JPH11142884A - Color liquid crystal panel and its manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To increase the numerical aperture and to obtain the color liquid crystal panel without using a color filter by forming pixel electrodes on top of coloring layers including intermediate electrodes and on top of black color coloring layers. SOLUTION: The panel is provided with a thick first transparent insulating layer 27, which is formed on a first transparent insulating substrate 2, grid- shaped optical shielding electrodes, which are formed at least over scanning lines and signal lines through the layer 27 and intermediate electrodes 30 which are formed by including first opening sections formed on the layer 27 over the drain electrodes of the insulated gate type transistors on the substrate 2. Moreover, coloring layers 19 are formed in a stripe shape on the layer 27 including a portion of the optical shield electrode for each of the colors (R, G and B) and pixel electrodes 14 are formed on the layers 19. Furthermore, the active substrate 2 and a second transparent insulating substrate, on which a transparent and electrically conductive layer is formed on one main surface, are pasted together to make the panel.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a liquid crystal panel having a color image display function and a method of manufacturing the same.

[0002]

2. Description of the Related Art Recent advances in microfabrication technology, liquid crystal material technology, packaging technology, and the like have led to the commercialization of television images and various image displays on a 5 to 50 cm diagonal liquid crystal panel that are comparable to CRTs. Offered on a base. By forming three colored layers of R, G, and B on one of two glass substrates constituting the liquid crystal panel,
Color display is also easily realized. In particular, in a so-called active type liquid crystal panel in which a switching element is incorporated for each picture element, an image having little crosstalk, high-speed response, and a high contrast ratio is guaranteed.

[0003] These liquid crystal panels have one scanning line.
Generally, a matrix organization of about 100 to 1000 lines and about 200 to 2,000 signal lines is used, but recently, a large screen and high definition have been simultaneously advanced.

FIG. 8 shows a state of mounting on a liquid crystal panel, in which a drive signal is supplied to one of the transparent insulating substrates constituting the liquid crystal panel 1, for example, a scanning line electrode terminal group 6 formed on a glass substrate 2. A COG (Chip-On-Glass) method for directly connecting the semiconductor integrated circuit chip 3 or a TCP film 4 having gold-plated copper foil terminals (not shown) based on, for example, a polyimide resin thin film and a signal line. An electrical signal is supplied to the image display unit by a mounting means such as a TCP system which is fixed to the electrode terminal group 5 by pressing with a suitable adhesive containing a conductive medium. Here, for the sake of convenience, two mounting schemes are shown at the same time, but it goes without saying that one of the two schemes is actually selected as appropriate.

Reference numerals 7 and 8 denote wiring paths for connecting the image display portion of the liquid crystal panel 1 to the electrode terminals 5 and 6 for the signal lines and the scanning lines, and are necessarily made of the same conductive material as the electrode terminals 5 and 6. No need to be configured. Reference numeral 9 denotes a glass substrate which is another transparent insulating substrate having a transparent conductive counter electrode common to all liquid crystal cells, and two glass substrates 2 and 9 constituting the liquid crystal panel 1 are made of resinous fibers or It is formed at a predetermined distance of about several μm by a spacer material such as beads,
The gap (gap) is a closed space sealed with a sealing material and a sealing material made of an organic resin at the peripheral portion of the glass substrates 2 and 9, and the closed space is filled with liquid crystal. .

In order to realize a color display, an organic thin film having a thickness of about 1 to 2 μm containing one or both of a dye and a pigment called a colored layer is deposited on the closed space side of the glass substrate 9 to form a color. Since a display function is provided, in that case, the glass substrate 9 is also called a color filter. Then, depending on the properties of the liquid crystal material, a polarizing plate is stuck on one or both of the upper surface of the glass substrate 9 and the lower surface of the glass substrate 2, and the liquid crystal panel 1 functions as an electro-optical element.

FIG. 9 is an equivalent circuit diagram of an active liquid crystal panel in which, for example, a thin-film insulated gate transistor is arranged as a switching element for each picture element. The elements drawn in solid lines are formed on the active substrate 2 which is one glass substrate, and the elements drawn in broken lines are formed on the other glass substrate 9. The scanning line 11 and the signal line 12
For example, a TFT (thin film transistor) 10 using amorphous silicon as a semiconductor layer and a silicon nitride layer as a gate insulating layer
Active substrate 2 (one glass substrate) simultaneously with the formation of
Fabricated on

The liquid crystal cell 13 includes a transparent conductive picture element electrode 14 formed on the active substrate 2 and a transparent conductive counter electrode 15 formed on the color filter 9 (the other glass substrate). And a liquid crystal 16 which fills a closed space formed by the two glass substrates 2 and 9, and may be electrically treated the same as a capacitor. There are several choices regarding the configuration of the storage capacitor for increasing the time constant of the liquid crystal cell 13. For example, in FIG. 9, the storage capacitor 17 includes a common electrode 18 and a pixel electrode 14 that are common to all the pixel electrodes. And an insulating layer such as a gate insulating layer of an insulated gate transistor.

FIG. 10 is a sectional view of a main part of a liquid crystal panel for color display. As described above, the colored layer 19 made of dyed photosensitive gelatin or colored photosensitive resin is disposed on the closed space side of the color filter 9 corresponding to the pixel electrode 14.
The three primary colors of GB are arranged according to a predetermined arrangement. The counter electrode 15 common to all the pixel electrodes 14 is formed on the colored layer 19 as shown in order to avoid loss of voltage distribution in the liquid crystal cell due to the interposition of the colored layer 19. A polyimide resin thin film layer 20 having a thickness of, for example, about 0.1 μm, which is adhered on the two glass substrates 2 and 9 in contact with the liquid crystal 16, is an alignment film for aligning liquid crystal molecules in a predetermined direction. It is. In addition, when a twisted nematic (TN) type liquid crystal is used, two polarizing plates 21 are required on the upper and lower sides.

When a low-reflection opaque film 22 is disposed at the boundary between the R, G, and B colored layers 19, reflected light from a wiring layer such as the signal line 12 on the active substrate 2 can be prevented, and image contrast can be reduced. The ratio is improved, and the leakage current at the time of the OFF operation of the switching element TFT 10 due to external light irradiation can be prevented from increasing, so that the liquid crystal panel can be operated even under strong external light.
M). Although many configurations of the BM are conceivable, it is disadvantageous in terms of cost in consideration of the occurrence of a step at the boundary between adjacent colored layers and light transmittance, but a metal thin film having a thickness of about 0.1 μm, for example, A Cr thin film is simple and reasonable.

In FIG. 10, for simplicity of understanding, in addition to the TFT 10, the scanning line 11, and the storage capacitor 17, components such as a back light source and a spacer are omitted.
Reference numeral 23 denotes a conductive thin film for connecting the pixel electrode 14 and the drain of the TFT 10, and is generally formed simultaneously with the same member as the signal line 12 and is called a drain wiring (electrode). Although not shown here, the counter electrode 15 is connected to an appropriate conductive pattern on the active substrate 2 having the TFT 10 via an appropriate conductive paste at an outer peripheral portion slightly outside the image display portion, Electrical connection is provided by being incorporated in a part of the electrode terminal groups 5 and 6.

FIG. 11 is a sectional view of a peripheral portion of the conventional liquid crystal panel 1 on the scanning line side, and shows a state in which the active substrate 2 and the color filter 9 are sealed with an adhesive resin seal 24. The width of the shape of the resin seal 24 is 0.5 to
The height is about 1.2 mm and the height is several μ
m, which is efficiently formed by screen printing on a small liquid crystal panel, and formed by using a seal drawing machine so as not to transfer foreign matter on a large liquid crystal panel.

In order to prevent unnecessary light from leaking from the back side when the liquid crystal panel is viewed obliquely around the image display section,
The colored layers 19 'and the BMs 22' are arranged in a predetermined number or more. Note that 25 is a gate insulating layer, and 26 is a passivation insulating layer.

The latest liquid crystal panel is designed to have a narrower frame, that is, the area outside the image display unit is designed to be as small as possible to promote the reduction of the weight and size of the display device.
It is also arranged as close to the image display as possible. As a result, the BM 22 'must be arranged on the seal 24.

At the same time, even in a large-sized panel having a diagonal width of 25 cm or more, high definition is simultaneously promoted in order to improve display capacity and display image quality, and as a result, it is required to secure an aperture ratio.
Improving the bonding accuracy of the two glass substrates 2 and 9 constituting the liquid crystal panel at the same time as reducing the BM width has suddenly become a technical problem. Specifically, the pasting accuracy of several μm was sufficient in the past, but in order to increase the aperture ratio to 80% or more, high accuracy of 2 μm or less has come to be required.

The bonding accuracy of the liquid crystal panel is the sum of the processing accuracy of the active substrate and the color filter and the bonding accuracy of the two substrates in the bonding process. As the substrate is larger, the warpage and undulation of the glass substrate are also added, and the accuracy is reduced.

At the time of bonding, two glass substrates are attached with an accuracy of 1 to
It is not too difficult to overlap at 2 μm in view of the mechanism and ability of a high-precision exposure machine for large substrates, but the accuracy that can be practically secured due to the warpage of the glass substrate in the curing process of the seal 24 is At present, it is reduced to several μm.

[0018]

Among the curing steps, one of the most important is the problem of temperature uniformity. Since the expansion coefficient of a glass substrate is several ppm per 1 ° C., for example, if a temperature difference of 10 ° C. exists between two glass substrates having a size of 30 cm, a difference in expansion and contraction of 10 to 20 μm occurs. Therefore, gradual heating and gradual cooling are indispensable for heating and cooling in the curing step, but it cannot be reduced too much time to reduce productivity.

Attempts have been made to lower the temperature to 100 ° C. or less in the heat curing of the sealing resin. However, generally, when the curing temperature is lowered, the airtightness and the adhesion are inevitably reduced. In addition, it is inevitable that the residual solvent in the sealing resin dissolves in the liquid crystal and the retention of the liquid crystal cell is reduced, and the display characteristics of the liquid crystal panel are deteriorated at high temperatures and during long-term operation. Attempts to cure the seal at room temperature using an ultraviolet-curable seal resin have not yet been put to practical use due to the compatibility of the materials.

Regarding the production of color filters, most of the exposure apparatuses used from the viewpoint of cost are of the proximity type, and the total pitch of about 2 μm is the limit of mass production. Has many issues.

The present invention has been made in view of the above situation, and aims to avoid various problems related to the conventional bonding by forming a colored layer having a color display function on an active substrate. .

[0022]

According to the color liquid crystal panel of the present invention, a thick transparent insulating layer having a first opening on a drain electrode of an insulated gate transistor is formed on a first transparent insulating substrate. A light shield electrode is formed on at least the scanning line and the signal line on the thick transparent insulating layer, and a second opening is formed on the intermediate electrode including the first opening. A colored layer having a portion is formed including a part of the light shield electrode for each color, a black colored layer is formed on the light shield electrode located between the colored layers by an electrodeposition method,
An active substrate having a pixel electrode formed on the colored layer and the black colored layer including the intermediate electrode, and a second transparent insulating layer having the active substrate and a transparent conductive layer on one main surface; A substrate is formed into a panel by filling a liquid crystal between them.

[0023]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The liquid crystal panel according to claim 1 is
A plurality of scanning lines are provided on one main surface of the first transparent insulating substrate, and a plurality of signal lines that are substantially orthogonal to the scanning lines via at least one or more insulating layers. An active substrate having at least one insulated gate transistor and a transparent conductive picture element electrode at each intersection with a signal line, and having a colored layer containing a pigment under the picture element electrode,
A liquid crystal panel having a transparent conductive layer on one main surface and a liquid crystal filled between the active substrate and a second transparent insulating substrate facing the active substrate, wherein a drain electrode of the insulated gate transistor is provided. Having a first opening above the first transparent insulating substrate and a grid-like light shield at least above the scanning lines and the signal lines via a thick first transparent insulating layer formed on the first transparent insulating substrate An intermediate electrode is formed including the electrode and the first opening, and a colored layer having a second opening on the intermediate electrode includes a part of the light shield electrode for each color (R, G, B). And a black colored layer containing one or both of a dye and a pigment is formed on the light shielding electrode between the colored layers,
A picture element electrode is formed on the colored layer including the intermediate electrode and on the black colored layer.

A liquid crystal panel according to a second aspect has a plurality of scanning lines on one main surface of the first transparent insulating substrate, and is substantially orthogonal to the scanning lines via at least one or more insulating layers. A colored layer containing at least one insulated gate transistor and a transparent conductive pixel electrode at each intersection of the scanning line and the signal line, and a pigment under the pixel electrode And a liquid crystal panel having a transparent conductive layer on one main surface and a liquid crystal filled between a second transparent insulating substrate facing the active substrate. A first opening on a drain electrode of the insulated gate transistor, at least over the scanning line via a thick first transparent insulating layer formed on a first transparent insulating substrate; A grid-shaped light shield electrode and a first The intermediate electrode is formed to include a mouth,
On the intermediate electrode, a colored layer having a second opening is formed in a stripe shape or an island (dot) shape including a part of the light shield electrode for each color (R, G, B). A black colored layer containing one or both of a dye and a pigment is formed on the light shield electrode between the colored layers, and a pixel electrode is formed on the colored layer and the black colored layer including the intermediate electrode. A thin second transparent insulating layer is formed on the picture element electrode, on the coloring layer, and on the black coloring layer.

A liquid crystal panel according to a third aspect has a plurality of scanning lines on one main surface of the first transparent insulating substrate, and is substantially orthogonal to the scanning lines via at least one or more insulating layers. A colored layer containing at least one insulated gate transistor and a transparent conductive pixel electrode at each intersection of the scanning line and the signal line, and a pigment under the pixel electrode And a liquid crystal panel having a transparent conductive layer on one main surface and a liquid crystal filled between a second transparent insulating substrate facing the active substrate. A first opening on a drain electrode of the insulated gate transistor, at least over the scanning line via a thick first transparent insulating layer formed on a first transparent insulating substrate; A grid-shaped light shield electrode and a first The intermediate electrode is formed to include a mouth,
On the intermediate electrode, a colored layer having a second opening is formed in a stripe shape or an island (dot) shape including a part of the light shield electrode for each color (R, G, B). A black colored layer containing either or both of a dye and a pigment is formed on the light shield electrode between the colored layers, and has a third opening on the second opening on the first transparent insulating substrate. A thin second transparent insulating layer is formed, and a picture element electrode is formed on the colored layer including the intermediate electrode in the third opening and on the second transparent insulating layer on the black colored layer. It is characterized by the following.

A method for manufacturing a liquid crystal panel according to a fourth aspect is the method for manufacturing a liquid crystal panel according to the first aspect,
Forming a scanning line, a signal line, and an insulated gate transistor on a first transparent insulating substrate; and a thick first transparent insulating layer having a first opening on a drain electrode of the insulated gate transistor Forming on a first transparent insulating substrate, a grid-like pattern including an intermediate electrode including at least a first opening on the first transparent insulating layer, and at least on the scanning line and on the signal line. Forming a light-shielding electrode, and forming a colored layer having a second opening on the intermediate electrode and containing a pigment in stripes for each color (R, G, B) including a part of the light-shielding electrode. Forming a black colored layer containing either or both of a dye and a pigment on the light shield electrode between the colored layers by electrodeposition, and forming the second opening Form pixel electrodes on the colored layer and on the black colored layer And having a that step.

A method of manufacturing a liquid crystal panel according to a fifth aspect is the method of manufacturing a liquid crystal panel according to the second aspect,
Forming a scanning line, a signal line, and an insulated gate transistor on a first transparent insulating substrate; and a thick first transparent insulating layer having a first opening on a drain electrode of the insulated gate transistor Forming on a first transparent insulating substrate, a grid-like pattern including an intermediate electrode including at least a first opening on the first transparent insulating layer, and at least on the scanning line and on the signal line. Forming a light-shielding electrode, and forming a colored layer having a second opening on the intermediate electrode and containing a pigment in stripes for each color (R, G, B) including a part of the light-shielding electrode. Forming a black colored layer containing either or both of a dye and a pigment on the light shield electrode between the colored layers by electrodeposition, and forming the second opening To form a pixel electrode on the colored layer and the black colored layer And having a step, and forming a thin second transparent insulating layer on the first transparent insulating substrate.

According to a sixth aspect of the present invention, there is provided a method of manufacturing a liquid crystal panel, comprising the steps of:
Forming a scanning line, a signal line, and an insulated gate transistor on a first transparent insulating substrate; and a thick first transparent insulating layer having a first opening on a drain electrode of the insulated gate transistor Forming on a first transparent insulating substrate, a grid-like pattern including an intermediate electrode including at least a first opening on the first transparent insulating layer, and at least on the scanning line and on the signal line. Forming a light-shielding electrode, and forming a colored layer having a second opening on the intermediate electrode and containing a pigment in stripes for each color (R, G, B) including a part of the light-shielding electrode. Forming a black colored layer containing one or both of a dye and a pigment on the light shield electrode between the colored layers by electrodeposition; A thin second transparent insulating layer having a third opening thereon A step of forming, characterized by a step of forming a pixel electrode on the third colored layer include openings of the black coloring layer second transparent insulating layer over.

According to the first aspect, the colored layer having the color display function is provided below the picture element electrode, and the black colored layer having the BM function is provided above the signal line and the scanning line via the thick transparent insulating layer. Since the formed light is formed on the shield electrode with high precision, the aperture ratio can be increased, and a color liquid crystal panel can be obtained without using a color filter.

According to the second aspect, the colored layer, the black colored layer, and the pixel electrode are covered with the transparent insulating layer. Elution and release of gas components are suppressed.

According to the third aspect, the colored layer and the black colored layer are covered with the transparent insulating layer, and the pixel electrode is formed on the uppermost layer of the first transparent insulating substrate. In addition, no voltage loss occurs when driving the liquid crystal cell, and the voltage use efficiency of the liquid crystal cell is improved.

According to the method for manufacturing a color liquid crystal panel of the present invention, in manufacturing the panel, the light shielding electrode formed on the signal line or on the signal line and the scanning line via the thick transparent insulating layer is formed. Since the black colored layer is formed by electrodeposition on the upper side, the step between the colored layer and the black colored layer is eliminated by adjusting the thickness of the black colored layer to the thickness of the colored layer. And the display image quality is improved.

According to the method of manufacturing a color liquid crystal panel of the fifth aspect, the colored layer, the black colored layer, and the pixel electrode are covered with the transparent insulating layer. Elution of impurities and release of gas components from the coloring layer and the black coloring layer are suppressed, and the reliability of the liquid crystal panel is improved.

According to the method of manufacturing a color liquid crystal panel of the present invention, a second transparent insulating layer is applied to cover the second opening formed in the colored layer above the intermediate electrode in manufacturing the panel. Further, since the third opening is formed in the second transparent insulating layer and the intermediate electrode is exposed, even if the pixel electrode is formed on the second transparent insulating layer, the pixel electrode is hardly disconnected. Become.

Hereinafter, each embodiment of the present invention will be described with reference to FIG.
This will be described with reference to FIGS. Parts having the same functions as those of the conventional example are denoted by the same reference numerals.

(Embodiment 1) FIG. 1 is a plan view of an active substrate according to (Embodiment 1) of the present invention, and FIG.
(A) to (c), FIGS. 3 (a), (b), and FIG.
FIG. 5 is a sectional view taken along the line A-A ′, and FIG. 5 is another plan view of the active substrate according to the first embodiment of the present invention.

In FIG. 1, reference numeral 27 denotes a thick first transparent insulating layer formed on the first transparent insulating substrate 2;
A grid-shaped light shield electrode 30 formed at least on the scanning lines and on the signal lines (both not shown) via the transparent insulating layer 27, is an insulated gate on the first transparent insulating substrate 2. On the drain electrode (not shown) of the type transistor,
An intermediate electrode including a first opening (described later) formed in the first transparent insulating layer 27. The coloring layer 19 is formed on the first transparent insulating layer 27 in a stripe shape including a part of the light shield electrode 29 for each color (R, G, B). Is formed on.

In the process of the first embodiment, first, as shown in FIG. 2A, an insulated gate transistor which is at least a switching element is provided on one main surface of the first transparent insulating substrate 2. 10 and scanning lines 11 (both not shown), signal lines 12 and drain electrodes 23 are sequentially formed to activate the first transparent insulating substrate 2. 25 is a transparent insulating layer such as a gate insulating layer as described above,
In order to reduce the probability of a short circuit between the scanning line 11 and the signal line 12, they are often stacked with different types of insulating layers.

Next, as shown in FIG. 2B, a thick first transparent insulating layer 27 is formed on the first transparent insulating substrate 2, and the surface is flattened. When the photosensitive material, for example, Optmer PC302 (trade name, manufactured by Nippon Synthetic Rubber Co., Ltd.) is used as the first transparent insulating layer 27, the first opening 28 is formed on the drain electrode 23 and not shown. Is the signal line 12
And the formation of openings on the terminal electrodes 5 and 6 of the scanning lines 11 can be performed simultaneously, which is reasonable.

Subsequently, as shown in FIG. 2C, on the first transparent insulating layer 27, preferably on the scanning line 11 including also on the insulated gate transistor 10, and on the signal line 12
A light shielding electrode 29 and an intermediate electrode 30 including the first opening 28 are both formed on a conductive thin film such as Cr, T
i, Mo, etc. are formed with a film thickness of about 0.1 to 0.3 μm. Although the insulated gate transistor 10 is not shown, the signal line 1
2 and the drain electrode 23,
The light shield electrode 29 (on which a black colored layer is laminated in a later step) formed on the insulated gate transistor 10 shields the insulated gate transistor 10 from external light.

The reason why the first transparent insulating layer 27 is preferably formed to have a large thickness of at least 1 μm, preferably 2 to 3 μm is that, in addition to the planarization of the first transparent insulating layer 27, Scanning line 1 via the first transparent insulating layer 27
This is because it is desired to reduce the capacitance formed with the signal lines 1 and the signal lines 12 as much as possible. This is because these capacitances increase the electrical load on the scanning lines 11 and the signal lines 12 to increase the power consumption of the liquid crystal panel, reduce the response speed, and lower the image quality such as crosstalk. It is.

After the formation of the light shield electrode 29, FIGS.
As shown in (a), the coloring layer 19 containing the pigment is formed on the first transparent insulating substrate 2 by photolithography using a photosensitive resin in which the pigment is dispersed, and the coloring layer 19 is formed on the intermediate electrode 30. A stripe (vertical stripe) is formed for each color (R, G, B) including a part of the light shield electrode 29 above the signal line 12 so as to have the second opening 31. Alternatively, as shown in FIG. 5, each pixel may be formed in an island (dot) shape including a part of the light shield electrode 29 on the signal line 12 and the scanning line 11.

Thereafter, as shown in FIG. 3B, the light shielding electrode 29 on the signal line 12 is
Alternatively, a black colored layer 32 containing one or both of a black dye and a pigment is deposited on the light shield electrode 29 around the island-shaped colored layer 19. For this purpose, the pattern of the light shield electrode 29 is extended and arranged on the peripheral edge of the active substrate 2 to provide an appropriate potential supply location, and a DC potential is applied to the potential supply location using a jig such as a clip, so that the potential in the insulating container is reduced. The electrodeposition is performed by immersing the active substrate 2 in an electrodeposition solution containing either or both of the black dye and the pigment, but the details are omitted here. At this time, since the light shield electrode 29 and the intermediate electrode 30 are electrically insulated, the black colored layer 32 is not deposited on the intermediate electrode 30 exposed in the second opening 31. Absent.

The thickness of the black colored layer 32 is made the same as that of the colored layer 19 so that the colored layer 19 and the black colored layer 32 are substantially flat. Of course, three colors (R, G,
It is desirable to consider the degree of dispersion and transmittance of the pigment so that the thickness of the colored layer 19 of B) is also uniform.

The last step as an active substrate is shown in FIG.
As shown in (1), a transparent conductive ITO thin film is deposited on the entire surface of the active substrate 2 by using a vacuum film forming apparatus such as sputtering, and the second opening 31 on the intermediate electrode 30 is formed by a fine processing technique. That is, the pixel electrode 14 is formed on the coloring layer 19 and on a part of the black coloring layer 32.

After the active substrate 2 on which the colored layer 19 having the color display function and the black colored layer 32 having the BM function are formed, a transparent conductive layer is formed on one main surface of the second transparent substrate. It is laminated with an insulating substrate to form a panel,
A color liquid crystal panel according to Embodiment 1 is completed.

(Embodiment 2) FIG. 6 is a process sectional view of an active substrate according to (Embodiment 2) of the present invention.
Also in (Embodiment 2), FIGS. 2 (a) to 2 (c) and FIG.
As shown in FIGS. 4A and 4B and FIG. 4, the steps up to the formation of the pixel electrode 14 proceed in the same manufacturing process as in the first embodiment, and subsequently, as shown in FIG. Substrate 2
The second transparent insulating layer 33 is formed in the image display area of FIG. The thickness should be relatively thin, from 0.1 to 0.3 μm.

The reason why the second transparent insulating layer 33 is preferably formed on the entire surface of the active substrate 2 is that, in part, the undesired ionic impurities from the black colored layer 32 formed by the electrodeposition method are introduced into the liquid crystal. The second is to prevent undesired gas release from the colored layer 19 and the black colored layer 32. These eluted or released components are likely to dissolve into the liquid crystal and cause obstacles to degrade the liquid crystal. This is a matter to be noted particularly in operation at high temperatures, and is known as an OC (overcoat) protective film even in a conventional color filter. Technology.

Thus, the active substrate 2 according to (Embodiment 2) is completed. Then, the transparent conductive layer is bonded to a second transparent insulating substrate formed on one main surface to form a panel, and a color liquid crystal panel according to Embodiment 2 is completed.

In the second embodiment, since the second transparent insulating layer 33 is formed in the image display area of the active substrate 2, the second transparent insulating layer 33 is also formed on the pixel electrode 14. Exists. Therefore, there is a possibility that the voltage use efficiency of the liquid crystal cell is reduced, or an afterimage is generated due to accumulation of electric charges depending on the material of the second transparent insulating layer 33. Therefore, in (Embodiment 3), the second transparent insulating layer 33 is formed on the colored layer 19 and the black colored layer 32 without forming the second transparent insulating layer 33 on the pixel electrode 14. This is taken into account.

(Embodiment 3) FIG. 7 is a process sectional view of an active substrate according to (Embodiment 3) of the present invention.
Also in (Embodiment 3), FIGS. 2 (a) to 2 (c) and FIG.
As shown in (a) and (b), the steps up to the formation of the colored layer 19 and the black colored layer 32 proceed in the same manufacturing steps as in (Embodiment 1), and subsequently shown in FIG. As described above, the second transparent insulating layer 33 is formed on the entire surface of the active substrate 2, and the third opening 34 is formed on the second opening 31. If the photosensitive material is used as the second transparent insulating layer 33 in the same manner as the first transparent insulating layer 27 described above,
The formation of the transparent insulating layer 33 and the formation of the third opening 34 can be simultaneously performed, which is reasonable.

Although not shown, the size of the third opening 34 is set smaller than that of the second opening 31 even if the cross-sectional shape of the second opening 31 is reversely tapered. Then, the side surface inside the opening 31 is filled with the second transparent insulating layer 33, and the cross-sectional shape is easily tapered.

After the formation of the second transparent insulating layer 33, FIG.
As shown in (b), a transparent conductive ITO thin film is deposited on the entire surface of the active substrate 2 using a vacuum film forming apparatus such as sputtering, and a third opening on the intermediate electrode 30 is formed by a fine processing technique. The picture element electrode 14 is formed on the second transparent insulating layer 33 including the portion 34, and the active substrate 2 according to the third embodiment is completed. Then, the transparent conductive layer is bonded to a second transparent insulating substrate formed on one main surface to form a panel, and a color liquid crystal panel according to Embodiment 3 is completed.

[0054]

As described above, according to the color liquid crystal panel of the present invention, a colored layer having a color display function is provided below the pixel electrode.
Further, since the active substrate in which the black colored layer having the BM function is formed with high precision on the light shield electrode and the opposing substrate having the transparent conductive layer on one principal surface are bonded, the colored layer and the liquid crystal The aperture ratio is improved by improving the relative positional accuracy with respect to the cell, and the aperture ratio is no longer influenced by the bonding accuracy in the paneling process as in the related art.

According to the color liquid crystal panel of the present invention, not only a liquid crystal panel having a high aperture ratio as described above can be obtained, but also the colored layer and the black colored layer are covered with the transparent insulating layer. Elution of impurities and emission of gas components from the black colored layer are suppressed, and the reliability of the liquid crystal panel is improved. Alternatively, it is not necessary to particularly consider the material purity of the colored layer and the black colored layer, and the material cost is reduced.

Further, according to the color liquid crystal panel of the present invention, not only a liquid crystal panel having a high aperture ratio and high reliability as described above can be obtained, but also the pixel electrodes are formed on the uppermost layer of the active substrate. No voltage loss occurs in driving the cell.

According to the method of manufacturing a color liquid crystal panel of the present invention, since the black colored layer is formed by electrodeposition, the step between the colored layer and the black colored layer can be eliminated to facilitate the alignment treatment. The display quality is improved. Further, since the elution of impurities and the release of gas components from the colored layer and the black colored layer are suppressed, a liquid crystal panel having high reliability for use for a long time or in a high temperature state can be obtained.

According to the method of manufacturing a color liquid crystal panel of the present invention, even if a pixel electrode is formed on the colored layer and the second transparent insulating layer on the black colored layer, the pixel electrode is not stepped. It is difficult to cut, and the electrical contact between the picture element electrode and the intermediate electrode is ensured, so that excellent effects such as improvement of the reliability of the liquid crystal panel can be obtained.

As described above, the requirements of the present invention include a thick first transparent insulating layer having a first opening on the drain electrode, and a drain electrode formed on the first transparent insulating layer. An intermediate electrode and a light shielding electrode, a coloring layer containing a pigment having a second opening on the intermediate electrode, and a light shielding electrode between the coloring layers containing one or both of a dye and a pigment by an electrodeposition method. A color liquid crystal panel in which the surface of the active substrate is flattened by filling it with a black colored layer, and a transparent conductive pixel electrode is formed on the flattened surface of the active substrate, and the configuration of switching elements such as insulated gate transistors It is needless to say that the present invention is naturally included in the present invention even if there is a difference due to the configuration or material of the scanning line or the signal line which is an electrode line, or a difference due to the material.

[Brief description of the drawings]

FIG. 1 is a plan view of an active substrate according to a first embodiment of the present invention.

FIG. 2 is a process cross-sectional view of the active substrate according to the first embodiment of the present invention.

FIG. 3 is a sectional view of the active substrate according to the first embodiment of the present invention after the process.

FIG. 4 is a sectional view of a further final step of the active substrate according to the first embodiment of the present invention;

FIG. 5 is another plan view of the active substrate according to the first embodiment of the present invention.

FIG. 6 is a sectional view of a final step of the active substrate according to the second embodiment of the present invention.

FIG. 7 is a process sectional view of the active substrate according to the second embodiment of the present invention;

FIG. 8 is a perspective view showing a mounting state of a liquid crystal panel.

FIG. 9 is an equivalent circuit diagram of an active liquid crystal panel.

FIG. 10 is a sectional view of a main part of a conventional active liquid crystal panel.

FIG. 11 is a cross-sectional view of a peripheral portion on the scanning line side of a conventional color liquid crystal panel.

[Explanation of symbols]

 Reference Signs List 2 Active substrate (first transparent insulating substrate) 9 Color filter 12 Signal line 14 Pixel electrode 19 Colored layer (R, G, B) containing pigment 23 Drain electrode 27 First (thick) transparent insulating layer 28 Drain electrode First opening 29 above light shield electrode 30 Intermediate electrode 31 Second opening above intermediate electrode 32 Black colored layer 33 Second (thin) transparent insulating layer 34 Second above second opening 3 openings

Claims (6)

[Claims] A first transparent insulating substrate having a plurality of scanning lines on one principal surface thereof, and a plurality of signal lines substantially orthogonal to the scanning lines via at least one or more insulating layers; Having at least one insulated gate transistor and a transparent conductive pixel electrode at each intersection of the scanning line and the signal line; and an active layer formed having a colored layer containing a pigment under the pixel electrode. A liquid crystal panel comprising: a substrate; and a liquid crystal which has a transparent conductive layer on one main surface and is filled between a second transparent insulating substrate facing the active substrate, wherein the insulated gate transistor Having a first opening above the drain electrode of the first transparent insulating substrate, and having a grid-like shape over at least the scanning line and the signal line via a thick first transparent insulating layer formed on the first transparent insulating substrate. An intermediate electrode is formed including the light shield electrode and the first opening. A colored layer having a second opening on the intermediate electrode is formed in a stripe shape or an island (dot) shape including a part of the light shield electrode for each color (R, G, B); A black colored layer containing one or both of a dye and a pigment is formed on the light shield electrode between the colored layers, and a pixel electrode is formed on the colored layer including the intermediate electrode and on the black colored layer. Color LCD panel. 2. A semiconductor device comprising: a plurality of scanning lines on one main surface of a first transparent insulating substrate; and a plurality of signal lines substantially orthogonal to the scanning lines via at least one or more insulating layers. Having at least one insulated gate transistor and a transparent conductive pixel electrode at each intersection of the scanning line and the signal line, and having a colored layer containing a pigment under the pixel electrode. A liquid crystal panel comprising: an active substrate; and a liquid crystal that has a transparent conductive layer on one main surface and is filled between a second transparent insulating substrate facing the active substrate. A first opening on the drain electrode of the transistor, at least over the scanning line and over the signal line via a thick first transparent insulating layer formed on the first transparent insulating substrate; The intermediate electrode includes a lattice-shaped light shield electrode and a first opening. A colored layer having a second opening is formed on the intermediate electrode in a stripe shape or an island (dot) shape including a part of the light shield electrode for each color (R, G, B). A black colored layer containing one or both of a dye and a pigment is formed on the light shield electrode between the colored layers, and a pixel electrode is formed on the colored layer including the intermediate electrode and on the black colored layer. A color liquid crystal panel formed, wherein a thin second transparent insulating layer is formed on the picture element electrode, the coloring layer, and the black coloring layer. 3. A first transparent insulating substrate having a plurality of scanning lines on one principal surface thereof, and a plurality of signal lines substantially orthogonal to the scanning lines via at least one insulating layer. Having at least one insulated gate transistor and a transparent conductive pixel electrode at each intersection of the scanning line and the signal line; and an active layer formed having a colored layer containing a pigment under the pixel electrode. A liquid crystal panel comprising: a substrate; and a liquid crystal which has a transparent conductive layer on one main surface and is filled between a second transparent insulating substrate facing the active substrate. Having a first opening above the drain electrode of the first transparent insulating substrate and having a first transparent insulating layer formed on the first transparent insulating substrate, at least over the scanning lines and the signal lines via a thick first transparent insulating layer. Forming an intermediate electrode including a light shield electrode and a first opening A colored layer having a second opening is formed on the intermediate electrode in a stripe shape or an island (dot) shape including a part of the light shield electrode for each color (R, G, B). A black colored layer containing either or both of a dye and a pigment is formed on the light shield electrode between the colored layers, and a third opening is formed on the second opening on the first transparent insulating substrate. Forming a thin second transparent insulating layer having a pixel electrode on the colored layer including the intermediate electrode in the third opening and on the second transparent insulating layer on the black colored layer. Color LCD panel. 4. A method for manufacturing a liquid crystal panel according to claim 1, wherein: forming a scanning line, a signal line, and an insulated gate transistor on the first transparent insulating substrate; Forming a thick first transparent insulating layer having a first opening on the first transparent insulating substrate on the first transparent insulating layer; and forming the first opening on the first transparent insulating layer. Forming a grid-shaped light shielding electrode on the intermediate electrode and at least on the scanning line and on the signal line; and forming a colored layer containing a pigment having a second opening on the intermediate electrode. A step of forming a stripe or an island (dot) for each color (R, G, B) including a part of the light shield electrode; and either a dye or a pigment on the light shield electrode between the colored layers by electrodeposition. Forming a black colored layer containing or both Method of manufacturing a color liquid crystal panel and a step of forming a pixel electrode on the upper of the colored layer and the black color layer comprises a second opening. 5. The method of manufacturing a liquid crystal panel according to claim 2, wherein: forming a scanning line, a signal line, and an insulated gate transistor on the first transparent insulating substrate; Forming a thick first transparent insulating layer having a first opening on the first transparent insulating substrate on the first transparent insulating layer; and forming the first opening on the first transparent insulating layer. Forming a grid-shaped light shielding electrode on the intermediate electrode and at least on the scanning line and on the signal line; and forming a colored layer containing a pigment having a second opening on the intermediate electrode. A step of forming a stripe or an island (dot) for each color (R, G, B) including a part of the light shield electrode; and either a dye or a pigment on the light shield electrode between the colored layers by electrodeposition. Forming a black colored layer containing or both A color including a step of forming a picture element electrode on the colored layer and the black colored layer including the second opening, and a step of forming a thin second transparent insulating layer on the first transparent insulating substrate Liquid crystal panel manufacturing method. 6. A method for manufacturing a liquid crystal panel according to claim 3, wherein: forming a scanning line, a signal line, and an insulated gate transistor on the first transparent insulating substrate; Forming a thick first transparent insulating layer having a first opening on the first transparent insulating substrate on the first transparent insulating layer; and forming the first opening on the first transparent insulating layer. Forming a grid-shaped light shielding electrode on the intermediate electrode and at least on the scanning line and on the signal line; and forming a colored layer containing a pigment having a second opening on the intermediate electrode. A step of forming a stripe or an island (dot) for each color (R, G, B) including a part of the light shield electrode; and either a dye or a pigment on the light shield electrode between the colored layers by electrodeposition. Forming a black colored layer containing or both Forming a thin second transparent insulating layer having a third opening on the second opening; and forming a second transparent insulating layer on the colored layer and the black colored layer including the third opening. Forming a pixel electrode on the layer.