JPH11124693A - Member for precision equipment - Google Patents
Member for precision equipmentInfo
- Publication number
- JPH11124693A JPH11124693A JP28698397A JP28698397A JPH11124693A JP H11124693 A JPH11124693 A JP H11124693A JP 28698397 A JP28698397 A JP 28698397A JP 28698397 A JP28698397 A JP 28698397A JP H11124693 A JPH11124693 A JP H11124693A
- Authority
- JP
- Japan
- Prior art keywords
- carbon fiber
- precision
- reinforced composite
- ceramics
- fiber reinforced
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Laminated Bodies (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、炭素繊維補強複合
部材（ＣＦＲＰ）を利用した精密機器部材に関するもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a precision equipment member using a carbon fiber reinforced composite member (CFRP).
【０００２】[0002]
【従来の技術】精密測定器や精密加工器の開発が急速に
行われる中で、それらを構成する各種部材は熱膨張、熱
収縮に耐え、しかも高剛性と高い寸法精度が要求され
る。この例として、炭素繊維補強複合材（ＣＦＲＰ）を
精密機器の部材に利用することが最近精密機器製造分野
で採用されつつある。その代表的な光学機器としては、
特開平６−３３１８７０号公報に開示されているよう
に、熱硬化性樹脂を炭素繊維に含浸させて成形した炭素
繊維補強複合材を光学機器用定盤に利用する技術が開発
されている。2. Description of the Related Art With the rapid development of precision measuring devices and precision processing devices, various members constituting them are required to withstand thermal expansion and thermal shrinkage, as well as high rigidity and high dimensional accuracy. As an example of this, the use of carbon fiber reinforced composite material (CFRP) for components of precision equipment has recently been adopted in the field of precision equipment manufacturing. As typical optical equipment,
As disclosed in Japanese Patent Application Laid-Open No. Hei 6-331870, a technique has been developed in which a carbon fiber reinforced composite material formed by impregnating a thermosetting resin with carbon fiber and molded is used for a surface plate for an optical device.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、炭素繊
維補強複合材を光学機器部材に使用した例は、前述した
先行例で開示されたような定盤のみで、それ以外の精密
機器部材は最近になってアルミナ、サイアロン、ＳｉＣ
等のセラミックスが使用される様になってきた。しかし
ながら、これらのセラミックスで製造された部材におい
ては、従来の石質材料、金属材料またはアルミニウム材
料で製造された部材に比較し、重量の点では改善されて
いるとは言え、依然として重量があり更に重量軽減が求
められている。特に、精密機器測定機器或いは検査機器
においては物によっては相当大型かつ大重量にもなり、
中には重量で数トンになるものもある。しかも、このよ
うな大型の精密機器においては各部材サイズも大きいた
めにセラミックスでは製造できないという問題がある。
これら部材は、軽量化に加えて強度、剛性、寸法精度、
耐磨耗性、低熱膨張性、鏡面性、精密加工性等の特性が
要求されるため、これを満足する材料が求められてい
た。加えて、前記要求を満足するような素材として炭素
繊維補強複合材を精密機器部材に使用した場合において
も、部材各部同士の摺動により激しく損傷、かつ磨耗す
るため、鏡面性が損なわれ、その結果、寸法精度が悪化
する等の問題がある。However, an example in which a carbon fiber reinforced composite material is used for an optical device member is only a surface plate as disclosed in the above-mentioned prior art, and other precision device members have recently been used. Alumina, Sialon, SiC
And other ceramics have come to be used. However, members made of these ceramics are improved in terms of weight compared to members made of conventional stone, metal, or aluminum materials, but still have weight and Weight reduction is required. In particular, precision equipment measuring equipment or inspection equipment can be quite large and heavy depending on the object,
Some can weigh several tons. In addition, in such a large precision instrument, there is a problem that ceramics cannot be manufactured due to the large size of each member.
These members are not only lightweight, but also have strength, rigidity, dimensional accuracy,
Since properties such as abrasion resistance, low thermal expansion, mirror surface properties, and precision workability are required, materials satisfying these properties have been demanded. In addition, even when a carbon fiber reinforced composite material is used for a precision instrument member as a material that satisfies the above-mentioned requirements, the members are severely damaged due to sliding of each part, and are worn, so that the mirror finish is impaired. As a result, there is a problem that the dimensional accuracy is deteriorated.
【０００４】[0004]
【課題を解決するための手段】本発明は、上記問題点を
解決すると同時に、上記要求を満足するもので、炭素繊
維補強複合部材からなる精密機器用部材表面に１ｍｍ以
下のセラミックス被膜或いは金属メッキ被膜を有するこ
とを特徴とする精密機器用部材であり、また、炭素繊維
補強複合部材からなる精密機器用部材表面にセラミック
ス焼結体の接着層、またはセラミックス焼結体の蒸着層
を有することを特徴とする精密機器用部材、である。SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems and satisfies the above-mentioned requirements. The present invention also provides a ceramic coating or metal plating of 1 mm or less on the surface of a precision instrument member made of a carbon fiber reinforced composite member. It is a member for precision equipment characterized by having a coating, and has an adhesive layer of a ceramic sintered body or a vapor deposition layer of a ceramic sintered body on the surface of the precision equipment member made of a carbon fiber reinforced composite member. A member for precision equipment.
【０００５】更に、本発明は、アルミナ、サイアロン、
ＳｉＣ等のセラミックス部材表面に１ｍｍ以下の炭素繊
維補強複合部材からなる薄膜を有することを特徴とする
精密機器用部材、である。Further, the present invention relates to an alumina, sialon,
A precision instrument member having a thin film made of a carbon fiber reinforced composite member of 1 mm or less on the surface of a ceramic member such as SiC.
【０００６】[0006]
【発明の実施の形態】次に、本発明を具体的に説明す
る。先ず、本発明で使用する炭素繊維補強複合部材とし
ては、熱硬化性樹脂または熱可塑性樹脂を組み合わせて
用い、剛性および熱膨張率は炭素繊維の弾性率、炭素繊
維の角度（＋９０°〜０°〜−９０°の範囲）および炭
素繊維の体積含有率（７０〜４０容量％の範囲）等を組
み合わせて設計することが望ましいが、特に、炭素繊維
の弾性率は２００〜８００ＧＰａの範囲、また熱膨張率
は−０．５〜−１．６×１０-6／ｋに範囲内にある必要
がある。具体的な各特性の比較を以下の表に示した。Next, the present invention will be described specifically. First, as the carbon fiber reinforced composite member used in the present invention, a thermosetting resin or a thermoplastic resin is used in combination, and the rigidity and the coefficient of thermal expansion are determined by the elastic modulus of the carbon fiber and the angle of the carbon fiber (+ 90 ° to 0 °). It is desirable to design by combining the carbon fiber volume ratio (range of 70 to 40% by volume) and the like, but in particular, the elastic modulus of the carbon fiber is in the range of 200 to 800 GPa, The expansion coefficient must be in the range of -0.5 to -1.6 x 10-6 / k. The comparison of specific characteristics is shown in the following table.
【０００７】[0007]
【表１】 [Table 1]
【０００８】また、本発明で使用する炭素繊維補強複合
部材は、精密機器用部材として使用される場合には、振
動減衰性にも優れているため最適素材とも言える。次
に、上記炭素繊維補強複合部材は、強度、寸法精度、軽
量化、低熱膨張性、精密加工性等の問題は解決できる
が、耐磨耗性、鏡面性に対して若干の不安が残る。特
に、摺動性という観点からは部材表面が鏡面性を有して
いなければならず、更に相当の頻度での部材同士の摺動
についても耐磨耗性が要求される。そこで、本発明者ら
は前記炭素繊維補強複合部材の表面特性について種々検
討した結果、炭素繊維補強複合部材からなる精密機器用
部材表面に１ｍｍ以下のセラミックス被膜或いは金属メ
ッキ被膜或いはセラミックス焼結体の接着層、またはセ
ラミックス焼結体の蒸着層を施すことにより前述した鏡
面性および耐磨耗性が満足されることを知見した。更
に、前記精密機器用部材は帯電性を嫌う傾向が強いため
に、この帯電性を防止する必要がある。そのために、前
述した絶縁性を有するセラミックス被膜、セラミックス
接着層、セラミックス蒸着層の上、或いはＣＦＲＰの上
に真鍮メッキ、無電解Ｎｉメッキ、アルミメッキ、また
はタングステンメッキ等の金属メッキ被膜、を公知の方
法で膜厚或いはメッキ厚として約１ｍｍ以下付与するこ
とによりほぼ１００％の帯電を防止することが可能にな
った。Further, the carbon fiber reinforced composite member used in the present invention, when used as a member for precision equipment, has excellent vibration damping properties and can be said to be an optimal material. Next, the carbon fiber reinforced composite member can solve problems such as strength, dimensional accuracy, weight reduction, low thermal expansion property, precision workability, etc., but some concerns remain about abrasion resistance and mirror finish. In particular, from the viewpoint of slidability, the surface of the member must have a mirror surface, and further, abrasion resistance is required for sliding of the members at a considerable frequency. Therefore, the present inventors have conducted various studies on the surface characteristics of the carbon fiber reinforced composite member, and found that the surface of a precision instrument member made of the carbon fiber reinforced composite member has a ceramic coating of 1 mm or less, a metal plating coating, or a ceramic sintered body. It has been found that the above-mentioned specularity and abrasion resistance are satisfied by applying an adhesive layer or a deposited layer of a ceramic sintered body. Further, since the precision equipment member has a strong tendency to dislike the charging property, it is necessary to prevent the charging property. For this purpose, a known metal plating film such as brass plating, electroless Ni plating, aluminum plating, or tungsten plating is formed on the above-mentioned ceramic film having insulating properties, a ceramic adhesive layer, a ceramic deposition layer, or a CFRP. By applying the film thickness or plating thickness of about 1 mm or less by the method, it was possible to prevent almost 100% of charging.
【０００９】更に、本発明においては、部材基盤として
アルミナ、サイアロン、ＳｉＣ等のセラミックス部材を
止むを得ず使用する場合においては、その表面に１ｍｍ
以下の炭素繊維補強複合部材からなる薄膜を施すことで
上述した各種特性を満足させることも可能である。本発
明による部材として適用可能な光学機器部材としては、
通常の光学機器のガイド、ステージ（テーブル）、ロー
タリーテーブル、ウエハーチャック、フレーム等、適用
範囲は無限に拡大できるものである。Further, in the present invention, when a ceramic member such as alumina, sialon, or SiC is unavoidably used as the member base, 1 mm
By applying a thin film made of the following carbon fiber reinforced composite member, it is possible to satisfy the above-mentioned various characteristics. Optical device members applicable as members according to the present invention include:
The range of application, such as guides, stages (tables), rotary tables, wafer chucks, frames, etc., for ordinary optical equipment can be expanded indefinitely.
【００１０】[0010]
【発明の効果】以上説明したように、本発明による炭素
繊維補強部材で製作した精密機器用各種部材は、軽量、
かつ高精度で、しかも高い剛性等の特性を有する部材を
提供することが可能となる。As described above, various members for precision equipment manufactured with the carbon fiber reinforced member according to the present invention are lightweight,
In addition, it is possible to provide a member having characteristics such as high accuracy and high rigidity.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 木村 浩巳 東京都千代田区大手町２−６−３ 新日本 製鐵株式会社内 ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Hiromi Kimura 2-6-3 Otemachi, Chiyoda-ku, Tokyo Nippon Steel Corporation
Claims (3)
用部材表面に１ｍｍ以下のセラミックス被膜或いは金属
メッキ被膜を有することを特徴とする精密機器用部材。1. A member for precision equipment, wherein the member for precision equipment made of a carbon fiber reinforced composite member has a ceramic coating or a metal plating film of 1 mm or less on the surface.
用部材表面にセラミックス焼結体の接着層、またはセラ
ミックス焼結体の溶射および／または蒸着層を有するこ
とを特徴とする精密機器用部材。2. A member for a precision instrument comprising a member for a precision instrument made of a carbon fiber reinforced composite member and a surface of an adhesive layer of a ceramic sintered body or a sprayed and / or vapor deposited layer of a ceramic sintered body on a surface of the member for a precision instrument.
ミックス部材表面に１ｍｍ以下の炭素繊維補強複合部材
からなる薄膜を有することを特徴とする精密機器用部
材。3. A precision instrument member comprising a ceramic member such as alumina, sialon, SiC or the like having a thin film made of a carbon fiber reinforced composite member of 1 mm or less on the surface thereof.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28698397A JPH11124693A (en) | 1997-10-20 | 1997-10-20 | Member for precision equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28698397A JPH11124693A (en) | 1997-10-20 | 1997-10-20 | Member for precision equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11124693A true JPH11124693A (en) | 1999-05-11 |
Family
ID=17711508
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28698397A Withdrawn JPH11124693A (en) | 1997-10-20 | 1997-10-20 | Member for precision equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11124693A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2004088733A1 (en) * | 2003-03-31 | 2006-07-06 | 新日本石油株式会社 | Dummy wafer |
| JP2008208316A (en) * | 2007-02-28 | 2008-09-11 | Teijin Ltd | Carbon fiber composite material |
| US9139908B2 (en) | 2013-12-12 | 2015-09-22 | The Boeing Company | Gradient thin films |
| US9970100B2 (en) | 2012-11-16 | 2018-05-15 | The Boeing Company | Interlayer composite substrates |
| US10060019B2 (en) | 2012-11-16 | 2018-08-28 | The Boeing Company | Thermal spray coated reinforced polymer composites |
-
1997
- 1997-10-20 JP JP28698397A patent/JPH11124693A/en not_active Withdrawn
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2004088733A1 (en) * | 2003-03-31 | 2006-07-06 | 新日本石油株式会社 | Dummy wafer |
| JP4599293B2 (en) * | 2003-03-31 | 2010-12-15 | Ｊｘ日鉱日石エネルギー株式会社 | Dummy wafer |
| JP2008208316A (en) * | 2007-02-28 | 2008-09-11 | Teijin Ltd | Carbon fiber composite material |
| US9970100B2 (en) | 2012-11-16 | 2018-05-15 | The Boeing Company | Interlayer composite substrates |
| US10060019B2 (en) | 2012-11-16 | 2018-08-28 | The Boeing Company | Thermal spray coated reinforced polymer composites |
| US9139908B2 (en) | 2013-12-12 | 2015-09-22 | The Boeing Company | Gradient thin films |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20050104 |