JPH11156652A - Control system for automatic carrier - Google Patents

Control system for automatic carrier

Info

Publication number
JPH11156652A
JPH11156652A JP9329239A JP32923997A JPH11156652A JP H11156652 A JPH11156652 A JP H11156652A JP 9329239 A JP9329239 A JP 9329239A JP 32923997 A JP32923997 A JP 32923997A JP H11156652 A JPH11156652 A JP H11156652A
Authority
JP
Japan
Prior art keywords
automatic
agv
transfer
production line
vehicle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP9329239A
Other languages
Japanese (ja)
Inventor
Susumu Maetaki
進 前滝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Co Ltd
Original Assignee
Shinko Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Co Ltd filed Critical Shinko Electric Co Ltd
Priority to JP9329239A priority Critical patent/JPH11156652A/en
Publication of JPH11156652A publication Critical patent/JPH11156652A/en
Withdrawn legal-status Critical Current

Links

Landscapes

  • Automatic Assembly (AREA)
  • Manipulator (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)

Abstract

PROBLEM TO BE SOLVED: To facilitate the smooth running of even a number of automatic carriers used on the same production line by starting, if transfer work is carried out for parts or the like by one automatic carrier, transfer work by the other automatic carrier after load transfer work is finished by the one automatic carrier. SOLUTION: Automatic carriers AGV5 to 7 are moved in the path 21 of a production line 20, load specified part items among part items stored in a stocker 22 and transfer the same to the machine 23 of a specified work machine. On the same production line, the plurality of automatic carriers AGV5 to 7 are located close to each other and, when these carriers simultaneously carry out part item transfer work, if there is a possibility of interference between the arms of the transfer mechanisms of the automatic carriers AGV5 and 6, control is performed to prevent the other adjacent automatic carrier AGV6 from carrying out transfer work until the transfer work by the one automatic carrier AGV5 is finished.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、ロボットアーム
による移載機構を持つ自動搬送車の制御方式に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a control system for an automatic carrier having a transfer mechanism using a robot arm.

【0002】[0002]

【従来の技術】従来から工場内生産ライン、特にクリー
ンルームにおけるウエーハカセット等の搬送は、省力化
と生産ラインのクリーン度維持のため自動搬送車(Auto
maticGuided Vehicle、AGV)が使われることが多
い。
2. Description of the Related Art Conventionally, the transfer of a wafer cassette or the like in a production line in a factory, particularly in a clean room, has been performed by an automatic transfer vehicle (Auto) in order to save labor and maintain the cleanliness of the production line.
maticGuided Vehicle (AGV) is often used.

【0003】ここで使われる自動搬送車(AGV)は、
固有の生産ライン(以下、ベイと略称する)内専用機と
して稼働するものであり、稼働するベイ専用のプログラ
ムによって制御され動作するものであった。また、省力
化とクリーン度維持のため、生産ライン特にクリーンル
ーム等において主として半導体ウエーハカセット等のハ
ンドリングはロボットアームによる移載機構を持つ自動
搬送車(AGV)が使用されることが多い。
The automatic guided vehicle (AGV) used here is:
It operates as a dedicated machine in a unique production line (hereinafter abbreviated as a bay), and is controlled and operated by a program dedicated to the operating bay. In addition, in order to save labor and maintain cleanliness, an automatic transfer vehicle (AGV) having a transfer mechanism using a robot arm is often used mainly for handling semiconductor wafer cassettes and the like in a production line, particularly in a clean room.

【0004】生産ラインで使用される自動搬送車(AG
V)は、変復調器(モデム)と送受信機(トランシー
バ)を介した無線通信により自動搬送車(AGV)制御
装置から動作指令を受け取り、この動作指令に従って生
産ライン内の通路を所定の加工機械等の機械の前まで移
動し、ウエーハカセット等の部品の移載作業を行うよう
になっていた。
An automatic carrier (AG) used in a production line
V) receives an operation command from an automatic guided vehicle (AGV) control device by wireless communication via a modem (modem) and a transceiver (transceiver), and follows a path in a production line according to the operation command to a predetermined processing machine or the like. In order to transfer parts such as wafer cassettes.

【0005】[0005]

【発明が解決しようとする課題】ところが上述の方法で
は、生産ラインの通路において、複数台のロボットアー
ム付自動搬送車(AGV)が互いに近接した位置で作業
を行うとき、自動搬送車(AGV)の移載機構のロボッ
トアーム同士が接触して作業がスムーズに行えないとい
う問題点があり、その解決策が課題となっていた。
However, according to the above-mentioned method, when a plurality of automatic guided vehicles (AGVs) with robot arms work at positions close to each other in a passage of a production line, the automatic guided vehicles (AGV) are used. However, there is a problem that the robot arms of the transfer mechanism contact each other and work cannot be performed smoothly, and a solution has been a problem.

【0006】本発明はこのような背景の下になされたも
ので、複数台の自動搬送車(AGV)が近接した対向停
止位置に移動して移載作業を行うとき、1台の自動搬送
車(AGV)の移載作業が終了してから次の自動搬送車
(AGV)の移載作業を開始する、自動搬送車(AG
V)の制御方式を提供することを目的とする。
The present invention has been made under such a background, and when a plurality of automatic transport vehicles (AGVs) move to a close opposing stop position to perform a transfer operation, one automatic transport vehicle (AGV) is used. After the transfer operation of the (AGV) is completed, the transfer operation of the next automatic transfer vehicle (AGV) is started.
An object of the present invention is to provide a control method V).

【0007】[0007]

【課題を解決するための手段】上記課題を解決するため
本発明の請求項1は、複数の自動搬送車を有する生産ラ
インにおいて、前記複数の自動搬送車が近接した位置に
あるとき、一の自動搬送車が部品等の移載作業を行って
いれば、他の自動搬送車は前記一の自動搬送車が移載作
業を終了してから移載作業を開始することを特徴とする
自動搬送車の制御方式を提供する。
According to a first aspect of the present invention, there is provided a production line having a plurality of automatic transport vehicles, wherein when the plurality of automatic transport vehicles are located in close proximity to each other, one of the automatic transport vehicles is provided. If the automatic transport vehicle is performing a transfer operation of parts and the like, another automatic transport vehicle starts the transfer operation after the one automatic transport vehicle has completed the transfer operation. Provide vehicle control system.

【0008】また、請求項2の発明は、前記生産ライン
がクリーンルーム内の生産ラインであることを特徴とす
る請求項1に記載の自動搬送車の制御方式を提供する。
According to a second aspect of the present invention, there is provided the control system for an automatic guided vehicle according to the first aspect, wherein the production line is a production line in a clean room.

【0009】[0009]

【発明の実施の形態】以下、この発明の一実施形態につ
いて図を参照しながら説明する。図1は、この発明の一
実施形態による自動搬送車(AGV)の制御装置の構成
を示すブロック図である。この図において、符号1はホ
ストコンピュータであり、自動搬送車(AGV)コント
ローラ2に対して統括的に運行指令を発する。自動搬送
車(AGV)コントローラ2は、変復調器(モデム)3
および送受信機(トランシーバ)4を介して自動搬送車
(AGV)5、自動搬送車(AGV)6および自動搬送
車(AGV)7の運行と搬送の動作を制御する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram illustrating a configuration of a control device for an automatic guided vehicle (AGV) according to an embodiment of the present invention. In this figure, reference numeral 1 denotes a host computer, which issues an overall operation command to an automatic guided vehicle (AGV) controller 2. An automatic guided vehicle (AGV) controller 2 includes a modem (modem) 3
It controls the operation and transport operations of an automatic carrier vehicle (AGV) 5, an automatic carrier vehicle (AGV) 6, and an automatic carrier vehicle (AGV) 7 via a transceiver (transceiver) 4.

【0010】自動搬送車(AGV)5は、送受信機51
によって前記自動搬送車(AGV)コントローラ2から
の制御信号を受信し、モデム52を介して自動搬送車
(AGV)駆動部53をコントロールし、移載機構54
および、その他の機構を駆動する。また、自動搬送車
(AGV)6は、送受信機61によって前記自動搬送車
(AGV)コントローラ2からの制御信号を受信し、モ
デム62を介して自動搬送車(AGV)駆動部63をコ
ントロールし、移載機構64および、その他の機構を駆
動する。さらに、自動搬送車(AGV)7は、送受信機
71によって前記自動搬送車(AGV)コントローラ2
からの制御信号を受信し、モデム72を介して自動搬送
車(AGV)駆動部73をコントロールし、移載機構7
4および、その他の機構を駆動する。
An automatic guided vehicle (AGV) 5 includes a transceiver 51
The control signal is received from the automatic carrier (AGV) controller 2 via the modem 52, the automatic carrier (AGV) driving unit 53 is controlled via the modem 52, and the transfer mechanism 54
And to drive other mechanisms. Further, the automatic guided vehicle (AGV) 6 receives a control signal from the automatic guided vehicle (AGV) controller 2 by a transceiver 61 and controls an automatic guided vehicle (AGV) driving unit 63 via a modem 62. The transfer mechanism 64 and other mechanisms are driven. Further, the automatic guided vehicle (AGV) 7 is controlled by the transceiver 71 by the automatic guided vehicle (AGV) controller 2.
, And controls an automatic guided vehicle (AGV) driving unit 73 via a modem 72 to control the transfer mechanism 7
4 and other mechanisms are driven.

【0011】このような構成による自動搬送車(AG
V)を使った生産ラインの実際のレイアウトを図2に示
す。この図において、自動搬送車(AGV)5、自動搬
送車(AGV)6および自動搬送車(AGV)7は生産
ライン20の通路21に配備され、この通路21の中で
移動して、ストッカ22にストックされている部品のう
ち、指示された部品を積載し、所定の加工機械等の機械
(以下、機械と略称する)23に移載する。
The automatic transport vehicle (AG) having such a configuration
FIG. 2 shows an actual layout of a production line using V). In this figure, an automatic transport vehicle (AGV) 5, an automatic transport vehicle (AGV) 6 and an automatic transport vehicle (AGV) 7 are arranged in a passage 21 of a production line 20, move in this passage 21, and move to a stocker 22. The designated parts are loaded from among the parts stocked in the machine, and are transferred to a machine (hereinafter, simply referred to as a machine) 23 such as a predetermined processing machine.

【0012】次に、この発明の一実施形態による自動搬
送車(AGV)の制御方式の動作について説明する前
に、一の自動搬送車と、他の自動搬送車またはその他の
障害物との「近接」について説明する。まず、自動搬送
車が移動中は、この自動搬送車が他の自動搬送車または
その他の障害物と接触しないように移動ルートおよび移
動時刻が自動搬送車(AGV)コントローラ2によって
算出され、この自動搬送車に指令が出される。この自動
搬送車の移動経路に自動搬送車(AGV)コントローラ
が検知していない障害物があった場合は、この自動搬送
車に装備されている近接スイッチによって障害物の接近
を検知し、停止したりルートを変更したりする。
Next, before describing the operation of the control method of an automatic guided vehicle (AGV) according to one embodiment of the present invention, the description will be made of the case where one automatic guided vehicle and another automatic guided vehicle or other obstacle are used. The “proximity” will be described. First, while the automatic guided vehicle is moving, a moving route and a moving time are calculated by the automatic guided vehicle (AGV) controller 2 so that the automatic guided vehicle does not come into contact with another automatic guided vehicle or other obstacles. A command is issued to the carrier. If there is an obstacle not detected by the automatic guided vehicle (AGV) controller in the moving route of the automatic guided vehicle, the approach switch provided on the automatic guided vehicle detects the approach of the obstacle and stops. Or change the route.

【0013】次に、自動搬送車が部品等の移載作業を行
う場合は、この自動搬送車の停止位置データと共に、自
動搬送車に指示した特定の移載作業を行うときの自動搬
送車のアーム等の行動範囲を自動搬送車(AGV)コン
トローラ2が把握しており、この行動範囲内に他の自動
搬送車が進入することが「近接」である。
[0013] Next, when the automatic transport vehicle performs the transfer operation of parts and the like, together with the stop position data of the automatic transport vehicle, the automatic transport vehicle performs a specific transfer operation instructed to the automatic transport vehicle. The automatic transport vehicle (AGV) controller 2 grasps the action range of the arm and the like, and the entry of another automatic transport vehicle into this action range is “close”.

【0014】また、複数の自動搬送車が同時に移載作業
を行うときは、自動搬送車(AGV)コントローラが把
握している一の自動搬送車の行動範囲と、他の自動搬送
車の行動範囲とが一部分でも重複すれば「近接」であ
る。但し、前記行動範囲の重複があったとしても、一の
自動搬送車の行動と他の自動搬送車の行動との間に時間
差があり、同時に重複しなければ「近接」とはしない。
[0014] When a plurality of automatic guided vehicles perform transfer operations simultaneously, the action range of one automatic guided vehicle known by an automatic guided vehicle (AGV) controller and the action range of another automatic guided vehicle are known. It is "proximity" if even one part overlaps. However, even if the action ranges overlap, there is a time difference between the action of one automatic transport vehicle and the action of another automatic transport vehicle.

【0015】次に、上述の「近接」の内容を踏まえ、図
3を参照してこの発明の一実施形態による制御方式の動
作について説明する。図3のステップs1において、自
動搬送車(AGV)5〜自動搬送車(AGV)7のうち
自動搬送車(AGV)コントローラ2によって部品の移
載を指示された自動搬送車(AGV)5は、ストッカ2
2に貯蔵されていた部品の中から自動搬送車(AGV)
コントローラ2によって指示された部品を自動搬送車
(AGV)に積載し、ステップs2において自動搬送車
(AGV)コントローラ2によって指示された機械23
に部品の移載ができる位置に移動する。
Next, an operation of the control system according to the embodiment of the present invention will be described with reference to FIG. In step s1 of FIG. 3, among the automatic transport vehicles (AGV) 5 to automatic transport vehicles (AGV) 7, the automatic transport vehicle (AGV) 5 for which the transfer of parts is instructed by the automatic transport vehicle (AGV) controller 2 is Stocker 2
Automatic transport vehicle (AGV) from the parts stored in 2
The parts specified by the controller 2 are loaded on an automatic carrier (AGV), and the machine 23 specified by the automatic carrier (AGV) controller 2 in step s2.
To a position where components can be transferred to

【0016】次に、ステップs3において、自動搬送車
(AGV)コントローラ2は、この自動搬送車(AG
V)5に近接して他の自動搬送車(AGV)があるかど
うかを調査し、他の自動搬送車(AGV)が近くになけ
ればステップs5において、所定の移載作業を行って一
連の動作を終了する。さて、ステップs3において、近
接した自動搬送車(AGV)がある場合は、ステップs
4において、自動搬送車(AGV)コントローラ2は前
記近接した自動搬送車(AGV)が委細作業を行ってい
るかどうかを調査し、もし、移載作業中であればステッ
プs3に戻り、移載作業中でなければステップs5に移
行して移載作業を行い、一連の動作を終了する。
Next, in step s3, the automatic transport vehicle (AGV) controller 2 controls the automatic transport vehicle (AGV).
V) Investigate whether there is another automatic transport vehicle (AGV) close to 5, and if another automatic transport vehicle (AGV) is not close, in step s5, perform a predetermined transfer operation to perform a series of operations. End the operation. By the way, in step s3, if there is an adjacent automatic guided vehicle (AGV), step s3
At 4, the automatic carrier (AGV) controller 2 checks whether or not the adjacent automatic carrier (AGV) is performing a subcontracting operation. If not, the process proceeds to step s5 to perform a transfer operation, and a series of operations ends.

【0017】上述した制御を行うことにより、同一の生
産ラインにおいて、複数の自動搬送車(AGV)が近接
した位置にあり、同時に部品の移載作業を行うと、自動
搬送車(AGV)の移載機構のアーム同士が干渉するお
それがある場合には、一方の自動搬送車(AGV)の移
載作業が終了するまで、近接した他の自動搬送車(AG
V)の移載作業を行わないように制御するので、同一の
生産ラインにおいて多数の自動搬送車(AGV)を使用
する場合でもスムーズな運用を行うことができる。
By performing the above-described control, when a plurality of automatic transport vehicles (AGVs) are located in close proximity on the same production line, and the parts are transferred at the same time, the transfer of the automatic transport vehicles (AGV) is performed. If there is a possibility that the arms of the loading mechanism may interfere with each other, another automatic transport vehicle (AG) that is in close proximity to the automatic transport vehicle (AGV) until the transfer operation of one automatic transport vehicle (AGV) is completed.
Since the control is performed so that the transfer operation of V) is not performed, smooth operation can be performed even when a large number of automatic transport vehicles (AGVs) are used in the same production line.

【0018】以上、本発明の一実施形態の動作を図面を
参照して詳述してきたが、本発明はこの実施形態に限ら
れるものではなく、本発明の要旨を逸脱しない範囲の設
計変更等があっても本発明に含まれる。例えば、本実施
形態では生産ラインをクリーンルームを想定して説明し
たが、当然のことながら、通常の雰囲気の生産ラインで
あっても適用が可能である。
The operation of one embodiment of the present invention has been described above in detail with reference to the drawings. However, the present invention is not limited to this embodiment, and a design change or the like may be made without departing from the gist of the present invention. The present invention is also included in the present invention. For example, in the present embodiment, the production line has been described assuming a clean room. However, it goes without saying that the invention can be applied to a production line having a normal atmosphere.

【0019】[0019]

【発明の効果】これまでに説明したように、この発明に
よれば、同一の生産ラインにおいて複数の自動搬送車
(AGV)が近接した位置にあり、同時に部品の移載作
業を行うと自動搬送車(AGV)の移載機構のアーム同
士が干渉するおそれがある場合には、一方の自動搬送車
(AGV)の移載作業が終了するまで、近接した他の自
動搬送車(AGV)の移載作業を行わないように制御す
るので、同一の生産ラインにおいて多数の自動搬送車
(AGV)を使用する場合でもスムーズな運用を行うこ
とができるという効果が得られる。
As described above, according to the present invention, when a plurality of automatic transport vehicles (AGVs) are located close to each other on the same production line and the parts are simultaneously transferred, the automatic transport is performed. If there is a possibility that the arms of the transfer mechanism of the vehicle (AGV) may interfere with each other, the transfer of the other adjacent automatic transport vehicle (AGV) is continued until the transfer operation of one automatic transport vehicle (AGV) is completed. Since the loading operation is controlled so as not to be performed, an effect is obtained that a smooth operation can be performed even when a large number of automatic transport vehicles (AGVs) are used in the same production line.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明の一実施形態による自動搬送車(AG
V)の制御装置の構成を示すブロック図である。
FIG. 1 shows an automatic guided vehicle (AG) according to an embodiment of the present invention.
It is a block diagram showing composition of a control device of V).

【図2】 生産ライン内のレイアウトを示す図である。FIG. 2 is a diagram showing a layout in a production line.

【図3】 本発明の一実施形態による自動搬送車(AG
V)の制御を説明するフローチャートである。
FIG. 3 shows an automatic guided vehicle (AG) according to an embodiment of the present invention.
It is a flowchart explaining control of V).

【符号の説明】[Explanation of symbols]

1 ホストコンピュータ 2 自動搬送車(AGV)コントローラ 3 変復調器(モデム) 4 送受信機(トランシーバ) 5 自動搬送車(AGV) 51 送受信機(トランシーバ) 52 変復調器(モデム) 53 自動搬送車(AGV)駆動部 54 移載機構 6 自動搬送車(AGV) 61 送受信機(トランシーバ) 62 変復調器(モデム) 63 自動搬送車(AGV)駆動部 64 移載機構 7 自動搬送車(AGV) 71 送受信機(トランシーバ) 72 送受信機(モデム) 73 自動搬送車(AGV)駆動部 74 移載機構 20 生産ライン 21 自動搬送車(AGV)通路 22 ストッカ 23 加工機械(機械) REFERENCE SIGNS LIST 1 host computer 2 automatic carrier (AGV) controller 3 modem (modem) 4 transceiver (transceiver) 5 automatic carrier (AGV) 51 transceiver (transceiver) 52 modem (modem) 53 automatic carrier (AGV) drive Unit 54 transfer mechanism 6 automatic carrier (AGV) 61 transceiver (transceiver) 62 modem (modem) 63 automatic carrier (AGV) drive unit 64 transfer mechanism 7 automatic carrier (AGV) 71 transceiver (transceiver) 72 transceiver (modem) 73 automatic transport vehicle (AGV) drive unit 74 transfer mechanism 20 production line 21 automatic transport vehicle (AGV) passage 22 stocker 23 processing machine (machine)

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 複数の自動搬送車を有する生産ラインに
おいて、 前記複数の自動搬送車が近接した位置にあるとき、一の
自動搬送車が部品等の移載作業を行っていれば、他の自
動搬送車は前記一の自動搬送車が移載作業を終了してか
ら移載作業を開始することを特徴とする自動搬送車の制
御方式。
1. In a production line having a plurality of automatic transport vehicles, when one of the automatic transport vehicles is performing a transfer operation of parts and the like when the plurality of automatic transport vehicles are in close proximity to each other. An automatic transport vehicle control system, wherein the transfer operation is started after the automatic transport vehicle has completed the transfer operation.
【請求項2】 前記生産ラインはクリーンルーム内の生
産ラインであることを特徴とする請求項1に記載の自動
搬送車の制御方式。
2. The method according to claim 1, wherein the production line is a production line in a clean room.
JP9329239A 1997-11-28 1997-11-28 Control system for automatic carrier Withdrawn JPH11156652A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9329239A JPH11156652A (en) 1997-11-28 1997-11-28 Control system for automatic carrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9329239A JPH11156652A (en) 1997-11-28 1997-11-28 Control system for automatic carrier

Publications (1)

Publication Number Publication Date
JPH11156652A true JPH11156652A (en) 1999-06-15

Family

ID=18219214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9329239A Withdrawn JPH11156652A (en) 1997-11-28 1997-11-28 Control system for automatic carrier

Country Status (1)

Country Link
JP (1) JPH11156652A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100318437B1 (en) * 1999-06-22 2001-12-24 박종섭 System for parallelly controlling auto guide vehicle and method using the same
JP2020086473A (en) * 2018-11-14 2020-06-04 株式会社東芝 Control system, control method, program and storage medium

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100318437B1 (en) * 1999-06-22 2001-12-24 박종섭 System for parallelly controlling auto guide vehicle and method using the same
JP2020086473A (en) * 2018-11-14 2020-06-04 株式会社東芝 Control system, control method, program and storage medium

Similar Documents

Publication Publication Date Title
US6169935B1 (en) Control method of stocker entry task and stocker exit task in semiconductor wafer cassette transportation apparatus
US7305287B2 (en) AGV control system and method
CN109760028B (en) Horizontal articulated robot and origin recovery method thereof
KR100640019B1 (en) Robotic manipulators based on pre-defined time-optimum trajectory shape
JP4831521B2 (en) Automated material processing system for semiconductor manufacturing based on vertical annular conveyor and overhead hoist
JP3068546B2 (en) Robot control method and device
US10684613B2 (en) Data communication method for reducing working time of automated material handling system
JP2005031873A (en) Conveyance system and semiconductor manufacturing system
KR20040062137A (en) System for transfering substrate
WO2020008659A1 (en) Production line and manufacturing method for production line
JPH11156652A (en) Control system for automatic carrier
JP3971526B2 (en) Substrate loading / unloading apparatus and transfer system
KR19990074697A (en) Wafer cassette conveying system and wafer cassette conveying method
JPH11340297A (en) Method and device for transporting substrate
JPH1129205A (en) Mobile carrying equipment and its control method
KR100245650B1 (en) A measuring system in the line for manufacturing semiconductor devicdevices
KR102315825B1 (en) Stocker
JPH11151627A (en) Automatic carrying vehicle control system
JP2719524B2 (en) Semiconductor manufacturing equipment
JP2000181542A (en) Stopping method for carrier in automatic conveyance system
JP2616212B2 (en) Transport system
JP2004110108A (en) Control device and control method for transfer device in automated carrier system
JP2001088913A (en) Carrying method and carrying device in fms
JP3932119B2 (en) Transport control system
JPH07105430B2 (en) Transport equipment

Legal Events

Date Code Title Description
A300 Application deemed to be withdrawn because no request for examination was validly filed

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 20050201