JPH09131871A - Ink jet head and its manufacture and ink jet apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain an ink jet head without generating warpage of a base sheet and deviation between an energy generating element and a liq. flow path and with excellent quality of printing by incorporating a carbon fiber in a resin member with the liq. flow path and a recessed part being a part of a liq. room. SOLUTION: In an ink jet head, a shape of an ink output is formed with a positive resist on a silicone base sheet 2 with an ink output energy generating means 1 and after a resin layer is formed around this with a resin raw material contg. a carbon fiber, the positive resist to be an output is washed off to form a nozzle. Namely, after two layers 7 and 8 are successively patterned on the base sheet 2, this is molded by means of a transfer molding machine to form a resin layer. Then, after the molded item is cut and an output element is separated, the two layers 7 and 8 are removed to perform preparation. As the resin being usable here, photocurable resins, thermosetting resins and ultraviolet curing resins are cited.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of forming a flow path of an inkjet head, and more particularly to the above-mentioned forming method using a resin, an inkjet head, and an inkjet apparatus equipped with the inkjet head.

[0002]

2. Description of the Related Art Generally, an ink jet head (hereinafter referred to as "head") applied to an ink jet system has an ejection port for ejecting ink, and a liquid chamber for storing the ink supplied to the ejection port. , A liquid flow path communicating the discharge port and the liquid chamber, an energy generating element provided in a part of the liquid flow path for generating energy for ink discharge, and for supplying ink to the liquid chamber from the outside Supply port is provided.

The following is known as a conventional method of manufacturing a head.

(1) A first substrate provided with an energy generating element is provided, and a discharge port, a liquid flow path and a liquid chamber are formed on a second substrate made of glass or metal by a processing means such as cutting or etching. After providing a concave portion and a supply port for communicating the liquid chamber with the outside, a second substrate is placed on the first substrate and the energy generating element and the liquid flow path are aligned by an adhesive. How to attach.

(2) A positive type or negative type photosensitive dry film is attached to a first substrate made of glass or the like provided with an energy generating element, and among the photosensitive dry film, a discharge port, a liquid flow path and A pattern corresponding to the liquid chamber is exposed or exposed by masking or exposing, and then developed to form a solid layer having a pattern corresponding to the ejection port, the liquid flow path, and the liquid chamber on the first substrate. A liquid curable material in which a curing agent is mixed is applied to the solid layer and the first substrate in an appropriate thickness and left at a predetermined temperature for a long time to cure the curable material. Next, the first substrate on which the curable material has been cured is cut at a position where a discharge port is formed to expose the end surface of the solid layer, and then the solid layer is immersed in a solvent that dissolves the curable material. A method of dissolving and removing the solid layer from the cured first substrate to provide a space for forming a liquid flow path and a liquid chamber therein (see JP-A-61-15497).

(3) A positive-type or negative-type photosensitive dry film is attached to the first substrate provided with the energy generating element, and the discharge port of the photosensitive dry film is
A pattern corresponding to the liquid flow path and the liquid chamber is exposed with a mask or exposed, and developed to provide a solid layer having a pattern corresponding to the discharge port, the liquid flow path and the liquid chamber on the first substrate.
On the solid layer and the first substrate, an active energy ray curable material that is cured by an active energy ray was applied to an appropriate thickness to provide a recess and a supply port for forming a part of a liquid chamber. A second substrate transparent to active energy rays,
On the active energy ray-curable material, the recess is aligned with the position where the liquid chamber is to be formed to form a laminated body. Then, the second substrate is masked so as to hide the portion of the active energy ray-curable material where the liquid chamber is to be formed, and the active energy ray is passed through the second substrate to the active energy ray-curable material. Irradiate and cure. Then, the active energy ray-curable material-cured laminate is cut at the position where the discharge port is formed to expose the end face of the solid layer, and then the solid layer and the uncured active energy ray-curable material are cured. A method of immersing a solid layer and an uncured active energy ray-curable material in a laminate by immersing the material in a solvent that dissolves the material and providing a space for forming a liquid flow path and a liquid chamber therein (See JP 62-253457 A).

(4) A second substrate provided with a first substrate provided with an energy generating element and, on the other hand, a discharge port plate having a recess and a discharge port and a part of the liquid chamber. The substrate (hereinafter, referred to as a grooved top plate) is formed by integral molding of resin. Then, the first substrate and the grooved top plate are pressure-bonded by an elastic member, and the sealant is poured into the gap in the joint region between the first substrate and the grooved top plate.

[0008]

All of these ink jet heads are made of an inorganic material such as silicon.
The structure is such that the member made of resin material is bonded onto the substrate of No. 1, but the linear expansion coefficient of the first substrate is different from that of the resin material. Due to the change, the head manufactured in (1) to (3) may warp the substrate, and the head manufactured in (4) may cause the concave portion of the grooved top plate to be displaced from the energy generating element. However, the print quality may be impaired. Although this problem is not so much affected when generally having about 64 to 128 ejection ports, this problem is remarkable in a so-called full line type inkjet head in which the ejection ports are provided over the entire recording area width of the recording medium. .

In any of these methods (1) to (3), the portion to be the discharge port is finally formed by cutting. However, when the resin raw material forming the nozzle portion is cured and contracted, a contraction stress remains between the first substrate and the resin. Therefore, since the member forming the lower part of the nozzle was obtained by forming a thin film on a silicon substrate, the impact at the time of cutting may cause chipping or microcracks, which may occur during ink ejection. This is the cause of the ink dripping.

Further, according to the method (1), the head having a large liquid chamber suitable for high-speed recording can be manufactured by enlarging the concave portion for forming the liquid chamber provided on the second substrate. There are advantages. However, when the first substrate and the second substrate are bonded together with an adhesive, the fine energy generating elements of the first substrate and the second substrate
It is necessary to precisely align the substrate with the fine liquid flow path, and when bonding with the adhesive, it is necessary to devise so that the adhesive does not flow into the fine liquid flow path. Therefore, the apparatus therefor becomes complicated and expensive, the mass productivity is bad, and the product cost is increased. At the same time, it is difficult to always make fine liquid flow paths uniform, which causes variations in print quality during printing.

The method (2) has an advantage of being able to solve the problem that occurs in the bonding of the first substrate and the second substrate as seen in the manufacturing method (1). However,
Since the thickness of the patterned solid layer provided on the first substrate is the height of the liquid chamber, the volume of the liquid chamber is limited by the thickness of the patterned solid layer. Therefore, the volume of the liquid chamber cannot be increased so much, and
Since the process is complicated, takes a lot of time, and the number of processes is large, there is a problem that the mass productivity is poor and the cost of the product is increased. At the same time, there is residual stress generated when the resin hardens in the cut portion of the discharge port, and cracks, chips, etc. occur during cutting, which causes variations in print quality during printing.

The method (3) has an advantage that a head having a large liquid chamber can be manufactured by enlarging a recess for forming another part of the liquid chamber provided on the second substrate. In addition, there is an advantage that a problem that occurs when the first substrate and the second substrate are attached to each other, which is found in the manufacturing method (1), can be solved. However, as in the method (2), the process is complicated and time-consuming,
Since the number of steps is more than that of the method (2), there is still a problem that mass productivity is lacking and the cost of the product is increased. At the same time, there is residual stress generated when the resin material is cured, and microcracks are formed in the protective film layer on the lower side of the discharge port cutting portion, that is, the substrate side, which causes variations in printing quality during printing.

In the head manufactured by the method (4), since the first substrate and the grooved top plate are not adhered to each other, heating and cooling are performed in the manufacturing process after the sealant applying process. Also, the expansion and contraction of the grooved top plate due to temperature changes in a storage environment may cause the sealing material to peel off, causing crosstalk between adjacent liquid channels and defective printing due to defective ejection.

The present invention has been made in view of the above-mentioned problems of the prior art. Even in a long ink jet head such as a full line type, the warpage of the first substrate, the energy generating element and the liquid flow path are caused. It is an object of the present invention to provide an inkjet head that does not cause misalignment and has excellent printing quality.

Another object of the present invention is to provide an ink jet device including at least the ink jet head and a member for mounting the head.

Still another object is that the step of precisely aligning and bonding the two substrates is not required, and the occurrence of defects such as cracks, chips and microcracks, which occur at the time of cutting, is reduced and is simple. It is an object of the present invention to provide a method for manufacturing an inkjet head suitable for mass production with a small number of steps.

[0017]

According to the present invention, there are provided an ejection port for ejecting ink, a liquid flow path communicating with the ejection port, the ink holding port, and the ejection port through the liquid flow path. A resin member having a liquid chamber communicating with the liquid chamber, energy generating means for generating energy used for ejecting the ink, a substrate having the energy generating means, and a concave portion that is a part of the liquid flow path and the liquid chamber. And an ink jet head in which the substrate and the resin member are joined to each other to form the liquid flow path, the resin member contains carbon fiber.

Further, an ejection port for ejecting ink, a liquid channel communicating with the ejection port, a liquid chamber for holding the ink and communicating with the ejection port through the liquid channel, The substrate includes an energy generating unit that generates energy used for ejecting ink, a substrate that has the energy generating unit, and a resin member that has a concave portion that is a part of the liquid flow path and the liquid chamber. In the method of manufacturing an inkjet head in which the liquid flow path is formed by joining the resin member and the resin member, the resin member is formed of a resin containing carbon fiber. provide.

Since the linear expansion coefficient of carbon fiber differs greatly in the fiber radial direction and the fiber length direction, the linear expansion coefficient at the time of curing the resin raw material falls within a desired range by including it in the resin raw material as described above. That is, the linear expansion coefficient of the silicon material used as the substrate can be adjusted to be equal to or close to the linear expansion coefficient. Therefore, when the resin layer (groove top plate) is thus formed using the resin raw material containing carbon fiber, the difference in linear expansion coefficient between the silicon substrate and the resin layer (groove top plate) is reduced. Reduced warpage of the first substrate,
Displacement between the energy generating element and the liquid flow path, cracking, chipping, microcracking, etc. during cutting for forming the discharge port are less likely to occur.

Further, by mixing the carbon fiber into the resin, the thermal conductivity of the resin also becomes large, so that the heat is easily radiated, and the warp of the first substrate due to the temperature change and the deviation between the energy generating element and the liquid flow path are further suppressed. Can be prevented.

The carbon fiber is preferably produced by a vapor phase method. The reasons are as follows. By producing the carbon fiber by the vapor phase method, the crystal of the carbon fiber becomes concentric in the length direction, and the thermal conductivity and electrostatic conductivity in the direction are improved. When the carbon fiber is mixed with the resin, the elongation of the resin can be suppressed by the crosslinking and hardening of the carbon fiber in the resin, and the coefficient of linear expansion can be made close to that of the carbon fiber. When the resin is mixed with the resin and extrusion-molded, the carbon fibers are easily oriented in the resin flow direction, so that the resin is less likely to stretch in the direction in which the carbon fibers are oriented. -To obtain the above effect, the fiber diameter of carbon fiber is 0.1.
The fiber diameter is preferably about 7 μm and the fiber length is 30 μm, and the fiber length is preferably 5.0 to 200 μm.
0 to 500 μm is the limit, especially fiber length is 500 μm
If it is present, it will be difficult to mix it with the resin.

Further, the carbon fiber of the present invention is preferably contained in an amount of 5.0 to 70% by weight based on the whole raw material of the resin member.

Referring to FIG. 1, a first method of the present invention, namely,
An ink ejection port shape should be formed on a silicon substrate having an ink ejection energy generating means with a positive resist, and a resin layer should be formed around the resin raw material containing vapor grown carbon fiber, and then the ejection port should be formed. 1 shows an example of an ejection element of an inkjet head manufactured by an inkjet head manufacturing method in which a portion of positive resist is washed away to form nozzles. 5 to 7 are views showing an example of a manufacturing process of a head having the ejection element of FIG.

That is, in the head of the present invention, as shown in FIG. 5, the first layer 7 is patterned on the substrate 2, and the second layer 8 is patterned thereon as shown in FIG. Then, it is put into a transfer mold molding machine to form a resin layer, and the obtained molded product is cut into discharge elements as shown in FIG. 7, and then the first layer and the second layer are separated. It is made by removing. In FIG. 7, 9 indicates the above resin layer.

Resins that can be used in the present invention include photocurable resins, thermosetting resins and ultraviolet curable resins. There is no particular limitation on the specific composition of these resins as long as they are generally used, but examples thereof include unsaturated urethane oligomer photosensitive resin and heavy chromium. Acid-based photoresists, polyvinyl cinnamate-based photoresists, cyclized rubber-azito-based photoresists, etc .; thermosetting resins such as epoxy resins; UV-curable resins such as acrylic resins and epoxy acrylate resins. is there.

FIGS. 8 and 9 show a second method of the present invention, that is, a first substrate provided with an energy generating element is prepared, while a concave portion which becomes a part of a liquid flow path and a liquid chamber is prepared. A grooved top plate including a discharge port plate having a discharge port and a discharge port plate is integrally formed of resin, and the first substrate and the grooved top plate are pressed and joined by an elastic member to form a first substrate. FIG. 8 shows an ejection element of an example of an inkjet head manufactured by an inkjet head manufacturing method in which a sealant is poured into a gap in a bonding region with a grooved top plate, and FIG. 8 shows an inkjet head formed by the second method. FIG. 9 is a schematic cross-sectional view of the inkjet head of FIG. 8 viewed from the ejection port side.

In FIG. 8 and FIG. 9, 11 is a silicon first substrate provided with an energy generating element, and this silicon substrate 11 is supported on a support substrate 13. Reference numeral 12 is a grooved top plate having a liquid flow path 18 and a concave portion which is a part of the liquid chamber 17, and a discharge port plate 14,
The grooved top plate 12 is formed by integral molding of resin, and the discharge port plate 14 portion of the grooved top plate 12 is irradiated with excimer laser to form the discharge port 19. Then, the silicon substrate 11 and the grooved top plate 12 are pressed and joined by the pressing spring 16 to form the liquid flow path 18 and the liquid chamber 17. Finally, an ink jet head is completed by pouring a sealant (not shown) into the gaps 10a and 10b in the joining region between the silicon substrate 11 and the grooved top plate 12.
In the figure, 12a is an ink supply port provided in the grooved top plate for supplying ink to the liquid chamber 17, and 15 is an ink supply which communicates with this ink supply port and supplies ink from an ink tank (not shown). It is a unit.

In the second method of the present invention, it is preferable to use a thermoplastic resin as the resin.
This is because the thermoplastic resin is easy to mold, and the one containing carbon fiber in the thermoplastic resin can be easily processed with an excimer laser, so the ejection port shapes can be made uniform and a highly reliable head can be obtained. This is because it can be obtained. Examples of such a resin include polyimide, polyether ketone, polysulfone, polyether sulfone, polyphenylene oxide, and polypropylene, but from the viewpoint of ink resistance, polysulfone,
Polyether sulfone, polyphenylene oxide,
Polypropylene is preferred.

2 to 4, suitable ink jet unit (IJU), ink jet head (IJH), ink jet cartridge, ink jet apparatus main body (IJRA) and carriage (H) to which the present invention is applied.
C) and the relationship between them are shown. The configuration of each part will be described below with reference to these drawings.

As shown in the perspective view of FIG. 2, the ink jet cartridge of this embodiment has an ink jet head IJ.
The shape is such that the H and the ink cartridge IK can be separated. The inkjet head IJH is an inkjet head that is fixedly supported by the carriage HC (FIG. 4) mounted on the inkjet apparatus main body IJRA and is detachable from the carriage HC.

(1) Description of Configuration of Inkjet Head IJH The inkjet head IJH performs recording by using an electrothermal converter that generates thermal energy for causing film boiling in the ink in response to an electric signal. This is a so-called bubble jet type head.

In FIG. 3, reference numeral 100 denotes an electrothermal converter (discharge heater) arranged in a plurality of rows on a Si substrate, and electric wiring such as Al for supplying electric power to the electrothermal converter, which is formed by a film forming technique. It is a heater board. Reference numeral 200 denotes a wiring board for the heater board 100, which includes wiring corresponding to the wiring of the heater board 100 (for example, is connected by wire bonding) and a pad 201 located at an end of this wiring and receiving an electric signal from the main body device. Have

Reference numeral 300 denotes an ink supply port for supplying ink to a plurality of ink flow paths, a partition for separating the ink supplied from each ink supply port, and an ink storage for supplying ink to each ink flow path. An ink supply port 30 for receiving the ink supplied from the ink cartridge IK and introducing the ink into the common liquid chamber described above by a top plate provided with a common liquid chamber for
1, having a plurality of common liquid chambers 302.

Borosilicate glass is preferable as these processed glasses, but other glasses or molding resin materials may be used. The top plate 300 and the heater board 100 are bonded with an epoxy adhesive. As this adhesive, a photo-curing adhesive, one that is cured by a combination of light and heat curing, or one that is cured by heat is used. The heater board 100 is adhered with a silicone or epoxy adhesive. As the adhesive, an adhesive having good thermal conductivity for radiating heat generated by the heater board is selected. Further, the support body 400 positions the distributor DB with three positioning holes, and heat-bonds and holds the distributor DB.

The distributor DB is provided with four ink supply nozzles and is connected to the ink cartridges IKB, IKY, IKM and IKC. There are two types of ink cartridges, one of which is integrated with three colors of IKY, IKC, and IKM, and the other of which has three different colors.

The ink cartridge can be replaced by the user. When the ink runs out, the used cartridge is removed and a new cartridge is attached. At this time, the bubbles generated between the ink supply nozzle and the ink tank are recovered by the recovery function attached to the apparatus main body IJRA, so that the printing defect can be prevented.

A filter for preventing the inflow of dust is provided in the distributor DB,
It protects against dust that flows from the ink tank. Further, a filter valve is provided in the nozzle to which the ink cartridge IKB is connected, and the structure is such that bubbles accumulated in the filter portion are easily removed during recovery.

The distributor DB is connected to the heater board by mechanically crushing and sealing the ink supply member between the ink supply member and the ink supply port, and wire bonding is performed around the connection port. The surroundings and the like are simultaneously sealed with a sealant. In this inkjet head IJH, the inkjet head IJH is fixed to the carriage HC, and the user only replaces the ink cartridge at the time when the ink is exhausted, so that variations in print quality due to replacement are avoided.

(2) General Description of Inkjet Device Main Body FIG. 4 shows an inkjet device IJR to which the present invention is applied.
In the schematic view of A, the carriage HC that engages with the spiral groove 5004 of the lead screw 5005 that rotates via the driving force transmission gears 5011 and 5009 in association with the forward and reverse rotation of the drive motor 5013 is a pin (not shown). And is reciprocated in the directions of arrows a and b.

A paper pressing plate 5002 presses the paper against the platen 5000 in the carriage movement direction. Reference numerals 5007 and 5008 denote photocouplers, which are home position detecting means for confirming the presence of the lever 5006 of the carriage in this area and switching the rotation direction of the motor 5013. 5016 is a member that supports a cap member 5022 that caps the front surface of the head.
Reference numeral 015 denotes a means for sucking the inside of the cap, which performs suction recovery of the head through the opening 5023 in the cap.

5017 is a cleaning blade,
Reference numeral 19 denotes a member that allows the blade to move in the front-rear direction, and these members are supported by the main body support plate 5018.
Needless to say, a known cleaning blade can be applied to this example other than the blade shown in the form.

Reference numeral 5012 is a lever for starting suction for suction recovery, which moves with the movement of the cam 5020 engaging with the carriage, and the driving force from the driving motor moves by a known transmission means such as clutch switching. Controlled. The capping, cleaning, and suction recovery are configured such that when the carriage comes to the home position side area, the desired processing can be performed at the corresponding positions by the action of the lead screw 5005. Any of them can be applied as long as it is operated.

[0043]

The present invention will be described below in detail with reference to examples.

Example 1 As shown in FIGS. 5 and 6, a first layer 7 was formed on a silicon substrate having an electrothermal conversion element.
The shape of the ink ejection port composed of the second layer 8 and the positive resist (Tokyo Ohka Co., Ltd. OFPR-2 or Shipley
ley) AZ-1350).

Next, as a transfer molding resin, Nitron-T8526 (molding resin manufactured by Nitto Denko Corporation) 10
Using a mixture of 0 parts by weight and 20 parts of Flep 10 (modified epoxy resin manufactured by Toraythiocol Co., Ltd.) as a base, 50% by weight of vapor grown carbon fiber VGFC (manufactured by Showa Denko KK) was added, and the transfer was performed. Molding was performed with a molding machine (FIG. 7). Then, the first layer and the second layer were washed and removed to manufacture a head having the ejection element shown in FIG.

Since the transfer resin transfer-molded with this molding resin has a different linear expansion coefficient in the fiber diameter direction and the linear expansion coefficient in the fiber length direction of the vapor grown carbon fiber, the vapor grown carbon fiber is The linear expansion coefficient of the included resin is 25 × 10 ^-6 , which is about 1/5 of the linear expansion coefficient of 105 × 10 ^-6 of the resin that does not contain vapor grown carbon fiber. Coefficient 2.4 to 4.0 × 1
It was found that the difference from 0 ^-6 was small and the residual stress after transfer molding was reduced.

Further, no peeling or breakage was observed around the ejection port of this head.

(Example 2) Polycarbonate-based carbon fiber VGF was used as a raw material for molding resin.
Molding was performed using a material containing 50% by weight of C (manufactured by Showa Denko KK) to form a grooved top plate. Then, the discharge port was formed by the excimer laser in the discharge plate part of the grooved top plate. This grooved top plate was brought into contact with a silicon substrate having an electrothermal conversion element, and pressure-bonded by a pressing spring. Finally, the sealant TSE3 is placed in the gap in the joining region between the silicon substrate and the grooved top plate.
An inkjet head was manufactured by pouring 99 black (trade name: manufactured by Toshiba Silicone Co., Ltd.) (FIG. 8).

As a result, as in Example 1, the difference in coefficient of linear expansion between the grooved top plate and the silicon substrate becomes small, the concave portion of the grooved top plate is displaced from the energy generating element, and the sealing material is peeled off. Therefore, it was not found that crosstalk between adjacent liquid flow paths or defective printing caused by defective ejection occurred.

The present invention brings excellent effects particularly in an ink jet type head and apparatus for recording by forming flying droplets by utilizing thermal energy among the ink jet type.

The typical configuration and principle are described in, for example, US Pat. Nos. 4,723,129 and 4,740.
No. 796, and the present invention is preferably performed using these basic principles. This recording method is applicable to both the so-called on-demand type and the continuous type.

To briefly explain this recording method, the electrothermal converter is arranged corresponding to the sheet or liquid path holding the liquid (ink), and the liquid (ink) corresponding to the recording information. Thermal energy is generated by applying at least one driving signal for giving a rapid temperature rise that causes a boiling phenomenon exceeding the nucleate boiling phenomenon, and film boiling is caused on the heat acting surface of the head. In this way, bubbles can be formed in a one-to-one correspondence with the drive signal applied from the liquid (ink) to the electrothermal converter, which is particularly effective for the on-demand recording method. By the growth and contraction of the bubbles, liquid (ink) is ejected through the ejection port,
Form at least one drop. When this drive signal is formed into a pulse shape, the growth and shrinkage of the bubble are immediately and appropriately performed, and therefore, the ejection of liquid (ink) having particularly excellent responsiveness can be achieved, which is more preferable. Examples of the drive signal in the form of a pulse include U.S. Pat. Nos. 4,463,359 and 4,345.
No. 262 are suitable. If the conditions described in US Pat. No. 4,313,124 of the invention relating to the rate of temperature rise on the heat acting surface are adopted, more excellent recording can be performed.

As the structure of the head, other than the structure (straight liquid flow path or right-angled liquid flow path) in which the ejection port, the liquid flow path, and the electrothermal converter are combined as disclosed in the above-mentioned specifications. In addition, as disclosed in U.S. Pat. No. 4,558,333 and U.S. Pat. No. 4,459,600, the present invention includes those having a configuration in which a heat acting portion is arranged in a bending region.

In addition, Japanese Laid-Open Patent Publication No. 123670/1984, which discloses a structure in which a common slit is used as a discharge port of a plurality of electrothermal converters, and a pressure wave of thermal energy is absorbed. The present invention is also effective in a configuration based on Japanese Patent Laid-Open No. 138461/1984 which discloses a configuration in which the corresponding opening corresponds to the ejection portion.

Further, as a head in which the present invention is effectively used, there is a full line type head having a length corresponding to the maximum width of the recording medium which can be recorded by the ink jet apparatus. The full line head may be a full line configuration formed by combining a plurality of heads as disclosed in the above specification, or a single full line head integrally formed.

In addition, by being mounted on the apparatus main body, it can be electrically connected to the apparatus main body and ink can be supplied from the apparatus main body, which is a replaceable chip type head, or integrally with the head itself. The present invention is effective even when the head of the provided cartridge type is used.

Further, it is preferable to add recovery means for the head, preliminary auxiliary means, etc. to the ink jet apparatus of the present invention because recording by the apparatus of the present invention can be made more stable. Specific examples thereof include capping means, cleaning means, pressurizing or suctioning means, an electrothermal converter or a heating element other than this, preheating means for the head, recording for the head. It is also effective to perform stable recording by adding a means for performing a preliminary ejection mode for performing ejection different from the above.

Further, the recording mode of the ink jet apparatus is not limited to the mode for recording only the mainstream color such as black, but may be one in which the head is integrally formed or a combination of a plurality of heads. The present invention is extremely effective for an apparatus provided with at least one of a multicolor of different colors or a full color by mixing colors.

In the above description, a liquid ink is used, but in the present invention, either an ink which is solid at room temperature or an ink which is in a softened state at room temperature can be used. In general, in the above-described ink jet device, the temperature of the ink itself is adjusted within a range of 30 ° C. or more and 70 ° C. or less to control the temperature so that the viscosity of the ink is in a stable ejection range. It is sufficient if the ink is in a liquid state.

In addition, the excessive temperature rise of the head or the ink due to thermal energy is positively prevented by using it as the energy of the state change of the ink from the solid state to the liquid state, or the evaporation of the ink is prevented. It is also possible to use an ink that solidifies when left as it is. In any case, such as the one in which the ink is liquefied by the application of the thermal energy according to the recording signal and is ejected as a liquid substance or the one which has already started to solidify when it reaches the recording medium,
The use of an ink that has the property of liquefying only when heat energy is applied is also applicable to the present invention.

Such an ink is disclosed in JP-A-54-568.
No. 47 or JP-A No. 60-71260, facing the electrothermal converter in the state of being held as a liquid or solid in the recesses or through holes of the porous sheet. It may be in the form.

In the present invention, the most effective one for each of the above-mentioned inks is to execute the above-mentioned film boiling method.

[0063]

As described above, according to the present invention, the warp of the first substrate and the deviation between the energy generating element and the liquid flow path do not occur, and an ink jet head having excellent printing quality can be obtained. In addition, it does not require the step of precisely aligning and bonding the two substrates, and reduces the occurrence of defects such as cracks, chips, and microcracks that occur during cutting. An inkjet head manufacturing method suitable for production is provided, and it is possible to obtain an accurate and highly reliable inkjet head having excellent printing quality, and an inkjet device including the inkjet head.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view of a discharge element in an example of a head manufactured by the first method of the present invention.

FIG. 2 is an exploded perspective view of an example of an inkjet cartridge having the head of the present invention.

FIG. 3 is a schematic perspective view schematically showing an example of the overall configuration of the head of the present invention.

FIG. 4 is a perspective view showing the structure of a typical inkjet device equipped with the head of the present invention.

FIG. 5 is a perspective view of a molded product in which a portion to be an orifice of a discharge element in the head of the present invention is formed on the first substrate.

FIG. 6 is a perspective view of a molded product in which a portion serving as a common liquid chamber is formed in the molded product of FIG.

FIG. 7 is a perspective view of transfer molding performed by using the molded product of FIG. 6 and separating each discharge element into sizes.

FIG. 8 is a schematic cross-sectional view showing an example of a discharge element of a head manufactured by the second method of the present invention.

9 is a schematic view of the inkjet head of FIG. 8 viewed from the ejection port side.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Electrothermal conversion element 2, 11 1st board | substrate 3, 19 Discharge port 4, 18 Ink flow path 5, 12a Ink supply port 6 Transfer resin 7 1st layer (resist) 8 2nd layer (resist) 9 resin Layer 12 Groove Top Plate 13 Support Substrate 14 Discharge Port Plate 16 Presser Spring 100 Heater Board 200 Electric Wiring Board 201 Pat 300 Top Plate 301 Ink Supply Port 302 Common Liquid Chamber 303 Si Substrate 400 Base Plate

Claims (18)

[Claims] 1. An ejection port for ejecting ink, a liquid flow path communicating with the ejection port, a liquid chamber for holding the ink and communicating with the ejection port via the liquid flow path, An energy generating means for generating energy used for ejecting ink, a substrate having the energy generating means,
An ink jet head comprising: the liquid flow path and a resin member having a concave portion that is a part of a liquid chamber; and the liquid flow path formed by joining the substrate and the resin member, wherein the resin member is An ink jet head containing carbon fiber. 2. The ink jet head according to claim 1, wherein the carbon fiber is manufactured by a vapor phase method. 3. The carbon fiber has a fiber diameter of 0.1 to 1.0.
The inkjet head according to claim 1, wherein the fiber length is 5.0 μm and the fiber length is 5.0 to 200 μm. 4. The ink jet head according to claim 1, wherein the carbon fiber is contained in an amount of 5.0 to 70% by weight based on the entire raw material of the resin member. 5. The resin forming the resin member is any resin selected from the group consisting of a photocurable resin, a thermosetting resin and an ultraviolet curable resin. The inkjet head according to item 1. 6. The ink jet head according to claim 1, wherein the resin forming the resin member is a thermoplastic resin. 7. The electrothermal converter, wherein the energy generating means generates heat by applying electric energy to generate a state change in the ink to generate energy used for ejecting the ink. The inkjet head according to claim 6. 8. The inkjet head according to claim 1, wherein the ejection port is provided over the entire width of the recording area of the recording medium, which is a full line type. 9. An ink jet device comprising at least the ink jet head according to claim 1, and a member for mounting the head. 10. An ejection port for ejecting ink, a liquid channel communicating with the ejection port, a liquid chamber for holding the ink and communicating with the ejection port through the liquid channel, An energy generating means for generating energy used for ejecting ink, a substrate having the energy generating means,
A method of manufacturing an inkjet head, comprising: a resin member having a concave portion that is a part of the liquid flow path and a liquid chamber, wherein the liquid flow path is formed by bonding the substrate and the resin member together, A method for manufacturing an inkjet head, wherein the resin member is formed of a resin containing carbon fiber. 11. The method of manufacturing an inkjet head according to claim 10, wherein the carbon fiber is manufactured by a vapor phase method. 12. The carbon fiber has a fiber diameter of 0.1 to 1.
The method for producing an inkjet head according to claim 10, wherein the fiber length is 0 μm, and the fiber length is 5.0 to 200 μm. 13. The method for manufacturing an inkjet head according to claim 10, wherein the carbon fiber is contained in an amount of 5.0 to 70% by weight based on the entire raw material of the resin member. 14. The resin forming the resin member is any resin selected from the group consisting of a photocurable resin, a thermosetting resin and an ultraviolet curable resin. Item 1. A method for manufacturing an inkjet head according to item 1. 15. The resin forming the resin member is a thermoplastic resin, according to any one of claims 10 to 13.
Item 14. The method for producing an ink jet head according to item 8. 16. A pattern layer to be the liquid flow path and a liquid chamber is formed on the substrate with a soluble resin, and the pattern layer is coated with a resin containing carbon fibers and cured, and then the pattern layer is formed. The method for manufacturing an inkjet head according to claim 10, wherein the resin member is formed by removing a resin. 17. The resin member is formed by molding a resin containing carbon fiber.
The method for manufacturing an ink jet head according to any one of the above items. 18. The discharge port is formed by cutting the resin containing the carbon fiber and the liquid flow path portion of the substrate before removing the pattern layer, and then removing the pattern layer. 16. The method for manufacturing an inkjet head according to item 16.