JPH11128836A - Ultrasonic horn - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ultrasonic horn having a joined structure of a metal main body and a ceramic part and having high reliability. SOLUTION: The ultrasonic horn 1 consists of a metal main body 2 and a ceramic part 3 joined on the vibration emitting end of the metal main body 2. A joining metal layer essentially comprising a metal having a different compsn. form that of the metal main body 2 is formed on the metal body 2 between the metal main body 2 and the ceramic part 3, while a joining reaction layer having a different compsn. from that of the ceramic part and essentially comprising one or more inorg. compds. of Ti, Nb, Zr, Al, Cr and V is formed on the ceramic part 3. The thickness t2 of the joining reaction layer is controlled to 0.2 to 7 μm.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic horn, for example, an ultrasonic working machine such as an ultrasonic pressing machine, an ultrasonic caulking machine, an ultrasonic soldering machine, an ultrasonic cutting machine, an ultrasonic welding machine, and the like. The present invention relates to an ultrasonic horn used for various ultrasonic devices such as an ultrasonic cleaner and an ultrasonic stirrer.

[0002]

2. Description of the Related Art Conventionally, as this kind of ultrasonic horn,
Metallic materials such as steel, titanium alloys or aluminum alloys have been used. However, the ultrasonic horn made of metal has a drawback that the ultrasonic radiation surface which comes into contact with the object to be processed is liable to be worn. ,
When used in liquids such as dispersion or emulsification,
There has been a problem that wear called erosion is likely to occur on the ultrasonic wave emitting surface. In order to improve the wear resistance of the ultrasonic radiation surface, a ceramic body joined to the tip of a metal main body is disclosed in, for example, Japanese Utility Model Laid-Open No. 5-80569.

[0003]

Here, in an ultrasonic horn having a structure in which a ceramic portion is joined to the tip of a metal body portion, it is necessary to secure the joining strength between the metal body portion and the ceramic portion. This is important for improving reliability. For example, in the case of an ultrasonic horn for an ultrasonic machine,
In general, since the device operates under a high load condition of a frequency of 20 to 40 KHz and an amplitude of 30 to 60 μm, particularly high reliability is required for joining the metal body portion and the ceramic portion.

An object of the present invention is to provide a highly reliable ultrasonic horn having a structure in which a metal main body portion and a ceramic portion are joined to each other and having high reliability.

[0005]

The construction of the ultrasonic horn according to the present invention is as follows.

[0006] (Claim 1) A metal body portion and a ceramic portion joined to an end of the metal body portion on the vibration radiation side, and a metal body portion is provided between the metal body portion and the ceramic portion. And a bonding metal layer mainly composed of a metal having a different composition is provided on the metal main body side with Ti and N as active metal components.
A bonding reaction layer mainly composed of one or more inorganic compounds of b, Zr, Al, Cr and V and having a composition different from that of the ceramic portion is formed on the ceramic portion side, and the thickness of the bonding reaction layer is T2 is adjusted in the range of 0.2 to 7 μm.

(Claim 2) In claim 1, the metal body portion and the ceramic portion are joined by brazing, and the joining reaction layer comprises: an active metal component in the brazing material used for the brazing; It is formed by reacting with the constituent components of the ceramic part.

(Claim 3) In claim 1 or 2, the ceramic portion is made of a ceramic containing Si ₃ N ₄ , ZrO ₂ or Al ₂ O ₃ as a main component.

(Claim 4) In any one of claims 1 to 3, the metal body is made of a metal containing Fe or Ti as a main component.

(Claim 5) In any one of claims 1 to 4, the ceramic portion is made of a ceramic mainly composed of ZrO ₂ or Al ₂ O ₃ .

(Claim 6) In any one of claims 1 to 5, the joint strength between the metal body and the ceramic part is 60M.
Pa or more.

[0012]

According to the ultrasonic horn of the present invention, the thickness t2 of the bonding reaction layer formed between the metal body and the ceramic portion is adjusted in the range of 0.2 to 7 μm. The bonding strength between the metal body and the ceramic portion is increased, and the reliability can be improved. This makes it possible to extend the life of a device that operates under high load conditions, such as an ultrasonic horn for an ultrasonic processing machine.

When the thickness t2 of the bonding reaction layer is less than 0.2 μm, the bonding strength is reduced, and the reliability of the ultrasonic horn may not be sufficiently secured, or the life of the ultrasonic horn may be shortened. On the other hand, if the thickness t2 of the bonding reaction layer exceeds 7 μm, the bonding reaction layer is mainly composed of an inorganic compound having high strength but brittleness, so that the bonding strength is rather deteriorated, and the ultrasonic In some cases, the reliability of the horn cannot be ensured, or the life of the horn may be shortened. The thickness t2 of the bonding reaction layer is more preferably adjusted to be 0.5 to 5 [mu] m.

The thickness t2 of the bonding reaction layer can be adjusted by the bonding conditions, specifically, the bonding temperature and the holding time at the bonding temperature. Therefore, the joining temperature and the holding time at the joining temperature are appropriately adjusted so that the thickness t2 of the joining reaction layer satisfies the above-mentioned conditions according to the ceramic part forming member, the metal body part forming member, and the brazing material used. do it.

As the material of the metal body, from the viewpoint of securing strength and reliability, a metal mainly composed of Fe, such as carbon steel, alloy steel or stainless steel, or Ti which is lightweight, has high strength and is excellent in corrosion resistance. Metals as main components are particularly suitable for the present invention. In addition, as a specific material of the ceramic portion, since it has excellent wear resistance and strength,
A ceramic containing any one of Si ₃ N ₄ , Al ₂ O ₃ and ZrO ₂ as a main component can be used.

Next, specifically, as shown in FIG. 1 (a), the joining structure between the metal main body and the ceramic part should be a metal main body forming member to be a metal main body, and a ceramic part to be a ceramic part. Insert a brazing material between the ceramic part forming member,
In this state, it can be obtained by heating to a predetermined temperature and brazing both members (FIG. 1 is a schematic diagram, and the brazing material, the joining metal layer and the joining reaction layer The thickness is exaggerated.) In this case, as the brazing material, Ti, Nb, Zr, and A as active metal components are used.
A plate-shaped or foil-shaped active brazing material containing one or more of l, Cr and V can be used.
Specifically, Ag-Cu-Ti-based, Ag-Cu-In-
A brazing material having various compositions such as Ti-based, Ag-Cu-Ti-Sn-based, Cu-Ti-based or Ag-Ti is appropriately selected and used according to the combination of the materials of the metal body and the ceramic portion. I do.

The joint structure obtained as a result of the above-mentioned brazing is, for example, as shown in FIG. That is, between the metal body and the ceramic part, the joining metal layer is formed on the metal body side, and the joining reaction layer is formed on the ceramic part side. The metal body portion and the ceramic portion are portions that substantially maintain the compositions of the metal body portion forming member and the ceramic portion forming member that are the starting materials.

Next, the bonding reaction layer is formed mainly based on the reaction between the active metal component in the brazing material and the constituent components of the ceramic part.
It is mainly composed of one or more inorganic compounds of b, Zr, Al, Cr and V, and has a composition different from that of the ceramic part. For example, when the active metal component in the brazing material is Ti and the ceramic portion is mainly composed of ZrO ₂ or Al ₂ O ₃ , the bonding reaction layer is mainly composed of titanium oxide (TiO or TiO ₂ ). If the active metal component is Ti and the ceramic portion is silicon nitride, the bonding reaction layer is mainly composed of titanium nitride or titanium silicide.

The active metal component forming the bonding reaction layer is not required when the metal main body is configured to contain the active metal component (for example, when the metal main body is formed of Ti or a Ti alloy). An active metal component that diffuses from the metal body portion side to the ceramic portion side via the brazing material layer, or an active metal component contained in the metallized layer applied to the joining surface of the ceramic portion forming member prior to joining. For example, it may be derived from something other than brazing material.
When a metallized layer is formed on the joint surface of the ceramic part forming member, the brazing material used is an Ag-Cu-based, Ag-based
-Cu-In system, Al-Si system, Al-Si-
A material that does not contain an active metal component such as Cu may be used.

The joining metal layer is a portion formed corresponding to the brazing material. The component diffuses between the joining metal layer and the metal main body forming member, and further, the ceramic reaction forming layer is formed to form the joining reaction layer. Since the diffusion of the components occurs between the brazing material and the brazing material, the composition of the brazing material generally differs from that of the original brazing material while the brazing material component is partially inherited. In any case, the joining metal layer is a portion mainly composed of a metal having a different composition from the metal main body.

The boundaries between the bonding metal layer, the bonding reaction layer, and the ceramic portion are generally unclear due to component diffusion and the like. In this specification, in the joining direction between the metal body and the ceramic portion, when the content of a cation component such as metal ions or silicon ions constituting the ceramic portion is analyzed from the ceramic portion side to the joining reaction layer side In addition, a position where at least one of the contents of the cation component is 80% of its maximum value is determined as a boundary between the ceramic portion and the bonding reaction layer. Similarly, when the content of the active metal component is analyzed from the bonding reaction layer side toward the bonding metal layer side, at least one of the active metal component analysis value levels is 80% of the maximum value. Is determined as the boundary between the bonding reaction layer and the bonding metal layer. And
The distance between the two boundaries is defined as the thickness of the bonding reaction layer.

The above analysis is performed by a known method such as an electron probe microanalyzer (EPMA), EDS (energy dispersive X-ray spectroscopy), WDS (wavelength dispersive X-ray spectroscopy), Auger electron spectroscopy (AES), or the like. Can be implemented. As a specific example, as shown in FIG. 2, a boundary portion between a ceramic portion (for example, an oxide of a cation component Q) and a metal main portion is observed with a scanning electron microscope (SEM). In the joining direction, the SEM is applied to the cation component Q and the active metal component A.
Suppose that a line analysis was performed by the attached EPMA. In this case, it is considered that each content of the component Q and the component A is proportional to the detection intensity of the corresponding fluorescent X-ray. At this time, assuming that the maximum value of the fluorescent X-ray intensity based on the component Q is IQmax and the maximum value of the fluorescent X-ray intensity based on the component A is IAmax, the position where 0.8 IQmax is obtained is joined to the ceramic part. It can be defined as the boundary BC-R with the reaction layer. Similarly, the position at which 0.8 IAmax is reached can be determined as the boundary BR-W between the bonding reaction layer and the bonding metal layer. Then, the distance TR between the two boundaries BC-R and BR-W
Can be determined as the thickness of the bonding reaction layer.

In order to alleviate the residual stress (or thermal stress) caused by the difference in thermal expansion between the metal body and the ceramic portion during the heat treatment for bonding, an intermediate layer (or a buffer plate) is provided between the two. Can also be inserted. The intermediate layer can be composed mainly of a soft metal such as Cu or Ni, for example, and has a function of relaxing the residual stress by its own plastic deformation. Further, the intermediate layer may be made of a material having an intermediate linear expansion coefficient between the ceramic portion and the metal main portion, such as W alloy or Kovar. The intermediate layer can be formed by joining a thin plate made of the above-mentioned material to the metal body by brazing or the like, and can be similarly joined by brazing to the ceramic portion via the above-mentioned brazing material or the like. In this case, the above-described bonding reaction layer is formed between the intermediate layer and the ceramic portion. And if the whole of the metal main body and the intermediate layer integrated by joining are re-examined as a metal main body,
It can be seen that the structure also has the configuration of the ultrasonic horn described in the claims of the present invention.

Further, it is desirable that the bonding strength between the metal body and the ceramic part is specifically 60 MPa or more. If the bonding strength is less than 60 MPa, the reliability of the ultrasonic horn may not be sufficiently secured, or the life of the ultrasonic horn may be shortened. The bonding strength is more desirably 100 MPa or more. In addition, in this specification, joining strength means the shear strength measured as follows. That is, by cutting and cutting the ultrasonic horn in which the ceramic part and the metal body part are joined, as shown in FIG. 5A, the joining direction and the axial direction including the interface between the two parts are performed. And the shaft section diameter is 15 mm and the length of the ceramic part is 4 m
m, A columnar test piece having a length of 20 mm on the metal main body side is prepared. Then, as shown in FIG. 2B, the metal body side of the test piece is clamped and held by a clamping jig. From above so as to be substantially perpendicular to the axis of. A semicircular notch corresponding to the shape of the outer peripheral surface of the test piece is formed at the contact portion between the pressure plate and the test piece. And
In this state, the crosshead speed was 0.5 m using a pressure tester.
The pressure plate is pressed against the test piece at m / min, and the maximum load when the ceramic part and the metal body part break is divided by the area of the joint surface, and this is defined as the measured value of the shear strength.

In the case of an ultrasonic horn used for an ultrasonic device for mixing, dispersing or emulsifying liquids, it is desirable to use a ceramic part having a color as white as possible. . In particular, in the field of manufacturing cosmetics (foundation, etc.) and foods (mayonnaise), when the ceramic part of the ultrasonic horn is eluted by, for example, erosion or the like, a white color is used so as not to affect the color tone of the object to be processed. Tend to be preferred.

Therefore, in the case of the above-mentioned application, the material of the ceramic part is white ZrO ₂ or Al ₂ O.
_It can be said that it is particularly desirable to use one mainly composed of _three . Here, it is obvious at first glance that the color of Al ₂ O ₃ and ZrO ₂ is originally white, and as long as these materials are used, the color of the finally obtained ceramic part is also close to white. It seems there is. However, as a result of diligent studies by the present inventors, a discolored region is almost inevitably formed in the ceramic portion adjacent to the joining reaction layer, and the thickness of the discoloring region is the same as that of the aforementioned joining reaction layer. It has been found that the larger the formed thickness is, the more significantly it increases. Therefore, the thickness of the discolored area increases if the bonding state between the metal body and the ceramic part, specifically, the thickness control of the bonding reaction layer is not taken into account, and the ceramic part is colored beyond the range. May occur.

The following are conceivable causes of the formation of the discolored area. That is, in order to form a bonding reaction layer, an anionic component (for example, oxygen in the case of an oxide) to react with the active metal component in the brazing material must be supplied from the ceramic part side. As a result, a region in which the anion is lost is formed in the ceramic portion adjacent to the bonding reaction layer. In many cases, the vacancies generated by the anion deficiency are likely to form a color center (color change), that is, a color change region of the ceramic portion, since the charge remains easily and a color center is easily formed.
Therefore, it is considered that when the thickness of the bonding reaction layer increases, the amount of the anion deficiency also increases, and the thickness of the discolored region also increases. In order to prevent the brazing material (particularly the active metal component) or the metal body from being oxidized, the brazing process is generally performed in a vacuum atmosphere or an inert gas atmosphere.
When the ceramic portion is made of an oxide-based material, oxygen deficiency is generated due to escape of the oxygen component into the atmosphere, which may also contribute to the formation of a discolored region.

Then, as shown in FIG. 1 (c), when the thickness of the bonding reaction layer becomes larger than a certain value, the discolored region having the increased thickness affects the front end face of the ceramic portion and the ceramic portion. Is composed of an oxide-based material, the effect of oxygen deficiency due to escape of oxygen components into the atmosphere is also superimposed, and coloring of the ceramic portion is more likely to occur.

For example, assuming that the joining direction to the metal main body is the thickness direction, the ceramic part is arranged in the thickness direction from the joining side to the metal main body, and the N8. Is less than 0, or the lightness V is greater than 8 in the “relationship between lightness and saturation in each hue” defined in 1.4 of JISZ8721, Degree C
Is less than 2, the thickness of the discolored area is t3, the thickness of the ceramic part is t1, the total length of the ultrasonic horn in the joining direction of the metal body and the ceramic part is L, It is desirable that t1−t3> 0.01L.

When the ultrasonic horn is applied to, for example, an ultrasonic machine or an ultrasonic stirrer, the resonance point is changed when the length of the ultrasonic radiating surface is worn and the above-mentioned length L changes more than a certain value. Misalignment, processing efficiency is extremely reduced. Then, if about 1% of the total length L is shortened due to abrasion or the like depending on the use conditions, the ultrasonic horn may need to be replaced. In this case, if the discolored area is exposed on the front end face of the ceramic portion before 1% of the L is worn, that is, before the ultrasonic horn is replaced, the discolored portion melts and affects the color tone of the workpiece. It is possible that this will occur. Therefore,
By setting t1−t3> 0.01 L, the ultrasonic horn is replaced before the discolored area is exposed, and the above problem can be avoided. It is more desirable that t
It is preferable that 1−t3> 0.015 L, and more preferably t1−t3> 0.02 L.

[0031]

Embodiments of the present invention will be described below with reference to embodiments shown in the drawings. FIG. 3 shows an ultrasonic horn as one embodiment of the present invention. The ultrasonic horn 1 has a structure in which a ceramic portion 3 is joined to an end surface on the ultrasonic wave radiation side of a metal main body 2. The other end surface 2a side of the metal main body 2 is connected to an ultrasonic wave generating source, and ultrasonic waves are transmitted through the metal main body 2 to the front end surface 3a of the ceramic portion 3.
Radiate from side. The metal body 2 has one end (in this case, the end face 2a) in order to concentrate the ultrasonic wave on the radiation surface side.
Side), and the other end (in this case, the joining side of the ceramic portion 3) is formed thin. In this embodiment, the metal main body 2 has a round bar shape in which an axial cross section is substantially circular and a step portion provided with a constant radius 2b is formed in the middle in the axial direction. The ceramic portion 3 is formed in a disk shape corresponding to the shape of the end surface of the metal main body 2.

In this embodiment, the metal body 2 is made of titanium or a titanium alloy.
It may be made of an iron-based material such as alloy steel or stainless steel. The ceramic portion 3 is mainly composed of a ceramic having excellent wear resistance and strength, such as Si ₃ N ₄ , Al ₂ O ₃ or ZrO ₂ .

The ultrasonic horn 1 is, as shown in FIG.
A disk-shaped ceramic part forming member 5 to be a ceramic part 3 is overlapped on a small diameter side end surface 4a of a round rod-shaped metal main body forming member 4 to be a metal main part 2 with a brazing material foil 6 interposed therebetween. The brazing is performed by heating at a temperature of 700 to 950 ° C. for 5 to 120 minutes in a vacuum or an inert gas atmosphere while pressing in the direction. Here, Ti, Nb, Zr, Al as active metal components are used as brazing materials.
An active brazing filler metal containing one or more of Cr and V,
For example, Ag-Cu-Ti, Ag-Cu-In-Ti
System, Ag-Cu-Ti-Sn system, Cu-Ti system, Ag-
An active brazing material such as Ti-based is used. In addition, vacuum evaporation,
A metallizing treatment of an active metal such as Ti can be performed on the bonding surface of the ceramic portion forming member 5 by a vapor phase film forming method such as sputtering or ion plating. In this case, an Ag-Cu-based or Ag-Cu- In-based or Al
It is also possible to use a brazing material that does not contain an active metal such as -Si or Al-Si-Cu. The same applies to the case where the diffusion of the Ti component from the metal body 2 via the brazing material layer can be expected.

A bonding metal layer and a bonding reaction layer as schematically shown in FIG. 1 are formed between the metal body 2 and the ceramic part 3. These details have already been described with reference to FIG. In the present invention, the thickness t2 of the bonding reaction layer is adjusted in the range of 0.2 to 7 [mu] m. Further, the above-mentioned bonding strength between the metal main body 2 and the ceramic part 3 is set to 60 MPa or more, preferably 100 MPa or more. Thereby, the metal body 2 and the ceramic part 3
And the reliability of the bonding is improved.

[0035]

EXAMPLES Examples of the present invention will be described below in more detail with reference to experimental data. First, the ultrasonic horn shown in FIG. 3 was manufactured using the metal body forming member 4, the brazing material foil 6, and the ceramic forming member 5 shown in FIG. The metal main body forming member 4 was made of a Ti alloy having a composition of Ti-6% by weight Al-4% by weight V. The dimensions of each part are L1
Was 123 mm, the length L2 of the thick shaft portion was 64 mm, the outside diameter D1 was 43 mm, the outside diameter D2 on the small diameter side was 36 mm, and the radius of the radius 2b was 15 mm.

The brazing material foil 6 is made of the following active brazing material: Ag-Cu-In-Ti-based composition: Ag-27% by weight Cu-12.5% by weight In-
Ag-Cu-Ti-based composition: Ag-35% by weight Cu-1.75% by weight Ti;

The ceramic-forming member 5, the following materials, i.e., ZrO ₂ based composition: ZrO ₂ -11 _{wt% Y 2 O 3 Al 2 O} 3 based composition: Al ₂ O ₃ -1 wt% SiO ₂ -3 Wt% CaO-
A disk having an outer diameter of 36 mm and a thickness of 4 mm was formed using one of 1 wt% MgO 2.

Then, the metal body forming member 4, the brazing material foil 6, and the ceramic portion forming member 5 are superposed and set in a predetermined jig as shown in FIG. While applying a load, in a vacuum heat treatment furnace, the degree of vacuum is 10 ^-4 torr, and the temperature is 720 to 900.
After the joining process under various conditions of 5 ° C.
After furnace cooling to 50 ° C., the joined body was taken out. Various tests of the ultrasonic horn were carried out by polishing the outer peripheral surface of the small diameter portion of the metal main body 2 and the ceramic portion 3 joined thereto to the outer diameter of 35 mm of the joined body thus obtained. Product was obtained. Table 1 shows the materials and joining conditions of each test sample.

[0039]

[Table 1]

First, the color of the tip surface of the ceramic part 3 of each test product was measured using the “brightness scale” specified in 1.3 of JISZ8721 and the “brightness and color in each hue” specified in 1.4 of JISZ8721. Reference and comparison with one of the color samples shown in "Relationship with degree"
When referring to 1.3 of 8721, the lightness is referred to JIS
When 1.4 of Z8721 was referred to, its hue, lightness, and saturation were determined.

Further, the outer peripheral surface of the polished ceramic part 3 is enlarged and observed with an optical microscope, and a region which does not satisfy the color conditions of the present invention is visually determined by referring to the lightness scale or color sample of JIS. The thickness of the region in the joining direction between the metal body 2 and the ceramic portion 3 was measured as the thickness t3 of the discolored region (when t3 varied in the circumferential direction, the average was calculated as the average value). ).

Next, a test piece was cut out from each test piece so as to straddle the boundary between the metal body 2 and the ceramic part 3 and the surface was polished, and then the boundary between the metal body 2 and the ceramic part 3 was subjected to EPMA. Is observed with a scanning electron microscope (SEM), and further, in the joining direction of both parts, the cation component (Zr, Al _{2 in} case of ZrO ₂ system) of the ceramic part
A line analysis is performed for the O ₃ -based Al) and the active metal component (Ti) using the EPMA attached to the SEM.
The thickness t2 of the bonding reaction layer was determined by the method described above.

The bonding strength between the metal body 2 and the ceramic part 3 of each test sample was measured by the above-described method shown in FIG. Table 2 shows the above results.

[0044]

[Table 2]

From these results, the bonding strength between the ceramic part 3 and the metal main body part 2 is good in the test specimen whose thickness t2 of the bonding reaction layer falls within the range of the present invention, and t2 is 1.5 to 1 It can be seen that the strength is further improved when the thickness is set to 0.6 μm. Further, in the test specimen in which the thickness t2 of the bonding reaction layer falls within the range of the present invention, the brightness of the tip surface of the ceramic portion is high.

The following tests were conducted on the ultrasonic horns of Test Item Nos. 4 and 5. First, average particle size 1
200 μm Al ₂ O ₃ particles, SiO 2 average particle size 2 μm
_Two particles (200 g) and water (1000 cc) were poured into a beaker, which was used as a treatment object. Then, the ultrasonic horn was connected to a predetermined ultrasonic generator (output: 300 W), and a processing cycle including the following steps was repeated 100 times. While the ceramic part 3 of the ultrasonic horn is immersed in the object to be processed, the object to be processed is mixed for 10 minutes by generating ultrasonic waves having an amplitude of 50 μm at the tip of the horn. Stops ultrasonic generation (ie, mixing) and sets the stopped state to 1
Keep for a minute. Note that this test has a considerably larger amplitude and a larger amount of powder than a general stirring device using the above-described ultrasonic horn, and thus has a meaning as an accelerated test.

After the above processing is completed, JISZ872
The lightness of the object to be processed was determined to be N9.0 or higher, referring to 1.3 of 1. After the test was completed, the test sample of No. 5 had a region of about N8.0 formed on a part of the front end face of the ceramic portion 3. It is considered that this is because the thickness of the discoloration layer (discoloration area) was slightly large in the test sample, and this was partially exposed due to erosion wear of the ceramic portion 3. On the other hand, the test piece of No. 4 maintained its lightness N9.0 or more even after the end of the test. In the test sample, t1−t3> 0, where t3 is the thickness of the color changing layer, t1 is the thickness of the ceramic portion 3, and L is the total length of the ultrasonic horn in the joining direction of the metal body portion 2 and the ceramic portion 3. .01L.

On the other hand, the same test was performed on the test sample No. 7 which did not satisfy the color conditions of the color of the present invention.
The lightness of the object to be processed was reduced to N8.5.

[Brief description of the drawings]

FIG. 1 is an explanatory view schematically showing a joint structure between a metal body and a ceramic part of an ultrasonic horn according to the present invention.

FIG. 2 is a diagram for explaining an example of a method for determining the thickness of a bonding reaction layer.

FIG. 3 is a side view showing an example of the ultrasonic horn of the present invention.

FIG. 4 is a side view showing the manufacturing method.

FIG. 5 is an explanatory diagram of a method for evaluating the bonding strength between a metal main body and a ceramic part.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Ultrasonic horn 2 Metal main body 3 Ceramic part 4 Metal main body forming member 5 Ceramic part forming member 6 Brazing material foil

Claims (5)

[Claims] A metal body portion; and a ceramic portion joined to an end of the metal body portion on a vibration radiation side, wherein the metal body portion is provided between the metal body portion and the ceramic portion. Indicates that a bonding metal layer mainly composed of metals having different compositions is provided on the metal body side with T as an active metal component.
a bonding reaction layer mainly composed of one or more inorganic compounds of i, Nb, Zr, Al, Cr and V and having a composition different from that of the ceramic part is formed on the ceramic part side; An ultrasonic horn, wherein the thickness t2 of the reaction layer is adjusted in the range of 0.2 to 7 µm. 2. The method according to claim 1, wherein the metal body and the ceramic part are joined by brazing, and the joining reaction layer is formed between the active metal component in the brazing material used for the brazing and the metal body. The active metal component included, and at least one of the active metal component included in the metallized layer when a metallized layer is formed in advance on a bonding surface of the ceramic portion to the metal main body, and a component of the ceramic portion The ultrasonic horn according to claim 1, wherein the ultrasonic horn is formed based on a reaction with the ultrasonic horn. 3. The ceramic part is made of Si ₃ N ₄ , ZrO.
_The ultrasonic horn according to claim 1, wherein the ultrasonic horn is made of a ceramic containing any one of ₂ and Al ₂ O ₃ as a main component. 4. The ultrasonic horn according to claim 1, wherein the metal main body is made of a metal containing Fe or Ti as a main component. 5. The ultrasonic horn according to claim 1, wherein a bonding strength between the metal main body and the ceramic part is 60 MPa or more.