flowing between the opposed surfaces.

For example, as the size of the substrate 20 increases, the centrifugal force generated when the substrate 20 is rotated by the rotating table 27 increases. When the centrifugal force increases, the flow rate of the air flow C increases.
The amount of outside air D flowing into the inside also increases. As a result, the amount of exhaust gas discharged from the discharge pipe 41 also increases,
Normally, since the exhaust capacity is constant, if the inflow of the outside air D increases, the exhaust is not smoothly exhausted, the air flow in the cup body 21 becomes turbulent, and dust and mist generated at the time of drying fly up, and There is a risk of adhesion.

Therefore, when the size of the substrate 20 is changed, as described above, the facing distance between the substrate 20 and the rectifying plate 61 is adjusted so that the inflow amount of the outside air D becomes constant. For example, when the size of the substrate 20 is increased, the facing distance between the substrate 20 and the rectifying plate 61 is increased to reduce the inflow of the outside air D. Thereby, the cup body 2
Since the exhaust air from the nozzle 1 is maintained smoothly and turbulence is prevented from being generated in the cup body 21, dust and mist can be prevented from rising and adhering to the substrate 20.

The size of the substrate 20 is 600 mm × 800 mm.
When the rotation speed of the rotary table 27 is 1400 rpm, the facing distance between the substrate 20 and the rectifying plate 61 is 15 to 50 mm,
It was confirmed that by setting the inner diameter of the substrate 2 to about 50 to 150 mm, the substrate 20 could be dried without adhering dust or mist.

The flow rate of the outside air D flowing between the opposing surfaces of the substrate 20 and the rectifying plate 61 is not determined only by the distance between these surfaces, but the introduction holes 62 formed in the rectifying plate 61.
Also varies depending on the inner diameter of the. That is, if the inner diameter of the introduction hole 62 is reduced, the flow rate of the outside air D increases,
Conversely, increasing the size of the introduction hole 62 decreases the flow velocity.

Therefore, the inside diameter of the introduction hole 62 is reduced so that the outside air D flowing between the opposing surfaces of the substrate 20 and the rectifying plate 61 is reduced.
If the flow rate is increased, the drying time of the substrate 20 can be shortened.

Therefore, the rectifying plate 61 is connected to the arm 7
6, the drying time can be controlled if it can be replaced with a rectifying plate 61 in which an introduction hole 52 having a predetermined inner diameter of the substrate 20 is formed.

When the substrate 20 is to be attached to or detached from the rotary table 27, the current plate 61 is retracted above the cup 21 as shown by a chain line in FIG. What is necessary is just to take in and out.

[0061]

According to the first to third aspects of the present invention, the rectifying member having the introduction hole formed in the center portion is disposed opposite to the rotary table, and the rotary table is used for drying the substrate. When the table is driven to rotate, external air is introduced into the space between the substrate and the rectifying member from the introduction hole by an airflow generated by the rotation of the table.

Therefore, not only can the substrate be reliably dried in a short time by the flow of the outside air introduced between the opposing surfaces of the substrate and the rectifying plate from the introduction hole, but also a drying gas dedicated to drying is required. Therefore, it is possible to reduce the running cost.

Further, according to the third aspect of the present invention, the rectifying member is moved up and down by the vertical drive mechanism so that the facing distance between the rectifying member and the substrate can be adjusted. By adjusting the facing distance between the rectifying member and the substrate in the case where the airflow is reduced, it is possible to suppress the amount of outside air introduced into the cup from exceeding the exhaust capacity.

As a result, since the exhaust from the cup body is performed smoothly, turbulence occurs in the cup body, so that mist and dust soar up and can be prevented from adhering to the substrate. According to the fourth aspect of the present invention, the air flow generated in the cup body by the rotation of the rotary table is guided toward the bottom by the inner cup provided in the cup body, and is discharged from the discharge port.

As a result, even if outside air is introduced into the cup, turbulence is prevented from being generated in the cup, thereby improving the drying efficiency of the substrate. Even if dust adheres to the inner surface or mist is generated during the drying process, they are prevented from rising and adhering to the substrate.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a spin processing apparatus according to a first embodiment of the present invention.

FIG. 2 is a plan view of the lid.

FIG. 3 is a sectional view showing a spin processing apparatus according to a second embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 20 ... Board 21 ... Cup 22c ... Inner cup 25 ... Driving source 26 ... Drive shaft 27 ... Rotary table 39 ... Discharge port 51 ... Lid (rectifying member) 52, 62 ... Introducing hole 61 ... Rectifying plate (rectifying member) 63) Vertical drive mechanism

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Masayuki Komatsu 1000-1, Kasama-cho, Sakae-ku, Yokohama-shi, Kanagawa Prefecture Inside Ofuna Plant of Shibaura Works (72) Inventor Akinori Iso, 1000-1, Kasama-cho, Sakae-ku, Yokohama-shi, Kanagawa 1 share Shibaura Plant Ofuna Factory

Claims (4)

[Claims] In a spin processing apparatus for drying a substrate by rotating the substrate, a cup body having an open upper surface, and a cup body inserted through a bottom center portion of the cup body and driven to rotate by a drive source. A drive shaft, a rotary table provided on the drive shaft for holding the substrate and rotating together with the drive shaft, and a central portion disposed opposite to the substrate held on the rotary table and facing the substrate. A plate-shaped rectifying member having an introduction hole for introducing a gas outside the cup body at a predetermined speed between the surfaces facing the substrate by an air current generated by rotating the rotation table. A spin processing device comprising: 2. The spin processing apparatus according to claim 1, wherein the rectifying member is detachably provided on the cup body so as to close the upper opening. 3. The spin processing apparatus according to claim 1, wherein the rectifying member is provided so as to be capable of adjusting an interval between the rectifying member and a substrate held by the rotating body by a vertical driving mechanism. 4. The rotating tape is provided inside the cup body.
When the bull is driven to rotate, an inner cup that guides the airflow generated in the cup body toward the bottom of the cup body is provided, and a discharge port that discharges the airflow is formed at the bottom of the cup body. The spin processing apparatus according to claim 1, wherein