JPH11101691A - Inspecting device for colored member and its manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make it possible it efficiently manufacture a high-accuracy colored member by processing the image data from multiple cameras with a first detecting mechanism to judge the presence or absence of a defect on the colored member, and forming the Fourier image information on the colored member on an area sensor face with a second detecting mechanism. SOLUTION: A first inspecting mechanism 13 photographs a color filter 12 illuminated from different directions by the light beams from light sources 17, 18 with cameras 15, 16 and processes the obtained images for the first inspection. A second inspecting mechanism 14 magnifies the light oscillated from laser light sources 19-21 with beam expanders 22-24, feeds the parallel light to the same light path with dichroic mirrors 25-27, and feeds the parallel light to the color filter 12 nearly vertically. The transmitted light from the color filter 12 is again separated into the light of individual colors by dichroic mirrors 28-30 and is converged and Fourier-transformed by Fourier transform lenses 31-33, and the Fourier image information is detected by CCD area sensors 34-36.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for inspecting a colored member and a method of manufacturing the same. The present invention relates to an inspection apparatus for inspecting, in particular, an inspection apparatus for inspecting a colored member for defects after forming a plurality of colored pixels (color filters) of at least one color on a substrate, and incorporating the inspection apparatus on a production line. This is suitable for inspecting defects of coloring members (coloring members such as color filters for color liquid crystal displays and color filters for color television cameras).

[0002]

2. Description of the Related Art Conventionally, a defect inspection of a colored member in this type of colored member inspecting apparatus is performed by, for example, making white light from a halogen lamp, a fluorescent lamp or the like incident on the colored member, and coloring the transmitted light therefrom. Observing the members. At this time, if there is a defect on the colored member, the defective portion has a different transmitted light intensity from that of the defect-free portion, and the observation state is different.

That is, a difference in image level in an image based on transmitted light of a coloring member photographed by a camera is extracted using an image obtained by the camera, and a defect is inspected from the extracted image level.

On the other hand, in Japanese Patent Application Laid-Open No. Hei 5-288640, a color filter is irradiated using a light source that emits monochromatic light, and image information of the color filter is detected by a photodetector using reflected light or transmitted light. The output is compared with a comparison signal to detect an abnormal portion. Then, a signal obtained from the same portion of the compared color filter is compared with the output signal as a comparison signal, or the current detection value is compared with the detection value of the immediately preceding line using a line sensor as a photodetector, thereby causing an abnormality. The location is detected.

[0005]

In the process of manufacturing a color filter, dusty defects, scratched defects, white spots where the coloring material is whitened, and the like occur. As an apparatus for detecting these defects, in the above-described inspection apparatuses,
Since these defects can be detected or the type of the defect cannot be determined, there is a problem that a processing step of a product according to the type of the defect cannot be performed. Furthermore, the coloring member may have short-period and long-period irregularities, but these cannot be automatically inspected and determined. Evaluation of these various defects mainly depends on visual inspection by inspectors, and there is no method for inspecting these defects in-line and providing feedback in the event of abnormalities.

The present invention efficiently manufactures a high-precision colored member capable of highly accurately inspecting for various types of defects and / or unevenness occurring in a process of manufacturing a colored member such as a color filter. It is an object of the present invention to provide an apparatus for inspecting a colored member and a method for manufacturing the same.

[0007]

According to the present invention, there is provided an apparatus for inspecting a colored member, comprising: (1-1) a first detecting mechanism for detecting a defect of a colored member having at least one pattern of colored pixels formed therein; An inspection apparatus for a colored member to be inspected by using a detection mechanism, wherein the first detection mechanism is arranged on one surface side of the colored member, and is different from a plurality of cameras that photograph the colored member and the colored member. A plurality of light source units for irradiating light from different directions, and an image processing unit for processing image data from the plurality of cameras to determine the presence or absence of a defect in the coloring member. It is characterized by comprising a plurality of laser light sources that emit light having a wavelength corresponding to the transmission spectrum of the member, and Fourier transform means for forming Fourier image information of the coloring member on the area sensor surface.

In particular, (1-1-1) at least one of the plurality of light source units of the first detection mechanism is on one surface side of the coloring member, and at least one is the other surface of the coloring member. And the plurality of cameras use a light beam emitted from the plurality of light source units and transmitted or reflected by the coloring member.

(1-1-2) The plurality of light source units of the first detection mechanism are arranged on one surface side of the coloring member.

(1-1-3) The plurality of light source units of the first detection mechanism are arranged on the other surface side of the coloring member.

(1-1-4) The plurality of laser light sources of the second detection mechanism have oscillation wavelengths in the visible range, and the laser light from the plurality of laser light sources is expanded by a beam expander to produce the laser light. It is incident on the coloring member almost perpendicularly.

(1-1-5) The plurality of laser light sources of the second detection mechanism are provided in correspondence with the number of colors of the coloring material used for the coloring member. The laser light of each color is synthesized into the same optical path by using a color synthesizing means, and then enters the coloring member.The laser light passing through the coloring member is separated into laser light of each color by using a color separating means. After that, the light enters the Fourier transform lens. And so on.

(1-2) A colored member inspection apparatus for inspecting a colored member formed with one or more patterned colored pixels for defects, which is disposed on one surface side of the colored member.
A plurality of cameras for photographing the colored member, a plurality of light source units for irradiating the colored member with light from different directions, and an image for processing image data from the plurality of cameras to determine the presence or absence of a defect in the colored member And a processing unit.

In particular, (1-2-1) at least one of the plurality of light source units is arranged on one surface side of the coloring member, and at least one is arranged on the other surface side of the coloring member. The plurality of cameras use light beams emitted from the plurality of light source units and transmitted or reflected by the coloring member.

(1-3) A color member inspection apparatus for inspecting a color member having a pattern of colored pixels of one or more colors for defects, the wavelength member corresponding to the transmission spectrum of the color member. It is characterized by comprising a plurality of laser light sources that emit light and Fourier transform means for forming Fourier image information of the coloring member on the area sensor surface.

In particular, (1-3-1) the plurality of laser light sources have an oscillation wavelength in a visible range, and the laser light from the plurality of laser light sources is expanded by a beam expander to be applied to the coloring member. It is characterized by being incident substantially perpendicularly.

(1-3-2) The plurality of laser light sources are provided corresponding to the number of colors of the coloring materials used in the coloring member, and the laser light of each color from the plurality of laser light sources is After being synthesized on the same optical path by using the color synthesizing means, it is incident on the coloring member, and the laser light passing through the coloring member is separated into laser light of each color by using color separating means, It is characterized in that a conversion lens is incident.

The method of manufacturing a colored member according to the present invention comprises the following steps: (2-1) A first detecting mechanism for inspecting a colored member having a pattern of colored pixels of one or more colors for defects of the colored member. In a method for manufacturing a colored member manufactured through an inspection step and a second inspection step by a second detection mechanism, the first detection mechanism is arranged on one surface side of the colored member and a plurality of cameras for photographing the colored member A plurality of light source units that irradiate the coloring member with light from different directions, and an image processing unit that processes image data from the plurality of cameras to determine the presence or absence of a defect in the coloring member. The second detection mechanism includes a plurality of laser light sources that emit light having a wavelength corresponding to the transmission spectrum of the coloring member, and Fourier transform means for forming Fourier image information of the coloring member on an area sensor surface. Is characterized by You.

In particular, (2-1-1) the coloring member is a color filter for a display device.

(2-1-2) The application or coloring of the colored layer in the color filter is performed by an ink jet printer method. And so on.

(2-2) In a method for manufacturing a colored member in which a colored member in which one or more colored colored pixels are formed through a step of inspecting a defect of the colored member, one of the colored members is provided. A plurality of cameras arranged on the surface side of the color member, for photographing the coloring member, a plurality of light source units for irradiating the coloring member with light from different directions, and processing image data from the plurality of cameras to form the coloring member. And an image processing unit for determining the presence / absence of a defect.

(2-3) In a method of manufacturing a colored member in which a colored member having at least one colored pixel in a pattern is formed through a step of inspecting a defect of the colored member, the transmission of the colored member is performed. It is characterized by comprising a plurality of laser light sources emitting wavelength light corresponding to the spectrum, and Fourier transform means for forming Fourier image information of the coloring member on the area sensor surface.

[0023]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a schematic view of a main part of a first embodiment of the present invention. In the figure, reference numeral 13 denotes a first detection mechanism, which corresponds to the first half of the inspection process, and performs a first inspection mainly for local defects and short-period color unevenness of the color filter 12 as a coloring member moving on the pass line 11. It is carried out.
Reference numeral 14 denotes a second detection mechanism, which corresponds to the latter half of the inspection process. A second test is being performed.

In this embodiment, only one of the first detection mechanism and the second detection mechanism may be used depending on the inspection items of the color filter.

In this embodiment, as the color filter 12 to be inspected, for example, a color filter manufactured by the ink jet printer method proposed in JP-A-8-262220 is used. The present invention is not limited to a color filter manufactured by a method, and can be similarly applied to a color filter manufactured by another method such as a pigment dispersion method, a printing method, and an electrodeposition method. In addition, the present invention can be similarly applied to inspection of printed materials other than color filters.

Further, in this embodiment, red, green,
Although a color filter in which three color filters of blue are provided on a substrate is used, the present invention can be similarly applied to a color filter in which three color filters of yellow, cyan, and magenta are provided on a substrate. In a first inspection mechanism 13 for performing a first inspection process such as a local defect of the color filter 12 and a short-period unevenness in the first half of the inspection process, a plurality of cameras 15 and 16 having sensors are used, and a light source for illumination , A plurality of low ripple fluorescent lamps 17 and 18 are used.

The light source 17 and the corresponding camera 15 detect one type of defect, and the light source 18 and the corresponding camera 16 detect another type of defect. By using a plurality of such light source and camera pairs, a plurality of defects are efficiently detected. FIG. 1 shows a case where two light source and camera pairs are used, but two or more pairs may be used.

In this embodiment, the color filters 12 illuminated in different directions by the light beams from the light sources 17 and 18 are imaged by the cameras 15 and 16, and the images obtained by the cameras 15 and 16 are processed by an image processing unit (not shown). The first inspection is performed by performing the above processing.

It is preferable to use a line sensor as a sensor for the cameras 15 and 16 in view of the relationship between the number of pixels and the speed of the color filter 12 on the pass line 11, but it is also possible to use another detector such as an area sensor. good.

The light sources 17 and 18 may be other light sources such as a fiber light source. Further, depending on the mode of the defect to be detected on the color filter 12, FIG.
The light source 17 on the back side of the color filter 12 as shown in FIG.
Instead of installing the light source 18 and detecting the light using transmitted light, a configuration may be adopted in which a plurality of light sources are installed on the surface side (upper side) of the color filter 12 and the light reflected from the color filter 12 is detected.

Further, at least one light source unit and a camera may be provided on the front surface and the back surface of the color filter. The outputs from the cameras 15 and 16 are subjected to data processing in an image processing unit as described later, and the evaluation results on local defects and short-period color unevenness are obtained from the data.

In the data processing of the outputs from the cameras 15 and 16 by the image processing unit, the presence or absence of a defect is generally determined by obtaining the change in the difference between adjacent pixels in the scanning direction and the color filter feeding direction. . At this time, by adding an integration operation between pixels in the vicinity of the cameras 15 and 16, the S / N ratio of the data is improved and the determination accuracy is improved. It should be noted that the plurality of light source units are switched and used, so that an optimal light source unit and camera are used for inspection.

In the second inspection mechanism 14 for performing the second inspection process such as the long-period unevenness of the color filter 12 in the latter half of the inspection process, three light sources 19, 20 and 21 composed of lasers are used.
Is used. The laser as the three light sources has an oscillation wavelength of 6
33 nm helium neon laser, oscillation wavelength 514.5
A laser that emits light having a wavelength corresponding to the transmission spectrum of a color filter, such as an argon ion laser having a wavelength of nm and an argon ion laser having an oscillation wavelength of 488 nm, is used.

The light oscillated from each laser is expanded by beam expanders 22, 23, and 24, and becomes parallel light to be a dichroic mirror (color synthesizing means) 25.
At 26 and 27, the light is supplied to the same optical path, and is incident on the color filter 12 to be inspected as a substantially vertical and parallel light. The transmitted light from the color filter 12 is again separated into each color light by dichroic mirrors (color separation means) 28, 29, 30 and condensed by Fourier transform lenses 31, 32, 33, and Fourier-transformed. Is detected by the CCD area sensors 34, 35, 36 placed on the Fourier plane.

The outputs from the CCD area sensors 34, 35 and 36 are subjected to image processing by an image processing section (not shown), whereby the position of the peak of the light beam on the Fourier plane and the intensity thereof are detected. The cycle and intensity of the color filter unevenness are determined. In particular, long-period irregularities that are difficult to detect with the cameras 15 and 16 in the first half of the inspection process are detected and evaluated with high accuracy.

In this embodiment, the color synthesizing means 25, 26, 2
In FIG. 7, the light beams from the three laser beams are set to the same optical path, but may be set to separate optical paths. At this time, the optical paths of the color separation means 28, 29 and 30 are also different optical paths.

As described above, in the first detection mechanism 13 of the present embodiment, the colored member (color filter) 12 in which the colored pixels (color filters) of one or more colors are formed.
When inspecting a defect of the color member, a plurality of cameras 15 and 16 which are arranged above the coloring member and detect the state of the coloring member and a plurality of light source units 17 which are switched and used to irradiate the coloring member from different directions. 18 and an image processing unit that processes image data from the cameras 15 and 16 to determine the presence or absence of a defect on the coloring member 12 to detect a local defect of the coloring member 12, its type, and short-period unevenness. ing.

The second detection mechanism 14 includes laser light sources 19, 20, and 21 for emitting light having a wavelength corresponding to the transmission spectrum of the coloring member 12, a Fourier transform lens for obtaining Fourier image information of the coloring member 12, and an area sensor. In addition, long-period unevenness of the coloring member is detected.

In this embodiment, the first and second detection mechanisms 13,
14, the inspection of the defect of the coloring member is performed with high precision. And after such first and second detection steps,
Manufactures colored members.

Next, a second embodiment of the present invention will be described. In the present embodiment, an inspection apparatus having the same configuration as that used in the first embodiment shown in FIG. 1 is installed on a line after drawing of a line for manufacturing a color filter using an inkjet method, and the color filter is inspected. Is different.

By using the method of this embodiment, the tact time (the number of color filters manufactured per minute)
Within the range, defects and unevenness of the color filter are determined. As a result, if a problem occurs, it is possible to stop the line immediately and take a countermeasure, thereby improving the yield. In addition, by using this method, the defect of the color filter and the low-frequency or high-frequency unevenness can be separated and determined, thereby reducing the time required for identifying the cause of the defect and taking a countermeasure, and improving the line operation rate. Let me.

[0042]

According to the present invention, by setting each element as described above, the presence or absence of various types of defects and / or unevenness occurring in the manufacturing process of a colored member such as a color filter can be inspected with high accuracy. It is possible to achieve a colored member inspection apparatus and a method of manufacturing the same capable of efficiently manufacturing a highly accurate colored member that can be manufactured.

In addition, according to the present invention, various defects and unevenness of the coloring member, particularly the color filter, are separated into respective modes, and the inspection and judgment are automatically performed within a short time available on the line. This makes it possible to produce a coloring member more efficiently.

[Brief description of the drawings]

FIG. 1 is a schematic diagram of a main part of a first embodiment of the present invention.

[Explanation of symbols]

Reference Signs List 11 pass line 12 coloring member (color filter) 13 first detecting mechanism 14 second detecting mechanism 15, 16 camera 17, 18 light source section 19, 20, 21 laser light source 22, 23, 24 beam expander 25, 26, 27, 28, 29, 30 Dichroic mirror 31, 32, 33 Fourier transform lens 34, 35, 36 CCD area sensor

Claims (16)

[Claims] 1. An apparatus for inspecting a colored member for inspecting defects of a colored member formed with colored pixels in one or more colors by using a first detection mechanism and a second detection mechanism, The detection mechanism is arranged on one surface side of the coloring member, a plurality of cameras for photographing the coloring member, a plurality of light source units for irradiating the coloring member with light from different directions, and image data from the plurality of cameras. And an image processing unit that determines whether or not there is a defect in the coloring member, wherein the second detection mechanism emits a plurality of laser light sources that emit light having a wavelength corresponding to the transmission spectrum of the coloring member, A fourier transforming means for forming Fourier image information of the coloring member on an area sensor surface. 2. At least one of the plurality of light source units of the first detection mechanism is arranged on one surface side of the coloring member, and at least one is arranged on the other surface side of the coloring member, The plurality of cameras are emitted from the plurality of light source units,
2. An apparatus for inspecting a colored member according to claim 1, wherein a light beam transmitted or reflected by said colored member is used. 3. The coloring member inspection apparatus according to claim 1, wherein the plurality of light source units of the first detection mechanism are arranged on one surface side of the coloring member. 4. The coloring member inspection apparatus according to claim 1, wherein the plurality of light source units of the first detection mechanism are arranged on the other surface side of the coloring member. 5. The plurality of laser light sources of the second detection mechanism have oscillation wavelengths in a visible range, and the laser light from the plurality of laser light sources is expanded by a beam expander to be substantially perpendicular to the coloring member. The inspection apparatus for a colored member according to claim 1, wherein the light is made incident on the colored member. 6. A plurality of laser light sources of said second detection mechanism are provided corresponding to the number of colors of coloring materials used for said coloring member, and laser light of each color from said plurality of laser light sources is provided. After being synthesized on the same optical path by using the color synthesizing means, the laser light is incident on the coloring member, and the laser light passing through the coloring member is separated into laser light of each color by using the color separating means,
2. The apparatus for inspecting a colored member according to claim 1, wherein said Fourier transform lens is incident. 7. A colored member inspection apparatus for inspecting a colored member formed with one or more colored colored pixels for defects, wherein the inspected device is disposed on one side of the colored member. And a plurality of light source units that irradiate the colored member with light from different directions, and an image processing unit that processes image data from the plurality of cameras to determine whether there is a defect in the colored member. An inspection apparatus for a colored member, comprising: 8. At least one of the plurality of light source units is arranged on one surface side of the coloring member, and at least one is arranged on the other surface side of the coloring member. 8. The coloring member inspection apparatus according to claim 7, wherein a light flux emitted from the plurality of light sources and transmitted or reflected by the coloring member is used. 9. A colored member inspection apparatus for inspecting a colored member formed with one or more colored colored pixels for inspecting a defect of the colored member, wherein the plurality of devices emit light having a wavelength corresponding to a transmission spectrum of the colored member. A laser light source, and a Fourier transform unit for forming Fourier image information of the coloring member on an area sensor surface. 10. The plurality of laser light sources have an oscillation wavelength in a visible region, and the laser light from the plurality of laser light sources is expanded by a beam expander and is made to enter the coloring member substantially perpendicularly. The inspection apparatus for a colored member according to claim 9, wherein: 11. The plurality of laser light sources are provided in correspondence with the number of colors of a color material used for the coloring member, and laser light of each color from the plurality of laser light sources uses color combining means. After being combined in the same optical path, the laser beam is incident on the coloring member, and the laser beam passing through the coloring member is separated into laser beams of each color by using color separation means, and then incident on the Fourier transform lens. 10. The inspection apparatus for a colored member according to claim 9, wherein: 12. A first inspection step by a first detection mechanism and a second inspection step by a second detection mechanism for inspecting a colored member on which a colored pixel of at least one color is formed for inspecting a defect of the colored member. In the method for manufacturing a colored member, the first detection mechanism is arranged on one surface side of the colored member, and a plurality of cameras for photographing the colored member, and a plurality of cameras for irradiating the colored member with light from different directions. A light source unit, and an image processing unit that processes image data from the plurality of cameras to determine whether or not the coloring member has a defect. The second detection mechanism corresponds to a transmission spectrum of the coloring member. A plurality of laser light sources that emit light of the specified wavelength, and Fourier transform means for forming Fourier image information of the coloring member on an area sensor surface. 13. The color member according to claim 12, wherein the color member is a color filter for a display device.
A method for producing a colored member. 14. The method according to claim 13, wherein the application or coloring of the coloring layer in the color filter is performed by an ink jet printer method. 15. A colored member manufacturing method for manufacturing a colored member having a pattern of colored pixels of one or more colors through a step of inspecting a defect of the colored member, wherein one side of the colored member is provided. A plurality of cameras for photographing the coloring member, a plurality of light source units for irradiating the coloring member with light from different directions, and processing of image data from the plurality of cameras to determine whether the coloring member has a defect. A method for producing a colored member, comprising: 16. A method for producing a colored member having at least one pattern of colored pixels formed therein through a step of inspecting the colored member for defects. A plurality of laser light sources that emit light of the selected wavelength, and Fourier transform means for forming Fourier image information of the coloring member on an area sensor surface.