JPH11145329A - Method for forming solder ball of bga-type semiconductor device - Google Patents

Method for forming solder ball of bga-type semiconductor device

Info

Publication number
JPH11145329A
JPH11145329A JP32041897A JP32041897A JPH11145329A JP H11145329 A JPH11145329 A JP H11145329A JP 32041897 A JP32041897 A JP 32041897A JP 32041897 A JP32041897 A JP 32041897A JP H11145329 A JPH11145329 A JP H11145329A
Authority
JP
Japan
Prior art keywords
solder ball
solder
substrate
semiconductor device
transfer tape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP32041897A
Other languages
Japanese (ja)
Inventor
Saburo Tanabe
三郎 田辺
Isao Yonenaga
功 米永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui High Tec Inc
Original Assignee
Mitsui High Tec Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui High Tec Inc filed Critical Mitsui High Tec Inc
Priority to JP32041897A priority Critical patent/JPH11145329A/en
Publication of JPH11145329A publication Critical patent/JPH11145329A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3457Solder materials or compositions; Methods of application thereof
    • H05K3/3478Applying solder preforms; Transferring prefabricated solder patterns

Abstract

PROBLEM TO BE SOLVED: To receive and hold solder ball chips, which are punched out in a solder plate with a press, at predetermined locations where solder balls are to be arranged and in a constant position with good accuracy, even if the solder ball chips are small in size and are large in number, without falling, rolling, or dropping the solder ball chips because of impact. SOLUTION: This method comprises a process of forming solder balls as external connection electrodes on the substrate of a semiconductor device. In this process, solder ball pieces 11 are punched out with a press 2 in a solder plate 8 from the bottom side thereof in the arrangement of the solder balls and are stuck to a movable transfer tape 2, which is provided above the solder plate 8 and with an adhesive and is moved after the press 22 punches the solder pate 8, and then the solder ball chips 1 stuck to the transfer tape 12 are transferred to the substrate.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明はBGA型半導体装置
の半田ボ−ル形成方法に関する。
The present invention relates to a method for forming a solder ball of a BGA type semiconductor device.

【0002】[0002]

【従来の技術】BGA型半導体装置が半導体装置の小型
化、高速化あるいは多ピン化のために提案されている。
該BGA型半導体装置は例えば配線パタ−ンを設けた基
板に半導体チップを接着材にて固着搭載し、半導体チッ
プの端子と配線パタ−ンをワイヤ−で接続し、当該半導
体チップと配線パタ−ンを樹脂封止し、前記基板に外部
接続電極として半田ボ−ルを設け、配線パタ−ンと半田
ボ−ルをスル−ホ−ルを経て電気的に接続している。
2. Description of the Related Art A BGA type semiconductor device has been proposed to reduce the size, speed, or increase the number of pins of a semiconductor device.
In the BGA type semiconductor device, for example, a semiconductor chip is fixedly mounted on a substrate provided with a wiring pattern with an adhesive, terminals of the semiconductor chip are connected to the wiring pattern by wires, and the semiconductor chip and the wiring pattern are connected. A solder ball is provided on the substrate as an external connection electrode, and the wiring pattern and the solder ball are electrically connected via a through-hole.

【0003】従来の基板への半田ボ−ル形成は、図4の
(A)に示すように半田ボ−ル貯留容器1に収容した球
状の半田ボ−ル2を、吸着孔3を格子状に設けた吸着ヘ
ッド4にて所定個数取り出し、(B)に示すように基板
5に形成されたランド6上へ移送して設置後、加熱し溶
融させて半田ボ−ル2を形成している。なお、図中の7
は吸気路である。
As shown in FIG. 4A, a conventional solder ball is formed on a substrate by forming a spherical solder ball 2 housed in a solder ball storage container 1 into a suction hole 3 in a lattice shape. A predetermined number of pieces are taken out by a suction head 4 provided in the above, transferred to a land 6 formed on a substrate 5 as shown in FIG. . Note that, in FIG.
Is an intake path.

【0004】この方法では基板1枚について半田ボ−ル
を例えば500個程度まで設置するのであれば、それ程
問題なくなされる。しかし、半田ボ−ルの設置数がより
多数になると、吸着ヘッドに所定個数例えば1000個
すべて1個の漏れもなく吸着させることが難しく基板へ
の半田ボ−ルの設置精度が劣化する。また半田ボ−ルの
大きさが小さくなると例えば径0.76mmから0.2
mm以下になると前記設置精度がより劣化し、置き直し
作業をせねばならず生産性が低下する。
[0004] In this method, if the number of solder balls per board is set to, for example, about 500, there is no problem. However, when the number of solder balls is increased, it is difficult to adsorb a predetermined number, for example, all 1000 pieces, to the suction head without leakage, and the accuracy of setting the solder balls on the substrate is deteriorated. When the size of the solder ball is reduced, for example, the diameter becomes 0.76 mm to 0.2 mm.
When it is less than mm, the installation accuracy is further deteriorated, and a re-placement operation has to be performed to lower the productivity.

【0005】他の基板へ半田ボ−ルの形成方法として、
半田金属板から半田ボ−ル片をプレスにより打抜き、該
打抜いた半田ボ−ル片を基板のランド上に移送し設置す
ることが提案されている。
As a method of forming a solder ball on another substrate,
It has been proposed that a solder ball piece is punched from a solder metal plate by a press, and the punched solder ball piece is transferred to a land of a substrate and installed.

【0006】[0006]

【この発明が解決しようとする課題】しかし、従来のプ
レスのパンチとダイで打抜きされた半田ボ−ル片は受け
板の上で倒れたり、転んだり、また衝撃によって落下す
ることがあって一定な位置あるいは姿勢をとり得ず、該
半田ボ−ル片を基板のランドに設置するのに、当該打抜
れた半田ボ−ル片が球状でないだけに取扱いが難しく手
間を要する。
However, the solder ball pieces punched by the punches and dies of the conventional press may fall down on the receiving plate, fall down, or fall due to impact. Since the solder ball pieces are not spherical, they are difficult to handle and require time and effort to install the solder ball pieces on the land of the board.

【0007】本発明は、半田用金属板からプレスで打抜
きした半田ボ−ル片が倒れや転び、あるいは衝撃等で落
下することなく、所定位置に且つ一定した姿勢で受け取
り保持され、基板の半田ボ−ル配列箇所に半田ボ−ル片
が小さくまた多数であっても精度よく設置し半田ボ−ル
を形成することを目的とする。
According to the present invention, a solder ball piece stamped from a solder metal plate by a press is received and held at a predetermined position and in a fixed posture without falling down, falling down, or falling due to impact, etc. An object of the present invention is to form a solder ball by accurately setting even a small number of solder ball pieces and a large number of solder ball pieces at a ball arrangement position.

【0008】[0008]

【課題を解決するための手段】本発明の要旨は、半導体
チップを搭載するBGA型半導体装置の基板に外部接続
電極として半田ボ−ルを形成する方法において、半田用
金属板から半田ボ−ル片をプレスにより下側から上方へ
基板の半田ボ−ル配列状に順次打抜くとともに、上方に
走行自在に設けた接着剤付き転写テ−プをプレスの打抜
きに応じて基板の半田ボ−ル配列間隔に相当長さ走行さ
せ、前記打抜れた半田ボ−ル片を被着させ、該接着剤付
き転写テ−プに着けた半田ボ−ル片を基板に移し換える
ところにある。
SUMMARY OF THE INVENTION The gist of the present invention is to provide a method of forming a solder ball as an external connection electrode on a substrate of a BGA type semiconductor device on which a semiconductor chip is mounted. The pieces are sequentially punched out from the lower side to the upper side in a solder ball arrangement of the board by a press, and a transfer tape with an adhesive provided movably upward is mounted on the board in accordance with the punching of the press. The punched solder ball pieces are applied to the board by traveling the length corresponding to the arrangement interval, and the solder ball pieces attached to the transfer tape with the adhesive are transferred to the substrate.

【0009】[0009]

【発明の実施の形態】次に、本発明の1実施例について
図面を参照して説明する。図面において、8は半田用金
属板で、例えば鉛又は鉛合金金属板等が採用される。該
半田用金属板8は下方に設置されたパンチ9とダイプレ
−ト10により下側から上向きに打抜かれ、該打抜かれ
た半田ボ−ル片11が当該パンチ9に載ったまま上方を
走行する接着剤付き転写テ−プ12に被着される。
Next, an embodiment of the present invention will be described with reference to the drawings. In the drawings, reference numeral 8 denotes a solder metal plate, for example, a lead or lead alloy metal plate or the like is employed. The solder metal plate 8 is punched upward from below by a punch 9 and a die plate 10 provided below, and the punched solder ball piece 11 travels upward while being mounted on the punch 9. The adhesive tape is attached to the transfer tape 12.

【0010】ここでまず、プレス金型装置22の構成に
ついて述べる。13は可動式ベッドで、前記パンチ9を
パンチプレ−ト14を介して設け、上下動させるもので
ある。15は固定式ストリッパ−で、前記ダイプレ−ト
10とパンチプレ−ト14の間に設けられている。該固
定式ストリッパ−15は前記パンチ9が可動式ベッド1
3の作動で上昇する際に、ともに上昇して半田用金属板
8をダイプレ−ト10とで挟圧する。その挟圧した状態
でパンチ9により半田用金属素片8を打抜きする。な
お、16はポストである。
First, the configuration of the press die apparatus 22 will be described. A movable bed 13 is provided with the punch 9 via a punch plate 14 and is moved up and down. A fixed stripper 15 is provided between the die plate 10 and the punch plate 14. The fixed stripper 15 is such that the punch 9 has a movable bed 1.
When it rises by the operation of 3, it rises together and clamps the solder metal plate 8 with the die plate 10. The metal piece for soldering 8 is punched out by the punch 9 in the state of being pressed. In addition, 16 is a post.

【0011】前記半田用金属板8はこの実施例では紙面
の表面側から裏面側に走行するようになされている。1
7は走行ガイドである。
In this embodiment, the solder metal plate 8 runs from the front side to the back side of the paper. 1
7 is a traveling guide.

【0012】18は固定式ラムで、テ−プ支持台19を
介してその下方に接着剤付き転写テ−プ12が走行自在
に設けられる。該接着剤付き転写テ−プ12は前記パン
チ9が上下動する1ストロ−ク毎に、基板5の半田ボ−
ル配列間隔の長さずつ走行するように別途の操作プログ
ラムでなされる。接着剤付き転写テ−プ12はこの実施
例では前記半田用金属板8と同様に紙面の表側から裏側
へ走行される。
Reference numeral 18 denotes a fixed type ram, on which a transfer tape 12 with an adhesive is provided under a tape support base 19 so as to run freely. The transfer tape 12 with the adhesive is applied to the solder board of the substrate 5 at every stroke of the punch 9 moving up and down.
The operation is performed by a separate operation program so that the vehicle travels by the length of the array interval. In this embodiment, the transfer tape 12 with the adhesive is moved from the front side to the back side of the paper surface in the same manner as the solder metal plate 8 in this embodiment.

【0013】なお、20は前記接着剤付き転写テ−プ1
2の走行ガイド、21は前記固定式ラム18にダイプレ
−ト10を取り付ける治具である。
Reference numeral 20 denotes the transfer tape 1 with the adhesive.
A traveling guide 21 is a jig for attaching the die plate 10 to the fixed ram 18.

【0014】なお、図1ではパンチ9を8個連設してい
るが、これは図の煩雑を避けるためであり、基板5に半
田ボ−ル2を1列分設置する個数に相当する数のパンチ
9を設置するのが望ましい。また、前記1列配置個数及
びその大きさによっては前後に分けて設置してもよい。
さらに、パンチ9は間欠作動が自在にできるように例え
ばテ−パプレ−トを介して前記パンチプレ−ト14に設
置し、必要なパンチ9だけを作動するようにしてもよ
い。
In FIG. 1, eight punches 9 are provided in series, but this is for the sake of simplicity of the drawing, and the number corresponds to the number of solder balls 2 arranged in one row on the substrate 5. It is desirable to install the punch 9 of the above. In addition, depending on the number and the size of the arrangement in one row, they may be installed separately in front and rear.
Further, the punch 9 may be installed on the punch plate 14 via a tape plate, for example, so that the intermittent operation can be freely performed, and only the necessary punch 9 may be operated.

【0015】本発明でのプレス金型装置22は前述のよ
うになされている。次に、前記と一部重複するが半田ボ
−ル片11を基板5に設置する方法を述べる。
The press die apparatus 22 according to the present invention is constructed as described above. Next, a method of installing the solder ball pieces 11 on the substrate 5, which partially overlaps with the above, will be described.

【0016】可動式ベッド13を作動してパンチ9とダ
イプレ−ト10により、半田用金属板8を下側から打抜
き、該打抜いた半田ボ−ル片11を、上方にて走行自在
に支承されている接着剤付き転写テ−プ12に被着させ
る。この際、前記打抜かれた半田ボ−ル片11はパンチ
9に載り支えられた状態で接着剤付き転写テ−プ12に
被着されるので、倒れたり転んだりせずに所定位置に同
じ姿勢で着けられる。
The movable bed 13 is operated to punch the solder metal plate 8 from below by the punch 9 and the die plate 10, and the punched solder ball piece 11 is supported so as to be able to run upward. Is adhered to the transfer tape 12 provided with an adhesive. At this time, since the punched solder ball pieces 11 are mounted on the transfer tape 12 with the adhesive while being supported by the punch 9, the same attitude is maintained at a predetermined position without falling down or falling down. Can be worn with

【0017】前記被着させた後、パンチ9が半田用金属
板8より下方の下死点に降下している間に、前記接着剤
付き転写テ−プ12を予め分かる基板5の半田ボ−ル配
列間隔の長さだけ走行させる。
After the application, the transfer tape 12 with the adhesive is known in advance while the punch 9 is lowered to the bottom dead center below the metal plate 8 for soldering. Run for the length of the array distance.

【0018】続いて再びパンチ9が上方に作動して前記
同様に半田用金属板8を打抜き、その打抜かれた半田ボ
−ル片11が接着剤付き転写テ−プ12に着けられる。
この作動を繰り返して行って、接着剤付き転写テ−プ1
2に半田ボ−ル片11が基板5の半田ボ−ル配列状態と
同じ配列で被着する。
Subsequently, the punch 9 is operated upward again to punch the solder metal plate 8 in the same manner as described above, and the punched solder ball piece 11 is attached to the transfer tape 12 with the adhesive.
By repeating this operation, the transfer tape with adhesive 1
2, solder ball pieces 11 are attached in the same arrangement as the solder ball arrangement state of the substrate 5.

【0019】その後、接着剤付き転写テ−プ12に着け
た半田ボ−ル片11が基板5のランド6に移し換えられ
設置される。次いで、加熱して溶融させ該基板5に半田
ボ−ル2が形成される。
Thereafter, the solder ball piece 11 attached to the transfer tape 12 with the adhesive is transferred to the land 6 of the substrate 5 and installed. Next, the solder ball 2 is formed on the substrate 5 by heating and melting.

【0020】また、本発明では、半田ボ−ル片の設置は
半導体チップを搭載する基板としているが、該基板は半
導体チップを直接的に搭載するもの、他の部材を介し続
いて間接的に搭載するのも含むものである。
Further, in the present invention, the solder ball pieces are placed on a substrate on which the semiconductor chip is mounted. The substrate may be a substrate on which the semiconductor chip is mounted directly or indirectly via another member. It also includes mounting.

【0021】[0021]

【発明の効果】本発明によれば、プレスにより半田ボ−
ル片を下側から上方に打抜いて、そのまま接着剤付き転
写テ−プに被着させるので、当該半田ボ−ル片が自重や
衝撃などで倒れたり、転ぶようなことが無く所定位置に
一定の姿勢で着けられる。また半田ボ−ル片は、設置数
が多数であっても、あるいは小さくとも欠けることなく
基板に設置できる等の効果がある。
According to the present invention, a solder ball is formed by pressing.
The solder ball piece is punched upward from the lower side and adhered to the transfer tape with adhesive as it is, so that the solder ball piece does not fall down or fall down due to its own weight or impact, etc. Wear in a certain posture. In addition, the solder ball pieces can be installed on a substrate without being chipped even if the number of solder ball pieces is large or small.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の1実施例における半田ボ−ル片の打抜
きを示す図。
FIG. 1 is a diagram showing punching of solder ball pieces according to one embodiment of the present invention.

【図2】本発明の1実施例において接着剤付き転写テ−
プから半田ボ−ル片を基板に移し換え形成した半田ボ−
ルを示す図。
FIG. 2 shows a transfer tape with an adhesive in one embodiment of the present invention.
Solder ball formed by transferring a solder ball piece from a board to a substrate
FIG.

【図3】本発明の1実施例において基板に半田ボ−ルを
形成した側面図。
FIG. 3 is a side view showing a state where a solder ball is formed on a substrate in one embodiment of the present invention.

【図4】従来の基板への半田ボ−ル設置を説明するため
の図。
FIG. 4 is a view for explaining a conventional solder ball installation on a substrate.

【符号の説明】[Explanation of symbols]

2 半田ボ−ル 5 基板 6 ランド 8 半田用金属板 9 パンチ 10 ダイプレ−ト 11 半田ボ−ル片 12 接着剤付き転写テ−プ 13 可動式ベッド 14 パンチプレ−ト 15 固定式ストリッパ− 16 ポスト 17、20 走行ガイド 18 固定式ラム 19 テ−プ支持台 21 取り付け治具 22 プレス金型装置 2 Solder Ball 5 Substrate 6 Land 8 Solder Metal Plate 9 Punch 10 Diplate 11 Solder Ball Piece 12 Transfer Tape with Adhesive 13 Movable Bed 14 Punch Plate 15 Fixed Stripper 16 Post 17 , 20 traveling guide 18 fixed ram 19 tape support 21 mounting jig 22 press die device

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 半導体チップを搭載するBGA型半導体
装置の基板に外部接続電極として半田ボ−ルを形成する
方法において、半田用金属板から半田ボ−ル片をプレス
により下側から前記基板の半田ボ−ル配列状に順次打抜
くとともに、上方に走行自在に設けた接着剤付き転写テ
−プをプレスの打抜きに応じて基板の半田ボ−ル配列間
隔に相当長さ走行させて、前記打抜れた半田ボ−ル片を
被着させ、該テ−プに着けた半田ボ−ル片を前記基板に
移し換えることを特徴とするBGA型半導体装置の半田
ボ−ル形成方法。
1. A method of forming a solder ball as an external connection electrode on a substrate of a BGA type semiconductor device on which a semiconductor chip is mounted, wherein a solder ball piece is pressed from a lower side of a metal plate for solder by pressing. The punching was performed sequentially in a solder ball array, and the transfer tape with adhesive provided so as to be able to run upward was run for a length corresponding to the solder ball array interval of the substrate in accordance with the punching of the press. A method of forming a solder ball for a BGA type semiconductor device, comprising: attaching a punched solder ball piece; and transferring the solder ball piece attached to the tape to the substrate.
JP32041897A 1997-11-05 1997-11-05 Method for forming solder ball of bga-type semiconductor device Pending JPH11145329A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32041897A JPH11145329A (en) 1997-11-05 1997-11-05 Method for forming solder ball of bga-type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32041897A JPH11145329A (en) 1997-11-05 1997-11-05 Method for forming solder ball of bga-type semiconductor device

Publications (1)

Publication Number Publication Date
JPH11145329A true JPH11145329A (en) 1999-05-28

Family

ID=18121243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32041897A Pending JPH11145329A (en) 1997-11-05 1997-11-05 Method for forming solder ball of bga-type semiconductor device

Country Status (1)

Country Link
JP (1) JPH11145329A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100376595B1 (en) * 2000-09-08 2003-03-15 주식회사 아큐텍반도체기술 Plating cathode device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100376595B1 (en) * 2000-09-08 2003-03-15 주식회사 아큐텍반도체기술 Plating cathode device

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