JPH11115194A - Nozzle plate for ink-jet head and its manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain an ink-jet head nozzle plate superior in resistances to heat and chemicals, and water repellency by using for the nozzle plate a carbon precursor obtained by setting a thermosetting resin at a specific temperature. SOLUTION: A nozzle plate substrate is formed with the use of a molding material of a thermosetting resin essentially consisting of a furan resin, a phenol resin, a polycoabodimide resin or a mixture of these resins. The obtained mold is set with heat in the air, vacuum or inactive ambience at a temperature of 150-500 deg.C. Ink heat holes 1 are formed thereafter. An ink-jet head comprises three plates, namely, a base plate 8, a cover plate 7 and a nozzle plate 2. The base plate 8 is provided with ink grooves 3 as ink flow passages, a heat- generating resistance element as a pressure generation actuator 4, an electrode for driving the element, etc.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a nozzle plate for an ink jet head installed in an ink jet type recording apparatus and a method for manufacturing the same.

[0002]

2. Description of the Related Art An ink jet type recording apparatus mainly prints desired characters and images on an opposing recording medium (recording paper) by ejecting ink droplets from fine nozzles having a diameter of several tens of μm. At present, as an ink jet head installed in this ink jet type recording apparatus, a drop-on-demand method in which ink droplets are ejected when necessary is mainly used. This type of inkjet head is
It is mainly composed of a nozzle plate having an ink ejection hole as shown in FIG. 1, an ink chamber for supplying ink to the nozzle plate, an ink groove, a pressure generating actuator provided in the ink chamber or the ink groove, and the like. By sending a printer control signal to the pressure generating actuator, pressure is applied to the ink, and ink droplets are ejected from the ink ejection holes toward a recording medium that is arranged opposite to the ink ejection holes. The pressure is generated by, for example, applying an electric signal to a laminated piezoelectric actuator to generate a pressure wave and ejecting ink droplets (for example, JP-B-53-12138, JP-A-63-247051). And a method in which ink is instantaneously vaporized and expanded by a heating resistor element to generate bubbles, and the ink droplets are ejected at the pressure (for example, Tominori Hara, Ichiro Endo, Journal of the Institute of Image Electronics Engineers, Vol. 11, No. 2, 1982) and the like.

[0003] As a method of manufacturing the nozzle plate of the ink jet head as described above, for example, polyimide,
A nozzle plate substrate is formed by injection molding of a polymer material such as polysulfone, polyacetal, polyphenylsulfone, polyphthalamide, polyphenylene oxide, polycarbonate, polyetherimide, etc., and ink jet holes are formed in this by a laser beam A known method of manufacturing a nozzle plate (for example, Japanese Patent Application Laid-Open No. 3-277554) is known.

[0004]

However, the above polyimide, polysulfone, polyphenylsulfone,
In a nozzle plate molded with a polymer material such as polycarbonate and formed with ink ejection holes, the chemical reaction with the organic solvent component of the ink causes a decrease in the mechanical strength and water repellency of the nozzle plate. Of the resin used has a problem of chemical resistance of the resin used, which adversely affects the flight of the ink droplets, causes variations in the flight direction, and lowers the print quality.

[0005] In order to solve the above problems, a hydrogenated amorphous carbon film is coated on the surface of an ink jet head part by a CVD method or the like to improve abrasion resistance and, if necessary, to reduce incompatibility with ink. In order to maintain for a long time, a method of performing a fluorination treatment on the surface of the hydrogenated amorphous carbon coating is disclosed in JP-A-4-229277, but in such a method, the nozzle surface has water repellency, It has excellent features such as prevention of nozzle hole blockage, good cutting of ink droplets, and prevention of diffusion and adhesion of ink droplets to adjacent nozzle holes.However, the adhesion between the resin used and the hydrogenated amorphous carbon coating is extremely high. Due to the low temperature, there has been a problem that mechanical peeling occurs with long-term use.

In the case of an ink jet head using a heating resistor element, the frequency of the element drive signal shifts to a higher frequency side due to a higher speed and a higher resolution of the apparatus based on recent technological advances. As the degree of integration increases, there has been an increasing demand for heat resistance of the resin material forming the nozzle plate against heat generated by the elements. In addition, when forming a nozzle plate, ablation processing by excimer laser, lithography, and electroforming are mainly used because burr generation at the time of nozzle processing greatly affects ink flyability. Occurs, the resin plate has a large Young's modulus,
There is a problem that it is difficult to remove by secondary processing such as polishing.

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a nozzle plate for an ink jet head which is excellent in heat resistance, chemical resistance, and water repellency, and a method of manufacturing the same. Things.

[0008]

According to the present invention, in order to attain this object, a nozzle plate used in an ink jet head for jetting ink droplets from an ink jetting hole to a recording medium uses a thermosetting resin at 150 to 500 ° C. A nozzle plate for an ink jet head, a substrate for a nozzle plate, which is made of a carbon precursor obtained by heat curing with a furan resin, a phenol resin, a polycarbodiimide resin, or a mixture thereof. Molding using a thermosetting resin molding material, and subjecting the obtained molded article to a thermosetting treatment at 150 to 500 ° C. in the air, in a vacuum or in an inert atmosphere, and then forming an ink ejection hole. A method for manufacturing a nozzle plate for an ink jet head, a substrate for a nozzle plate is formed of a furan resin, a phenol resin,
Molded using a thermosetting resin molding material in which the same type of cured resin fine powder is added to and mixed with a polycarbodiimide-based resin or a resin mainly containing a mixture thereof, and the obtained molded product is subjected to vacuum or an inert atmosphere. A method of manufacturing a nozzle plate for an ink-jet head, which comprises forming an ink jetting hole after a heat curing treatment at 150 to 500 ° C.

[0009]

DETAILED DESCRIPTION OF THE INVENTION A nozzle plate for an ink jet head according to the present invention is instantaneously provided by an ink jet method in which an electric signal is applied to a laminated piezoelectric actuator to generate a pressure wave to eject ink droplets, or a heating resistor element. It is used for an ink jet head of an ink jet recording apparatus such as a bubble jet method in which bubbles are generated by vaporizing and expanding ink and ink droplets are jetted at the pressure.

As shown in FIG. 1, for example, the ink jet head is formed of three plates, a base plate 8, a cover plate 7, and a nozzle plate 2.
The base plate 8 has ink grooves 3 serving as ink flow paths,
The cover plate 7 includes an ink chamber 5, an ink supply port 6, an ink groove 3 serving as an ink flow path, and the like. The base plate 8 and the cover plate 7 are positioned so that the corresponding ink grooves 3 are aligned with each other, and are bonded and used with an epoxy-based adhesive or the like. Then, the nozzle plate 2 is used by being joined to the joint end surface between the base plate 8 and the cover plate 7 (the front surface of the formed ink flow path).

The nozzle plate 2 is made of a carbon precursor, has an ink ejection hole 1 formed therein, and has a sectional shape as shown in FIG. 3, for example.

Hereinafter, a method for manufacturing the nozzle plate 2 will be described. First, a nozzle plate substrate is formed into a cross-sectional shape as shown in FIG. 2, for example, using a thermosetting resin molding material.

As the thermosetting resin molding material, a resin containing a furan resin, a phenol resin, a polycarbodiimide resin or a mixture thereof as a main component is used. Further, when a resin obtained by adding and mixing the same type of cured resin fine powder to the resin is used, better results can be obtained.

As the phenolic resin, the surface layer of a granular phenolic resin having a moisture content of 1% by weight or less, a particle diameter of 50 μm or less, and a heat fluidity of 60 to 160 mm as measured by a disc cure method has a melting point of 30%. It is desirable to perform injection molding using a granular phenol resin coated with a low surface tension substance at -160 ° C and a composition ratio of phenol resin to phenol resin of 0.2 to 5% by weight.

As used herein, the term "thermal fluidity" refers to the property of being solid at room temperature but exhibiting fluidity when a load is applied in a heated state (except for the case of thermosetting by heating for a long time). . As a measure of the thermal fluidity, it is represented by the flow (diameter elongation: mm) of the sample resin under a predetermined load at 160 ° C. measured by the disk cure method.

A low surface tension substance is a low surface tension substance having properties such as lubricity, release property, and non-adhesion property (for example, room temperature
(A substance whose critical surface tension is about 35 dynes / cm or less at [25 ° C])
It is desirable that the compound is a low-melting-point compound which is solid at room temperature at a melting point of 30 to 160 ° C. If the melting point is lower than 30 ° C., poor weighing tends to occur during molding. If the melting point exceeds 160 ° C., the lubricity in the cylinder of the molding machine is poor, and stable moldability cannot be obtained.

Typical examples are higher fatty acids such as stearic acid, higher fatty acid esters such as monoglyceride stearate and ethyl stearate, solid fats and oils such as hardened castor oil, higher fatty acid amides such as stearic amide, stearyl alcohol and the like. Higher fatty alcohols,
Higher aliphatic (meth) acrylates such as stearyl methacrylate; waxy hydrocarbons such as paraffin wax; polyvalent fluorine-containing higher fatty acids such as perfluorooctanoic acid; polyvalent fluorine-containing higher aliphatic sulfonamides; Group iodides, polyvalent fluorine-containing higher aliphatic alcohols, polyvalent fluorine-containing higher aliphatic (meth) acrylates,
Polyvalent fluorine-containing higher aliphatic hydrocarbons, polyvalent fluorine-containing aromatic compounds, polyvalent fluorine-containing oligomeric compounds, derivatives thereof, mixtures of one or more of these, and compositions in which additives such as a polymerization catalyst are blended. Is mentioned.

When a phenol resin coated with this low surface tension substance is used, it has excellent fluidity and the like,
Kneading and molding can be easily performed, and a good molded product which is transparent and contains almost no air bubbles can be obtained.

The coating amount is desirably 0.2 to 5% by weight based on the phenol resin composition ratio. If the coating amount is less than 0.2% by weight, blockage may occur in the cylinder of the molding machine at the time of molding, making continuous molding difficult. If it exceeds 5% by weight, moldability is improved. The effect reaches a plateau, and a transparent molded body cannot be obtained. Furthermore, since a low surface tension substance melted during the heat curing treatment may cause deformation and dimensional deviation of the molded product, a highly accurate carbon precursor cannot be obtained. The phenol molding material prepared in this manner has a coating film having water repellency and low moisture permeability. A molded article using this molding material has excellent water repellency because the low surface tension substance is uniformly dispersed in the molded article.

Further, the cured resin fine powder is preferably a granular phenol resin having a water content of 1% by weight or less, a particle diameter of 50 μm or less, and a heat fluidity of 0 to 10 mm measured by a disc cure method. If the water content exceeds 1% by weight, dimensional shrinkage during molding and dimensional shrinkage during thermosetting increase, which is not preferable.

The molding method of the thermosetting resin molding material includes:
Injection molding, press molding, cast molding and the like can be mentioned, and especially in view of mass productivity, the injection molding method is preferable. When using a thermosetting resin molding material containing a granular furan-based resin, a phenol-based resin, a polycarbodiimide-based resin or a mixture thereof as a main component, it is desirable to mold by an injection molding method or a press molding method. Similarly, in the case of using a thermosetting resin molding material in which the same type of cured resin fine powder is added to and mixed with a resin mainly composed of granular furan-based resin, phenol-based resin, polycarbodiimide-based resin or a mixture thereof. It is desirable to mold by an injection molding method or a press molding method.

Liquid furan resin, phenolic resin,
When a thermosetting resin molding material containing a polycarbodiimide-based resin or a mixture thereof as a main component is used, it is desirable to perform casting and molding in a mold. Similarly, when using a thermosetting resin molding material in which the same type of cured resin fine powder is added to and mixed with a resin mainly containing a liquid furan-based resin, a phenol-based resin, a polycarbodiimide-based resin, or a mixture thereof. It is desirable that the composition be cast and cured in a mold.

The obtained molded product is heated at 150 to 500 ° C. in air, under vacuum or in an inert atmosphere, preferably at 150 to 500 ° C. in air.
It is heat cured at 150 to 500 ° C in an inert atmosphere in a vacuum at 280 ° C to form a carbon precursor. 50 heat curing treatments
When the temperature exceeds 0 ° C., thermal decomposition and carbonization are promoted at a stretch, physical properties become unstable, and constant performance in water repellency and chemical resistance cannot be expected. Next, the ink ejection holes are formed (ablated) by excimer laser, lithography, electroforming, or the like, so that the cross-sectional shape is as shown in FIG.

According to this production method, it is possible to provide a nozzle plate for an ink jet head having performances excellent in water repellency, heat resistance and chemical resistance, which are characteristics of the carbon precursor.

The present invention can be variously modified without departing from the gist thereof. For example, it can be used for a nozzle plate of an ink jet recording apparatus such as a piezoelectric actuator type. Further, the present invention can also be used for an ink groove serving as an ink flow path, a nozzle plate integrally formed with a shape for disposing a polarized piezoelectric actuator, and the like.

[0026]

The present invention will be described below in detail with reference to examples.

Example 1 As a resin for a nozzle plate material, a water content of 0.8% and a particle size were used.
Thermal fluidity measured by the disc cure method at 5-30 μm is 1
Using a granular phenolic resin of 59 mm, the orifice is formed by injection molding with a mold having a shape in which the ink ejection hole part is not a through hole, and then heat cured at 220 ° C. in air to form a carbon precursor. A nozzle plate made of a carbon precursor was manufactured by forming a through hole in the orifice portion using an excimer laser.

When a solvent resistance test was performed on the nozzle holes by ink jetting using a polyhydric alcohol such as diethylene glycol butyl ether or tripropylene glycol monomethyl ether as a solvent, the obtained nozzle plate made of a carbon precursor showed excellent printing accuracy. Had been maintained.

Next, a high-frequency drive signal (1
To 2 kHz) for 30 minutes to increase the heat generation of the heating resistor element and observe the change in the temperature of the nozzle plate and the change in the shape of the nozzle hole. There was no change in the shape of the holes, there was no wetting between the nozzle holes that were locally close to each other, and good ink flying properties and ink water repellency were maintained.

Example 2 Example 1 except that it was heat cured at 400 ° C. in a nitrogen atmosphere.
In the same manner as in the above, a carbon precursor nozzle plate was manufactured. When a solvent resistance test was performed in the same manner as in Example 1, the obtained carbon precursor nozzle plate maintained excellent printing accuracy. When the temperature change of the nozzle plate and the shape change of the nozzle hole were observed in the same manner as in Example 1, the temperature rise was small, there was no change in the shape of the nozzle hole, there was no wetting between the nozzles, and a good ink was obtained. The flying property and the ink water repellency were maintained.

Example 3 Example 1 was performed except that a heat curing treatment was performed at 500 ° C. under a nitrogen atmosphere.
In the same manner as in the above, a carbon precursor nozzle plate was manufactured. When a solvent resistance test was performed in the same manner as in Example 1, the obtained carbon precursor nozzle plate maintained excellent printing accuracy. When the temperature change of the nozzle plate and the shape change of the nozzle hole were observed in the same manner as in Example 1, the temperature rise was small, there was no change in the shape of the nozzle hole, there was no wetting between the nozzles, and a good ink was obtained. The flying property and the ink water repellency were maintained.

Example 4 As a resin for a nozzle plate material, a water content of 0.8% and a particle size were used.
Thermal fluidity measured by the disc cure method at 5-30 μm is 1
Example 1 was repeated except that a mixed resin of a granular phenol resin having a particle size of 59 mm and a fine phenol resin particle having a moisture content of 0.5% and a particle diameter of 10 μm or less and having a heat fluidity of 0 mm measured by a disc cure method and having a particle diameter of 0 mm was used. In the same manner as in the above, a carbon precursor nozzle plate was manufactured. When a solvent resistance test was performed in the same manner as in Example 1, the obtained carbon precursor nozzle plate maintained excellent printing accuracy. When the temperature change of the nozzle plate and the shape change of the nozzle hole were observed in the same manner as in Example 1, the temperature rise was small, there was no change in the shape of the nozzle hole, there was no wetting between the nozzles, and a good ink was obtained. The flying property and the ink water repellency were maintained.

Example 5 As a resin for a nozzle plate material, a water content of 0.8% and a particle size were used.
Thermal fluidity measured by the disc cure method at 5-30 μm is 1
Using a mixed resin of a granular phenol resin of 59 mm and a fine phenol resin fine particle of 0.5% moisture content, a particle diameter of 10 μm or less and a fluidity of 0 mm measured by a disc cure method at 400 ° C under a nitrogen atmosphere. A nozzle plate made of a carbon precursor was manufactured in the same manner as in Example 1 except that the heat curing treatment was performed. When a solvent resistance test was performed in the same manner as in Example 1, the obtained carbon precursor nozzle plate maintained excellent printing accuracy. When the temperature change of the nozzle plate and the shape change of the nozzle hole were observed in the same manner as in Example 1, the temperature rise was small, there was no change in the shape of the nozzle hole, there was no wetting between the nozzles, and a good ink was obtained. The flying property and the ink water repellency were maintained.

Example 6 As a resin for a nozzle plate material, a water content of 0.8% and a particle size were used.
Thermal fluidity measured by the disc cure method at 5-30 μm is 1
Using a mixed resin of a granular phenolic resin of 59 mm and a fine phenolic resin powder having a moisture content of 0.5% and a particle diameter of 10 μm or less and having a heat fluidity of 0 mm measured by a disc cure method at 500 ° C. in a nitrogen atmosphere A nozzle plate made of a carbon precursor was manufactured in the same manner as in Example 1 except that the heat curing treatment was performed. When a solvent resistance test was performed in the same manner as in Example 1, the obtained carbon precursor nozzle plate maintained excellent printing accuracy. When the temperature change of the nozzle plate and the shape change of the nozzle hole were observed in the same manner as in Example 1, the temperature rise was small, there was no change in the shape of the nozzle hole, there was no wetting between the nozzles, and a good ink was obtained. The flying property and the ink water repellency were maintained.

Example 7 A nozzle plate made of a carbon precursor was manufactured in the same manner as in Example 1 except that press molding was performed instead of injection molding. A solvent resistance test was performed in the same manner as in Example 1. As a result, excellent printing accuracy was maintained. When the temperature change of the nozzle plate and the shape change of the nozzle hole were observed in the same manner as in Example 1, the temperature rise was small, there was no change in the shape of the nozzle hole, there was no wetting between the nozzles, and a good ink was obtained. The flying property and the ink water repellency were maintained.

Example 8 A nozzle plate made of a carbon precursor was manufactured in the same manner as in Example 2 except that press molding was performed instead of injection molding. A solvent resistance test was performed in the same manner as in Example 1. As a result, excellent printing accuracy was maintained. When the temperature change of the nozzle plate and the shape change of the nozzle hole were observed in the same manner as in Example 1, the temperature rise was small, there was no change in the shape of the nozzle hole, there was no wetting between the nozzles, and a good ink was obtained. The flying property and the ink water repellency were maintained.

Example 9 A nozzle plate made of a carbon precursor was manufactured in the same manner as in Example 3 except that press molding was performed instead of injection molding. A solvent resistance test was performed in the same manner as in Example 1. As a result, excellent printing accuracy was maintained. When the temperature change of the nozzle plate and the shape change of the nozzle hole were observed in the same manner as in Example 1, the temperature rise was small, there was no change in the shape of the nozzle hole, there was no wetting between the nozzles, and a good ink was obtained. The flying property and the ink water repellency were maintained.

Example 10 A nozzle plate made of a carbon precursor was manufactured in the same manner as in Example 4 except that press molding was performed instead of injection molding. A solvent resistance test was performed in the same manner as in Example 1. As a result, excellent printing accuracy was maintained. When the temperature change of the nozzle plate and the shape change of the nozzle hole were observed in the same manner as in Example 1, the temperature rise was small, there was no change in the shape of the nozzle hole, there was no wetting between the nozzles, and a good ink was obtained. The flying property and the ink water repellency were maintained.

Example 11 A nozzle plate made of a carbon precursor was manufactured in the same manner as in Example 5, except that press molding was performed instead of injection molding. A solvent resistance test was performed in the same manner as in Example 1. As a result, excellent printing accuracy was maintained. When the temperature change of the nozzle plate and the shape change of the nozzle hole were observed in the same manner as in Example 1, the temperature rise was small, there was no change in the shape of the nozzle hole, there was no wetting between the nozzles, and a good ink was obtained. The flying property and the ink water repellency were maintained.

Example 12 A nozzle plate made of a carbon precursor was manufactured in the same manner as in Example 6, except that press molding was performed instead of injection molding. A solvent resistance test was performed in the same manner as in Example 1. As a result, excellent printing accuracy was maintained. When the temperature change of the nozzle plate and the shape change of the nozzle hole were observed in the same manner as in Example 1, the temperature rise was small, there was no change in the shape of the nozzle hole, there was no wetting between the nozzles, and a good ink was obtained. The flying property and the ink water repellency were maintained.

Example 13 A nozzle plate made of a carbon precursor was manufactured in the same manner as in Example 1 except that granular furan resin was used as the resin for the nozzle plate material. A solvent resistance test was performed in the same manner as in Example 1. As a result, excellent printing accuracy was maintained. When the temperature change of the nozzle plate and the shape change of the nozzle hole were observed in the same manner as in Example 1, the temperature rise was small, there was no change in the shape of the nozzle hole, there was no wetting between the nozzles, and a good ink was obtained. The flying property and the ink water repellency were maintained.

Example 14 A nozzle plate made of a carbon precursor was manufactured in the same manner as in Example 2 except that granular furan resin was used as the resin for the nozzle plate material. A solvent resistance test was performed in the same manner as in Example 1. As a result, excellent printing accuracy was maintained. When the temperature change of the nozzle plate and the shape change of the nozzle hole were observed in the same manner as in Example 1, the temperature rise was small, there was no change in the shape of the nozzle hole, there was no wetting between the nozzles, and a good ink was obtained. The flying property and the ink water repellency were maintained.

Example 15 A nozzle plate made of a carbon precursor was manufactured in the same manner as in Example 3, except that granular furan resin was used as the resin for the nozzle plate material. A solvent resistance test was performed in the same manner as in Example 1. As a result, excellent printing accuracy was maintained. When the temperature change of the nozzle plate and the shape change of the nozzle hole were observed in the same manner as in Example 1, the temperature rise was small, there was no change in the shape of the nozzle hole, there was no wetting between the nozzles, and a good ink was obtained. The flying property and the ink water repellency were maintained.

COMPARATIVE EXAMPLE Injection molding was performed using a polycarbonate, polyphenylsulfone, or polysulfone resin in a mold having a final dimension, and a through hole was formed with an excimer laser in the same manner as in Example 1.
A nozzle plate made of each resin was prepared. When a solvent resistance test was carried out in the same manner as in Example 1, the printing accuracy was maintained in the obtained polyphenylsulfone nozzle plate. Eroded, it became difficult to maintain the nozzle shape, the ink flying direction varied, and the printing accuracy was greatly reduced.

When the temperature change of the nozzle plate and the change in the shape of the nozzle hole were observed in the same manner as in Example 1, the polycarbonate and polysulfone nozzle plates had poor solvent resistance. Immediately after the application of, the nozzle hole started to be deformed, so that the measurement could not be performed.
In the polyphenyl sulfone nozzle plate, although the nozzle hole shape was maintained, the plate temperature increased, the flying direction of each nozzle hole changed due to thermal expansion, and a phenomenon that the nozzle holes that were locally close to each other got wet occurred. Printing accuracy has decreased.

[0046]

As described above, according to the present invention, by using a carbon precursor, heat resistance, chemical resistance,
A nozzle plate for an ink jet head having excellent water repellency and a method for manufacturing the same can be provided.

[Brief description of the drawings]

FIG. 1 is a development view schematically showing an inkjet head.

FIG. 2 is a sectional view of a nozzle plate substrate according to one embodiment of the present invention.

FIG. 3 is a sectional view of a nozzle plate according to an embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Ink ejection hole 2 Nozzle plate 3 Ink groove 4 Actuator for pressure generation 5 Ink chamber 6 Ink supply port 7 Cover plate 8 Base plate 9 Orifice

Claims (5)

[Claims] 1. A nozzle plate used in an ink jet head for ejecting ink droplets from an ink ejection hole to a recording medium is made of a carbon precursor obtained by subjecting a thermosetting resin to a thermosetting treatment at 150 to 500 ° C. Nozzle plate for an inkjet head. 2. A nozzle plate substrate comprising a furan resin,
It is molded using a thermosetting resin molding material containing a phenolic resin, a polycarbodiimide resin or a mixture thereof as a main component, and the obtained molded product is heated at 150 to 500 ° C. in air, vacuum or an inert atmosphere. A method for manufacturing a nozzle plate for an inkjet head, comprising forming an ink ejection hole after a thermosetting treatment. 3. A nozzle plate substrate comprising a furan resin,
A phenolic resin, a polycarbodiimide-based resin or a resin containing a mixture thereof as a main component is molded using a thermosetting resin molding material in which the same kind of cured resin fine powder is added and mixed, and the obtained molded product is vacuum or 150 under inert atmosphere
A method for manufacturing a nozzle plate for an ink jet head, comprising forming an ink jetting hole after a thermosetting treatment at a temperature of up to 500 ° C. 4. The thermosetting resin molding material has a water content of 1%.
A low surface tension substance having a melting point of 30 to 160 ° C. and a phenol resin composition ratio of 0.2 to 0.2% by weight are coated on the surface layer of a granular phenol resin having a thermal fluidity of 60 to 160 mm as measured by a disc cure method with a particle size of 50 μm or less. 4. The method for producing a nozzle plate for an ink jet head according to claim 2, wherein the molding material is a thermosetting resin molding material mainly composed of a granular phenol resin coated by about 5% by weight. 5. The cured resin fine powder has a water content of 1% by weight.
5. The method for producing a nozzle plate for an ink jet head according to claim 3, wherein the resin is a granular phenol resin having a particle diameter of 50 [mu] m or less and a thermal fluidity of 0 to 10 mm as measured by a disc cure method.