JPH11133367A5 - - Google Patents

Info

Publication number
JPH11133367A5
JPH11133367A5 JP1997301301A JP30130197A JPH11133367A5 JP H11133367 A5 JPH11133367 A5 JP H11133367A5 JP 1997301301 A JP1997301301 A JP 1997301301A JP 30130197 A JP30130197 A JP 30130197A JP H11133367 A5 JPH11133367 A5 JP H11133367A5
Authority
JP
Japan
Prior art keywords
layer
conductivity type
cladding layer
type
semiconductor optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997301301A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11133367A (ja
JP3897420B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP30130197A priority Critical patent/JP3897420B2/ja
Priority claimed from JP30130197A external-priority patent/JP3897420B2/ja
Priority to US09/182,881 priority patent/US6198853B1/en
Publication of JPH11133367A publication Critical patent/JPH11133367A/ja
Publication of JPH11133367A5 publication Critical patent/JPH11133367A5/ja
Application granted granted Critical
Publication of JP3897420B2 publication Critical patent/JP3897420B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP30130197A 1997-10-31 1997-10-31 半導体光変調装置およびその製造方法 Expired - Fee Related JP3897420B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP30130197A JP3897420B2 (ja) 1997-10-31 1997-10-31 半導体光変調装置およびその製造方法
US09/182,881 US6198853B1 (en) 1997-10-31 1998-10-30 Semiconductor optical functional element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30130197A JP3897420B2 (ja) 1997-10-31 1997-10-31 半導体光変調装置およびその製造方法

Publications (3)

Publication Number Publication Date
JPH11133367A JPH11133367A (ja) 1999-05-21
JPH11133367A5 true JPH11133367A5 (enrdf_load_html_response) 2005-06-23
JP3897420B2 JP3897420B2 (ja) 2007-03-22

Family

ID=17895200

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30130197A Expired - Fee Related JP3897420B2 (ja) 1997-10-31 1997-10-31 半導体光変調装置およびその製造方法

Country Status (1)

Country Link
JP (1) JP3897420B2 (enrdf_load_html_response)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005116644A (ja) * 2003-10-03 2005-04-28 Ntt Electornics Corp 半導体光電子導波路
EP2000848B1 (en) 2003-10-03 2012-12-12 NTT Electronics Corporation Semiconductor optoelectronic waveguide
JP2007134480A (ja) * 2005-11-10 2007-05-31 Nippon Telegr & Teleph Corp <Ntt> 波長可変光源
JP2007133287A (ja) * 2005-11-14 2007-05-31 Nippon Telegr & Teleph Corp <Ntt> 波長合分波器
US8300991B2 (en) 2008-03-28 2012-10-30 Nec Corporation Waveguide-type semiconductor optical modulator and method for manufacturing the same

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