JPH1111907A - Ozone production apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To increase the discharge density of a discharge space and to make it possible to convert gaseous raw material to ozone with high efficiency by inducing a space discharge and creeping discharge in the common discharge space into which this gaseous raw material is introduced. SOLUTION: The ozone production apparatus 10 consists of an electrode 11 for the space discharge, a dielectric substance 12 for the space discharge, an electrode 13 for the creeping discharge, a dielectric substance 14 for the creeping discharge, a common discharge electrode 15 commonly used as a second electrode for the space discharge and the second electrode for the creeping discharge, the discharge space 16 to be introduced with the gaseous raw material, a radiation plate 17, a power source 18 for the space discharge and a power source 19 for the creeping discharge. The one sides of the space and creeping dielectric substances 12, 14 are provided with the electrodes 11, 13 for the space and creeping discharge. The discharge electrode 15 forms patterns of a mesh shape of about 1 m in w1 and about 5 mm in g1. The voltage of the power source 18 is 10 to 20 KV and the voltage of the power source 19 is 4 to 8 KVpp. The corona discharge A is induced between the electrode 15 and the dielectric substance 12 by the impression of the power source 18. The corona discharge B is induced along the dielectric substance 14 at the peripheral edge of the electrode 15 by the impression of the power source 19.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention introduces a space discharge that causes a silent discharge (corona discharge) in a three-dimensional space and a surface discharge that causes a silent discharge on the surface of a dielectric material to occur in a common space, and introduces them into the space. The present invention relates to a superposition type ozone production apparatus that generates ozone from a source gas.

[0002]

2. Description of the Related Art FIG. 10 is a view for explaining the principle of a conventional space discharge type ozone producing apparatus 80. 81 is the first for space discharge
Electrode, 82 is a second electrode for spatial release, 83 is the second electrode 8
Reference numeral 84 denotes a discharge space dielectric disposed inside 2, reference numeral 84 denotes a discharge space, and reference numeral 85 denotes an AC power supply. In the ozone producing apparatus 80, when a high voltage of a predetermined frequency is applied between the electrodes 81 and 82 by the power supply 85, a corona discharge A (space discharge) is generated in a discharge space 84 between the dielectric 83 and the first electrode 81. Then, when a raw material gas such as air or oxygen is introduced in the direction of arrow X, ozone O ₃ is generated by the reaction of O ₂ + e ⁻ → 2O ⁻ and O ⁻ + O ₂ → O ₃ .

FIG. 11 is a view for explaining the principle of a conventional surface discharge type ozone producing apparatus 90. Reference numeral 91 denotes a creeping discharge first electrode, and reference numeral 92 denotes a creeping discharge dielectric having the first electrode 91 formed on one surface. Reference numeral 93 denotes a surface discharge second electrode, which is formed in a mesh shape on the other surface of the dielectric 92. 94 is an AC power supply. In the ozone producing apparatus 90, the power supply 9
When a high voltage of a predetermined frequency is applied between the electrodes 91 and 83 by the
Since a corona discharge B (creep discharge) occurs along the surface of No. 2, when a raw material gas such as air or oxygen is introduced from the direction of arrow Y, ozone is generated by the above-described reaction formula.

[0004]

However, in the space discharge type ozone production apparatus 80 shown in FIG. 10, when the applied voltage and its frequency are increased, the heat generation becomes remarkable, and the cooling density becomes difficult. It was difficult to increase ozone generation efficiency. In the surface discharge type ozone generator 90 shown in FIG. 11, the region where the corona discharge B is generated is a flat surface along the periphery of the electrode 93 and the extension length is about 2 mm. The ozone generation efficiency was low because the region in contact with the surface was superficial.

The present invention has been made in view of the above points, and an object of the present invention is to generate a space discharge and a creeping discharge in a common space, and to increase the ozone generation efficiency by a superposition action.

[0006]

To achieve the above object, an ozone producing apparatus according to a first aspect of the present invention is configured to generate a space discharge and a surface discharge in a common discharge space into which a raw material gas is introduced. . In a second aspect, in the first aspect,
The means for generating space discharge includes a first electrode for space discharge, a dielectric for space discharge provided with the first electrode for space discharge on the opposite side to the space, and a space in front of the dielectric for space discharge. And a space discharge power source for applying a voltage between the first electrode for space discharge and the second electrode for space discharge, the means for generating the creeping discharge. A surface discharge first electrode, a surface discharge dielectric provided with the surface discharge first electrode on the opposite side to the space, and a surface discharge first dielectric provided on the space side of the surface discharge dielectric. It was configured to include two electrodes and a surface discharge power source for applying a voltage between the surface discharge first electrode and the surface discharge second electrode. In a third aspect based on the second aspect, the second electrode for space discharge and the second electrode for surface discharge are configured as a common electrode. According to a fourth aspect, in the second aspect,
The space discharge second electrode and the creeping discharge first electrode were configured as a common electrode. In a fifth aspect based on the second or third aspect, the surface discharge dielectric and the space discharge dielectric are configured as a common dielectric. In a sixth aspect based on the second to fourth aspects, the space discharge power supply and the surface discharge power supply are configured as a common power supply. In a seventh aspect based on the second to fifth aspects, a phase of a current flowing between the first electrode for space discharge and the second electrode for space discharge, and the first electrode for surface discharge and the surface The apparatus is provided with means for adjusting the phase of the current flowing between the second electrode and the discharge electrode. According to an eighth aspect of the present invention, in the sixth aspect, a means for performing the space discharge and the creeping discharge at different timings is provided.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION

[First Embodiment] FIG. 1 is a diagram showing a basic schematic configuration of an ozone producing apparatus 10 according to a first embodiment of the present invention. 11 is an electrode for space discharge (first electrode for space discharge), 1
Numeral 2 is a dielectric for space discharge, 13 is an electrode for surface discharge (first electrode for surface discharge), 14 is a dielectric for surface discharge, and 15 is a common electrode for both the second electrode for space discharge and the second electrode for surface discharge. It is a discharge electrode. 16 is a discharge space into which the source gas is introduced,
Reference numeral 17 denotes a radiator plate provided with a plurality of radiator fins. Reference numeral 18 denotes a power supply for space discharge, and 19 denotes a power supply for surface discharge.

The dielectric material 12 for space discharge and the dielectric material 14 for creeping discharge are made of a material such as alumina ceramic having a thickness of, for example, about 0.5 mm.
As shown in FIG. 3, the space discharge electrode 11 and the surface discharge electrode 13 are provided by plating of conductive metal, plasma spraying, or the like, and the discharge electrode 15 on the other surface of the surface discharge dielectric 14 is provided.
Is, for example, as shown in FIG.
mm, thickness is about 20 μm, gap g1 is about 5 mm
It is formed in a mesh-shaped pattern of a degree. As the discharge electrode 15, for example, a conductive ceramic or the like having a high durability against ozone, that is, against oxidation is used.

The gap between the discharge electrode 15 and the space discharge dielectric 12 is set to, for example, about 0.8 mm to 10 mm. The voltage for the space discharge power supply 18 is approximately 10
KV to 20 KV and a frequency of about 60 Hz to 2 KHz.
Kpp to 8 KVpp and a frequency of about 50 Hz to 20 KHz are used.

In the ozone producing apparatus according to the first embodiment, a corona discharge A is generated between the discharge electrode 15 and the space discharge dielectric 12 by applying a voltage of the power supply 18, and the voltage of the power supply 19 is reduced. The corona discharge B is also generated by the application along the peripheral edge of the discharge electrode 15 along the dielectric material 14 for surface discharge. That is, corona discharges A and B are generated in a superposed manner in the common discharge space 16. As a result, the discharge density in the discharge space 16 is significantly higher than in the case of a single discharge, so that the source gas such as oxygen or air introduced therein can be converted to ozone with high efficiency. .

In the above configuration, the discharge space 16 is not only used in common for the space discharge and the surface discharge but also for the discharge electrode 1.
5 is also common, so that the overall shape can be reduced as compared with the case where the space discharge structure and the surface discharge structure are individually configured, and the device can be made compact without lowering the ozone generation efficiency. Cost reduction can be achieved.

In the above configuration, the generated heat is transferred to the electrode 1.
Since heat can be dissipated by the heat radiating plate 17 outside the first and the first 13, the frequency of the applied voltage can be further increased, and the ozone generation efficiency can be further increased.

FIG. 2 is a diagram showing a configuration of an ozone generator 10A according to a first modification of this embodiment. In this modification, a common power supply 20 is used for space discharge and surface discharge, thereby facilitating power supply management. However, in this case, the space discharge and the creepage discharge are performed at the same timing by the common power supply 20, so that one discharge is not affected by the other discharge, that is, both discharges are performed to the same extent. The capacitance between the space discharge electrode 11 and the discharge electrode 15 is substantially equal to the capacitance between the creeping discharge electrode 13 and the discharge electrode 15. This is because the dielectric constant and plate thickness of the space discharge dielectric 12 and the surface discharge dielectric 14 are
This is performed by appropriately setting the gap and the like of the discharge space 16.

FIG. 3 is a diagram showing a configuration of an ozone generator 10B according to a second modification of this embodiment. In this modification, a common power supply 20 is used, and a diode 2
The first half period of the voltage of the power supply 20 is applied between the electrodes 11 and 15 by the diode 21 and the second half period of the voltage of the power supply 20 is applied between the electrodes 13 and 15 by the diode 22. is there.

According to the second modification, at a certain timing, only one of the space discharge and the creeping discharge is performed and the simultaneous discharge is not performed.
5 and the capacitance between the creeping discharge electrode 13 and the discharge electrode 15 need not necessarily be set to the same level, and the current capacity of the common power supply 20 is shown in FIG. It can be reduced to half of the first modification.

FIG. 4 is a diagram showing a configuration of an ozone generator 10C according to a third modification of this embodiment. In this modification, the dielectric on the side of the space discharge electrode 11 is removed, and the surface discharge dielectric 14 is shared for space discharge, and the surface discharge electrode 13 is shared as the space discharge electrode. The discharge power supply 18 is connected to the electrode 1 via the capacitor 23.
1 and 13 is different from the configuration shown in FIG.

In the third modification, the surface discharge is performed by the electrode 15 in the same manner as in the above-described ozone producing apparatuses 10, 10A and 10B.
The space discharge occurs at the periphery of the electrode 11 and the dielectric 1
4 and the electrode 15 becomes irrelevant. In the third modified example, the dielectric material incorporated as a structural material is one.
Since only one piece is required, the overall structure can be made more compact, and further lower manufacturing costs can be achieved. By appropriately setting the capacity of the capacitor 23, the electrode 1
Since the phase of the current flowing between 1 and 13 can be adjusted, the relationship between the space discharge and the creeping discharge can be adjusted by this.
Ozone generation efficiency can be further increased. The method of adjusting the current phase using this capacitor is based on a configuration in which separate power supplies are used for space discharge and surface discharge (for example, FIG. 1).
Are all applicable.

[Second Embodiment] FIG. 5 is a diagram showing a basic schematic configuration of an ozone producing apparatus 40 according to a second embodiment of the present invention. 41 is a space discharge electrode (space discharge first).
Electrode, 42 is a dielectric for space discharge, 43 is an electrode for surface discharge (first electrode for surface discharge), 44 is a dielectric for surface discharge,
45 is a discharge electrode for space discharge (second electrode for space discharge);
Reference numeral 46 denotes a discharge electrode for surface discharge (second electrode for surface discharge). Reference numeral 47 denotes a discharge space into which the source gas is introduced, and reference numeral 48 denotes a radiator plate provided with a plurality of radiator fins. 49 is a power supply for space discharge, and 50 is a power supply for surface discharge.

The space discharge dielectric 42 has a cylindrical shape made of a material such as alumina having a plate thickness of about 0.5 mm, for example, and has a space discharge electrode 41 formed on its outer surface by plating a conductive metal or plasma spraying. Are formed. The creepage discharge dielectric 44 also has a cylindrical shape made of a material such as alumina ceramic having a plate thickness of about 0.5 mm, for example, and has a creepage discharge electrode 43 made of a rod-shaped (or cylindrical) conductor inside. Discharge electrodes 45 and 46, which are provided in close contact with each other and have a diameter of, for example, about 0.8 mm and made of highly corrosion-resistant titanium or a titanium alloy, are spirally spaced apart from each other. The radiator plate 48 is
Is formed in a cylindrical shape along the outer side of the body or a plurality of divided parts.

The gap between the discharge electrode 45 and the space discharge dielectric 42 is set to, for example, about 0.8 mm to 1.0 mm. As the space discharge power supply 49, for example, a power supply having a voltage of approximately 20 KV and a frequency of about 60 Hz to 1 KHz, and a creeping discharge power supply 50 having a voltage of approximately 8 KV
Vpp having a frequency of about 2 KHz to 20 KHz is used.

The ozone producing apparatus 4 of the second embodiment
At 0, a corona discharge A occurs between the discharge electrode 45 and the space discharge dielectric 42 by application of the voltage of the power supply 49,
In addition, the application of the voltage of the power supply 50 causes the corona discharge B to occur along the surface discharge dielectric 44 on the periphery of the discharge electrode 46. That is, corona discharges A and B are generated in a superposed manner in the common discharge space 47. As a result, since the discharge density in the discharge space 47 is significantly higher than that in the case of the single discharge, it is possible to convert the introduced gas such as oxygen and air into ozone with high efficiency. .

In the above configuration, the discharge space 47 is not only used in common for the space discharge and the surface discharge, but also for the discharge electrode 4.
5 and 46 are wound around the common dielectric 44, so that the overall shape can be made smaller and the ozone generation efficiency can be reduced as compared with the case where the space discharge structure and the creeping discharge structure are individually configured. Therefore, the apparatus can be made compact.

In the above configuration, the generated heat is transferred to the electrodes 4.
Since heat can be dissipated by the heat radiating plate 48 on the outside, the frequency of the applied voltage can be further increased, and the ozone generation efficiency can be further increased.

FIG. 6 is a diagram showing a configuration of an ozone generator 40A according to a first modification of this embodiment. In this modification, the space discharge electrode 45 and the surface discharge electrode 46 are changed to one common discharge electrode 51, and the discharge electrode 5
1 and the space discharge electrode 41, and between the discharge electrode 51 and the surface discharge electrode 43, a common power source 52 is connected,
This facilitates power management.

In this modified example, the space discharge and the surface discharge are performed at the same timing by the common power supply 20, as in the configuration shown in FIG. 2, so that one discharge is not affected by the other discharge. In order to make the capacitance between the space discharge electrode 41 and the discharge electrode 51 and the capacitance between the creeping discharge electrode 43 and the discharge electrode 51 substantially the same, The dielectric constant and plate thickness of the surface discharge dielectric 44 and the gap of the discharge space 47 are set.

FIG. 7 is a diagram showing a configuration of an ozone generator 40B according to a second modification of this embodiment. In this modification, a common power supply 52 is used, and
The first half cycle of the voltage of the power supply 52 is applied between the electrodes 41 and 51 by the diode 53 and the second half cycle of the voltage of the power supply 52 is applied between the electrodes 43 and 51 by the diode 54. is there.

According to the second modified example, at a certain timing, only one of the space discharge and the creeping discharge is performed and the simultaneous discharge is not performed.
1 and the capacitance between the creeping discharge electrode 43 and the discharge electrode 51 do not necessarily have to be set to the same level, and the current capacity of the common power supply 52 is set to the first modified example. Can be halved.

FIG. 8 is a diagram showing a configuration of an ozone generator 40C according to a third modification of this embodiment. In this modification, the dielectric on the side of the space discharge electrode 41 is removed to use the surface discharge dielectric 44 for space discharge, the surface discharge electrode 43 is also used for space discharge, and 49 is connected between the electrodes 41 and 43 via a capacitor 54.

In the third modified example, the creeping discharge is generated at the periphery of the electrode 51 similarly to the above-described ozone producing apparatuses 40A and 40B, but the space discharge is performed between the electrode 41 and the dielectric 44, The electrode 51 becomes irrelevant. Further, in the third modification, since only one dielectric is required to be incorporated as a structural material, the overall structure can be made more compact and the manufacturing cost can be reduced. Further, by appropriately setting the capacity of the capacitor 54, the phase of the current flowing between the electrodes 41 and 43 can be adjusted, and the relationship between the space discharge and the creeping discharge can be adjusted, thereby further improving the ozone generation efficiency. Can be. The method of adjusting the current phase by using this capacitor can be applied to all configurations using separate power supplies for space discharge and creeping discharge.

FIG. 9 is a diagram showing a configuration of an ozone generator 40D according to a fourth modification of this embodiment. In this modification, the creeping discharge electrode 43 is lengthened, and a cooling device 55 such as a heat pipe is provided at an end of a position deviated from the discharge space 47 so that heat generated at the electrode 43 of the ozone generator 40D is removed therefrom. From the outside heat sink 48
The heat radiation efficiency is further improved in addition to the heat radiation by the above. The cooling device 55 causes the cooling unit 56 to absorb heat generated in the electrode 43 so that the cooling unit 56 surrounds the end of the electrode 43.

The electrode 43 may be formed in a hollow shape and a coolant may be circulated therein, or the electrode 43 itself may be made of a liquid having both a coolant and a conductor (for example, water in which a conductive agent is melted). In the latter case, the dielectric 4
The inside of 4 may be a cavity, and the cavity and a heat exchanger portion provided outside may be connected by a pipe to form a circulation path for the conductive refrigerant liquid.

[0032]

As described above, according to the present invention, a space discharge and a creeping discharge are generated in a common discharge space, so that the discharge density in the discharge space can be increased, and the raw material gas introduced into the discharge space has a high efficiency. Can be converted to ozone. When a common electrode, a common dielectric, or a common power source is used for the space discharge portion and the surface discharge portion, the overall shape can be reduced, and the device can be manufactured without lowering the ozone generation efficiency. Can be reduced in size and cost. Further, by adjusting the phases of the space discharge and the creeping discharge, an optimum superimposing effect of the space discharge and the creeping discharge can be obtained, and higher ozone generation efficiency can be achieved. Furthermore, if the timing at which the space discharge and the creeping discharge occur are made different, the current capacity can be reduced when a common power source is used.

[Brief description of the drawings]

FIG. 1 is a diagram showing a schematic configuration of an ozone producing apparatus according to a first embodiment of the present invention, (a) is a side view thereof,
(B) is a plan view showing a pattern of the dielectric and the plate-shaped electrode, and (c) is a plan view showing a pattern of the dielectric and the grid-shaped electrode.

FIG. 2 is a side view of a first modified example of the ozone producing apparatus of the embodiment.

FIG. 3 is a side view of a second modified example of the ozone producing apparatus of the embodiment.

FIG. 4 is a side view of a third modified example of the ozone producing apparatus of the embodiment.

FIG. 5 is a view showing a schematic configuration of an ozone producing apparatus according to a second embodiment of the present invention, where (a) is a longitudinal sectional view thereof,
(B) is a cross-sectional view thereof.

FIG. 6 is a side view of a first modified example of the ozone producing apparatus of the embodiment.

FIG. 7 is a side view of a second modified example of the ozone producing apparatus of the embodiment.

FIG. 8 is a side view of a third modified example of the ozone producing apparatus of the embodiment.

FIG. 9 is a side view of a fourth modified example of the ozone producing apparatus of the embodiment.

FIG. 10 is a side view showing a schematic configuration of a conventional space corona discharge type ozone producing apparatus.

FIG. 11 is a side view showing a schematic configuration of a conventional surface corona discharge type ozone producing apparatus.

[Explanation of symbols]

10: Ozone generator of the first embodiment, 10A to 1
0C: Ozone generator of the first to third modified examples, 1
1: space discharge electrode, 12: space discharge dielectric, 13:
Creeping discharge electrode, 14: Creepage discharge dielectric, 15: Common discharge electrode, 16: Discharge space, 17: Heat sink, 18: Space discharge power supply, 19: Creepage discharge power supply, 20: Common power supply, 21 , 22: diode, 23: capacitor, 4
0: Ozone generator of the second embodiment, 40A to 40
D: Ozone generator of the first to fourth modified examples, 41:
Electrode for space discharge, 42: dielectric for space discharge, 43: electrode for surface discharge, 44: dielectric for surface discharge, 45: electrode for space discharge, 46: electrode for surface discharge, 47: discharge space, 4
8: heat radiation plate, 49: power supply for space discharge, 50: power supply for surface discharge, 51: common discharge electrode, 52: common power supply, 53,
54: diode, 54: capacitor, 55: heat dissipation device, 56: cooling unit.

Claims (8)

[Claims] An ozone producing apparatus characterized in that a space discharge and a surface discharge are generated in a common discharge space into which a raw material gas is introduced. 2. The space discharge generating means includes: a space discharge first electrode; a space discharge dielectric provided with the space discharge first electrode on a side opposite to the space; and a space discharge dielectric. A second electrode for space discharge which is opposed to the front surface through the space,
A space discharge power supply for applying a voltage between the space discharge first electrode and the space discharge second electrode, wherein the creeping discharge generating means comprises: a creeping discharge first electrode; A surface discharge dielectric provided with a first electrode on the opposite side of the space, a surface discharge second electrode provided on the space side of the surface discharge dielectric, the surface discharge first electrode, and the surface 2. The ozone producing apparatus according to claim 1, comprising a creeping discharge power supply for applying a voltage between the discharge second electrodes. 3. The ozone producing apparatus according to claim 2, wherein the second electrode for space discharge and the second electrode for creeping discharge are common electrodes. 4. The ozone producing apparatus according to claim 2, wherein the second electrode for space discharge and the first electrode for creeping discharge are common electrodes. 5. The dielectric material for a surface discharge and the dielectric material for a space discharge are a common dielectric material.
Or the ozone production apparatus according to 3. 6. The power source for space discharge and the power source for surface discharge are common power sources.
An ozone producing apparatus according to item 1. 7. A phase of a current flowing between the first electrode for space discharge and the second electrode for space discharge, and a current flowing between the first electrode for surface discharge and the second electrode for surface discharge. 6. The ozone producing apparatus according to claim 2, further comprising means for adjusting a phase of the current. 8. An ozone producing apparatus according to claim 6, further comprising means for performing said space discharge and said creeping discharge at different timings.