JPH1110497A - Thin workpiece holding device which employs static pressure mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a thin workpiece holding device having a drive mechanism which does not necessitate a carrier to hold a workpiece even if the workpiece is a thin workpiece having a thickness of 1 mm or less and does not cause dust when the workpiece is driven and rotated. SOLUTION: Both faces of a part of a thin workpiece 2 are held by a thin workpiece holding device having a hydrostatic pad part 4. The thin workpiece 2 is rotated by a rod 5 rotated by a drive source 6. A part of the workpiece 2 on thin side which protrudes from the thin workpiece hold device in this holding condition is inserted between double head grinding grindstones constituted by facing open sides of two cup type grindstones 1 to feed in both cup type grindstones 1 in the direction in which the thin workpiece 2 exists for grinding.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for holding a thin work when the thin work is applied to a processing apparatus for processing both surfaces of a thin work, for example, a thin work such as glass of an optical component or a semiconductor silicon wafer. In particular, the present invention relates to a thin work holding device when applied to a grinding device having a double-headed grinding wheel.

[0002]

2. Description of the Related Art Conventionally, as a technique for holding and inserting a work into a grinding machine having a double-headed grinding wheel, there has been known a method in which a work is fixed with a carrier thinner than the work and held and inserted between the double-headed grinding wheels of the grinding machine. ing. Such a work holding and inserting method includes a through feed method which is used when holding and inserting a simple shaped part such as a bearing and a piston ring and grinding, and an irregular shaped such as a connecting rod, a roller and a cross pin. Rotary carrier system that holds and inserts and grinds small items,
A gun feed method is used for grinding both sides of a specially shaped object such as a brake disc or a part of a workpiece, and a swing arm method is used for double side grinding of a part with a complicated shape such as a cross pin or a part of a workpiece. Was.

However, in these work holding / inserting methods, a carrier for fixing the work must be made thinner even for a work having a work thickness of less than 1 mm. It did not work and it was difficult to produce such a thin carrier.

On the other hand, a method is known in which a workpiece is sandwiched between roller-type retainers made of a softer material, and the rollers of the retainer are driven automatically by a motor or the like to drive the workpiece to perform grinding. . However,
In the method in which the work is sandwiched by the roller type retainer, since the roller is softer than the work, the roller is worn,
There is a problem that dust is remarkably generated and cannot be used in a clean room environment where contamination is remarkably disliked. Further, in this method, there is a problem that the work is likely to be distorted by the pressure of the roller.

[0005]

SUMMARY OF THE INVENTION Accordingly, the present invention is directed to a thin work having a thickness of 1 mm or less, which does not require a carrier for holding the work, and furthermore, when the thin work is driven and rotated, dust is generated. It is an object of the present invention to provide a thin work holding device having a drive mechanism that is free from occurrence.

[0006]

SUMMARY OF THE INVENTION In order to solve the above problems, the present invention is a thin work holding apparatus having a static pressure pad portion capable of holding both surfaces of a thin work. .

Further, the present invention is characterized in that it has a rotary drive device capable of rotating the thin work held by the thin work holding device. The rotary drive device may be a rotary rod that drives the periphery of a thin work made of a disk into contact.

In a preferred embodiment of the thin work holding apparatus of the present invention, the open end face is a flat grinding operation surface.
A double-sided grinding wheel is configured by facing the open sides of the cup-shaped grinding wheels, and the double-sided grinding wheel is arranged so that in-feed or out-feed can be performed in the direction in which the thin work exists.
In addition, the thin work holding device is applied to a grinding device in which the double-headed grinding wheel is configured to be rotatable so that a thin work is applied.

[0009]

BRIEF DESCRIPTION OF THE DRAWINGS FIG.
An example in which the present invention is applied to a grinding device having a double-head grinding wheel will be described below. 1 and 2 schematically show a thin work holding device applied to a grinding device having a double-headed grinding wheel. FIG. 1 is a side sectional view, and FIG. 2 is a front view.

Reference numeral 1 denotes a cup-type grindstone, and an end surface on the open side of the cup shape is a flat grinding operation surface 7. Two cup-shaped grindstones 1 are paired, and the open sides face each other to form a horizontal double-headed grindstone. The double-headed grinding wheel is held by a moving device (not shown) so that the distance between the grinding operation surfaces 7 can be adjusted, and has a driving device that can cut into the thin work 2. Thus, a grinding device capable of grinding both surfaces of the thin work 2 is formed. The above-described grinding apparatus is suitable for grinding a thin work that requires grinding on both sides.

Reference numeral 3 denotes a work holder for holding the thin work 2. A static pressure pad portion 4 for holding the thin work 2 is provided on both inner surfaces of the work holder 3. The static pressure pad section 4 is configured to hold both surfaces of the thin work 2 at a fluid pressure by supplying a fluid such as a liquid or a gas as a lubricant under pressure.

Since the liquid has a higher heat capacity than the gas, the liquid can efficiently absorb and remove the heat generated during the grinding, and therefore minimize the thermal distortion of the thin work 2. It is preferably used for In particular, the grinding fluid used for grinding the workpiece is most suitable for the fluid applied to the hydrostatic pad portion 4, and is suitable for minimizing distortion due to viscosity, workpiece, and processing heat. Water is also a preferably used fluid.

In a grinding apparatus having a horizontal double-headed grinding wheel, the diameter of the thin work 2 is usually reduced to 1/2 or less than the diameter of the cup-shaped grinding wheel 1 so that grinding can be efficiently performed. Can be performed. The work holder 3 includes a rod 5 for rotating the thin work 2 held by the static pressure pad portion 4 by friction, and a driving source 6 for the rod 5.
Is provided.

The operation of the grinding device having the thin work holding device using the static pressure mechanism of the present invention will be described. Both surfaces of a part of the thin work 2 are held by the static pressure pad portion 4 of the holder, and the thin work 2 is rotated in contact with a rod 5 driven and rotated by a servo motor as a drive source 6. Since the holding of the rotated thin work 2 is performed by the static pressure pad portion 4, the friction applied to the holding of the thin work 2 is extremely small, and therefore, the thin work 2 can be rotationally driven with a small driving force. Become. Next, a part of the thin work 2 that is rotating and protruding from the thin work holding device is inserted between the cup-shaped grindstones 1 of the double-headed grinding wheel, and then the cup-shaped grindstones 1 are thinned. By infeeding in the direction in which the work 2 exists, the grinding operation surface 7 is brought into contact with the thin work 2 and both surfaces of the thin work 2 are simultaneously ground.

Double cup type grinding wheel 1 constituting double-head grinding wheel
May be the same or opposite directions. In addition, by rotating the thin work 2 by the rod 5 during grinding, the thin work can be uniformly ground.

[0016]

The thin work holding apparatus of the present invention does not require a carrier for holding a thin work having a thickness of 1 mm or less.

The thin work holding device of the present invention has a drive mechanism that does not cause generation of dust when driving and rotating the thin work.

The thin work holding device of the present invention uses a hydrostatic pad as a thin work holding mechanism.
Since the rigid member can hold the thin work without any contact, the friction of the holding mechanism of the thin work becomes extremely small, and therefore, the thin work can be rotationally driven with a small driving force.

[Brief description of the drawings]

FIG. 1 is a side sectional view schematically showing a thin work holding device applied to a grinding device having a double-ended grinding wheel.

FIG. 2 is a front view schematically showing a thin work holding device applied to a grinding device having a double-head grinding wheel.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Cup-type grindstone 2 Thin work 3 Work holder 4 Static pressure pad part 5 Rod 6 Drive source 7 Grinding operation surface

Continued on the front page (72) Inventor Akio Iwase 63-30 Yuyugaoka, Hiratsuka-shi, Kanagawa Prefecture Sumitomo Heavy Industries Machinery Co., Ltd. Hiratsuka Office

Claims (3)

[Claims] 1. A thin work comprising a static pressure pad portion capable of holding both surfaces of a thin work, and a rotary drive device capable of rotating the thin work, wherein the rotary drive device is provided for a thin work made of a disk. A thin work holding device, which is a rotating rod for driving a peripheral edge thereof in contact. 2. The open-side end faces face the open sides of two cup-shaped grindstones, each of which is a flat grinding operation surface,
A thin work held by the thin work holding device according to claim 1, wherein the thin work is held by a thin work holding device according to claim 1, wherein the thin work is arranged so as to be capable of infeed or outfeed in a direction in which the thin work exists, and the cup type grindstone itself is configured to be rotatable. A thin work holding device characterized by being arranged so that a work is applied. 3. The thin work holding device according to claim 1, wherein the lubricant used for the static pressure pad portion is a grinding fluid.