JPH11162366A - Gyrotron power source device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide the smooth and stabilized output operation without generating an excessive current in a body power source when fluctuation of the output voltage is generated in a collector power source at the time of starting stopping the output voltage of a device. SOLUTION: A gyrotron power source device is formed of a gyrothoron, a collector power source 1 for supplying power to a collector power electrode of the gyrotron, an anode power source 21 for supplying power to an anode electrode of the gyrotron, a body power source 31 for supplying power to a body electrode of the gyrotron, a voltage detecting means 6, 27, 37 for separately detecting the output voltage of the collector power source 1, the anode power source 21 and the body power source 31, and a constant voltage control means for maintaining the output voltage of the collector power source 1, the anode power source 21 and the body power source 31 constant. This gyrotron power source device is also provided with a reference value converting means 42, in which an output voltage reference value 51 of the collector power source 1 and the operating signal 52 of a semi-conductor switch are input and which converts the output voltage reference value 51 of the collector power source 1 to a previously stored reference value pattern for output.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gyrotron power supply device used for, for example, high-frequency plasma heating of a nuclear fusion device, and more particularly, to a decelerating potential applied to a collector electrode with increasing power in recent years. (Collector Po
The present invention relates to an energy recovery type gyrotron power supply device that employs tential depression.

[0002]

2. Description of the Related Art Generally, a gyrotron is an electron tube for oscillating high power electromagnetic waves in the millimeter wave band by a cyclotron resonance maser function, and is mainly used for electron cyclotron heating of fusion plasma.

A gyrotron power supply for supplying a high voltage to the gyrotron is required to start up the output voltage at high speed. In addition, gyrotrons are often short-circuited due to arc generation, and at this time, it is necessary to have a function of shutting off at high speed. Therefore, a semiconductor switch in which a plurality of self-extinguishing elements are connected in series, or a self-extinguishing A self-excited converter using elements is used.

FIG. 12 is a block diagram showing a configuration example of this kind of conventional gyrotron power supply device. In FIG. 12, reference numeral 11 denotes a gyrotron serving as a load 11 having a cathode electrode K, an anode electrode A, a body electrode B, and a collector electrode C.

On the other hand, 1 is a collector power supply for supplying power to the collector electrode C of the load 11, 2 is a thyristor switch for controlling a DC output voltage to be constant, 3 is a step-up transformer, and 4 is a rectifier for converting an AC voltage to DC. 5 is a smoothing capacitor connected in parallel with the rectifier 4, and 6 is a smoothing capacitor 5.
A voltage detector 7 for detecting a DC output voltage of the collector power supply 1, that is, an output voltage of the collector power supply 1, is a gate turn-off thyristor (hereinafter simply referred to as GTO) unit, and is provided in series between the smoothing capacitor 5 and the load 11. A plurality of connected semiconductor switches (for example, GTO 101 to 1
0n) and a gate circuit (not shown) for driving these GTOs 101 to 10n. Here, GTO10
1 to 10n have a function of interrupting the load current.

Reference numeral 8 denotes a load 11 when the output voltage rises.
Voltage control circuit that controls the voltage applied to the load 9
A DC reactor 10 for suppressing an overcurrent when a short circuit occurs due to an arc or the like in 1 is connected in parallel with the DC reactor 9 and recirculates the current flowing through the DC reactor 9 when the load current is interrupted, thereby reducing the overvoltage. A diode 12 for preventing the occurrence is a current detector for detecting a current flowing through the load 11, that is, an output current of the collector power supply 1.

Further, reference numeral 13 denotes an output voltage reference value of the collector power supply 1 (hereinafter, referred to as a collector output voltage reference value) 51.
An arithmetic circuit for taking the difference between the output voltage from the voltage detector 6 and
14 is a constant voltage control circuit that keeps the output voltage of the collector power supply 1 constant based on the output from the arithmetic circuit 13, and 15 is control rectification of each phase of the thyristor switch 2 so that the output voltage of the collector power supply 1 becomes constant. A phase control circuit 52 for determining the firing timing of the elements is a GTO operation signal for simultaneously driving the GTOs 101 to 10n.

The output of the collector power supply 1 is
Are connected to the collector electrode C and the cathode electrode K, respectively. As the voltage control circuit 8, a conventionally known circuit, for example, a voltage control circuit disclosed in Japanese Patent Publication No. Sho 62-293155, "Protection Circuit for Acceleration Power Supply Device", or the like can be used.

In such a configuration, the thyristor switch 2 controls the DC output voltage value of the rectifier 4 to a constant voltage. In this state, when the GTO operation signal 52 is issued, the GTOs 101 to 10n are driven, and a voltage is applied to the load 11 to supply power.

The collector power supply 1 has the largest power among the gyrotron power supply devices. With the recent increase in the power and pulse length of the gyrotron, the DC voltage becomes several tens of KV or more.
Some require 100 KV and a direct current of several tens of A to 150 A.

In such a DC power supply, the capacity of the smoothing capacitor 5 is generally large in order to suppress the fluctuation of the load voltage. However, if the capacity of the smoothing capacitor 5 is increased, peripheral circuits, protection devices, etc. are also increased, which is extremely uneconomical, and the capacity of the smoothing capacitor 5 is limited.

On the other hand, reference numeral 21 denotes an anode power supply for supplying power to the anode A of the load 11. The anode power supply 21 includes a rectifier 22 for converting AC to DC, and a chopper circuit 23 for keeping the input voltage of the self-excited inverter 24 constant.
A step-up transformer 25, a rectifier 26 for rectifying the output of the step-up transformer 25 and converting it to a direct current, a voltage detector 27 for detecting an output voltage of the rectifier 26, that is, an output voltage of the anode power supply 21, An arithmetic circuit 28 that calculates a difference between an output voltage reference value 21 (hereinafter referred to as an anode output voltage reference value) 53 and an output voltage from the voltage detector 27.
And a constant voltage control circuit 29 for keeping the output voltage of the anode power supply 21 constant based on the output from the arithmetic circuit 28, and a pulse width modulation of the self-excited inverter 24 so that the output voltage of the anode power supply 21 becomes constant. Pulse width modulation circuit 30
It is composed of

The output of the anode power supply 21 is the load 1
One anode electrode A and one cathode electrode K are connected. Reference numeral 56 denotes an anode power supply operation signal.

In such a configuration, the received AC is converted into DC by the rectifier 22, and this DC is converted into a predetermined DC by the chopper circuit 23, and the output voltage of the rectifier 26, which is the output voltage of the anode power supply 21, has a predetermined value. Calculation circuit 28, constant voltage control circuit 29, pulse width modulation circuit 30
The self-excited inverter 24 is controlled by the
To supply power.

Reference numeral 31 denotes a body power supply for supplying power to the body electrode B of the load 11. This body power supply 31
The rectifier 32 converts AC to DC, a chopper circuit 33 for keeping the input voltage of the self-excited inverter 34 constant, a step-up transformer 35, and rectifies the output of the step-up transformer 35, similarly to the anode power supply 21. Rectifier 3 to convert to DC
6 and the output voltage of the rectifier 36, that is, the body power supply 31
Voltage detector 37 for detecting the output voltage of
1 for calculating the difference between the output voltage reference value (hereinafter referred to as the body output voltage reference value) 54 and the output voltage from the voltage detector 37, and the body power supply 31 based on the output from the calculation circuit 38. And a pulse width modulation circuit 40 that performs pulse width modulation on the self-excited inverter 34 so that the output voltage of the body power supply 31 is constant.

The output of the body power supply 31 is
Are connected to the body electrode B and the cathode electrode K, respectively. Reference numeral 57 denotes a body power supply operation signal.
In such a configuration, the received AC is converted into DC by the rectifier 32, and this DC is converted into a predetermined DC by the chopper circuit 33, so that the output voltage of the rectifier 36, which is the output voltage of the body power supply 31, becomes a predetermined value. In addition, the self-excited inverter 34 is controlled by the arithmetic circuit 38, the constant voltage control circuit 39, and the pulse width modulation circuit 40 to supply power to the load 11.

Anode power supply 21 and body power supply 31
Also, as in the case of the collector power supply 1 described above, the DC voltage requires a high voltage, but the DC current is several tens mA to 100 m
A, and the power supply capacity is smaller than that of the collector power supply 1. Therefore, a circuit system suitable for the power supply capacity may be selected.

Further, there is a capacitance 41A between the anode electrode A and the cathode electrode K of the load 11,
And a cathode electrode K, there is a capacitance 41B. In general, the capacitance 41A is about 1000 PF, but the capacitance 41B is about 4000 PF, which is larger than the capacitance 41A.

The load 11 is the aforementioned energy recovery type gyrotron, and recovers energy by applying a reverse bias voltage between the body electrode B and the collector electrode C.

The reverse bias voltage is 30 at the maximum.
It is about KV. That is, assuming that the DC voltage rating of collector power supply 1 is −60 KV, the DC voltage rating of body power supply 31 is −90 KV.

Other power supplies for operating the gyrotron include a heater power supply for supplying power to the heater electrode of the load 11 and an electromagnet power supply for supplying an external magnetic field to the load 11. Since only the constant power is supplied, illustration and description thereof are omitted here.

Next, the operation of the gyrotron power supply device having such a configuration will be described with reference to a time chart shown in FIG. First, the thyristor 2 is operated to charge the smoothing capacitor 5 of the collector power supply 1 with a predetermined voltage.

Next, when the smoothing capacitor 5 reaches a constant voltage, the GTO operation signal 52 of the collector power supply 1
Then, the anode power supply 21 and the body power supply 31 are operated.
That is, in the collector power supply 1, the GTO 101 to 10 n are driven by the GTO operation signal 52 to supply power to the load 11.

An anode power supply 21 and a body power supply 31
The output voltage is controlled by the self-excited inverters 24 and 34 to supply power to the load 11. Next, when the gyrotron power supply device is normally stopped or the protection is stopped due to arcing of the load 11, the GTO operation signal 52,
The operation signal of the thyristor switch 2, the operation signal 56 of the anode power supply 21, and the operation signal 57 of the body power supply 31 are turned off, and the power supplied to the load 11 is cut off at high speed.

The load 11 may be operated repeatedly in the short pulse mode. In this case, the thyristor 2 is operated continuously as shown by a dotted line in FIG. 13 in order to increase the operation efficiency.

[0026]

In the gyrotron power supply device described above, since energy is recovered by the load 11, it is necessary to apply a reverse bias voltage between the collector electrode C and the body electrode B. There is. In order for the load 11 to perform a stable output operation, it is desirable that the reverse bias voltage is stable.

However, as described above, since the capacity of the smoothing capacitor 5 of the collector power supply 1 is limited,
At the moment when the GTOs 101 to 10n are turned on and power is supplied to the load 11, the voltage of the smoothing capacitor 5 temporarily drops.

In this case, the thyristor switch 2 attempts to compensate for this drop, but the constant voltage control circuit 1
If the response of step 4 is made faster, stable control cannot be obtained, so that the control gain and control response of the constant voltage control are limited. Therefore, it takes a certain time until the voltage of the smoothing capacitor 5 becomes stable.

On the other hand, the body power supply 31 is
Since the power supply capacity is smaller than that of the above, and a large-capacity capacitor is not required for the DC output section, stable control at a relatively high speed can be obtained.

As described above, the output voltage of the collector power supply 1 drops momentarily when power is supplied to the load 11, and the above-mentioned reverse bias voltage increases until the voltage is stabilized. When the reverse bias voltage increases, a leak current to the body electrode B of the load 11 increases, and there is a problem that the body power supply 31 becomes overcurrent.

When the gyrotron power supply is normally stopped and the protection is stopped, since the collector power supply 1, the anode power supply 21 and the body power supply 31 are simultaneously stopped because of the capacitances 41A and 41B present in the load 11, Due to the difference in the discharge time constant of the power supply, the output voltage of the collector power supply 1 becomes zero first, and the rise of the output voltage of the body power supply 31 having the large capacitance 41B is the slowest. Therefore, similarly to the above-described problem, there is a problem that the reverse bias voltage increases and the body power supply 31 becomes overcurrent.

Further, since the gyrotron power supply device is required to have a fast rise of the output voltage, the constant voltage control circuit 29 of the anode power supply 21 and the body power supply 31
Requires a high-speed response.

A general output voltage rise time is 1 to 3 m.
s, and the body power supply 31 is
Requires higher voltage. When the output voltage rises, there is time to charge the capacitances 41A and 41B. Due to this difference in capacitance, the anode power supply 21 and the body power supply 31 do not rise at the same time and reach a predetermined value. There is a difference in time.

In this case, naturally, the capacitance 4
The body power supply 31 having a larger 1B has a longer charging time and the output voltage rise time is longer than the anode power supply 21. However, it is not preferable for the gyrotron to have a period in which the output voltage of the anode power supply 21 is higher than the output voltage of the body power supply 31, so that a smooth output operation cannot be obtained and the output becomes unstable.

It is an object of the present invention to provide a method for starting and stopping the output voltage of the device and for changing the output voltage of the collector power supply.
An object of the present invention is to provide a gyrotron power supply device capable of obtaining a smooth and stable output operation of a gyrotron without a body power supply becoming overcurrent.

[0036]

In order to achieve the above object, a gyrotron serving as a load having a cathode electrode, an anode electrode, a body electrode, and a collector electrode, and a DC output rectified by a rectifier by inputting an AC power supply. From a smoothing capacitor connected in parallel to the rectifier, a plurality of semiconductor switches connected in series between the rectifier and the gyrotron, and a non-linear resistor connected in parallel to the semiconductor switch. A collector power supply for supplying power to the gyrotron collector electrode through a voltage control circuit composed of a voltage sharing element, an anode power supply for supplying power to the gyrotron anode electrode, and a gyrotron body electrode And the output voltage of the body power supply, collector power supply, anode power supply, and body power supply. Voltage detecting means for detecting each different Re,
A gyrotron power supply device comprising: constant voltage control means for maintaining output voltages of a collector power supply, an anode power supply, and a body power supply at a constant level based on the output voltages detected by the voltage detection means. According to the first aspect of the invention, a reference value conversion means for inputting an output voltage reference value of a collector power supply and an operation signal of a semiconductor switch, converting the output voltage reference value of the collector power supply into a reference value pattern stored in advance, and outputting the same. It has.

Therefore, in the gyrotron power supply device according to the first aspect of the present invention, the output voltage reference value of the collector power supply is converted into a reference value pattern stored in advance, thereby temporarily increasing the output voltage of the collector power supply. Even if the output voltage drops, the stable output voltage of the collector power supply can be obtained and the difference from the output voltage of the body power supply can be kept at a predetermined value.Therefore, the energy recovery operation of the gyrotron does not become unstable. Without overcurrent
A stable gyrotron output operation can be obtained.

Further, the invention according to claim 2 includes means for controlling a difference between an output voltage of the collector power supply detected by the voltage detection means and an output voltage of the body power supply detected by the voltage detection means to a predetermined value. ing.

Therefore, in the gyrotron power supply device according to the second aspect of the present invention, the output voltage of the collector power supply fluctuates by controlling the difference between the output voltage of the collector power supply and the output voltage of the body power supply to a predetermined value. However, if the output voltage of the body power supply follows this fluctuation and the difference between the output voltage of the collector power supply and the output voltage of the body power supply can be maintained at a predetermined value, the energy recovery operation of the gyrotron becomes unstable. As a result, a stable gyrotron output operation can be obtained without the body power supply becoming overcurrent.

Further, the invention according to claim 3 further comprises means for detecting a deviation between an output voltage reference value of the collector power supply and an output voltage of the collector power supply detected by the voltage detecting means.
The deviation detected by the above means is added to the output voltage reference value of the body power supply.

Therefore, in the gyrotron power supply device according to the third aspect of the present invention, the deviation between the output voltage reference of the collector power supply and the output voltage of the collector power supply is added to the output voltage reference value of the body power supply, thereby obtaining the collector power supply. Even if the output voltage fluctuates, the difference between the output voltage of the collector power supply and the output voltage of the body power supply can be controlled to a predetermined value, so that the energy recovery operation of the gyrotron does not become unstable and the body power supply A stable gyrotron output operation can be obtained without overcurrent.

On the other hand, the invention according to claim 4 further comprises means for detecting and amplifying a deviation between the output voltage reference value of the collector power supply and the output voltage of the collector power supply detected by the voltage detecting means, and amplifying by the means. The deviation is added to the output of the constant voltage control means of the body power supply.

Therefore, in the gyrotron power supply device according to the present invention, the deviation between the reference voltage of the collector power supply and the output voltage of the collector power supply is amplified and added to the output of the constant voltage control means of the body power supply. By doing so, even if the output voltage of the collector power supply fluctuates, the output voltage of the body power supply can be transiently controlled, so that the difference between the output voltage of the collector power supply and the output voltage of the body power supply can be temporarily suppressed. As a result, the energy recovery operation of the gyrotron does not become unstable, and the body power supply does not become overcurrent,
A stable gyrotron output operation can be obtained.

According to a fifth aspect of the present invention, there is provided means for detecting a deviation between the output voltage reference value of the collector power supply and the output current of the collector power supply detected by the current detecting means. It is added to the output voltage reference value of the body power supply.

Therefore, in the gyrotron power supply device according to the fifth aspect of the invention, since the gyrotron serving as a load can be considered as a pure resistor, when the output voltage of the power supply changes, the output current also changes at the same rate. Therefore, by adding the deviation between the output voltage reference value of the collector power supply and the output current of the collector power supply to the output voltage reference value of the body power supply, even if the output voltage of the collector power supply fluctuates, the output voltage of the collector power supply and the body voltage Since the difference between the output voltage of the power supply and the output voltage of the power supply can be controlled to a predetermined value, the energy recovery operation of the gyrotron does not become unstable, and the output operation of the gyrotron can be stabilized without overcurrent of the body power supply. Obtainable.

Further, according to the invention of claim 6, there is provided a means for detecting and amplifying a deviation between the output voltage reference value of the collector power supply and the output current of the collector power supply detected by the current detecting means, and amplifying by the means. The deviation is added to the output of the constant voltage control means of the body power supply.

Therefore, in the gyrotron power supply device according to the sixth aspect of the invention, since the gyrotron serving as a load can be considered as a pure resistor, when the output voltage of the power supply changes, the output current also changes at the same rate. Therefore, the deviation between the output voltage reference value of the collector power supply and the output current of the collector power supply is amplified and added to the output of the constant voltage control means of the body power supply. Since the output voltage of the body power supply can be controlled, the difference between the output voltage of the collector power supply and the output voltage of the body power supply can be temporarily suppressed, so that the energy recovery operation of the gyrotron does not become unstable, A stable gyrotron output operation can be obtained without overcurrent of the body power supply.

On the other hand, in the invention of claim 7, when the gyrotron power supply main body is normally stopped, there is provided a means for stopping the anode power supply and the body power supply and then stopping the collector power supply after a fixed time.

Therefore, in the gyrotron power supply device according to the seventh aspect of the present invention, when the gyrotron power supply main body is stopped, the output of the collector power supply is delayed later than the body power supply, so that the energy recovery operation of the gyrotron is unstable. Therefore, the gyrotron power supply main body can be stopped normally without an overcurrent of the body power supply.

Further, the invention according to claim 8 is provided with means for starting the operation of the anode power supply on condition that it is detected that the output voltage of the body power supply detected by the voltage detection means has reached a predetermined value. I have.

Therefore, in the gyrotron power supply device according to the eighth aspect of the present invention, the operation start time of the anode power supply is set to the time when the output voltage of the body power supply reaches a predetermined value. Since the output of the gyrotron can be raised smoothly without rising before the output voltage of the power supply, a stable gyrotron output operation can be obtained.

[0052]

Embodiments of the present invention will be described below in detail with reference to the drawings. (First Embodiment: Corresponding to Claim 1) FIG. 1 is a block diagram showing an example of the configuration of a gyrotron power supply device according to the present embodiment. A description thereof is omitted, and only different portions will be described here.

That is, the gyrotron power supply device of the present embodiment has a configuration in which a reference value conversion circuit 42 is added to the collector power supply 1 in FIG. 12, as shown in FIG.

The reference value conversion circuit 42 receives the collector output voltage reference value 51 and the GTO operation signal 52, converts the collector output voltage reference value 51 into a reference value pattern stored in advance, and outputs it.

Next, the operation of the gyrotron power supply device according to the present embodiment configured as described above will be described. In FIG. 1, when a collector output voltage reference value 51 is inputted to a reference value conversion circuit 42, the reference value conversion circuit 42 converts the reference value pattern into a reference value pattern stored in advance corresponding to the value of the collector output voltage reference value 51. Output. The converted reference value pattern is a reference value that is higher by an output voltage that drops when the GTOs 101 to 10n are turned on.

Next, the output voltage of the rectifier 4 is controlled by the thyristor switch 2 so as to be a reference value pattern from the reference value conversion circuit 42. And in this state, GTO
When the operation signal 52 is issued, the reference value conversion circuit 42
It is converted into a collector output voltage reference value 51 and output.

When the GTO operation signal 52 is turned off,
The output of the reference value conversion circuit 42 is stored in the reference value conversion circuit 42 so as to return to the reference value pattern. That is,
Only when the GTO operation signal 52 is on, the reference value conversion circuit 42 outputs the value of the collector output voltage reference value 51 as it is, and when the GTO operation signal 52 is off, the GTO1
A reference value pattern that is higher by an output voltage that falls when 01 to 10n are turned on is output.

In this configuration, when the GTO operation signal 52 is issued, the GTOs 101 to 10n are turned on, and a voltage is applied to the load 11. When the output voltage rises at this time, the output voltage of the rectifier 4 becomes GTO 101-1.
Since the voltage is controlled to be higher by the output voltage that drops when 0n is turned on, this voltage is about to be output.

However, since the collector power supply 1 includes the voltage control circuit 8, this overvoltage is suppressed when the output voltage rises. However, the controllable time is limited by the non-linear resistor provided in the voltage control circuit 8, and continuous control cannot be performed.

On the other hand, the output voltage of the rectifier 4 drops at the moment when the current is supplied to the load 11, but this voltage value is about the collector output voltage reference value 51, as described above, and returns to the original value. During this time, the output of the reference value conversion circuit 42 outputs the value of the collector output voltage reference value 51 according to the GTO operation signal 52, so that the output voltage of the rectifier 4 becomes equal to the value of the collector output voltage reference value 51. Is controlled by the thyristor switch 2.

As described above, the control response of the thyristor switch 2 is not fast, but it is sufficient if the control can be performed within the withstand time of the nonlinear resistor provided in the voltage control circuit 8.
It is enough.

Next, the GTO operation signal 52 is turned off and the GT
After the power to the load 1 is cut off by O101 to 10n, the output of the reference value conversion circuit 42 becomes GTO101 to 10
In order to return to the reference value pattern before n was turned on, the rectifier 4
Is also controlled by the thyristor switch 2 so as to return to this reference value pattern.

FIG. 2 is a diagram showing operation waveforms of various parts in the gyrotron power supply device according to the present embodiment. 2, the dotted line portion of the output signal of the reference value conversion circuit 42 indicates the value of the collector output voltage reference value 51.

The dotted line of the output voltage of the collector power supply 1 indicates the voltage controlled by the voltage control circuit 8. As described above, in the gyrotron power supply of the present embodiment,
A reference value conversion circuit 4 for converting the collector output voltage reference value 51 into a reference value pattern stored in advance and outputting the same.
2, even if the output voltage temporarily drops when the output voltage of the collector power supply 1 rises, a stable output voltage of the collector power supply 1 is obtained, and the difference between the output voltage of the body power supply 31 and the output voltage of the body power supply 31 is set to a predetermined value. , The energy recovery operation of the gyrotron does not become unstable, and a stable gyrotron output operation can be obtained without the body power supply 31 becoming overcurrent.

(Second Embodiment: Corresponding to Claim 2) FIG. 3 is a block diagram showing an example of the configuration of a gyrotron power supply device according to the present embodiment. The description is omitted here, and only different parts will be described here.

That is, in the gyrotron power supply device of the present embodiment, as shown in FIG. 3, an output voltage reference bias circuit 43 is added to the body power supply 31 in FIG. And an output signal from the voltage detector 6 of the collector power supply 1 are input to an arithmetic circuit 38 of the body power supply 31.

In other words, the output voltage reference value 54 of the body power supply 31 becomes the output voltage value of the rectifier 4 of the collector power supply 1, and the output voltage reference bias circuit 43 outputs the output voltage of the collector power supply 1 and the output voltage of the body power supply 31. Is controlled to an arbitrary value and input to the arithmetic circuit 38.

Next, the operation of the gyrotron power supply device of the present embodiment configured as described above will be described. In FIG. 3, the output voltage of the body power supply 31 is different from the output voltage value of the collector power supply 1 by the output voltage reference bias circuit 4.
The self-excited inverter 34 is controlled by the constant voltage control circuit 39 and the pulse width modulation circuit 40 so that the output is increased by the predetermined voltage set in Step 3.

By operating as described above, the body power supply 3
1 uses the output voltage value of the collector power supply 1 as the output voltage reference value, so that even if the output voltage of the collector power supply 1 fluctuates,
Since the output voltage of the body power supply 31 can always be controlled to be higher than the output voltage of the collector power supply 1 by a predetermined voltage set by the output voltage reference bias circuit 43, the output voltage of the collector power supply 1 and the output of the body power supply 31 The difference from the voltage can be kept at a predetermined value.

As described above, in the gyrotron power supply device of the present embodiment, the output voltage reference bias circuit 43 for controlling the difference between the output voltage of the collector power supply 1 and the output voltage of the body power supply 31 to an arbitrary value is provided. Therefore, even if the output voltage of the collector power supply 1 fluctuates, the output voltage of the body power supply 31 follows the fluctuation, and the difference between the output voltage of the collector power supply 1 and the output voltage of the body power supply 31 is determined by a predetermined value. Since the value can be maintained, the energy recovery operation of the gyrotron does not become unstable, and a stable gyrotron output operation can be obtained without the body power supply 31 becoming overcurrent.

(Third Embodiment: Corresponding to Claim 3) FIG. 4 is a block diagram showing a configuration example of a gyrotron power supply device according to the present embodiment, and the same parts as those in FIG. The description is omitted here, and only different parts will be described here.

That is, in the gyrotron power supply device of the present embodiment, as shown in FIG. 4, a differential detection circuit 44 is added to the collector power supply 1 in FIG.
Output signal from the arithmetic circuit 3 of the body power supply 31
8 is input.

The differential detection circuit 44 detects a deviation between the collector output voltage reference value 51 and the output signal from the voltage detector 6 of the collector power supply 1, and adds this difference to the body output voltage reference value 54. I do.

Next, the operation of the gyrotron power supply device according to the present embodiment configured as described above will be described. In FIG. 4, as described above, when the output voltage of the collector power supply 1 rises, the output voltage temporarily drops, but the thyristor switch 2 controls this drop to return to a predetermined voltage.

The differential detection circuit 44 detects the difference between the collector output voltage reference value 51 and the output signal from the voltage detector 6, and inputs this to the arithmetic circuit 38 of the body power supply 31.
Thereby, the self-excited inverter 34 is controlled at high speed by the constant voltage control circuit 39 and the pulse width modulation circuit 40 so that the output voltage of the body power supply 31 increases and decreases by the value output from the differential detection circuit 44. .

By operating as described above, the body power supply 3
1 can be controlled so as to be increased or decreased by the value output from the differential detection circuit 44, so that the difference between the output voltage of the collector power supply 1 and the output voltage of the body power supply 31 is maintained at a predetermined value. Can be.

As described above, in the gyrotron power supply device of the present embodiment, the differential detection circuit 44 for detecting the deviation between the collector output voltage reference value 51 and the output voltage of the collector power supply 1 is provided. Since the deviation is added to the body output voltage reference value 54, even if the output voltage of the collector power supply 1 fluctuates, the difference between the output voltage of the collector power supply 1 and the output voltage of the body power supply 31 is controlled to a predetermined value. Therefore, the energy recovery operation of the gyrotron does not become unstable, and a stable output operation of the gyrotron can be obtained without overcurrent of the body power supply 31.

(Fourth Embodiment: Corresponding to Claim 4) FIG. 5 is a block diagram showing an example of the configuration of a gyrotron power supply device according to the present embodiment. The description is omitted here, and only different parts will be described here.

That is, in the gyrotron power supply device of the present embodiment, as shown in FIG. 5, a differential detection circuit 44 is added to the collector power supply 1 in FIG. 12, and an operational amplifier circuit 45 is added to the body power supply 31. And the operational amplifier circuit 4
5 is added to the output of the constant voltage control circuit 39 of the body power supply 31.

The differential detection circuit 44 detects a deviation between the collector output voltage reference value 51 and an output signal from the voltage detector 6 of the collector power supply 1. The operational amplifier circuit 45 amplifies the deviation detected by the differential detection circuit 44 and adds the amplified deviation to the output of the constant voltage control circuit 39 of the body power supply 31.

Next, the operation of the gyrotron power supply of the present embodiment configured as described above will be described. In FIG. 5, the differential detection circuit 44 detects a difference between the collector output voltage reference value 51 and the output voltage signal from the voltage detector 6, and inputs this to the operational amplifier circuit 45 of the body power supply 31.

The operational amplifier circuit 45 inputs and amplifies the deviation (increase / decrease value) detected by the differential detection circuit 44, and limits the deviation to a constant value. That is, in the operational amplifier circuit 45, the deviation (increase / decrease value) detected by the differential detection circuit 44 is determined by the body power supply 3
The output value is adjusted so that only the control amount necessary to transiently correct the output voltage of No. 1 by the above-described increase or decrease value is input to the pulse width modulation circuit 40.

In this case, if the output value of the operational amplifier circuit 45 is too large, high gain control is performed and the control system becomes unstable. Therefore, the upper limit of the correction value is limited. That is, when the output voltage value of the collector power supply 1 temporarily increases or decreases with respect to the collector output voltage reference value 51, an increase / decrease value which is a deviation is detected, and a correction value for the increase / decrease value is limited. By controlling the circuit 40, the body power 31
Can be transiently controlled at a high speed by the above-mentioned increase / decrease value. The fluctuation of the output voltage of the collector power supply 1 is temporary, and there is no problem if the control can be performed transiently.

By operating as described above, the body power supply 3
1 can be transiently controlled at a high speed by the deviation (increase / decrease value) output from the differential detection circuit 44. Therefore, the difference between the output voltage of the collector power supply 1 and the output voltage of the body power supply 31 is determined. It can be kept at a predetermined value.

As described above, in the gyrotron power supply device of the present embodiment, the differential detection circuit 44 and the operational amplification circuit 45 which detect and amplify the difference between the collector output voltage reference value 51 and the output voltage of the collector power supply 1 And the deviation detected and amplified is added to the output of the constant voltage control circuit 39 of the body power supply 31.
Even if the output voltage fluctuates, the output voltage of the body power supply 31 can be transiently controlled, so that the difference between the output voltage of the collector power supply 1 and the output voltage of the body power supply 31 can be temporarily suppressed. The energy recovery operation of the gyrotron does not become unstable, and a stable gyrotron output operation can be obtained without the body power supply 31 becoming overcurrent.

(Fifth Embodiment: Corresponding to Claim 5) FIG. 6 is a block diagram showing an example of the configuration of a gyrotron power supply device according to this embodiment. The description is omitted here, and only different parts will be described here.

That is, in the gyrotron power supply device according to the present embodiment, as shown in FIG. 6, a differential detection circuit 47 is added to the collector power supply 1 in FIG.
7 from the arithmetic circuit 3 of the body power supply 31.
8 is input.

The differential detection circuit 47 detects a deviation between the collector output voltage reference value 51 and the output signal from the current detector 12 of the collector power supply 1, and adds this difference to the body output voltage reference value 54. I do.

Next, the operation of the gyrotron power supply of the present embodiment configured as described above will be described. In FIG. 6, as described above, when the output voltage of the collector power supply 1 rises, the output voltage temporarily drops, but the thyristor switch 2 controls this drop to return to a predetermined voltage. Since the gyrotron serving as the load 11 can be considered as a pure resistor, when the output voltage of the collector power supply 1 changes, the output current also changes at a similar rate.

That is, the differential detection circuit 47 can detect the difference between the collector output voltage reference value 51 and the actual output voltage of the collector power supply 1 at the same level. The differential detection circuit 47 detects a difference between the collector output voltage reference value 51 and an output signal from the current detector 12. The output of the differential detection circuit 47 is output only when the GTO operation signal 52 is ON, and the output from the differential detection circuit 47 is input to the arithmetic circuit 38 of the body power supply 31.

Thus, the self-excited inverter 34 is operated at high speed by the constant voltage control circuit 39 and the pulse width modulation circuit 40 so that the output voltage of the body power supply 31 increases or decreases by the value output from the differential detection circuit 47. Controlled.

By operating as described above, the body power supply 3
1 can be controlled so as to increase or decrease by the value output from the differential detection circuit 47. Therefore, the difference between the output voltage of the collector power supply 1 and the output voltage of the body power supply 31 is maintained at a predetermined value. Can be.

As described above, in the gyrotron power supply device according to the present embodiment, the gyrotron serving as the load 11 can be considered as a pure resistor, so that when the output voltage of the power supply changes, the output current also changes at the same rate. Therefore, a differential detection circuit 47 for detecting a deviation between the collector output voltage reference value 51 and the output current of the collector power supply 1 is provided, and the detected deviation is added to the body output voltage reference value 54. , Even if the output voltage of the collector power supply 1 fluctuates,
Since the difference between the output voltage of the collector power supply 1 and the output voltage of the body power supply 31 can be controlled to a predetermined value, the energy recovery operation of the gyrotron does not become unstable, and the body power supply 31 becomes overcurrent. Therefore, a stable gyrotron output operation can be obtained.

(Sixth Embodiment: Corresponding to Claim 6) FIG. 7 is a block diagram showing an example of the configuration of a gyrotron power supply device according to the present embodiment. The description is omitted here, and only different parts will be described here.

That is, in the gyrotron power supply device of the present embodiment, as shown in FIG. 7, a differential detection circuit 47 is added to the collector power supply 1 in FIG. 12, and an operational amplifier circuit 48 is added to the body power supply 31. And the operational amplifier circuit 4
8 is added to the output of the constant voltage control circuit 39 of the body power supply 31.

The differential detection circuit 47 detects a deviation between the collector output voltage reference value 51 and an output signal from the current detector 12 of the collector power supply 1. The operational amplifier circuit 48
The deviation detected by the differential detection circuit 47 is amplified, and the amplified deviation is used as the constant voltage control circuit 39 of the body power supply 31.
To the output of.

Next, the operation of the gyrotron power supply device of the present embodiment configured as described above will be described. 7, a differential detection circuit 47 detects a difference between a collector output voltage reference value 51 and an output signal from the current detector 12, and inputs the difference to an operational amplifier circuit 48 of the body power supply 31.

The operational amplifier circuit 48 receives and amplifies the deviation (increase / decrease value) detected by the differential detection circuit 47, and limits the deviation to a constant value. That is, the operational amplifier circuit 48 uses the deviation (increase / decrease value) detected by the differential detection circuit 47 as the body power supply 3
The output value is adjusted so that only the control amount necessary to transiently correct the output voltage of No. 1 by the above-described increase or decrease value is input to the pulse width modulation circuit 40.

In this case, if the output value of the operational amplifier circuit 48 is too large, high gain control is performed and the control system becomes unstable. Therefore, the upper limit of the correction value is limited. That is, when the output voltage value of the collector power supply 1 temporarily increases or decreases with respect to the collector output voltage reference value 51, an increase / decrease value which is a deviation is detected, and a correction value for the increase / decrease value is limited. By controlling the circuit 40, the body power supply 3
1 can be transiently controlled at a high speed by the above-mentioned increase or decrease. The fluctuation of the output voltage of the collector power supply 1 is temporary, and there is no problem if the control can be performed transiently.

By operating as described above, the body power supply 3
1 can be transiently controlled at a high speed by the deviation (increase / decrease value) output from the differential detection circuit 47. Therefore, the difference between the output voltage of the collector power supply 1 and the output voltage of the body power supply 31 is determined. It can be kept at a predetermined value.

As described above, in the gyrotron power supply device according to the present embodiment, the gyrotron serving as the load 11 can be considered as a pure resistor. Therefore, when the output voltage of the power supply fluctuates, the output current fluctuates at the same rate. Therefore, a differential detection circuit 47 and an operational amplifier circuit 48 for detecting and amplifying the difference between the collector output voltage reference value 51 and the output current of the collector power supply 1 are provided. Is added to the output of the constant voltage control circuit 39, so that even if the output voltage of the collector power supply 1 fluctuates, the output voltage of the body power supply 31 can be transiently controlled. Since the difference with the output voltage of the power supply 31 can be temporarily suppressed, the energy recovery operation of the gyrotron does not become unstable, and the body power supply 31 Without a, it is possible to obtain an output operation stable gyrotron.

(Seventh Embodiment: Corresponding to Claim 7) FIG. 8 is a block diagram showing an example of the configuration of a gyrotron power supply device according to the present embodiment. The description is omitted here, and only different parts will be described here.

That is, in the gyrotron power supply device of the present embodiment, as shown in FIG. 8, an off-time delay circuit 49 is added to the collector power supply 1 in FIG. G of GTO unit 7
The input is made to the TOs 101 to 10n.

The off-time delay circuit 49 receives the GTO operation signal 52, outputs the same state when the GT0 operation signal 52 is on, and delays the off-time only when the GT0 operation signal 52 is off. I do. In the off-time delay circuit 49, an arbitrary time is set.

In other words, when the gyrotron power supply main body is normally stopped, the collector power supply 1 is stopped after a certain period of time after the anode power supply 21 and the body power supply 31 are stopped.

Next, the operation of the gyrotron power supply device of the present embodiment configured as described above will be described with reference to an operation waveform diagram shown in FIG. 9, when the GTO operation signal 52 is turned on, the output signal of the off-time delay circuit 49 is turned on at the same timing as the GTO operation signal 52, and drives the GTOs 101 to 10n to supply power to the load 11.

Next, when the GTO operation signal 52 is turned off,
The output signal of the off-time delay circuit 49 is turned off with a delay of the time Δt1 set by the off-time delay circuit 49. The operation signal of the thyristor switch 2 is also turned off at this timing.

In this case, the time Δt1 set by the off-time delay circuit 49 is such that the output voltage of the body power supply 31 is substantially zero volt.
The timing may be set to That is, when the output of the power supply 1 is cut off at a timing when the output voltage of the body power supply 31 becomes substantially zero V, the reverse bias voltage does not increase when the gyrotron power supply main body is stopped, and the body power supply 31 can be safely stopped without an overcurrent.

However, although not shown, the collector power supply 1
It is necessary to instantaneously shut off the GTOs 101 to 10n and the thyristor switch 2 when an error that requires the collector power supply 1 to be shut off instantaneously occurs, for example, in the event of an abnormality.

As described above, in the gyrotron power supply device of the present embodiment, when the gyrotron power supply main body is normally stopped, the collector power supply 1 is turned off after a fixed time after the anode power supply 21 and the body power supply 31 are stopped. Since the off-time delay circuit 49 for stopping is provided, the gyrotron energy recovery operation does not become unstable, and the gyrotron power supply device main body can be stopped normally without the body power supply 31 becoming overcurrent. Becomes

(Eighth Embodiment: Corresponding to Claim 8) FIG. 10 is a block diagram showing an example of the configuration of a gyrotron power supply device according to this embodiment. The description is omitted here, and only different parts will be described here.

That is, as shown in FIG. 10, the gyrotron power supply device of the present embodiment has a configuration in which a level detection circuit 60 and an AND circuit 61 are added to the anode power supply 21 in FIG.

The level detection circuit 60 is connected to the body power supply 3
When it is detected that the value of the output signal from the first voltage detector 37 has reached a predetermined value, an output is generated. AND circuit 61
Receives the output from the level detection circuit 60 and the anode power supply operation signal 56, and issues a final anode power supply operation signal for starting the operation of the anode power supply 31 when the AND condition of both is satisfied.

In other words, the operation of the anode power supply 21 is started on condition that it is detected that the output voltage of the body power supply 31 has reached a predetermined value. next,
The operation of the gyrotron power supply device according to the present embodiment configured as described above will be described.

In FIG. 10, the anode power supply operation signal 5
When the output voltage of the body power supply 31 reaches a value set by the level detection circuit 60 in a state where the signal 6 is issued, a final anode power supply operation signal is issued from the AND circuit 61 and the anode power supply 21 is operated. Power is supplied to the load 11.

In this case, the value set by the level detection circuit 60 is set to an arbitrary value equal to or higher than the value at which the output voltage of the anode power supply 21 does not become higher than the output voltage of the body power supply 31.

By operating as described above, when the output voltage of the gyrotron power supply main body rises, the anode power supply 2
1 does not become higher than the output voltage of the body power supply 31, and a stable and smooth gyrotron output operation can be obtained.

As described above, in the gyrotron power supply according to the present embodiment, the level detection for starting the operation of the anode power supply 21 is performed on condition that the output voltage of the body power supply 31 reaches a predetermined value. Since the circuit 60 and the AND circuit 61 are provided, the output voltage of the anode power supply 21 does not rise before the output voltage of the body power supply 31, and the output of the gyrotron can be smoothly started up. Can be obtained.

(Another Example of Eighth Embodiment: Corresponding to Claim 8) FIG. 11 is a block diagram showing a configuration example of a gyrotron power supply device according to the present embodiment. Are denoted by the same reference numerals and description thereof is omitted, and only different portions will be described here.

That is, as shown in FIG. 10, the gyrotron power supply device of the present embodiment has a configuration in which an operation time delay circuit 62 and an AND circuit 63 are added to the anode power supply 21 in FIG.

The operation time delay circuit 62 receives the body power supply operation signal 57 and outputs an output after a certain period of time. The AND circuit 63 receives the output from the operation time delay circuit 62 and the anode power supply operation signal 56, and the final anode power supply operation signal for starting the operation of the anode power supply 31 when the AND condition of both of them is satisfied. Emits.

In other words, the operation of the anode power supply 21 is started on condition that it is detected that the output voltage of the body power supply 31 has reached a predetermined value. next,
The operation of the gyrotron power supply device according to the present embodiment configured as described above will be described.

In FIG. 11, the anode power supply operation signal 5
When the body power supply operation signal 57 is input to the operation time delay circuit 62 in a state where the
After a certain period of time set in 2, a final anode power supply operation signal is issued from the AND circuit 63 to operate the anode power supply 21 and supply power to the load 11.

In this case, the value set by the operation time delay circuit 62 is set to an arbitrary time equal to or more than a value at which the output voltage of the anode power supply 21 does not become higher than the output voltage of the body power supply 31.

By operating as described above, when the output voltage of the gyrotron power supply main body rises, the anode power supply 2
1 does not become higher than the output voltage of the body power supply 31, and a stable and smooth gyrotron output operation can be obtained.

As described above, in the gyrotron power supply device of the present embodiment, the operation time for starting operation of the anode power supply 21 on condition that the output voltage of the body power supply 31 reaches a predetermined value is detected. Since the delay circuit 62 and the AND circuit 63 are provided, the output voltage of the anode power supply 21 does not rise earlier than the output voltage of the body power supply 31, and the output of the gyrotron can be smoothly started up. The output operation of TRON can be obtained.

[0127]

As described above, according to the first aspect of the present invention, the output voltage reference value of the collector power supply is converted into a reference value pattern stored in advance. Even if the output voltage drops temporarily during power up, a stable output voltage of the collector power supply can be obtained, and the difference from the output voltage of the body power supply can be kept at a predetermined value, so that the energy recovery operation of the gyrotron does not become unstable Thus, a stable gyrotron output operation can be obtained without the body power supply becoming overcurrent.

According to the second aspect of the present invention, the difference between the output voltage of the collector power supply and the output voltage of the body power supply is controlled to a predetermined value, so that even if the output voltage of the collector power supply fluctuates. Since the output voltage of the body power supply follows this variation and the difference between the output voltage of the collector power supply and the output voltage of the body power supply can be maintained at a predetermined value, the energy recovery operation of the gyrotron does not become unstable, A stable gyrotron output operation can be obtained without the body power supply becoming overcurrent.

Further, according to the third aspect of the invention, the deviation between the output voltage reference of the collector power supply and the output voltage of the collector power supply is added to the output voltage reference value of the body power supply. Even if the power supply fluctuates, the difference between the output voltage of the collector power supply and the output voltage of the body power supply can be controlled to a predetermined value, so that the energy recovery operation of the gyrotron does not become unstable and the body power supply According to the fourth aspect of the present invention, the deviation between the output voltage reference value of the collector power supply and the output voltage of the collector power supply can be amplified to obtain a stable output operation of the gyrotron. Is added to the output of the constant voltage control means, so that even if the output voltage of the collector power supply fluctuates, the output voltage of the body power supply can be controlled transiently, Since the difference between the power voltage and the output voltage of the body power supply can be temporarily suppressed, the energy recovery operation of the gyrotron does not become unstable, and the An output operation can be obtained.

According to the fifth aspect of the present invention, the deviation between the output voltage reference value of the collector power supply and the output current of the collector power supply is added to the output voltage reference value of the body power supply. Even if the voltage fluctuates, the difference between the output voltage of the collector power supply and the output voltage of the body power supply can be controlled to a predetermined value, so that the energy recovery operation of the gyrotron does not become unstable and the body power supply becomes excessive. According to the sixth aspect of the present invention, it is possible to obtain a stable output operation of the gyrotron without generating a current. Addition to the output of the constant voltage control means of the power supply allows the output voltage of the body power supply to be transiently controlled even if the output voltage of the collector power supply fluctuates. Since the difference between the output voltage and the output voltage of the body power supply can be temporarily suppressed, the energy recovery operation of the gyrotron does not become unstable, and the body power supply does not become overcurrent and the stable gyrotron An output operation can be obtained.

On the other hand, according to the seventh aspect of the invention, when the gyrotron power supply main body is stopped, the output of the collector power supply is cut off later than the body power supply, so that the energy recovery operation of the gyrotron becomes unstable. Thus, the gyrotron power supply main body can be normally stopped without an overcurrent of the body power supply.

According to the invention of claim 8, since the operation start time of the anode power supply is set to the time when the output voltage of the body power supply reaches a predetermined value, the output voltage of the anode power supply becomes Since the output of the gyrotron can be smoothly raised without rising before the output voltage, a stable gyrotron output operation can be obtained.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a first embodiment of a gyrotron power supply device according to the present invention.

FIG. 2 is a diagram showing operation waveforms of each unit in the gyrotron power supply device according to the first embodiment.

FIG. 3 is a block diagram showing a gyrotron power supply device according to a second embodiment of the present invention.

FIG. 4 is a block diagram showing a gyrotron power supply device according to a third embodiment of the present invention.

FIG. 5 is a block diagram showing a gyrotron power supply device according to a fourth embodiment of the present invention.

FIG. 6 is a block diagram showing a gyrotron power supply device according to a fifth embodiment of the present invention.

FIG. 7 is a block diagram showing a gyrotron power supply device according to a sixth embodiment of the present invention.

FIG. 8 is a block diagram showing a gyrotron power supply device according to a seventh embodiment of the present invention.

FIG. 9 is a diagram showing operation waveforms of each unit in the gyrotron power supply device according to the seventh embodiment.

FIG. 10 shows an eighth embodiment of the gyrotron power supply device according to the present invention.
FIG. 2 is a block diagram showing an embodiment.

FIG. 11 is a block diagram showing another configuration example of the gyrotron power supply device according to the eighth embodiment.

FIG. 12 is a block diagram showing a configuration example of a conventional gyrotron power supply device.

FIG. 13 is a diagram showing operation waveforms of various parts in a conventional gyrotron power supply device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Collector power supply, 2 ... Thyristor switch, 3, 25, 35 ... Step-up transformer, 4, 22, 26, 32, 36 ... Rectifier, 5 ... Smoothing capacitor, 6, 27, 37 ... Voltage detector, 7 ... GTO unit, 8: voltage control circuit, 9: DC reactor, 10: diode, 11: load, 12: current detector, 13, 28, 38: arithmetic circuit, 14, 29, 39: constant voltage control circuit, 15: Phase control circuit 101 to 10n GT0, 21 Anode power supply, 23, 33 Chopper circuit, 24, 34 Self-excited inverter, 30, 40 Pulse width modulation circuit, 31 Body power supply, 41A, 41B Electrostatic 42, a reference value conversion circuit, 43, an output voltage reference bias circuit, 44, 47, a differential detection circuit, 45, 48, an operational amplifier circuit, 49, an off-time delay circuit, 1: Collector output voltage reference value, 52: GTO operation signal, 53: Anode output voltage reference value, 54: Body output voltage reference value, 56: Anode power supply operation signal, 57: Body power supply operation signal, 60: Level detection circuit, 61, 63: AND circuit, 62: Operating time delay circuit.

Claims (8)

[Claims] 1. A gyrotron serving as a load having a cathode electrode, an anode electrode, a body electrode, and a collector electrode, and a DC output rectified by a rectifier by inputting an AC power supply, and a smoothing capacitor connected in parallel to the rectifier. A voltage control device comprising: a plurality of serially connected semiconductor switches provided between the rectifier and the gyrotron; and a voltage sharing element including a non-linear resistor connected in parallel to the semiconductor switches. A collector power supply for supplying power to the collector electrode of the gyrotron through a circuit; an anode power supply for supplying power to an anode electrode of the gyrotron; and a body power supply for supplying power to a body electrode of the gyrotron. The output voltages of the collector power supply, the anode power supply, and the body power supply are individually detected. Voltage detecting means, and constant voltage controlling means for keeping the output voltages of the collector power supply, the anode power supply, and the body power supply respectively constant based on the output voltages detected by the voltage detecting means, respectively. In the gyrotron power supply device, an output voltage reference value of the collector power supply and an operation signal of the semiconductor switch are input, and the output voltage reference value of the collector power supply is converted into a reference value pattern stored in advance and output. A gyrotron power supply device comprising reference value conversion means. 2. A gyrotron as a load having a cathode electrode, an anode electrode, a body electrode, and a collector electrode, and a smoothing capacitor connected in parallel to the rectifier, which receives an AC power supply and rectifies a DC output rectified by the rectifier. A voltage control device comprising: a plurality of serially connected semiconductor switches provided between the rectifier and the gyrotron; and a voltage sharing element including a non-linear resistor connected in parallel to the semiconductor switches. A collector power supply for supplying power to the collector electrode of the gyrotron through a circuit; an anode power supply for supplying power to an anode electrode of the gyrotron; and a body power supply for supplying power to a body electrode of the gyrotron. The output voltages of the collector power supply, the anode power supply, and the body power supply are individually detected. Voltage detecting means, and constant voltage controlling means for keeping the output voltages of the collector power supply, the anode power supply, and the body power supply respectively constant based on the output voltages detected by the voltage detecting means, respectively. A gyrotron power supply device, comprising: means for controlling a difference between an output voltage of the collector power supply detected by the voltage detection means and an output voltage of the body power supply detected by the voltage detection means to a predetermined value. A gyrotron power supply. 3. A gyrotron serving as a load having a cathode electrode, an anode electrode, a body electrode, and a collector electrode, and a DC capacitor input with an AC power supply and rectified by a rectifier, and a smoothing capacitor connected in parallel to the rectifier. A voltage control device comprising: a plurality of serially connected semiconductor switches provided between the rectifier and the gyrotron; and a voltage sharing element including a non-linear resistor connected in parallel to the semiconductor switches. A collector power supply for supplying power to the collector electrode of the gyrotron through a circuit; an anode power supply for supplying power to an anode electrode of the gyrotron; and a body power supply for supplying power to a body electrode of the gyrotron. The output voltages of the collector power supply, the anode power supply, and the body power supply are individually detected. Voltage detecting means, and constant voltage controlling means for keeping the output voltages of the collector power supply, the anode power supply, and the body power supply respectively constant based on the output voltages detected by the voltage detecting means, respectively. A gyrotron power supply device, comprising: means for detecting a deviation between an output voltage reference value of the collector power supply and an output voltage of the collector power supply detected by the voltage detection means; and detecting the deviation detected by the means to the body power supply. A gyrotron power supply device, wherein the gyrotron power supply device is added to the output voltage reference value. 4. A gyrotron serving as a load having a cathode electrode, an anode electrode, a body electrode and a collector electrode, and a smoothing capacitor connected in parallel to the rectifier by inputting AC power and rectifying a DC output rectified by the rectifier. A voltage control device comprising: a plurality of serially connected semiconductor switches provided between the rectifier and the gyrotron; and a voltage sharing element including a non-linear resistor connected in parallel to the semiconductor switches. A collector power supply for supplying power to the collector electrode of the gyrotron through a circuit; an anode power supply for supplying power to an anode electrode of the gyrotron; and a body power supply for supplying power to a body electrode of the gyrotron. The output voltages of the collector power supply, the anode power supply, and the body power supply are individually detected. Voltage detecting means, and constant voltage controlling means for keeping the output voltages of the collector power supply, the anode power supply, and the body power supply respectively constant based on the output voltages detected by the voltage detecting means, respectively. A gyrotron power supply device, comprising: means for detecting and amplifying a deviation between an output voltage reference value of the collector power supply and an output voltage of the collector power supply detected by the voltage detecting means, wherein the deviation amplified by the means is A gyrotron power supply device, wherein the gyrotron power supply device is added to an output of a constant voltage control means of a body power supply. 5. A gyrotron serving as a load having a cathode electrode, an anode electrode, a body electrode, and a collector electrode, and a DC output rectified by a rectifier by inputting an AC power supply, and a smoothing capacitor connected in parallel to the rectifier. A voltage control device comprising: a plurality of serially connected semiconductor switches provided between the rectifier and the gyrotron; and a voltage sharing element including a non-linear resistor connected in parallel to the semiconductor switches. A collector power supply for supplying power to the collector electrode of the gyrotron through a circuit; an anode power supply for supplying power to an anode electrode of the gyrotron; and a body power supply for supplying power to a body electrode of the gyrotron. The output voltages of the collector power supply, the anode power supply, and the body power supply are individually detected. Voltage detecting means, and constant voltage controlling means for keeping the output voltages of the collector power supply, the anode power supply, and the body power supply respectively constant based on the output voltages detected by the voltage detecting means, respectively. A gyrotron power supply device, comprising: means for detecting a deviation between an output voltage reference value of the collector power supply and an output current of the collector power supply detected by current detection means; and detecting the deviation detected by the means to the body power supply. A gyrotron power supply device, wherein the gyrotron power supply device is added to the output voltage reference value. 6. A gyrotron serving as a load having a cathode electrode, an anode electrode, a body electrode, and a collector electrode, and a DC output rectified by a rectifier by inputting an AC power supply, and a smoothing capacitor connected in parallel to the rectifier. A voltage control device comprising: a plurality of serially connected semiconductor switches provided between the rectifier and the gyrotron; and a voltage sharing element including a non-linear resistor connected in parallel to the semiconductor switches. A collector power supply for supplying power to the collector electrode of the gyrotron through a circuit; an anode power supply for supplying power to an anode electrode of the gyrotron; and a body power supply for supplying power to a body electrode of the gyrotron. The output voltages of the collector power supply, the anode power supply, and the body power supply are individually detected. Voltage detecting means, and constant voltage controlling means for keeping the output voltages of the collector power supply, the anode power supply, and the body power supply respectively constant based on the output voltages detected by the voltage detecting means, respectively. A gyrotron power supply device, comprising: means for detecting and amplifying a deviation between an output voltage reference value of the collector power supply and an output current of the collector power supply detected by current detection means, and calculating the deviation amplified by the means. A gyrotron power supply device, wherein the gyrotron power supply device is added to an output of a constant voltage control means of a body power supply. 7. A gyrotron serving as a load having a cathode electrode, an anode electrode, a body electrode, and a collector electrode, and a DC output, which is supplied with an AC power supply and rectified by a rectifier, is connected in parallel to the rectifier. A voltage control device comprising: a plurality of serially connected semiconductor switches provided between the rectifier and the gyrotron; and a voltage sharing element including a non-linear resistor connected in parallel to the semiconductor switches. A collector power supply for supplying power to the collector electrode of the gyrotron through a circuit; an anode power supply for supplying power to an anode electrode of the gyrotron; and a body power supply for supplying power to a body electrode of the gyrotron. The output voltages of the collector power supply, the anode power supply, and the body power supply are individually detected. Voltage detecting means, and constant voltage controlling means for keeping the output voltages of the collector power supply, the anode power supply, and the body power supply respectively constant based on the output voltages detected by the voltage detecting means, respectively. A gyrotron power supply device, wherein when the gyrotron power supply device main body is normally stopped, means for stopping the anode power supply and the body power supply and stopping the collector power supply after a predetermined time has been provided. TRON power supply. 8. A gyrotron serving as a load having a cathode electrode, an anode electrode, a body electrode, and a collector electrode, and a DC output rectified by a rectifier by inputting an AC power supply, and a smoothing capacitor connected in parallel to the rectifier. A voltage control device comprising: a plurality of serially connected semiconductor switches provided between the rectifier and the gyrotron; and a voltage sharing element including a non-linear resistor connected in parallel to the semiconductor switches. A collector power supply for supplying power to the collector electrode of the gyrotron through a circuit; an anode power supply for supplying power to an anode electrode of the gyrotron; and a body power supply for supplying power to a body electrode of the gyrotron. The output voltages of the collector power supply, the anode power supply, and the body power supply are individually detected. Voltage detecting means, and constant voltage controlling means for keeping the output voltages of the collector power supply, the anode power supply, and the body power supply respectively constant based on the output voltages detected by the voltage detecting means, respectively. A gyrotron power supply device, comprising: means for starting the operation of the anode power supply on condition that the output voltage of the body power supply detected by the voltage detection means reaches a predetermined value. Gyrotron power supply.