JPH11112269A - In-package support structure for piezoelectric vibrator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an in-package support structure for the piezoelectric vibrator whose reliability is enhanced, by effectively preventing deficiency of a support strength in the middle of a vibrator raw substrate that is a defect having been caused in a conventional piezoelectric device package where a lower face of one end of the piezoelectric vibrator raw substrate is supported in a cunti- lever state and a pillow member is placed opposite to the other free end lower face in a contactless state, that is, a damage in the middle of the vibrator raw substrate resulting from external shock and vibration or a frequency deviation resulting from amplitude displacement. SOLUTION: In the support structure of the piezoelectric vibrator 21 where one end lower face of the piezoelectric vibrator having an exciting electrode on both front and rear sides of the piezoelectric raw substrate is horizontally supported in a cunti-lever state by an upper face of a support electrode 22 projected to a bottom side in an air-tightly sealed package, a pillow member 25 is projected to an in-package bottom face 20 equivalent to a middle part between one end and the other end of the piezoelectric vibrator supported by the upper support electrode.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in a structure for supporting a piezoelectric vibrator in a package, and more particularly to a piezoelectric vibrator plate supported in a cantilevered state in a package, which is damaged or damaged by external shock or the like. The present invention relates to a structure for supporting a piezoelectric vibrator in a package, which can effectively prevent displacement and improve the reliability of a piezoelectric device.

[0002]

2. Description of the Related Art A piezoelectric device such as a crystal oscillator has a structure in which a piezoelectric vibrator in which an excitation electrode is formed on a piezoelectric element such as a crystal element and a circuit thereof are hermetically sealed in a package made of an insulating material. Have. 4 (a) and 4 (b) are an exploded perspective view showing a package structure of a conventional piezoelectric device and a longitudinal sectional view of a completed product. The flat package shown in FIG. Of a ceramic package body 1, a cap 2 for closing an upper surface opening thereof, and a conductive pad 4 formed on a shelf (holding electrode) 3 in the package body. And a circuit board (not shown) disposed in an appropriate position in the package. The reason why the quartz crystal plate 5 is supported in a cantilever state is that it is advantageous in terms of impact resistance and aging characteristics as compared with the case where both ends of the quartz crystal plate are bonded and fixed, and has high accuracy and high reliability. This is because it is effective in obtaining a device. Excitation electrodes 6 are formed symmetrically on the upper and lower surfaces of the quartz crystal plate 5 by a vapor deposition method, and connection pads 7 drawn from one end of each excitation electrode 6 to the edge of the base plate 5 correspond to side vapor deposition portions. The connection pad 8 extends to the rear side through the connection. A device in which an excitation electrode is formed on a quartz plate (piezoelectric plate) is referred to as a quartz oscillator (piezoelectric oscillator).

A pillow member 10 is arranged on the bottom surface of the package facing the shelf 3, and a slight gap is formed between the upper surface of the pillow member 10 and the lower surface of the other end of the crystal plate 5. The pillow member 10 is used for suppressing damage to the piezoelectric vibrator, which is likely to be generated when an impact is applied from the outside, and damage due to large deformation, thereby preventing deterioration in characteristics. That is, the crystal blank 5
When the pillow member 10 facing the lower surface of the front end of the crystal plate 5 is not present, the front end of the cantilevered quartz crystal plate 5 largely swings in the plane direction due to external impact or vibration, and is adhered and fixed on the shelf 3. The end of the base plate may be broken or the part may be damaged, causing a change in characteristics.
By arranging 0, the deformation range of the front end of the raw plate is regulated, so that the above-mentioned problem can be prevented to some extent.
When assembling the quartz crystal plate 5 in the package having the above configuration, as shown in (b), the connection pad 8 on the lower surface of the quartz crystal plate is faced on the conduction pad 4 on the upper surface of the shelf 3. And electrically and mechanically connected by the conductive adhesive 9. After that, the opening of the package body was closed by the cap 2 to hermetically seal the quartz crystal plate.

[0004]

As described above, in the conventional structure for supporting a piezoelectric vibrator in a package, one end of the piezoelectric vibrator base plate having one end supported in a cantilever state is provided below the other end of the free end of the piezoelectric vibrator base plate. The pillow member is placed in non-contact,
This pillow member is used exclusively to prevent damage to one end (adhered and fixed portion by the shelf 3) due to large deformation of the piezoelectric vibrator due to vibration and characteristic fluctuation (frequency shift) due to damage to the electrode portion in which vibration energy is confined. I was However, the moment when the vibrator oscillates in the plane direction due to an impact or the like has a large value with the one end fixed on the shelf 3 as a fixed point. Even if the range is restricted, there is no restriction on the central part of the vibrator, so that when the impact is large, breakage at the central part and characteristic fluctuation due to damage at the central part are likely to occur. As a result, problems such as a decrease in the durability of the piezoelectric device and deterioration of the characteristics have occurred. In addition, since the center of the vibrator is a region where the vibration energy is confined, even if the vibrator returns to its original shape and operates normally after deformation due to impact, the frequency shift occurs at the moment when amplitude displacement occurs. Will be. When such a piezoelectric device is used for a receiver such as a pager to ensure frequency synchronization of each channel, a deviation occurs in a set channel due to frequency fluctuation due to an impact applied during use of the pager. Once the frequency deviates, it takes a long time to re-synchronize, resulting in the receiver being prevented from operating properly.

The problem to be solved by the present invention is to provide a conventional piezoelectric device in which a lower surface of one end of a piezoelectric vibrator is supported in a cantilever state, and a pillow member is arranged opposite to the lower surface of the other end of the free end in a non-contact state. Insufficient support strength at the center of the vibrator, which is a problem that has occurred in the package, effectively preventing damage to the center of the vibrator base plate due to external impact and vibration, and frequency deviation due to amplitude displacement Accordingly, an object of the present invention is to provide a support structure in a package of a piezoelectric vibrator which can improve reliability.

[0006]

In order to achieve the above object, a first aspect of the present invention is to provide a piezoelectric vibrator having excitation electrodes on both front and back surfaces of a piezoelectric element, wherein a lower surface of one end of the piezoelectric vibrator is hermetically sealed in a package. In a support structure of a piezoelectric vibrator horizontally supported in a cantilever state by an upper surface of a holding electrode protruding from a bottom surface, a package corresponding to an intermediate portion between one end and the other end of the piezoelectric vibrator supported by the holding electrode. A pillow member protrudes from the inner bottom surface. The invention according to claim 2 is characterized in that the upper surface of the pillow member and the lower surface of the intermediate portion of the piezoelectric vibrator are in a non-contact state. The invention according to claim 3 is characterized in that the lower surface of the intermediate portion of the piezoelectric vibrator is contacted and supported by the upper surface of the pillow member. According to a fourth aspect of the present invention, two of the pillow members are provided at predetermined intervals along the width direction of the piezoelectric vibrator, and each pillow member is located at a position corresponding to both ends in the width direction of the piezoelectric vibrator. Are arranged so as to be able to contact each other. The invention according to claim 5 is characterized in that the upper surface of each pillow member is a flat surface. The invention according to claim 6 is characterized in that both of the upper surfaces of the two pillow members are inclined surfaces which are inclined upward from the inside to the outside in the width direction of the piezoelectric vibrator. Claim 7
The present invention is characterized in that the interval between the two pillow members is set shorter than the width of the piezoelectric vibrator in the width direction.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail based on an embodiment shown in the drawings. FIGS. 1A, 1B and 1C are a front longitudinal sectional view, a plan view, and an AA sectional view of a main part showing a support structure of a piezoelectric vibrating element plate according to an embodiment of the present invention. FIG. 4 is a diagram illustrating the structure of the bottom plate portion of the package as shown in FIG. In this package, a piezoelectric vibrator 21 such as a crystal vibrator is supported in a cantilevered state on the upper surface of the bottom plate 20 (the inner bottom surface of the package). Thus, two protruding holding electrodes 22 are protruded, and the lower surface of one end of the piezoelectric vibrator 21 is bonded and fixed to the flat upper surfaces of both the holding electrodes 22 using a conductive adhesive 23. Further, on the upper surface of the bottom plate 20, two pillow members 25 having a flat upper surface are spaced apart from each other by a predetermined width direction at a position corresponding to a longitudinal center portion of the piezoelectric vibrator 21 supported in a cantilever state. It is protruding. As a result, each pillow member 25
The upper surface of the piezoelectric vibrator faces the center of the bottom surface (both edges in the width direction) of the piezoelectric vibrator in a non-contact manner or is supported in a contact state. The quartz vibrator has excitation electrodes formed on both sides of a piezoelectric vibrator base plate (piezoelectric plate), and leads similar to the piezoelectric vibrator shown in the above description of the prior art. Are individually connected to an electrode pad or the like provided on the holding electrode 22.

The distance L between the pillow members 25 is set shorter than the width (short side length) of the piezoelectric vibrator 21 and the contact area between the upper surface of the pillow member and the bottom of the piezoelectric vibrator is made as small as possible. The pillow member 25 of the present invention may be arranged so as to be opposed to the bottom surface in the longitudinal direction center of the horizontally supported piezoelectric vibrator so as to be in non-contact, and to allow free vibration of the piezoelectric vibrator. And may be brought into contact. Further, while intentionally holding the upper surface of the pillow member 25 in non-contact with the bottom surface of the piezoelectric vibrator, due to the amount of the conductive adhesive 23 supporting one end of the piezoelectric vibrator, When the adhesive 23 solidifies, the bottom surface of the piezoelectric vibrator may come into contact with the top surface of the pillow member, but usually there is no adverse effect on the characteristics. Also, if you want to positively contact the top of the pillow member with the bottom of the piezoelectric vibrator,
A small amount of adhesive may be applied to the contact portion between the two to prevent separation. The height of the upper surface of the pillow member 25 is
When the upper surface is separated from the bottom of the piezoelectric vibrator, the height is preferably lower than the height of the upper surface of the holding electrode 22, and when both are positively contacted, the height is equal to or higher than the upper surface of the holding electrode. Set higher. When a conductive adhesive is interposed between the lower surface of one end of the piezoelectric vibrator and the upper surface of the holding electrode, the height of the pillow member 25 is adjusted in consideration of an increase in the height position of the piezoelectric vibrator. Set.

In this case, a conventional pillow member need not be provided on the bottom plate corresponding to the lower surface of the free end of the piezoelectric vibrator, but may be provided. For example, in the case where the piezoelectric vibrator portion on the distal end side of the pillow member is largely deflected, the conventional pillow member effectively functions to prevent large deformation of the distal end portion. When one end of the piezoelectric vibrator is fixed on the holding electrode 22 using the conductive adhesive 23,
Due to the nature of the conductive adhesive, the piezoelectric vibrator cannot be supported horizontally when uncured at the beginning of bonding, and as a result, the piezoelectric vibrator rests on the pillow member. Since it contracts during the curing process, it is lifted upward with one end on the bonding side as a fulcrum, and finally assumes a horizontal posture. The lifting angle of the piezoelectric vibrator in this case varies depending on the amount of the conductive adhesive applied, and so on, depending on whether the top surface of the pillow member and the bottom surface of the piezoelectric vibrator are to be kept in non-contact or in a contact state. It is necessary to make the application amount different. That is,
When it is desired to adjust the lifting amount, it is necessary to appropriately adjust the relationship between the amount of the conductive adhesive applied and the height of the pillow member. In particular, when adopting a supporting method of positively contacting the top surface of the pillow member with the bottom surface of the piezoelectric vibrator, if it is not possible to avoid lifting of the vibrator due to curing of the conductive adhesive, the conductive adhesive may be used. It would be effective to bond the pillow member upper surface and the piezoelectric vibrator bottom surface with a small amount of adhesive after curing.

FIGS. 2A and 2B are diagrams comparing the effect of the support structure of the present invention with the effect of the conventional support structure.
When the pillow member 25 that supports the lower surface of the piezoelectric vibrator in the non-contact state or the contact state is provided as in the present invention shown in (a), the case of the conventional example shown in (b) is used. Compared to
Since the amplitude displacement of the free-end-shaped piezoelectric vibrator tip is effectively regulated (t1 <t2), weakness of the supporting strength of the central part of the piezoelectric vibrator, which is a drawback of the conventional example, and breakage due to the weakness, Frequency variation due to amplitude displacement can be effectively prevented.
In particular, when the pillow member is configured to be in non-contact with the bottom surface of the piezoelectric vibrator at all times and to come into contact with the bottom surface of the piezoelectric vibrator only when the vibrator vibrates downward due to external stress, Since there is no possibility that free vibration of the oscillation frequency is hindered, it is possible to cope with specifications that require high accuracy and high stability of the oscillation frequency. In this embodiment, in order to prevent as much as possible the occurrence of vibration energy leakage due to the contact between the widthwise edge of the piezoelectric vibrator and the upper surface of the pillow member, the contact area when the two are in contact is made as small as possible. It is effective to approach the line contact. Next, when the upper surface of the pillow member, which is a flat surface, is always in surface contact with the lower surface of the edge in the width direction of the vibrator, there is a concern that the frequency of the vibrator may be adversely affected. That is, the upper surface of the pillow member is always in surface contact with a part of the region (the vibrating portion) where the excitation electrode for confining the vibration energy is present, and vibration energy leakage therefrom occurs. In other words, when the piezoelectric vibrator and the pillow member come into surface contact with each other in the vibrating portion, the contact area becomes large and leakage of vibration energy occurs, but when the contact area is very small such as line contact or point contact, Vibration energy leakage is negligibly small. However, since it is difficult to secure the stability of mechanical support in point contact, it is preferable to support in a line contact state.

The second embodiment of the present invention shown in FIGS. 3 (a), 3 (b) and 3 (c) is based on such considerations, and the upper surfaces of the two pillow members are tapered. The configuration is characterized in that the piezoelectric vibrator and the widthwise edge (non-vibration portion) of the piezoelectric vibrator are supported in line contact with each other. Also in this embodiment, the bottom surface of the piezoelectric vibrator and the top surface of the pillow member are always in non-contact with each other, and only when the piezoelectric vibrator swings in the plane direction, the intermediate portion is supported by the top surface of the pillow member. Needless to say, such a configuration is effective. However, the shape of the upper surface of the pillow member in this embodiment exerts extremely great effectiveness in preventing energy leakage in a type that is always in contact with the bottom surface of the piezoelectric vibrator. That is, FIG.
(B) is a plan view thereof, (c) is a BB cross-sectional view thereof, and a supporting structure of the piezoelectric vibrator of this embodiment is formed on an upper surface of a package bottom plate 20. In order to support the piezoelectric vibrator 21 such as a crystal vibrator in a cantilever state on the bottom surface in the package, two protruding holding electrodes 2 are provided at predetermined positions in the width direction at appropriate positions near one end of the bottom plate 20.
2 is protruded and the lower surface of one end of the piezoelectric vibrator 21 is adhered and fixed to the flat upper surface of both holding electrodes 22 using the conductive adhesive 23, which is equivalent to the above embodiment. This embodiment is different from the above-described embodiment in that a flat surface whose upper surface is inclined at the same angle toward the inside in the width direction is provided on a bottom plate corresponding to the longitudinal center portion of the piezoelectric vibrator 21 supported in a cantilever state. In this configuration, two pillow members 30 are protruded at a predetermined interval in the width direction to support the center portions (non-vibration portions) of both ends in the width direction of the piezoelectric vibrator in a line contact state.

The inclination direction of the upper surface 30a of each pillow member 30 is as follows.
As shown in FIG. 3 (b), the direction of inclination is downward toward the inside in the width direction (short side) of the crystal unit 21, and the upper surface inclination angle of both pillow members and the area of the upper surface 30a are set to be equal. ing. Also, both pillow members 30 are provided with respective inclined surfaces 30.
By a, both ends in the width direction of the crystal unit 21 in the cantilever state are held in line contact. Therefore, similarly to the case of the first embodiment, the distance L between the pillow members is
Set to be narrower than the width of the crystal unit in the width direction. With this configuration, it is possible to prevent large deformation of the piezoelectric vibrator in the plane direction when an impact is applied by receiving the pillow member 30 located at the center of the piezoelectric vibrator. It does not affect the main surface vibrating part. That is, it is possible to effectively prevent a frequency shift due to an instantaneous amplitude displacement at the time of occurrence of an impact, and secure stable oscillation. In addition, since the contact portion between the pillow member 30 and the piezoelectric vibrator is a line contact, and the widthwise edge of the piezoelectric vibrator is a non-vibrating portion that does not participate in vibration, it is possible to effectively prevent leakage of vibration energy. , Reliability can be prevented from lowering. The height of the upper surface 30a of each pillow member 30 is
The height of the lower edge of Oa is set in advance so as to be equal to or higher than the upper surface of the holding electrode 22.
In other words, the height of the middle portion of the piezoelectric vibrator held by being in contact with the upper surface of the pillow member 30 does not become lower than the height position of one edge fixed on the holding electrode 22 by the adhesive. Thus, the height of the upper surface of the pillow member may be set. Further, even when supporting the piezoelectric vibrators having different lengths in the width direction, if the distance L between the pillow members is smaller than the length in the width direction of the piezoelectric vibrator, the width direction edge of the piezoelectric vibrator must be surely set. It can be received by the inclined surface 30a, and stable oscillation at the time of impact can be secured.

As described above, according to each embodiment of the present invention,
The moment when the vibrator oscillates in the plane direction due to an impact or the like is not a large value having a fixed point at one end portion bonded and fixed on the holding electrode 22, but a small moment having a fixed point at a central portion where the pillow members 25 and 30 are in contact. This pillow member 2
While the elements 5 and 30 regulate the range of the downward swing of the vibrator tip so as to be small, they also serve as means for effectively preventing damage to the central part of the vibrator. There is no breakage at the center and no characteristic fluctuation due to damage at the center. As a result, problems such as a decrease in the durability of the piezoelectric device and deterioration of the characteristics can be prevented. Conventionally, even if the vibrator is not damaged by impact, the oscillation frequency fluctuates due to instantaneous deformation,
Even if the vibrator returns to its original shape and operates normally, the moment when the amplitude displacement occurs, a frequency shift has occurred, causing various problems, but according to the present invention, the pillow Since the deformation of the portion of the piezoelectric vibrator located on the tip end side of the members 25 and 30 due to the impact can be extremely slightly suppressed, such a problem is eliminated. That is,
Even when a piezoelectric device is used for a receiver such as a pager, for example, to ensure frequency synchronization of each channel, there is no frequency fluctuation due to an impact applied during use of the pager, so a deviation may occur in a set channel. Disappears.
Therefore, it is possible to effectively prevent a situation in which once the frequency is shifted, it takes a long time to re-establish the synchronization, and as a result, the normal operation of the receiver is prevented. In particular, by always keeping the pillow member in a non-contact state with the piezoelectric vibrator, free vibration at all times can be guaranteed, and high frequency stability can be maintained.

Further, in the first embodiment, the flat upper surface of the pillow member and the widthwise edge of the central portion of the piezoelectric vibrator are in surface contact with each other, thereby securely supporting the central portion of the piezoelectric vibrator. It is possible to effectively prevent breakage, damage, and amplitude displacement due to deformation of the tip. If the area of the surface contact is made as small as possible to prevent the leakage of vibration energy from the vibrating portion of the piezoelectric vibrator, the stability of the oscillation frequency can be ensured, so that a practical piezoelectric device is provided. be able to. Next, in the second embodiment, when supporting the center portion of the piezoelectric vibrator close to the vibrating portion with two pillow members, the widthwise edge of the piezoelectric vibrator is line-contacted by the upper surface inclined inward. Since the vibration energy is supported, leakage of vibration energy can be more effectively prevented.
Therefore, the support structure of this embodiment can be applied to a piezoelectric device having a higher requirement for stability of the oscillation frequency. In the above embodiment, an example is shown in which a protruding holding electrode and a pillow member are protruded on a flat package bottom plate. However, this is an example, and therefore, for example, as shown in the conventional example of FIG. The present invention can be applied to a package having a structure in which a shelf and a pillow member are formed at an appropriate position on the bottom plate by forming a recess at the center of the bottom plate.
In this case, in order to prevent a short circuit between the electrode pads on one shelf due to the conductive adhesive, metallize tungsten as a base for both pads to raise the bulk and form a groove between both pads. Is preferred.

[0015]

According to the first aspect of the present invention, the lower end of one end of the piezoelectric vibrator having the excitation electrodes on both the front and back surfaces of the piezoelectric element plate is projected from the inner bottom surface of the hermetically sealed package. In the support structure of the piezoelectric vibrator supported in a cantilever state by the upper surface of the piezoelectric vibrator, a pillow member protrudes from a bottom surface in the package corresponding to an intermediate portion between one end and the other end of the piezoelectric vibrator supported by the holding electrode. According to the second and third aspects of the present invention, the lower surface of the intermediate portion of the piezoelectric vibrator is supported by the upper surface of the pillow member while the upper surface of the pillow member and the bottom surface of the piezoelectric vibrator are not in contact with each other or in a contact state. When the vibrator oscillates in the plane direction due to impact or vibration, the fixed point of the moment is not located at one end of the vibrator but at the center.
It is possible to effectively prevent the oscillation frequency from becoming unstable due to the amplitude displacement of the tip portion rather than the pillow member, as well as the breakage or damage of the vibrator due to impact or vibration. Therefore, when synchronizing each channel based on the oscillation frequency of the piezoelectric device in various devices using the piezoelectric device having the package structure, for example, a pager, etc., the deviation of the channel due to the deviation of the frequency may be reduced. Can be prevented.

According to the fourth aspect of the present invention, two pillow members provided at predetermined intervals in the width direction of the piezoelectric vibrator are respectively positioned at positions corresponding to both widthwise edges of the piezoelectric vibrator. Since the contact portions are arranged so as to be in contact with each other, the contact area between the piezoelectric vibrator and the pillow member can be reduced as much as possible, and the center portion of the vibrator can be supported to eliminate the above-mentioned problems caused by impact and vibration. According to the fifth aspect of the present invention, since the upper surface of each of the pillow members is a flat surface, the central portion of the vibrator can be stably supported in a substantially horizontal posture, and the stability of the characteristics is maintained. be able to. According to the invention of claim 6, since the upper surfaces of the two pillow members are both inclined surfaces that are inclined upward from the inside to the outside in the width direction of the piezoelectric vibrator, both end edges in the width direction of the piezoelectric vibrator. Can be supported in a line contact state. For this reason, it is possible to effectively prevent leakage of vibration energy from the vibrating portion where the excitation electrode is formed. According to the invention of claim 7, the interval between the two pillow members is set shorter than the width of the piezoelectric vibrator in the width direction. A piezoelectric device can be configured using packages of the same size, even if they are of the same size.

[Brief description of the drawings]

FIGS. 1 (a), 1 (b) and 1 (c) are a front longitudinal sectional view, a plan view, and an AA sectional view of a main part showing a support structure of a piezoelectric vibrator according to an embodiment of the present invention.

FIGS. 2A and 2B are diagrams for explaining the effect of the present invention by comparison with a conventional example.

FIGS. 3 (a), (b) and (c) are a front view, a plan view and a BB cross-sectional view of a main part of a second embodiment of the present invention.

4A is an exploded view of a conventional package structure, and FIG. 4B is a longitudinal sectional view.

[Explanation of symbols]

Reference Signs List 20 bottom plate, 21 piezoelectric vibrator, 22 holding electrode, 23
Conductive adhesive, 25, 30 Pillow members.

Claims (7)

[Claims] 1. A lower surface of one end of a piezoelectric vibrator having excitation electrodes on both front and back surfaces of a piezoelectric element plate is horizontally supported in a cantilevered state by an upper surface of a holding electrode protruding from an inner bottom surface of a hermetically sealed package. A support structure for a piezoelectric vibrator, wherein a pillow member protrudes from a bottom surface in a package corresponding to an intermediate portion between one end and the other end of the piezoelectric vibrator supported by the holding electrode. Support structure inside the package. 2. A support structure in a package of a piezoelectric vibrator, wherein an upper surface of the pillow member and a lower surface of an intermediate portion of the piezoelectric vibrator are in a non-contact state. 3. A supporting structure in a package of a piezoelectric vibrator, wherein an upper surface of the pillow member supports and contacts a lower surface of an intermediate portion of the piezoelectric vibrator. 4. The pillow member is provided two at a predetermined interval along the width direction of the piezoelectric vibrator, and each pillow member is located at a position corresponding to both ends in the width direction of the piezoelectric vibrator. 4. The support structure in a package of a piezoelectric vibrator according to claim 1, wherein the support structure is arranged so as to be in contact with the piezoelectric vibrator. 5. The support structure in a package of a piezoelectric vibrator according to claim 1, wherein an upper surface of each of said pillow members is a flat surface. 6. An upper surface of each of the two pillow members is an inclined surface which is inclined upward from the inside to the outside in the width direction of the piezoelectric vibrator.
Or a supporting structure in a package of the piezoelectric vibrator according to 4. 7. The piezoelectric vibrator according to claim 2, wherein an interval between the two pillow members is set shorter than a length of the piezoelectric vibrator in a width direction. Support structure inside the package.