JP2004134464A - Substrate cassette and display device manufacturing system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate cassette that can be changed efficiently in width size in conformity with the dimensional change of a substrate in a short time, and to provide a display device manufacturing system. <P>SOLUTION: The substrate cassette is provided with a lower frame 31, an upper frame 32, and side frames 33 constituting an outer frame; a pair of supporting panels 5a which are faced to each other in erected wall-like states and respectively support both ends of substrates; and a position-changeable fixing means 10 which fixes the panels 5a to the outer frame in a position-changeable state. The fixing means 10 has resin boards and rods engaged with the frame, and fixes the panels 5a to the frame by energizing the rods by means of the energizing forces of the resin boards. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a substrate cassette for accommodating display screen substrates such as a liquid crystal display device, a plasma display device, and an electroluminescence display device, and a display device manufacturing system using the substrate cassette.
[0002]
[Prior art]
Unlike a cathode ray tube display device, a flat flat screen is used for a liquid crystal display device or a plasma display device, and it is easy to increase the screen size without increasing the thickness of the display device. For this reason, flat panel display devices of various sizes from various mobile terminals to personal computers, televisions, and large display devices have been manufactured.
[0003]
Various substrates are used in these flat panel display devices. As the substrate, a transparent glass, a transparent ceramic, a transparent resin plate, or the like is used, and it is required that there is no warpage or distortion and that the thickness accuracy is good. In addition, since a silicon film or the like is subjected to heat treatment or chemical treatment in many processing steps after being deposited, it is necessary to have excellent heat resistance and corrosion resistance. In order to form a display device by performing processing on a substrate, it is necessary to go through many film formation processes, etching processes, heat treatment processes, and the like in a clean room. For this reason, great care must be taken in handling the substrate.
[0004]
The substrate cassette has, for example, a frame including a lower frame, an upper frame, and a pair of side frames facing each other. The side frame is provided with ribs on which the ends of the substrate are placed inward at a predetermined pitch. The ribs are formed of a predetermined resin so as not to generate dust and to protect the substrate (for example, see Patent Documents 1, 2, 3, and 4).
[0005]
If the substrate is large, the substrate may be bent in a state of being stored in the substrate cassette, which may cause inconvenience. Therefore, in order to suppress the bending, it is preferable to increase the number of rib-supported portions and lengthen the rib. Further, the substrate repeatedly contacts and separates from many members, so that the substrate is charged and discharged upon separation. If discharge occurs, the substrate may be damaged, so first of all, to prevent charging due to that cause, the resin that makes up the ribs is made conductive, and the charged electricity is grounded through the ribs and the frame. . The substrate cassette is usually placed on a sleeper-like conductor, placed on a fork of a transfer robot, and transferred in a clean room.
[0006]
As described above, the flat panel display device has various sizes, and even a substrate for a television screen has not only a few types but also a variety of sizes. It is uneconomical to have a dedicated substrate cassette for each type of substrate, and usually, the mounting position of the side frame on the upper and lower frames is changed according to the size of the substrate.
[0007]
[Patent Document 1]
JP 2001-102437 A
[0008]
[Patent Document 2]
JP-A-11-035089
[0009]
[Patent Document 3]
JP-A-09-36219
[0010]
[Patent Document 4]
JP 06-247483 A
[0011]
[Problems to be solved by the invention]
When attaching the side frame to the upper and lower frames according to the size of the board, usually, a bolt is inserted into a hole formed by aligning the side (side) frame and the upper and lower frames, and is screwed and fastened with a nut to be fixed. For each of the substrates having different sizes, the steps of releasing the screwing of the bolts and nuts, releasing the interconnection of the respective parts of the frame, aligning the side frames with the upper and lower frames, and tightening the screws and bolts are repeated. This size change is performed at a frequency that cannot be ignored, and the number of substrate cassettes whose size is to be changed is large. For this reason, in order to reduce the number of substrate cassettes on hand and to respond immediately to the change in size, it is necessary to shorten the time for this size change operation.
[0012]
SUMMARY OF THE INVENTION It is an object of the present invention to provide a substrate cassette capable of efficiently changing the width size in a short time in response to a change in the substrate size, and a display device manufacturing system using the substrate cassette.
[0013]
[Means for Solving the Problems]
The substrate cassette of the present invention is a substrate cassette that supports substrates horizontally. This substrate cassette comprises a frame constituting an outer frame, a pair of support panels having ribs facing each other in the shape of an upright wall and supporting both ends of the substrate, and position variable fixing means for variably fixing the support panel to the frame. Prepare. The variable position fixing means has elastic urging means and engaging means for engaging with the frame. The support panel is fixed to the frame by urging the engaging means with the elastic urging means.
[0014]
According to this configuration, since the engagement means is provided which is urged by the elastic urging means and engages with the frame, it is possible to omit insertion, screwing, tightening, and the like in releasing and refastening the bolt and nut. That is, the engagement and fixing state can be maintained by the elastic urging force without performing the above-described fastening operation using the bolt and nut. For this reason, the size change operation can be made more efficient and the time can be reduced.
[0015]
It is desirable that the frame be composed of an upper frame, a lower frame, and two side frames. However, the side frame has a configuration that is also used by the support panel, and may be omitted. One side frame of the two side frames may serve as one of the two support panels, or both may serve as the two support panels. The above two support panels are variably fixed in position to change the interval between the support panels according to the change in the width size of the substrate. However, the fixing position of only one of the two support panels may be variable. In both cases, the fixed position may be variable. As described above, when the support panel also serves as the side frame and the side frame is omitted, it is easier to change the size by changing the fixed position of only one of the support panels.
[0016]
Further, the position variable fixing means may include a fixed on / off switching member for manually switching between application and release of the urging force to the engagement means.
[0017]
By adopting the fixing on / off control member, the fixing can be realized and the fixing can be released with one touch, and the change of the substrate size can be responded in a shorter time.
[0018]
Further, the position variable fixing means is, for example, movably attached to the support panel, is positioned over the support panel and the frame, and has a rod having an engaging portion for engaging an end on the frame side with the frame; And a pulling means attached to the rod for pulling the rod toward the support panel by an urging force.
[0019]
Since the rod is pulled by the elastic urging force, the fixed state can be efficiently realized without the necessity of screwing the bolt and nut.
[0020]
The pulling means is constituted by a cam provided on the support panel side of the rod and rotating around a horizontal rotation axis, and a resin plate attached to the support panel and having an elastic force to come into contact with the peripheral surface of the cam. Is also good.
[0021]
By appropriately selecting the distance from the rotation axis of the cam to the peripheral surface, the support panel can be fixed to the frame at the stable position of the cam.
[0022]
Further, the rod may be guided in a guide provided on the frame.
[0023]
With this configuration, the support panel can be moved smoothly.
Also, the support panel is provided with a locking piece urged by an elastic force movably, and the locking piece is inserted into an insertion hole provided in the frame by the elastic force to determine the position of the support panel. Means may be further provided.
[0024]
According to this configuration, the positioning means can perform the positioning simply and reliably. The positioning means has a play corresponding to the clearance between the insertion hole and the locking piece inserted therein, and the two are rubbed to generate dust, so that they are firmly fixed by the fixing means.
[0025]
An insertion on / off switching member for manually switching the application and release of the elastic force to the locking piece may be provided.
[0026]
According to this configuration, the positioning by inserting the locking piece into the insertion hole and the detachment can be performed by one-touch operation.
[0027]
At a support panel position opposite to the loading surface side for loading the substrate, a stopper bar capable of changing a mounting position is provided so that a distance from the loading surface changes according to a depth size of the substrate. Is also good.
[0028]
Normally, the depth size changes according to the change in the width size. According to the above configuration, when the substrates are loaded into the substrate cassette, it is possible to prevent the substrates from going too deep into the substrate or from protruding too far from the front surface.
[0029]
The above frame includes an upper frame, a lower frame, and two opposing side frames, and the support panel is fixed to the upper frame and the lower frame inside the two opposing side frames. Good.
[0030]
With this configuration, even when the size is changed, the frame maintains the predetermined shape, and only the support panel can be moved. For this reason, in the configuration in which the support panel also serves as the side frame, in the above-described size change, even if the interval between the two support panels is changed by changing the fixing position of one of the support panels, the size change operation is performed as described above. It is not as easy as the configuration. By using the support panel and the side frame as separate members as described above, the assembling time can be further reduced.
[0031]
The display device manufacturing system according to the present invention is a manufacturing system that manufactures a display device by performing processing on a substrate, and a processing device that performs processing on the substrate, and any one of the above-described substrates that stores the processed substrate. And a cassette. With this configuration, the size of the substrate cassette can be changed within a short time according to the size of the substrate to be manufactured.
[0032]
BEST MODE FOR CARRYING OUT THE INVENTION
Next, embodiments of the present invention will be described with reference to the drawings.
[0033]
(Embodiment 1-substrate cassette-)
FIG. 1 is a perspective view of a substrate cassette according to Embodiment 1 of the present invention. In FIG. 1, the frame 35 includes a lower frame 31, an upper frame 32, and a pair of side (side) frames 33. The side frame 33 is constituted by a plurality (three in FIG. 1) of side plates, and is screwed to the lower frame 31 and the upper frame. The support panel 5 includes a plurality of rib mounting plates 5b provided with the ribs 7 and the plurality of rib mounting plates at predetermined intervals, and is fixed to the lower frame and the upper frame. And a fixing upper plate 5c. Since the rib repeatedly contacts and separates frequently from the substrate, a resin is used to suppress dust generation. Other members use resin or metal. As the metal, aluminum, an aluminum alloy, and stainless steel can be used.
[0034]
The support panel 5 is fixed to the upper frame and the lower frame by the position variable fixing means 10 attached to the fixing lower plate 5a and the fixing upper plate 5c. The support panel 5 changes the space between the support panel 5 and the other support panel that faces in response to the change in the width size of the substrate to be stored. At this time, if the measurement of the interval is repeated every time the width size of the substrate is changed, the time required for the changing operation is not shortened. This positioning is performed by the positioning means 20 attached to the fixing lower plate 5a and the fixing lower plate 5c of the support panel, and the insertion holes 29 provided in the lower frame and the upper frame.
[0035]
In the present embodiment, a configuration including the support panel 5 in addition to the side frame 33 is adopted. However, a configuration in which the side panel is not provided and the support panel also serves as the side frame may be employed. As shown in FIG. 1, when a support panel is separately provided in addition to the side frame, a predetermined frame shape is reliably maintained in the above-described change operation. On the other hand, when the support panel also has a structure that also functions as a side frame, the number of components is reduced, which is effective in reducing manufacturing costs and weight. However, when the distance between the support panels is changed, even if only one of the support panels is configured to change the fixing position, it is inevitable that the frame shape is slightly deformed during the above-described change operation. For this reason, as shown in FIG. 1, providing the support panel separately in addition to the side frame enables the above-described change operation to be performed easily and efficiently in a short time.
[0036]
FIG. 2 is a partial perspective view of a surface (rear surface) opposite to the surface (front surface) on the loading side of the substrate cassette of FIG. 1. Referring to FIG. 2, a stopper bar 41 is provided so as to prevent the substrate from being excessively pushed into the depth corresponding to the depth size of the substrate. The stopper bar 41 has a distal end inserted into an insertion hole 49 provided in the lower fixing plate 5a of the support panel, and can be detachably attached to the insertion hole 49 by an elastic means such as an internal spring. . The insertion hole 49 is provided in an enlarged portion inside the fixing lower plate 5a and the upper plate 5c of the support panel. For this reason, since the support panel is moved in accordance with the change of the interval, the support panel can always contact the rear end of the substrate even if the size of the substrate changes, and can function as a stopper.
[0037]
As shown in FIG. 2, the position variable fixing means 10 and the positioning means 20 are also provided on the back side of the substrate cassette. An insertion hole 29 into which a locking piece (not shown) of the positioning means is inserted is provided in the lower frame 31. However, since the positioning means is also provided on the upper side, an insertion hole is naturally also provided in the upper frame 32. Is provided. Further, a guide hole 19 through which a rod (not shown) of the positioning means 20 is guided is also provided in the lower frame 31.
[0038]
(Position variable fixing means)
FIG. 3 is a perspective view of the position variable fixing means 10 for fixing the support panel 5 to the frame 35. FIG. 4 is a sectional view taken along line IV-IV in FIG. 3 and 4, the rod 13 extends from the lower frame 31 to the lower plate 5a for fixing the support panel. A horizontal rotating shaft 12 is provided on the upper part of the rod 13, and a cam 11 is attached to the rotating shaft. The cam 11 is mounted on the elastic resin plate 14 by its own weight and the weight of the rod. The rod 13 is inserted into the guide hole 19 provided in the lower frame 31, but since the engaging portion 13b is provided at the tip thereof, the rod is not pulled out upward. The repulsive force of the compressed elastic resin plate 14 acts on the cam 11, and when viewed from the support panel side, exerts a force to draw the rod 13 toward the support panel side, and causes the rod engaging portion 13 b of the lower frame 31 to move. Pressed against the back. The pressing force of the rod engaging portion 13b against the back surface of the lower frame 31 is a force for fixing the support frames 5a, 5b, 5c to the frame. Since the rod 13 is guided in the guide hole, the entire support panel can be easily moved so as to change the distance from the counterpart support panel.
[0039]
Since the rod 13, the rotating shaft 12, and the cam 11 are required to have strength, hardness, durability, and the like, they are preferably formed of metal, particularly stainless steel. The elastic resin plate 14 needs to be repeatedly pushed in to develop an elastic force as described later. Therefore, it is desirable that the resin has an appropriate elastic modulus (Young's modulus) and the resin has a durable elastic force. That is, it is desirable that the resin is a resin that does not significantly deteriorate the expression of elastic force during use. Examples of such a resin include various engineering plastics.
[0040]
In order to release the fixed state from the fixed state shown in FIG. 4, the cam is rotated clockwise as shown in FIG. In this clockwise rotation, when the point L on the cam peripheral surface passes directly below the rotation shaft, the distance between the axis of the rotation shaft and the surface of the resin plate becomes the longest, and the engagement portion 13b of the rod moves downward. The force against the back of the frame is maximized. Further, if the clockwise rotation is continued, the distance between the rotating shaft and the cam peripheral surface that is in contact with the resin plate immediately below the rotating shaft is sharply shortened, the rod 13 falls down, and the engagement portion 13b moves to the lower frame back surface. Is released. FIG. 5 is a diagram illustrating a state after the rod has dropped.
[0041]
As described above, the position variable fixing means is constituted by the rod 13 having the engaging portion 13b, the guide (hole) 19, the elastic resin plate 14, the rotating shaft 12, and the cam 11. The elastic resin plate 14 is an elastic urging means for urging the cam with an elastic force by being compressed. The cam 11 and the rotating shaft 12 of the cam constitute a fixed on / off switching member. The cam 11 and the rotating shaft 12 of the cam also constitute pulling means for pulling the rod 13 toward the support panel. It goes without saying that the position variable fixing means, the fixed on / off switching means and the pulling means may be constituted by other mechanisms or members.
[0042]
Since the above-described position variable fixing means firmly fixes the support panel to the frame, the support panel and the frame do not rub against each other and generate dust, and can be used in a clean room. Further, by providing a rod as an engagement means, a resin plate as an elastic biasing means, and a cam as a fixed on / off switching member, it is possible to switch between fixing and release of the support panel to the frame with one touch, thereby reducing time. Can be measured. Further, since the switching operation can be performed manually without using a special tool, there is an advantage that dust is not easily generated in a clean room in addition to an advantage that a tool is not required.
[0043]
The above-mentioned position-variable fixing means improves the efficiency of the size changing work by using only it, and enables a reduction in time.However, by improving the efficiency of the positioning between the support panel and the frame at the time of changing the size, Further time can be reduced. As a simple mechanism of the alignment, there is a method of drawing a line at a predetermined position of the frame and the supporting frame and matching the two. Further, for example, there is a method in which a linear groove is provided at a predetermined position of the lower frame, a linear protrusion is provided at a predetermined position of the support frame, and both are fitted together. Next, the positioning means to be described is a mechanism having not only a positioning action but also a fixing action within a certain range, and can promote a reduction in the time required for the size changing operation.
[0044]
(Positioning means)
FIG. 6 is a diagram showing the positioning means used in the present embodiment. The positioning means 20 includes a spring 21 for urging an elastic force, a shaft 23 as a locking piece, a pin 22 fixed to the shaft, and a case 24 of a spring or a shaft. In the state shown in FIG. 6, the shaft tip protrudes downward, and is inserted into an insertion hole of a frame (not shown) and locked. As described below, the case 24 is provided with a guide hole, and the pin moves along the guide hole, so that the shaft is inserted into the insertion hole (position E) and separated from the shaft (position F). Is switched over.
[0045]
FIG. 7 is a diagram illustrating a state in which the tip of the shaft 23 is inserted into an insertion hole provided in the lower frame 31. In the state of FIG. 7, the spring is in a state of being compressed more than the free state where there is no load. When the spring is compressed in the inserted state, the shaft 23 receives a biasing force for maintaining the inserted state in the insertion hole 29 even if disturbance is applied, and the inserted state is stably maintained. Can be.
[0046]
FIG. 8 is a view of the positioning means shown in FIG. 7 as viewed from the right side. A guide hole 25 is provided in the case 24, and by moving the pin 22 along the guide hole, it is possible to switch between an inserted state and an inserted / removed state. In FIG. 8, the pin 22 is at the position E in the inserted state. By moving the pin 22 from the E position to the F position against the spring force, the spring can be more compressed to be in the insertion / removal state. Since a reaction force is applied to the case 24 from a spring via a pin, the case 24 is formed of a metal or resin having an appropriate thickness and strength.
[0047]
In the above positioning means, the pin 22, the case 24 and the guide hole 25 of the case constitute an insertion on / off switching member.
[0048]
According to the above positioning means, the shaft 23 is pulled up from the insertion hole 29 by moving the pin 22 along the guide hole 25, and becomes movable. For this reason, the support panel can be moved by a one-touch operation, and the time for the change operation can be reduced. Further, in the above-described positioning means, the support panel is moved in a state where the shaft is pulled out from the insertion hole, so that the shaft tip does not rub against the frame. For this reason, for example, dust generation can be suppressed as compared with a mechanism in which a linear groove is provided in the frame and a linear protrusion is provided in the support panel, and the two are fitted and aligned.
[0049]
(Combination of position variable fixing means and positioning means)
By combining the above-mentioned position variable fixing means and positioning means, the size changing operation is performed as follows. First, the elastic urging force of the position variable fixing means is removed, the locking piece is pulled out of the insertion hole against the urging force of the urging means of the positioning means, and the support panel is made movable. Next, the support panel is moved, and the locking piece is inserted into another insertion hole of the frame. The clearance between the insertion hole and the locking piece is about ± 0.3 mm to ± 0.5 mm. With such a clearance, rattling occurs and dust is generated in the clean room. In order to prevent such rattling, at the position where the locking piece is inserted into the insertion hole, the elastic biasing force of the position-variable fixing means is applied to the rod or the like as the engaging means to engage the rod with the frame. As you pull, the support panel is securely attached to the frame. As a result, with the positioning means alone, there is play for the clearance between the insertion hole and the locking piece inserted therein, and the two are rubbed and generate dust. Since it is firmly fixed by the position variable fixing means, dust generation as described above is suppressed.
[0050]
The elastic urging means in the position variable fixing means and the positioning means may be any as long as they exhibit an elastic force. For example, the elastic urging means in the position variable fixing means which requires a small elastic deformation is It may be configured to maintain a predetermined pulling force by using the elastic force of the material itself of the rod, the support panel, and the frame, or a member that exerts an urging force may be separately provided. These members can be formed of a metal material or a resin having a predetermined strength.
[0051]
According to the above configuration, the alignment and the fixing and release of the support panel at that position can be performed quickly. In addition, since the positioning means inserts the shaft, which is a locking piece, into the insertion hole, when disturbance occurs in the substrate cassette, there is movement within a certain clearance range, but the support panel is moved from the frame fixing position. It does not deviate greatly. Since the substrate cassette is transported by a robot or the like, the above-described disturbance may occur when the substrate cassette is transported by the robot.
[0052]
According to this configuration, the locking piece inserted into the insertion hole can be extracted with one touch by the spring control means. Further, it is preferable that the cam of the pulling means be shaped to maintain the pulling force at a stable position by utilizing the elastic force of the resin plate. This cam can also operate locking and unlocking with one touch.
[0053]
(Embodiment 2-Display device manufacturing system-)
FIG. 9 is a diagram showing a display device manufacturing system according to Embodiment 2 of the present invention. The substrate cassette used in the present embodiment is the substrate cassette described in the first embodiment. The manufacturing process of the display device usually includes a substrate cleaning process and a film forming process. The cleaning process includes a physical cleaning step and a chemical cleaning step. FIG. 9 shows only the physical cleaning step.
[0054]
In FIG. 9, a substrate 51 mounted on a substrate cassette 50 is transported in a clean room by an automatic guided vehicle (AGV) 60. In the predetermined process, the substrate cassette 50 is carried into the loader 53, is put into the physical cleaning room 90 by the transfer robot 54, and the substrate 51 is subjected to the physical cleaning process. In the physical cleaning, first, ultraviolet light is irradiated by a UV lamp 61 to remove organic substances, and then, the physical cleaning unit 62 such as a brush cleaning or a megasonic cleaning is used. The cleaning is performed by a water cleaning processing unit 64 and a drying processing unit 65. It is sent to the unloader 55. These cleaned substrates are stored in a substrate cassette 50 and transported to the loader / unloader 56 of the film forming chamber 72 by the AGV. Here, the substrate 51 is taken out of the substrate cassette 50 by the transfer robot 54, and the amorphous silicon film is formed in the film forming chamber. Next, the wafer is transported again by being exposed to the clean room atmosphere, and subjected to another processing. These substrates may be stored in the storage 80 depending on the idle time of the film forming apparatus.
[0055]
In the above display device manufacturing system, a large number of substrate cassettes containing large substrates are used, and the processing proceeds in a clean room. When the substrate size is changed in response to a manufacturing opportunity, it is necessary to change the size of a large number of substrate cassettes or to use a substrate cassette matching the corresponding substrate size. According to this embodiment, the positions of the variable position fixing means and the positioning means and the positions of the stopper rods of a large number of substrate cassettes are changed in a short time in response to the change of the width size and the depth size of the substrate. Can be changed. In addition, since dust generation is suppressed during this change operation, an increase in dust in the clean room can be suppressed.
[0056]
(Remarks to the embodiment)
(1) In the above-described embodiment, the substrate cassette provided with both the position variable fixing means and the positioning means has been described. However, the substrate cassette in which only the position variable fixing means is arranged may be the widest. .
(2) In the above embodiment, in the position variable fixing means, a resin plate is used as the elastic urging means, and a cam or the like is used as the fixed on / off switching member. However, the mechanism is not limited to the example mechanism of the embodiment, but may be any mechanism that can switch between the fixed state and the non-fixed state with one touch without using the screwing means of the bolt and nut. A mechanism deformed within can be used. Similarly, the positioning means is not limited to the exemplary mechanism of the embodiment as long as it is a mechanism that can switch between the inserted state and the detached state with a single touch, and is deformed within the scope described in the claims. A mechanism can be used.
(3) In the above embodiment, the physical cleaning device and the film forming device are described as the processing device of the display device manufacturing system. However, the present invention is not limited thereto, and any processing device necessary for manufacturing the display device is used. Good.
[0057]
Although the embodiments of the present invention have been described above, the embodiments of the present invention disclosed above are merely examples, and the scope of the present invention is limited to these embodiments. Never. The scope of the present invention is shown by the description of the claims, and further includes all modifications within the meaning and scope equivalent to the description of the claims.
[0058]
【The invention's effect】
By using the substrate cassette and display device manufacturing system of the present invention, it is possible to efficiently change the support panel interval of a large number of substrate cassettes arranged in the manufacturing system in a short time according to the change in the size of the substrate. .
[Brief description of the drawings]
FIG. 1 is a perspective view showing an outline of a substrate cassette according to Embodiment 1 of the present invention.
FIG. 2 is a partial perspective view of the back side of the substrate cassette of FIG. 1;
FIG. 3 is a perspective view illustrating a position variable fixing unit.
FIG. 4 is a sectional view taken along the line IV-IV in FIG. 3;
5 is a view showing a state in which the fixing of the position variable fixing means of FIG. 3 is released.
FIG. 6 is a view showing positioning means.
FIG. 7 is a cross-sectional view showing a state where a shaft tip of a positioning means is inserted into an insertion hole.
8 is a view of the positioning unit shown in FIG. 7 as viewed from the right side.
FIG. 9 is a diagram showing a display device manufacturing system according to a second embodiment of the present invention.
[Explanation of symbols]
Reference Signs List 5 support panel, 5a fixing lower plate (support panel), 5b rib mounting plate (support panel), 5c fixing upper plate, 7 rib, 10 position variable fixing means, 11 cam, 12 rotating shaft, 13 rod, 13b rod Engaging part, 14 elastic resin plate, 19 guide hole, 20 positioning means, 21 spring, 22 pin, 23 shaft (locking piece), 24 case, 25 guide hole, 29, 49 insertion hole, 31 lower frame, 32 upper Frame, 33 side frame, 35 frame, 41 stopper rod, 50 substrate cassette, 51 substrate, 53 loader, 54 transfer robot, 55 unloader, 56 loader / unloader, 61 UV lamp, 62 physical cleaning unit, 64 washing unit, 65 Drying processing unit, 72 Deposition chamber, 80 Storage room, 90 Physical cleaning room, A Far from the axis of cam peripheral surface , The insertion position of E positioning means, the insertion-off position of the F positioning means.

Claims (10)

A substrate cassette that horizontally supports the substrate,
A frame constituting an outer frame;
A pair of support panels facing each other in the shape of a standing wall and having ribs supporting both ends of the substrate,
Position-variable fixing means for variably fixing the support panel to the frame,
The position variable fixing means has an elastic urging means and an engaging means which engages with the frame, and the supporting panel is attached to the frame by urging the engaging means with the elastic urging means. A substrate cassette to be fixed. 2. The substrate cassette according to claim 1, wherein the position variable fixing unit includes a fixed on / off switching member that manually switches between application and release of the urging force by the elastic urging unit to the engagement unit. 3. A rod having an engagement portion that is movably attached to the support panel, is located over the support panel and the frame, and has an engagement portion that engages an end on the frame side with the frame; The substrate cassette according to claim 1, further comprising: a pulling unit attached to the rod on a side thereof, the pulling unit pulling the rod toward the support panel by the urging force. The pulling means is constituted by a cam provided on the support panel side of the rod and rotating around a horizontal rotation axis, and a resin plate attached to the support panel and having an elastic force to come into contact with the peripheral surface of the cam. 4. The substrate cassette according to claim 3, wherein said substrate cassette is processed. The substrate cassette according to claim 2, wherein the rod is guided in a guide provided on the frame. The support panel is provided with a locking piece urged by an elastic force movably, and the locking piece is inserted into an insertion hole provided in the frame by the elastic force to determine the position of the support panel. The substrate cassette according to any one of claims 1 to 5, further comprising positioning means. The substrate cassette according to claim 6, further comprising an insertion on / off switching member that manually switches between application and release of the elastic force to and from the locking piece. At a support panel position on the side opposite to the loading surface side on which the substrate is loaded, a stopper bar capable of changing a mounting position is provided so that a distance from the loading surface changes according to a depth size of the substrate. The substrate cassette according to any one of claims 1 to 7. The frame is composed of an upper frame, a lower frame, and two opposing side frames, and the support panel is fixed to the upper frame and the lower frame inside the two opposing side frames. 9. The substrate cassette according to any one of 1 to 8. 10. A manufacturing system for manufacturing a display device by performing processing on a substrate, wherein the processing device for performing processing on the substrate and the substrate on which the processing is performed are housed. A display device manufacturing system comprising a substrate cassette.

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