JPH11165057A - Vacuum vessel and its production - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a vacuum vessel large in the overall coefficient of heat transfer and capable of accurately performing temp. control by forming a tubular flow passage capable of passing a cooling or heating medium on a cylindrical part of the vacuum vessel formed cylindrical or bottomed vessel like. SOLUTION: The vacuum vessel 1 suitably used for an etching device, a sputtering device or the like for producing a semiconductor, a liquid crystal or a solar cell is formed by using aluminum, magnesium or the alloy and a pipe 2, through which a fluid for temp. control is passed, is disposed in the vacuum vessel 1 so as to be cast-in. As a result, the generation of mold cavity in the surroundings of the pipe 2 is eliminated to increase the overall coefficient of heat transfer to the inside of the vacuum vessel 1. As the material for the pipe 1, one of copper, iron, an aluminum alloy, titanium, stainless, a nickel alloy and the like is used. And a porous body made of a ceramic can be arranged on the circumferential part of the vacuum vessel 1.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a temperature controllable vacuum vessel.

[0002]

2. Description of the Related Art Vacuum equipment used for etching equipment for manufacturing semiconductors, liquid crystals or solar cells, CVD and sputtering equipment, vacuum containers used for freeze-drying foods, and vacuum tanks used for electron microscopes, etc.
Conventional products consist of a vacuum vessel and a heat exchanger that acts on a heating or cooling medium. The two bodies are joined by a method such as screwing or welding to join them, but the joining interface is not completely adhered and the overall thermal conductivity is small.

[0003]

SUMMARY OF THE INVENTION An object of the present invention is to provide a vacuum vessel having a large overall thermal conductivity and capable of controlling the temperature, in which a vacuum vessel and a heat exchanger are integrally formed from the beginning.

[0004]

Means for Solving the Problems In order to solve the above problems, the vacuum container according to the present invention has a cylindrical shape or a container shape with one end closed, and the cylindrical portion is cooled or cooled. It has a tubular channel through which a heating medium can flow.

According to a second aspect of the present invention, there is provided the copper of the fourth aspect, wherein the tubular flow path is formed in the first aspect of the invention.
A pipe made of iron, an aluminum alloy, stainless steel, or a nickel alloy is made of aluminum, magnesium, or an alloy thereof, and is integrally formed by being cast by high-pressure casting to increase the overall thermal conductivity.

The composite material layer according to claim 3 is formed on the outside of the pipe of claim 4, that is, on the atmosphere side opposite to the vacuum side, and a layer having a small heat conductivity is provided, so that the heat transfer to the vacuum side is further improved. This composite layer, which allows the vacuum vessel itself to be thinner because the composite material layer has high rigidity while improving exchange,
A portion made of a pre-formed body of a ceramic porous body, and a portion made of a vacuum vessel material, which is an alloy component (hereinafter referred to as "alloy material"), is a matrix.

According to a fifth aspect of the present invention, there is provided a manufacturing method according to the present invention, in which a pipe and, if necessary, a porous body made of a ceramic material are arranged in a mold, and are integrally molded by a high-pressure casting method. Things. The pipe by the two methods and the alloy material of claim 2 are closely joined and the entire pipe periphery is covered, so that the overall thermal conductivity is increased.

[0008]

Embodiments of the present invention (hereinafter, referred to as "embodiments") will be described in detail with reference to the drawings. FIG. 1 shows an embodiment of the vacuum container of the present invention, and FIG. 2 is a sectional view of the container.

FIG. 3-1 shows a conceptual diagram of a vacuum vessel according to the prior art. FIG. 3B is a schematic cross-sectional view of the container and the pipe in FIG.

FIG. 4 is a schematic cross-sectional view of a cast-in-pipe drawing by an aluminum gravity casting method, and FIG. 5 is a schematic cross-sectional view of a high-pressure casting method according to the present invention.

As shown in FIGS. 1 and 2, the vacuum vessel completely encases a pipe through which a fluid for temperature control passes, and the overall heat transfer coefficient for exchanging heat with the inside of the vacuum vessel becomes large. The contact area between the container and the pipe according to the prior art shown in FIGS. 3A and 3B is the same as that of FIGS.
Since the pipe surface is extremely small and the surface area of the pipe other than that joined to the vacuum vessel is large, it is very easily affected by the temperature on the atmosphere side, so that the overall thermal conductivity becomes extremely small. The material of the pipe used in the present invention,
Any of copper, iron, aluminum alloy, titanium, stainless steel, nickel alloy and the like can be used.

[0012] In the casting of the pipe by the gravity casting method shown in Fig. 4, many cavities are generated around the pipe.
Since it contains a gas layer with poor heat conductivity, the overall thermal conductivity is not large. On the other hand, in the high-pressure casting method according to the present invention shown in FIG. 5, no porosity is generated around the pipe, and the overall thermal conductivity is large.

In the cross-sectional view shown in FIG. 2, a porous material made of ceramic is disposed on the outer periphery of the container to substantially form a composite material layer. As the ceramic material forming the composite material layer, a pre-formed body such as alumina fiber or ceramic fiber may be used, or a porous formed body such as cordierite may be used. Table 1 shows the thermal conductivity and Young's modulus of this composite material layer when the alumina fiber volume ratio is 25% and the aluminum alloy JISA5052 is used as a matrix. In addition, the characteristics of the aluminum alloy JISA5052 are also described. If the composite material layer is arranged in a portion that becomes the outer periphery of the vacuum vessel, it becomes resistant to heat transfer with the atmosphere, and heat exchange between the inside of the vacuum vessel and the fluid in the pipe becomes dominant. Further, since the Young's modulus is large, there is an advantage that the wall of the vacuum vessel can be thinned.

[0014]

According to the present invention, it is possible to provide an integrated vacuum vessel having a high overall thermal conductivity.

[Brief description of the drawings]

FIG. 1 is a schematic view of a vacuum container of the present invention.

FIG. 2 is a sectional view of FIG.

FIG. 3A is a conventional vacuum vessel. Figure-
FIG. 3-2 is a cross-sectional view showing a conventional connection between a temperature control pipe of a vacuum vessel and a vacuum chamber.

FIG. 4 is a cross-sectional view of an alloy material and a pipe formed by gravity casting.

FIG. 5 is a sectional view of an alloy material and a pipe formed by a high-pressure casting method.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Alloy material 2 Pipe 3 Composite material 4 Cast cavity 5 Vacuum container 6 Pipe joined by welding etc.

Continued on the front page (51) Int.Cl. ⁶ Identification code FI F25D 1/02 F25D 1/02 Z

Claims (5)

[Claims] 1. A container having a cylindrical shape or a container shape with one end closed, and having a tubular flow path through which a cooling or heating medium can flow. 2. A cylindrical or container-like object is integrally formed by high-pressure casting of aluminum, magnesium or an alloy thereof. 3. A composite material according to claim 1, wherein a composite material layer having low heat conductivity is provided on the outer peripheral side of the cylindrical or container-like material. 4. A material for forming a tubular flow path according to claim 1,
Pipes made of copper, iron, aluminum alloy, titanium, stainless steel or nickel. 5. A porous material mainly composed of a ceramic material for forming the composite material layer according to claim 3 is disposed at a predetermined position in a mold, and the preformed pipe according to claim 4 is placed inside the porous material. A method of obtaining a vacuum container integrally formed by applying the molten metal according to claim 2 and pressurizing and molding at a high pressure.