JPH11153204A - Rough/fine movement stage - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the efficiency of the observation work by a microscope by arbitrarily releasing the fixed condition of a nut to a movable base plate to idle the nut. SOLUTION: When a clamp screw 44 is screwed, the rotation of a ball nut relative to a nut case 41 is regulated by the clamp screw 44, and fixed to a movable base plate 120 through the nut case 41. When a handle 131 is operated to turn a feed screw 130, the ball nut engaged with the feed screw 130 is moved straight in the axial direction of the feed screw 130 by the turn, and the movable base plate 120 is moved along a guide part 111 as indicated by the arrow (a). When the clamp screw 44 is loosened, and the regulation of the turn of the ball nut by the clamp screw 44 to the nut case 41 is released, the ball nut can be freely turned around the feed screw 130. As a result, the movable base plate 120 can be rapidly moved in the axial direction of the feed screw 130 while holding a holding part 21.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coarse / fine movement stage, and more particularly, to a coarse / fine movement stage moved by a feed screw.

[0002]

2. Description of the Related Art FIG. 5 is a plan view of a conventional coarse / fine movement stage.

The coarse / fine movement stage includes a fixed substrate 110 provided with a guide portion 111 on the upper surface, a movable substrate 120 supported by the guide portion 111 so as to be linearly movable, and a feeder for moving the movable substrate 120 along the guide portion 111. A screw 130 and a nut 140 fixed to the moving substrate 120 and screwed with the feed screw 130 are provided.

[0006] The moving substrate 120 is provided with a grip 121 for moving the moving substrate 120.

The feed screw 130 has a bearing 1 provided at both ends thereof on the fixed substrate 110 so as to be parallel to the moving substrate 120.
It is rotatably supported by 49.

A handle 131 for rotating the feed screw 130 is provided at one end of the feed screw 130.

According to the coarse / fine movement stage, the handle 1
When the feed screw 130 is rotated by rotating the nut 31, the nut 140 and the moving substrate 120 move linearly as shown by the arrow b along the guide portion 111, so that the sample placed on the moving substrate 120 is moved. Can be moved to an arbitrary position while slightly moving.

[0008]

By the way, when observing a plurality of portions of a large sample, if the moving substrate 120 is slightly moved by operating the handle 131, the moving substrate 1
It takes time to move 20.

Therefore, there is a strong demand for a coarse / fine movement stage for quickly moving a sample to a position requiring observation regardless of the operation of the handle 131.

FIG. 6 is a sectional view taken along the line AA of FIG. 5. FIG. 6 (a) shows a state where the feed screw and the nut are engaged, and FIG. 6 (b) shows a state where the feed screw and the nut are engaged. It is a figure showing the state where alignment was deviated, respectively.

The nut 140 includes a bearing 141 fixed to the moving board 120, a feed screw 130, and split nuts 142 and 143 screwed to the feed screw 130, and a shaft 144 for supporting the split nuts 142 and 143. Prepare.

A coil spring 145 is provided at one end of the split nuts 142 and 143. This coil spring 145
Thus, the split nuts 142 and 143 are urged to mesh with the feed screw 130.

At the other end of the split nuts 142, 143, a clamp mechanism 180 is provided. Clamp mechanism 180
Is composed of a shaft 182 parallel to the shaft 144, a piece (having a rectangular cross section) 181 fixed to an intermediate portion of the shaft 182, and a clamp knob 183 provided at one end of the shaft 182. . This shaft 182 is rotatably supported by a bearing 141.

The long side 181a of the rectangular cross section is
6 (a), the short side 181b of the rectangular cross section is divided into the split nuts 142, 14 (see FIG. 6 (a)).
3 by the clamp knob 183 so as to contact the
1 rotates 90 °, split nuts 142, 143 rotate in opposite directions about axis 144, and
When the nut 140 is disengaged from the nut 30 (see FIG. 6B), the nut 140 can move (coarsely move) in the axial direction of the feed screw 130 freely.

In order to engage the split nuts 142 and 143 and the feed screw 130 again so that the nut 140 can be finely moved, the piece 181 is moved by the clamp knob 183 so that the long side 181a contacts the split nuts 142 and 143.
Rotate 0 °.

When the ridges (or valleys) of the split nuts 142 and 143 do not match the valleys (or ridges) of the feed screw 130, the nut 140 is moved by the biasing force of the coil spring 145. Move in the axial direction of the feed screw 130 to a position where they mesh properly.

Since the lead of the feed screw 130 (the length of the feed screw that advances in the axial direction for one rotation) is about 1 to 2 mm, the nut 140 moves at most 0.5 to 1 mm.

On the other hand, if an objective lens having a magnification of, for example, 100 is used, the actual visual field observed with a microscope is 0.2 to 0.25 m.
m.

Therefore, after the movable substrate 120 is moved so that the portion to be observed of the sample can be put into the field of view of the microscope in a state where the engagement between the split nuts 142 and 143 and the feed screw 130 is released (coarse movement state), Split nut 142, 1
When the screw 43 and the feed screw 130 are engaged with each other (fine movement state), the part to be observed of the sample may be out of the field of view.

At this time, the moving substrate 1 is further operated by operating the handle 131 so that the portion to be observed of the sample is in the field of view.
20 has to be finely moved, and there has been a problem that observation work with a microscope is time-consuming and labor-intensive, resulting in inefficient operation.

Since the coarse and fine movements are switched by the engagement of the split nuts 142, 143 and the feed screw 130, the split nuts 142, 143 and the feed screw 130 collide when engaged with each other, and the split nuts 142, 143 and the feed screw 130 are collided. There has been a problem that 130 is damaged.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a coarse and fine movement stage which can improve the efficiency of observation work with a microscope and is excellent in durability.

[0023]

According to a first aspect of the present invention, there is provided a fixed board, a movable board capable of linearly moving on the fixed board, and provided on the fixed board. In a coarse / fine movement stage provided with a feed screw for moving the moving substrate and a nut provided on the moving substrate and screwed to the feed screw, the nut is freely released from the fixed state with respect to the moving substrate and the nut is idled. And switching means for causing the switching means to be provided.

Since switching means for arbitrarily releasing the fixed state of the nut with respect to the moving board and rotating the nut idly is provided,
After releasing the fixed state of the nut with respect to the moving substrate, coarsely moving the moving substrate, and moving the moving substrate in the axial direction of the feed screw so that the portion to be observed of the sample is included in the microscope field of view,
Even when the nut is fixed to the moving substrate, the nut and the moving substrate do not move in the axial direction of the feed screw, and the part to be observed of the sample does not deviate from the microscope field of view. In addition, since the nut and the feed screw are always screwed together, when the nut is fixed to the moving substrate (during coarse / fine movement switching), the nut and the feed screw may be damaged due to the collision between the nut and the feed screw. Does not occur, and the durability is improved.

According to a second aspect of the present invention, in the coarse and fine movement stage according to the first aspect, the switching means is provided on an electromagnetic clutch and a grip for manually moving the movable substrate, And an intermittent switch.

The switching means comprises an electromagnetic clutch and a switch provided on the gripper for manually moving the moving substrate, and a switch for switching the electromagnetic clutch on and off. Then, the electromagnetic clutch is disengaged, and the nut and the movable board can be moved (coarsely moved) along the axis of the feed screw manually.

According to a third aspect of the present invention, there is provided a fixed substrate, a movable substrate capable of linearly moving on the fixed substrate, a feed screw provided on the movable substrate for moving the movable substrate,
In the coarse / fine movement stage provided on the fixed substrate and including a nut screwed to the feed screw, a switching means for arbitrarily releasing a fixing state of the nut to the fixed substrate and idling the nut is provided. I do.

Since switching means for arbitrarily releasing the fixing state of the nut to the fixed substrate and rotating the nut idly is provided,
After releasing the fixed state of the nut to the fixed substrate, coarsely moving the moving substrate, and moving the moving substrate in the axial direction of the feed screw so that the portion to be observed of the sample is included in the microscope field of view,
Even when the nut is in a fixed state with respect to the fixed substrate, the nut and the moving substrate do not move in the axial direction of the feed screw, and the part to be observed of the sample does not deviate from the field of view of the microscope. Also, since the nut and the feed screw are always screwed together, when the nut is fixed to the fixed substrate (during coarse / fine switching), the nut and the feed screw may be damaged due to the collision between the nut and the feed screw. Does not occur, and the durability is improved.

According to a fourth aspect of the present invention, in the coarse / fine movement stage according to the third aspect, the switching means is provided on an electromagnetic clutch and a grip for manually moving the movable substrate, And an intermittent switch.

The switching means comprises an electromagnetic clutch and a switch provided on the gripper for manually moving the movable substrate, and a switch for switching the electromagnetic clutch on and off. The electromagnetic clutch is turned off, the nut is disengaged, and the nut and the moving board can be moved (coarsely moved) along the axis of the feed screw by hand.

[0031]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a plan view of a coarse / fine movement stage according to a first embodiment of the present invention, and FIG. 2 is an enlarged sectional view of a nut case portion. Omitted.

The coarse / fine movement stage includes a fixed substrate 110, a moving substrate 120, a feed screw 130, and a nut 40.

The nut 40 includes a nut case 41, a ball nut 42, an angular bearing 43, and a clamp screw 44.

The nut case 41 is fixed to the movable board 120 by screws 45. Also, nut case 41
Has a female screw 46 extending in a direction orthogonal to the feed screw 130.
The clamp screw (switching means) 44 is screwed to the female screw 46.

Angular bearings 43 are provided at both ends of the through hole 47 of the nut case 41, and the ball nut 42 is held by the nut case 41 via these angular bearings 43.

The ball nut 42 is screwed with a feed screw 130 via a ball 42a, and rotatably supports the feed screw 130.

As the feed screw 130, for example, a screw having a screw efficiency of 90% or more, such as a ball screw, is preferable because the coarse movement operation force is small.

The operation of the coarse / fine movement stage having the above configuration will be described.

When the clamp screw 44 is screwed in, the rotation of the ball nut 42 with respect to the nut case 41 is restricted by the clamp screw 44, and the ball nut 42 is fixed to the movable board 120 via the nut case 41.

By operating the handle 131, the feed screw 130
Is rotated, the ball nut 42 meshing with the feed screw 130 linearly moves in the axial direction of the feed screw 30 by this rotation, and the moving substrate 120 moves along the guide portion 111 as shown by the arrow a (fine movement). I do.

When the clamp screw 44 is loosened and the restriction of the rotation of the ball nut 42 with respect to the nut case 41 by the clamp screw 44 is released, the ball nut 42 can freely rotate around the feed screw 30. That is, it can idle (rotate) in the nut case 41.

As a result, the moving substrate 1 is
20 can be quickly moved in the axial direction of the feed screw 130 (coarse movement). At this time, the ball nut 42 idles inside the nut case 41. After moving the movable substrate 120 so that the portion to be observed of the sample is in the field of view of the microscope, the clamp screw 44 is screwed again, and the ball nut 42 is moved through the nut case 41 to the movable substrate 12.
Fix to 0. By rotating the handle 131, the moving substrate 120 can be slightly moved.

According to this embodiment, the clamp screw 44
When the ball nut 42 is fixed to the moving board 120 by screwing the nut, the ball nut 42 does not move in the axial direction of the feed screw 130 and is fixed to the moving board 120 via the nut case 41 at that position. This eliminates the necessity of re-moving (slightly moving) the moving substrate 120 to the sample observation position as in the related art, thus improving the efficiency of the observation operation using a microscope.

The ball nut 42 and the feed screw 130
When the ball nut 42 is fixed to the nut case 41 (at the time of switching between coarse and fine movement), the feed screw 130 and the like may be damaged due to the collision between the ball nut 42 and the feed screw 130. Does not occur, and the durability is improved. Also, by using a ball screw as the feed screw 130, fine movement feed becomes accurate.

FIG. 3 is an enlarged sectional view of a nut case portion according to a second embodiment of the present invention, and FIG. 4 is an enlarged sectional view of a gripping portion. Is omitted.

In this embodiment, the ball nut 4
2 has one end held by a nut case 41 via an angular bearing 43, and the other end has an electromagnetic clutch (switching means).
It is held by the nut case 41 via 50.

Therefore, in this embodiment, the nut 4
Reference numeral 0 denotes a nut case 41, a ball nut 42, an angular bearing 43, and an electromagnetic clutch 50.

The grip 21 has a hollow U-shaped handle 22 and a lever 23, and the handle 22 is fixed to the movable board 120. One end of the lever 23 is rotatably supported by a shaft 24, and a switch 60 is provided at the other end.

A compression spring 25 is provided between the other end of the lever 23 and the handle 22. The compression spring 25 urges the lever 23 clockwise (in a direction away from the handle 22).

The electromagnetic clutch 50 is connected to a power supply 70 via a switch 60. When the switch 60 is off, the electromagnetic clutch 50 operates and the ball nut 42 is fixed to the movable board 120 via the nut case 41. (See FIG. 3).

When the feed screw 130 is rotated by operating the handle 131 (see FIG. 1), the ball nut 42 meshed with the feed screw 130 is rotated by this rotation.
The moving substrate 120 linearly moves in the axial direction of the moving member 30, and the moving substrate 120 moves (finely moves) along the guide portion 111.

When the grip 23 is gripped and the lever 23 is pulled in the counterclockwise direction (the direction approaching the grip 22), the end 23a of the lever 23 pushes down the contact piece 61,
The switch 60 is turned on. When the switch 60 is turned on, the electromagnetic clutch 50 is disengaged, the ball nut 42 can freely rotate around the feed screw 130 in the nut case 41, and the movable board 120 is moved by operating the grip 21. Can be moved quickly (coarse movement) in the direction of the axis.

According to the second embodiment, the same effects as those of the first embodiment can be exerted, and the coarse / fine movement can be switched only by gripping the grip portion 21, so that the workability is higher than that of the first embodiment. improves.

In the second embodiment, the ball nut 42 may be fixed to the nut case 41 when the electromagnetic clutch 50 is disconnected. In this case, when the switch 60 is turned on, the electromagnetic clutch 50 operates.

In each of the above embodiments, the ball nut 42 is fixed to the movable board 120 and the feed screw 130 is rotatably supported by the bearing 149 provided on the fixed board 110. A configuration may be adopted in which the feed screw 130 is fixed and rotatably supported by a bearing provided on the movable substrate 120. It is needless to say that the same operation and effect as those of the above-described embodiments can be exhibited also by this configuration.

In each of the above embodiments, the ball screw and the ball nut are used as the feed screw and the nut. However, the present invention is not limited to this structure, and may be formed by ordinary screws and nuts. . Further, the nut case may be provided integrally with the moving board.

[0058]

As described above, according to the first aspect of the present invention, the fixed state of the nut with respect to the moving substrate is released, the moving substrate is roughly moved, and the portion to be observed of the sample enters the visual field of the microscope. Even after the moving substrate is moved in the axial direction of the feed screw after the moving substrate is moved, the nut and the moving substrate do not move in the axial direction of the feed screw even when the nut is fixed to the moving substrate. The part to be observed of the sample does not come off. In addition, since the nut and the feed screw are always screwed together, when the nut is fixed to the moving substrate (during coarse / fine movement switching), the nut and the feed screw may be damaged due to the collision between the nut and the feed screw. Does not occur, and the durability is improved.

According to the second aspect of the present invention, when the grip portion is gripped, the switch is turned on or off, the electromagnetic clutch is disconnected, and the nut and the movable substrate are manually moved along the axis of the feed screw (coarse movement). ).

According to the third aspect of the present invention, the fixed state of the nut with respect to the fixed substrate is released, the movable substrate is roughly moved, and the movable substrate is moved by the feed screw so that the portion to be observed of the sample is included in the visual field of the microscope. After moving in the axial direction, even when the nut is fixed to the fixed substrate, the nut and the moving substrate do not move in the axial direction of the feed screw,
The portion to be observed of the sample does not deviate from the microscope visual field. Also, since the nut and the feed screw are always screwed together, when the nut is fixed to the fixed substrate (during coarse / fine switching), the nut and the feed screw may be damaged due to the collision between the nut and the feed screw. Does not occur, and the durability is improved.

According to the fourth aspect of the present invention, when the grip portion is gripped, the switch is turned on or off, the electromagnetic clutch is disconnected, and the nut and the moving board are moved manually along the axis of the feed screw (coarse). Movement).

[Brief description of the drawings]

FIG. 1 is a plan view of a coarse / fine movement stage according to a first embodiment of the present invention.

FIG. 2 is an enlarged sectional view of a nut case part.

FIG. 3 is an enlarged sectional view of a nut case portion according to a second embodiment of the present invention.

FIG. 4 is an enlarged sectional view of a grip portion.

FIG. 5 is a plan view of a conventional coarse / fine movement stage.

6 is a sectional view taken along the line AA of FIG. 5, and FIG.
(A) shows the state in which the feed screw and the nut are engaged,
FIG. 6B is a diagram illustrating a state where the engagement between the feed screw and the nut is released.

[Explanation of symbols]

 40 Nut 44 Clamp screw (switching means) 50 Electromagnetic clutch (switching means) 110 Fixed board 120 Moving board 130 Feed screw

Claims (4)

[Claims] 1. A fixed substrate, a movable substrate capable of linearly moving on the fixed substrate, a feed screw provided on the fixed substrate for moving the movable substrate, and a feed screw provided on the movable substrate, A coarse and fine movement stage comprising: a nut to be screwed; and a switching means for arbitrarily releasing a fixed state of the nut with respect to the moving substrate and idling the nut. 2. The switching device according to claim 1, wherein the switching unit includes an electromagnetic clutch and a switch provided on a grip for manually moving the movable substrate and for switching the electromagnetic clutch on and off. The coarse and fine movement stage described. 3. A fixed substrate, a movable substrate capable of linearly moving on the fixed substrate, a feed screw provided on the movable substrate for moving the movable substrate, and a feed screw provided on the fixed substrate, A coarse / fine movement stage comprising: a nut to be screwed; and a switching unit for arbitrarily releasing a state of fixing the nut to the fixed substrate and idling the nut. 4. The apparatus according to claim 3, wherein said switching means comprises an electromagnetic clutch and a switch provided on a grip portion for manually moving said movable board and for switching said electromagnetic clutch on and off. The coarse and fine movement stage described.