JPH1088369A - Formation of hard carbon coating film and electric shaver edge - Google Patents

Abstract

PROBLEM TO BE SOLVED: To uniformly form an intermediate layer even to a substrate having a three dimensional shape and to improve the adhesion of hard carbon coating film to be formed thereon by forming the intermediate layer on the substrate by plating. SOLUTION: As an example having a substrate with a complicated three dimensional shape, the edge of an electric shaver can be given. On the substrate 1 of the outer edge of the shaver edge, an intermediate layer 2 is formed on the intermediate layer 2. Then, on this intermediate layer 2, diamond like coating film 3 is formed as hard carbon coating film. The inside of the substrate 1 of the outer edge is provided with an inner edge. Diamond like coating film 13 is formed on an intermediate layer 12 formed by plating. A gradient face 11a for shortly cutting mustaches is formed on the tip part of the substrate 11 of the inner edge. Then, the substrate 1 of the outer edge may be formed of Ni or the like, and the substrate 11 of the inner edge may be formed of a stainless steel or the like.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming a substrate having a hard carbon film which can be used for an electric shaver blade and the like, and an electric shaver blade obtained by the method.

[0002]

2. Description of the Related Art Conventionally, when a diamond-like film is formed directly on a substrate, there has been a problem that the adhesion between the substrate and the diamond-like film is not good. In order to solve such a problem, it has been proposed to form an intermediate layer between the substrate and the diamond-like coating. JP-A-1-317
No. 197 discloses a technique of forming an intermediate layer containing silicon as a main component on a substrate by a plasma CVD method and forming a diamond-like coating on the intermediate layer. By providing such an intermediate layer, the adhesion of the diamond-like coating to the substrate can be improved as compared with the case where the diamond-like coating is formed directly on the substrate.

Further, when a diamond-like film is formed on a substrate such as nickel (Ni), aluminum (Al), or stainless steel used as an electric shaver blade or the like, a technique of forming Ru as an intermediate layer is a special technique. It is disclosed in Japanese Unexamined Patent Publication No. 7-41386. By forming such an intermediate layer, the adhesion of the diamond-like coating to the substrate can be improved as compared with the case where the diamond-like coating is formed directly on the substrate.

[0004]

However, in the above-mentioned prior art, the intermediate layer is formed by a vapor phase growth method such as a sputtering method or a plasma CVD method.
Therefore, when the substrate has a complicated three-dimensional shape, it is necessary to increase the film thickness or change the arrangement state of the substrate in the middle of the process of forming the intermediate layer.

An object of the present invention is to form a hard carbon coating capable of uniformly forming an intermediate layer even on a substrate having a complicated three-dimensional shape and forming a hard carbon coating with good adhesion. It is to provide a method.

[0006]

The method for forming a hard carbon film according to the present invention is a method for forming a hard carbon film on a substrate, comprising the steps of: forming an intermediate layer on the substrate by plating; Forming a hard carbon film.

[0007] In a more limited aspect according to the present invention, a step of depositing and forming a substrate on a mold by electroforming, a step of forming an intermediate layer on the substrate by plating, Forming a hard carbon film thereon.

Further, in this limited aspect,
In the step of forming the intermediate layer by plating, the intermediate layer can be formed on the substrate while the substrate is held on the mold. For this reason, it is not necessary to remove the substrate from the mold, and the substrate can be manufactured with higher productivity.

The hard carbon coating in the present invention includes an amorphous diamond coating and a diamond coating containing microcrystals. Further, it contains a crystalline diamond film.

In the present invention, the method of forming the hard carbon film is not particularly limited, but it can be formed by, for example, a CVD method. Also, for example, a plasma CV
The hard carbon film may be formed by applying a high-frequency voltage to the substrate using the method D, thereby generating a self-bias voltage on the substrate. In such a case, the self-bias voltage generated on the substrate is preferably -20 V or less. As a plasma generating means in the plasma CVD method, for example, an electron cyclotron resonance (ECR) plasma CVD apparatus or the like can be used. By using such an apparatus, the density of the plasma can be further increased, and a high-quality hard carbon film can be formed at a low temperature.

In the present invention, the plating method for forming the intermediate layer may be a general plating method, such as electroplating or electroless plating.
When the intermediate layer is formed by electroplating, it is generally necessary that at least the surface of the substrate has conductivity.

According to the present invention, since the intermediate layer is formed by plating, it can be applied to a substrate having a complicated three-dimensional shape.
The intermediate layer can be formed with a uniform thickness, and the intermediate layer can be uniformly formed even at an edge portion or the like where the thin film is not easily formed by the conventional vapor phase method. Therefore, the adhesion of the hard carbon coating to the substrate can be improved. Also, since the intermediate layer can be formed uniformly,
The intermediate layer can be formed with a smaller thickness as compared with the formation of the intermediate layer by a conventional vapor phase method. The thickness of the intermediate layer in the present invention is not particularly limited.
５5000 °, more preferably 100-300 °
0 °.

According to the present invention, the intermediate layer can be formed even on a substrate having a complicated three-dimensional shape as described above. Therefore, the present invention can be advantageously applied to those having a complicated three-dimensional shape such as an outer blade and an inner blade of an electric shaver blade. Electric shaver blade is generally a metal or alloy mainly composed of Ni or Al,
Or it is formed from stainless steel or the like. Therefore,
The present invention can be advantageously applied to these substrates.

The material of the intermediate layer is not particularly limited as long as it can be formed by plating and can enhance the adhesion between the substrate and the hard carbon film. Specific examples of such a material for the intermediate layer include:
Examples include metals such as Ru, Cr, Sn, and Co, and alloys containing these as main components.

The intermediate layer according to the present invention may be formed by composite plating in which fine particles such as ceramics are dispersed in a plating film. Such composite plating can be performed by a conventionally known method, and generally, a plating film containing dispersed fine particles is formed by performing plating in a plating bath in which fine particles are dispersed. can do.

The fine particles dispersed in the composite plating film include, for example, Al, Ru, Ti, Cr,
Examples include oxides, nitrides, and carbides of Sn, Co, Si, B, and Zr. The content of the fine particles in the dispersion plating film is preferably from 0.1 to 30% by volume, and more preferably from 1 to 10% by volume. Further, the particle diameter of the fine particles is preferably 1 μm or less.

In the present invention, when the dispersion plating film is formed as an intermediate layer, the dispersed particles in the plating film are:
The adhesion to the hard carbon coating can be improved. Therefore, the material serving as the matrix in the plating film can be selected from a wider range than the above-mentioned plating film material. For example, when a Ni substrate is used, a plating film is formed using Ni, which is the same material as the substrate, and fine particles are dispersed in the Ni plating film to improve the adhesion to the hard carbon film. it can.

[0018]

FIG. 1 is a sectional view showing an outer blade and an inner blade of an electric shaver blade on which a hard carbon film is formed according to the present invention. Referring to FIG. 1, an intermediate layer 2 formed by plating is formed on a substrate 1 of an outer blade of an electric shaver blade, and a diamond-like coating as a hard carbon coating is formed on the intermediate layer 2. 3 are formed. FIG.
It is a top view which shows the planar shape of the board | substrate 1 of an outer blade. As shown in FIG. 2, a hole 1a for catching many whiskers is formed.

Referring to FIG. 1 again, an inner blade is provided inside the outer blade substrate 1.
An intermediate layer 12 formed by plating is formed, and a diamond-like coating 13 is formed on the intermediate layer 12. An inclined surface 11a for cutting the beard more sharply is formed at the tip of the substrate 11 of the inner blade. The beard caught in the hole 1a of the outer blade is cut by the inner blade sliding inside in the direction of the arrow shown in FIG. FIG. 3 is a front view showing the substrate 11 of the inner blade, as viewed from a direction along the plane of FIG. As shown in FIG. 3, an inclined surface 11a is formed at the tip of the substrate 11 of the inner blade.

In this embodiment, the outer blade substrate 1 is made of Ni, and the inner blade substrate 11 is made of stainless steel (SUS). FIG. 4 is a cross-sectional view showing a state in which the intermediate layer 2 is formed by plating on the substrate 1 of the outer blade of the electric shaver. The substrate of the outer blade of the electric shaver can be formed by, for example, an electroforming method.

FIGS. 5 and 6 are cross-sectional views showing steps of forming an intermediate layer by plating on the outer blade substrate formed by electroforming. As shown in FIG. 5A, a metal layer 22 is formed on a plastic plate 21 by nickel plating or by attaching a copper foil. Next, FIG.
As shown in (b), a resist film 23 is formed on the metal layer 22.
After the resist film 23 is patterned into a predetermined pattern corresponding to the outer blade of the electric shaver, the metal layer 22 is etched using the resist film 23 as a mask,
The electric shaver is formed in a predetermined pattern on the outer blade. Next, as shown in FIG. 5C, the resist film is removed, and a metal layer 22 patterned on an outer blade of an electric shaver on the plastic plate 21 is obtained.

Next, as shown in FIG.
2 is plated with nickel, and the outer blade substrate 1 of the electric shaver is formed by electroforming. The nickel plating solution used in this electroforming method is a general electroplating solution,
For example, a plating solution composed of 30 g / liter of nickel chloride, 300 g / liter of nickel sulfamate, 30 g / liter of boric acid, and an appropriate amount of a pit inhibitor can be used. Further, for example, pH 3.5 to 4.0, temperature 3
Electroplating is performed under the conditions of 0 to 60 ° C. and a current density of ^{2 to} 15 A / dm ² to deposit a nickel layer.
Although the thickness of the nickel layer to be deposited is not particularly limited, it is formed, for example, with a thickness of about 10 to 100 μm.

Next, as shown in FIG.
While holding the outer blade substrate 1 on the outer blade 2, the intermediate layer 2 is formed on the outer blade substrate 1 by electroplating or electroless plating. As the plating solution, general plating solutions and plating conditions can be adopted according to the type of the plating film formed as the intermediate layer. The thickness of the intermediate layer 2 is, for example, about 50 to 5000 °.

Next, as shown in FIG. 6 (f), the outer blade substrate 1 of the electric shaver on which the intermediate layer is formed is obtained by peeling the outer blade substrate 1 from the metal layer. By forming a hard carbon coating such as a diamond-like thin film on the intermediate layer, an outer blade of an electric shaver having a hard carbon coating formed on the outer blade substrate via the intermediate layer can be obtained. The hard carbon film is formed while the outer blade substrate 1 is held on the metal layer 22 without peeling the outer blade substrate 1 from the metal layer.
The outer blade substrate 1 may be peeled from the metal layer.

Example 1 A substrate of an outer blade of an electric shaver blade made of Ni was formed by the electroforming method shown in FIGS. 5 and 6, and an intermediate layer made of Ru was formed thereon. As a Ni plating solution for forming a substrate by the electroforming method, a plating solution comprising nickel chloride 30 g / l, nickel sulfamate 300 g / l, boric acid 30 g / l, and a suitable amount of a pit inhibitor was used. 50 ° C, current density 10A /
Plating was performed under the conditions of dm ² , and a Ni substrate was deposited on the mold by electroforming. The thickness of the substrate was about 50 μm.

Next, while the substrate was held on the mold, Ru plating was performed to form an intermediate layer on the substrate. As the Ru plating solution, ruthenium sulfate 3 g / liter, sulfuric acid 6 g / liter, and an appropriate amount of additive were used.
Plating was performed under the conditions of a pH of about 1.5, a temperature of about 50 ° C., and a current density of 2 A / dm ² . The thickness of the intermediate layer is about 100
Å

After forming the Ru intermediate layer on the Ni substrate as described above, a diamond-like coating was formed on the intermediate layer. The diamond-like film was formed using an ECR plasma CVD apparatus. The conditions for forming the thin film include a partial pressure of Ar gas of 5.7 × 10 ⁻⁴ Torr and a partial pressure of CH ₄ gas of 1.3 × 1.
The test was performed at 0 ^-3 Torr, a microwave frequency of 2.45 GHz, and a microwave power of 100 W. RF power of 13.56 MHz is applied to the substrate holder from a high frequency power source, and RF power is applied so that the self-bias voltage generated on the substrate becomes -50V.
The power was adjusted and applied. By forming a thin film for 15 minutes, a diamond-like film having a thickness of 1000 ° was formed. Next, after forming a diamond-like coating, the substrate was peeled off from the mold.

Example 2 After a Ni substrate was formed on a mold in the same manner as in Example 1, Sn plating was performed to form an intermediate layer. As the Sn plating solution, a plating solution of 90 g / L of sodium stannate, 8 g / L of sodium hydroxide, and 10 g / L of sodium acetate was used at a temperature of 70 ° C. and a current density of 1.5 A.
The plating was performed under the condition of / dm ² . The thickness of the intermediate layer is about 1
00 °. After forming the Sn intermediate layer, the above Example 1 was used.
A diamond-like coating was formed on the Sn intermediate layer to a thickness of about 1000 ° in the same manner as described above.

Example 3 After a Ni substrate was formed on a mold in the same manner as in Example 1 above, an intermediate layer was formed using a composite plating solution in which SiC particles were dispersed in a Sn plating solution. The same Sn plating solution as in Example 2 was used, and a composite plating solution in which SiC particles having a particle size of about 0.1 μm were dispersed at 10% by weight in the plating solution was used. The plating conditions were the same as in Example 2 above, and S
An intermediate layer composed of an n film was formed. The Sn film contained 5% by volume of SiC particles. Next, the first embodiment
A diamond-like coating was formed on the intermediate layer in the same manner as described above.

Comparative Example 1 After a Ni substrate was formed on a mold in the same manner as in Example 1, a diamond-like coating was formed directly in the same manner as in Example 1 without forming an intermediate layer.

With respect to Examples 1 to 3 and Comparative Example 1 obtained as described above, the adhesion of the diamond-like coating was evaluated. The evaluation of the adhesion was performed by an indentation test with a constant load (load = 1 kg) using a Vickers indenter. The number of samples was set to 50, and the number of peeled diamond-like films on the Ni substrate was counted and evaluated. Table 1 shows the evaluation results.

[0032]

[Table 1]

As is apparent from Table 1, Examples 1 to 3 in which the intermediate layer was formed by plating according to the present invention were compared with Comparative Examples 1 and 2.
It shows that the diamond-like coating has excellent adhesion to the substrate.

Example 4 An intermediate layer made of Ru was formed by electroplating on the inner blade substrate of the electric shaver shown in FIG. As shown in FIG. 7, the substrate 11 having the inner blade is placed on the jig 14 for coating treatment.
Was plated with Ru. The Ru plating solution and plating conditions were the same as in Example 1 above. As a result, it was confirmed that the Ru intermediate layer was formed even at the edge of the substrate 11.

COMPARATIVE EXAMPLE 2 As shown in FIG. 7, with the inner blade substrate 11 upright with respect to the jig 14, the Ru intermediate layer 12 was sputtered.
Was formed. The sputtering conditions were as follows: Ar gas partial pressure: 1.5 × 10 ⁻³ Torr;
The power was supplied to the target at 400 W using u. The intermediate layer was formed so as to have a thickness of about 100 °. Observation of the formed intermediate layer showed that the rotation of the intermediate layer was poor and the thickness of the intermediate layer at the edge portion was thin.

COMPARATIVE EXAMPLE 3 As shown in FIG. 8, the substrate 11 of the inner blade was arranged at an angle to the jig 14 for coating treatment. 12 was formed, the substrate 11 of the inner blade was inclined in the reverse direction during the formation, and then an intermediate layer was formed in the same manner. As a result, the intermediate layer at the edge portion was not thin, and a substantially uniform intermediate layer as a whole could be formed.

As is apparent from the comparison between Example 4 and Comparative Examples 2 and 3, by forming the intermediate layer by plating according to the present invention, even a substrate having a complicated three-dimensional shape can be obtained. It can be seen that the rotation is good and a uniform thin film can be formed. Therefore, by forming a hard carbon coating on such a uniform intermediate layer, a hard carbon coating having good adhesion to the substrate can be obtained.

In the above embodiment, an intermediate layer is formed on the outer blade and inner blade substrates of the electric shaver by plating.
Although an example in which a hard carbon film is formed thereon has been described, the present invention is not limited to this, and can be applied to other substrates. In the above embodiment,
Although the example in which the intermediate layer is formed by electroplating has been described, in the present invention, the intermediate layer may be formed by electroless plating.

When the present invention is applied to an electric shaver, it goes without saying that the present invention may be applied to only one of the outer blade and the inner blade of the electric shaver. Further, in the above embodiment, the intermediate layer and the hard carbon coating are formed only on the outer side of the outer cutter of the electric shaver, but the intermediate layer and the hard carbon coating may be formed on the inner side of the outer cutter.

[0040]

According to the present invention, by forming the intermediate layer by plating, even a substrate having a complicated three-dimensional shape such as an outer blade and an inner blade of an electric shaver can be formed.
The intermediate layer can be formed uniformly, and the hard carbon coating can be formed with good adhesion to the substrate.

In the present invention, when an intermediate layer is formed by plating on a substrate after the substrate is formed by depositing the substrate on the substrate by electroforming, the substrate is held on the substrate. In this state, the intermediate layer can be continuously formed, so that the manufacturing process can be simplified and the production efficiency can be increased.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view showing an outer blade and an inner blade of an electric shaver of an embodiment formed according to the present invention.

FIG. 2 is a plan view showing a planar shape of an outer blade of the electric shaver.

FIG. 3 is a front view showing an inner blade of the electric shaver.

FIG. 4 is a sectional view showing a state in which an intermediate layer is formed outside the outer blade of the electric shaver.

FIG. 5 shows a method for forming a substrate by electroforming according to the present invention;
Sectional drawing which shows the process of forming an intermediate | middle layer on a board | substrate.

FIG. 6 shows a method for forming a substrate by electroforming according to the present invention;
Sectional drawing which shows the process of forming an intermediate | middle layer on a board | substrate.

FIG. 7 is a side view showing an arrangement state of an inner blade of an electric shaver when an intermediate layer is formed by plating in an embodiment according to the present invention.

FIG. 8 is a side view showing an arrangement state when an intermediate layer is formed on an inner blade of an electric shaver by a sputtering method in a comparative example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... The board | substrate of the outer blade of an electric shaver 1a ... The hole of the board | substrate of an electric shaver outer blade 2 ... Intermediate layer 3 ... Hard carbon coating 11 ... The board | substrate of the inner blade of an electric shaver 11a ... The outer peripheral part of the board | substrate of the inner blade of an electric shaver Inclined surface 12 ... Intermediate layer 13 ... Hard carbon coating 21 ... Plastic plate 22 ... Metal layer 23 ... Resist film

Continued on the front page (51) Int.Cl. ⁶ Identification code FI C30B 29/04 C30B 29/04 B (72) Inventor Seiichi Kiyama 2-5-5 Keihanhondori, Moriguchi-shi, Osaka SANYO Electric Co., Ltd. Inside

Claims (9)

[Claims] 1. A method for forming a hard carbon coating on a substrate, comprising: forming an intermediate layer on the substrate by plating; and forming a hard carbon coating on the intermediate layer. Method of forming carbon coating. 2. A method of forming a hard carbon film on a substrate, comprising: depositing the substrate on a mold by electroforming, and forming an intermediate layer on the substrate by plating. And a step of forming a hard carbon coating on the intermediate layer. 3. The method according to claim 2, wherein, in the step of forming the intermediate layer by plating, the intermediate layer is formed on the substrate while the substrate is held on the mold. 4. The method according to claim 1, wherein at least the surface of the substrate has conductivity. 5. The method according to claim 1, wherein the substrate is a substrate made of a metal or alloy containing Ni or Al as a main component, or stainless steel. 6. The method for forming a hard carbon film according to claim 1, wherein the substrate is a substrate of an electric shaver blade. 7. The method according to claim 1, wherein the intermediate layer is composed of Ru, Cr, Sn, and C.
The method for forming a hard carbon film according to any one of claims 1 to 6, comprising at least one metal selected from the group consisting of o or an alloy containing the same as a main component. 8. The method for forming a hard carbon film according to claim 1, wherein fine particles of an oxide, a nitride, or a carbide are dispersed in the intermediate layer. 9. An electric shaver blade comprising a hard carbon film formed on a substrate via an intermediate layer according to the method according to claim 1. Description: