JPH1078166A - Vacuum valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the drop and deformation of a seal member such as an O-ring fitted to an opening on the lower surface of a valve element via a simple operation, and improve an evacuating function as a high vacuum device. SOLUTION: An annular seal member 9 and a retainer in contact with the inner side thereof are fitted to an opening on the lower surface of a valve element 5, and a thin-walled cutout ring type member 11 capable of being laterally inserted in the peripheral groove 5h of a valve element projection part 5g comes into contact with the lower surface of the retainer. Thus, the drop and deformation of the annular seal member 9 is prevented via a simple operation. In addition, only the thin-walled cutout ring type member 11 is in contact with the retainer, and the projection part 5g and the ring type member 11 do not intrude deep in a gas outlet 3, thereby improving an evacuating function as a high vacuum device.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to the technical field of a vacuum valve used between a vacuum chamber and a vacuum pump when the vacuum chamber is evacuated.

[0002]

2. Description of the Related Art Conventionally, there has been known a vacuum valve shown in FIGS. 9 and 10 for approximating a vacuum chamber used for semiconductor manufacturing or the like to a vacuum.

A vacuum valve 100 shown in FIG. 9 has a gas inlet 101 connected to a vacuum chamber 110 on one side and a gas outlet 102 connected to a vacuum pump 120 on the other side. And the actuator 104
A valve 105 for controlling the opening and closing of the gas outlet 102 by means of a gas outlet 10.
An O-ring 107 for sealing 2 is mounted.

[0004]

In such a conventional vacuum valve 100, the O-ring 107 for sealing the gas outlet 102 is fitted in the lower groove 106 of the valve body 105 in a fitted manner. Yes, actuator 10
When the valve 4 is driven to raise the valve body 105 and vacuum evacuation is performed instantaneously, an accident such as the O-ring 107 falling out due to the vacuum evacuation occurs.

If the vacuum valve 100 is heated, or if the valve seat 108 is left closed for a long time with impurities (particles) adhered to the valve seat 108, the O-ring 107 will be closed. O-ring 107 may fall off when the valve seat is fully opened.

Therefore, as a means for solving this,
As shown in FIG. 10, an O-ring 207 and an O-ring stopper 209 for sealing the gas outlet 202 are attached to the lower opening 206 of the valve body 205, and
There is known a vacuum valve 200 in which a hexagon nut 211 for fastening the O-ring stopper 209 is attached to a protrusion 210 provided at the center of the vacuum valve. In addition, 201 is a gas inlet, 220 is a vacuum chamber, and 230 is a vacuum pump.

According to this, the O-ring 207 is pressed against the side wall of the valve body 205 via the O-ring stopper 209 by tightening the hexagon nut 211, so that the O-ring is prevented from falling off as described above. The operation is troublesome, and the hexagon nut 211 is deeply inserted into the gas outlet 202. Therefore, when the valve seat 208 is fully opened, the hexagon nut 211 becomes a gas flow resistance in the gas outlet 202, the conductance is reduced, and the high vacuum device is used. Exhaust capacity decreases. Furthermore, the O-ring 20
7 had a problem and had a problem.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and it is possible to prevent a sealing member such as an O-ring attached to an opening on the lower surface of a valve body from falling off and deforming by a simple operation, An object of the present invention is to provide a vacuum valve that improves the evacuation capacity as a vacuum device.

[0009]

According to the present invention, there is provided a vacuum valve comprising:
A gas outlet is controlled to be opened and closed in a valve box, and a valve body having a projection formed with a circumferential groove in a center portion on a valve seat side thereof, and the gas outlet mounted on a lower surface opening of the valve body to seal the gas outlet. An annular seal member, a holding member that fits into the projection and is mounted on the lower surface opening of the valve body, and that is in contact with the inside of the annular seal member. ,
A thin notch ring-shaped member that comes into contact with the lower surface of the holding member when engaged with the peripheral groove. With this feature, it is possible to prevent the annular seal member from falling off and deforming by a simple operation using the thin notched ring-shaped member. In addition, since the thin notch ring-shaped member is only in contact with the short protrusion on the lower surface of the holding member, the protrusion and the ring-shaped member do not enter deeply into the gas outlet in the valve open state. Exhaust capacity as a high vacuum device is also improved.

[0010] In the vacuum valve according to the present invention, it is preferable that a step portion with which the ring-shaped member is engaged is formed on a periphery of the lower surface side fitting portion of the holding member. With this configuration, when the ring-shaped member is attached to the peripheral groove, the ring-shaped member engages with the stepped portion, so that not only can the ring-shaped member be prevented from falling off, but also the peripheral groove can be prevented. It is also easy to confirm whether the link-shaped member has been securely fitted.

In the vacuum valve according to the present invention, a contact surface of the ring-shaped member is formed on a periphery of the lower surface side fitting portion of the holding member, and a downward tapered surface is formed outside the corresponding contact surface. Is preferred. With this configuration, when the ring-shaped member is attached to the peripheral groove, the ring-shaped member is guided by the downward tapered surface of the holding member and is always guided in the stepwise direction. It will be easier.

[0012] A vacuum valve according to the present invention is a valve body which controls opening and closing of a gas outlet in a valve box, and is provided with a projection having a peripheral groove formed in a center portion on a valve seat side thereof; A plate-shaped sealing member mounted on the sealing member and sealing the gas outlet, and a thin cutout which can be inserted into the peripheral groove from a lateral direction and abuts on a lower surface of the plate-shaped sealing member when engaged with the peripheral groove. And a notched ring-shaped member. With this feature, the detachment and deformation of the plate-shaped seal member can be prevented by a simple operation using the thin notched ring-shaped member. In addition, since the thin notch ring-shaped member is only in contact with the short protrusion on the lower surface of the plate-shaped seal member, when the valve is open, the protrusion and the ring-shaped member may deeply enter the gas outlet. In addition, the exhaust capacity as a high vacuum device is also improved.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the embodiments and the drawings.

First, FIG. 1 is a sectional view showing a main part of a vacuum valve according to a first embodiment of the present invention.
In a valve box 4 having a gas inlet 2 on one side and a gas outlet 3 on the other side, a valve body 5 for controlling opening and closing of the gas outlet 3 is provided.

A stem 6 is connected to an upper center holder 5a of the valve body 5, and the stem 6 is a piston rod (not shown) of an air cylinder 7 as an actuator.
It is connected to. The stem 6 is sealed by a bellows 8 extending upward from the upper surface 5b of the valve body 5, and the inside of the bellows 8 is maintained at atmospheric pressure by an atmosphere communication hole (not shown).

As shown in FIGS. 2 and 3, an annular opening groove 5c is formed in the lower surface of the valve body 5 as a lower surface opening, and the diameter D2 of the bottom side 5e is larger than the diameter D1 of the opening side 5d. A step 5f is formed on the bottom side 5e. A central shaft 5g as a protrusion is provided at the center of the valve body 5 on the valve seat 4a side.
A circumferential groove 5h is formed on the outer periphery of the portion located on the opening side 5d plane. Although the annular opening groove 5c is formed by digging the valve body 5 inward, it may be formed by welding an annular ring or the like to the bottom surface of the valve body 5.

Reference numeral 9 denotes an O-ring made of rubber or metal as an annular sealing material. The O-ring 9 is mounted in the annular opening groove 5c of the valve body 5, and comes into contact with the valve seat 4a when the valve is closed. The gas outlet 3 is sealed. The outer diameter D3 of the O-ring 9 is slightly larger than the diameter D1 of the opening 5d, and is equal to or slightly smaller than the diameter D2 of the bottom 5e.

Reference numeral 10 denotes an O-ring stopper as a holding member.
a, an inclined surface 10b on its side, and a valve body 5 on its center
A through hole 10c through which the central shaft 5g passes, a step portion 10d is formed on the periphery of the lower surface side fitting portion, and a tapered surface 10e having a downward angle α (≒ 3 °) is formed outside the step portion 10d. ing. And O-ring stopper 10
Similarly to the O-ring 9, it is mounted in the annular opening groove 5 c of the valve body 5 and is in contact with the inside of the O-ring 9.

As shown in FIG. 4, reference numeral 11 denotes an E-shaped ring as a thin notched ring-shaped member. The E-shaped ring 11 can be inserted into the circumferential groove 5h from a lateral direction.
When engaged with the circumferential groove 5h, it is fitted into the step portion 10d of the O-ring stopper 10 mounted in the annular opening groove 5c of the valve body 5.

FIG. 5 is a sectional view showing a main part of a vacuum valve according to a second embodiment of the present invention. A step 15b with which the ring 11 is engaged is formed. In this case, the tapered surface 10e as in the first embodiment does not exist.

FIG. 6 shows a third embodiment of the vacuum valve according to the present invention.
FIG. 3 is an assembly view showing the embodiment, in which an annular opening groove (lower surface opening) 25c is provided on the lower surface of the valve body 25 and a central shaft (projection) 25g is provided at the center of the valve seat side. A circumferential groove (circumferential groove) 25h is formed in a portion of the central shaft 25g located on a plane 25d on the opening side of the valve body 25.

Reference numeral 29 denotes a plate gasket as a plate-like sealing material. The plate gasket 29 is made of fluorine rubber or the like and is mounted in the annular opening groove 25c of the valve body 25. To seal the gas outlet (not shown). The E-shaped ring 11 that engages with the circumferential groove 25h contacts the lower surface of the plate gasket 29 as described above.

Next, the process of assembling the vacuum valve and its function will be described.

In the first embodiment of the present invention shown in FIG. 1, as shown in FIG. 3, first, an O-ring 9 is mounted in the annular opening groove 5c of the valve body 5. At this time, the outer diameter D3 of the O-ring 9 is slightly larger than the diameter D1 of the opening side 5d of the annular opening groove 5c,
Since the diameter is slightly smaller than the diameter D2 of the bottom side 5e, O
The O-ring 9 made of rubber is attached to the annular opening groove 5c by mounting the ring 9 in the annular opening groove 5c while slightly contracting the ring inward.
The inner side wall 5i is pressed and held in the annular opening groove 5c.

Next, the step 10a of the O-ring stopper 10 is engaged with the step 5f in the annular opening groove 5c, and the inclined surface 10b of the O-ring stopper 10 is brought into contact with the inner surface of the O-ring 9. As a result, the O-ring 9 moves radially outward (side wall 5i).
Side).

Then, the E-shaped ring 11 is inserted into the circumferential groove 5h of the central shaft 5g from the lateral direction and engaged therewith, and the stepped portion 10 of the O-ring stopper 10 incorporated in the annular opening groove 5c of the valve body 5 is formed.
Press in the d direction. At this time, since the downward tapered surface 10e is formed outside the contact surface 10d, the E-shaped ring 11 is always guided by the downward tapered surface 10e and guided to the step portion 10d of the O-ring stopper 10. Will be.

In the vacuum valve 1 assembled as described above, when air is supplied to the upper chamber (not shown) of the air cylinder 7 to operate, the stem 6 connected to the piston rod is pushed, and the valve body 5 is moved. The bellows 8 is extended and lowered, and the O-ring 9 is pressed against the valve seat 4a to be sealed, so that the valve is closed.

Next, in order to suck the air in the vacuum chamber 13 by the vacuum pump 12, the air in the upper chamber of the air cylinder 7 is evacuated, and the air is supplied to the lower chamber (not shown). Then, the stem 6 connected to the piston rod is pulled up, the valve body 5 shortens and rises the bellows 8, the O-ring 9 of the valve body 5 is separated from the valve seat 4a, and the valve is opened.

Even in such an operation state, an O-ring 9 and an O-ring stopper 10 which is in contact with the inside of the O-ring 9 are attached to the annular opening 5c of the valve body 5, and
Since the E-shaped ring 11 that can be inserted from the lateral direction into the peripheral groove 5h of the valve body projection 5g abuts on the lower surface of the O-ring stopper 10, the O-ring 9 is prevented from falling off and deformed by a simple operation. .

Further, since the thin E-shaped ring 11 is merely fitted on the lower surface of the O-ring 9 with the short valve body projection 5g, the E-shaped ring 9 and the valve body projection are in the valve opened state. The portion 5g does not penetrate deeply into the gas outlet 3, and the evacuation capacity as a high vacuum device is also improved.

Further, when the E-shaped ring 11 is attached to the circumferential groove 5h, the E-shaped ring 11 is guided by the downward tapered surface 10e of the O-ring stopper 10 and is easily fitted into the step portion 10d. 11 is also prevented from falling off.

In the second embodiment of the present invention shown in FIG. 5, only a step 15b with which the E-shaped ring 11 is engaged is formed on the periphery of the lower surface side fitting portion of the O-ring stopper 15 as a holding member. This is a possible structure.

Further, in the third embodiment of the present invention shown in FIG. 6, a plate gasket 2 is provided in the annular opening 25c of the valve body 25.
9 is mounted on the lower surface of the plate gasket 29, and E can be inserted into the circumferential groove 25h of the valve body projection 25g from the lateral direction.
Since the shaped ring 11 abuts, the falling off and deformation of the plate gasket 11 can be prevented by a simple operation.

Further, since the thin E-shaped ring 11 is only in contact with the short valve body projection 25g on the lower surface of the plate gasket 29, the E-shaped ring 11 and the valve body projection 25g are in the valve open state. The gas does not penetrate deeply into the gas outlet 3, and the exhaust capability as a high vacuum device is also improved.

Although the embodiments of the present invention have been described with reference to the drawings, the specific configuration is not limited to these embodiments, and changes and additions may be made without departing from the spirit of the present invention. Included in the present invention.

For example, although the E-shaped ring 11 is used as the thin notched ring-shaped member, the concentric ring 31 shown in FIG.
Alternatively, a C-shaped ring 41 shown in FIG. 8 may be used.

[0037]

The present invention has the following effects.

(A) According to the first aspect of the present invention, it is possible to prevent the annular seal member from falling off and deforming by a simple operation using the thin notched ring-shaped member. In addition, since the thin notch ring-shaped member is only in contact with the short protrusion on the lower surface of the holding member, the protrusion and the ring-shaped member do not enter deeply into the gas outlet in the valve open state. The evacuation capacity as a high vacuum device is also improved.

(B) According to the second aspect of the present invention, when the ring-shaped member is attached to the peripheral groove, the ring-shaped member engages with the step, so that the ring-shaped member can be prevented from falling off. In addition, it is easy to confirm whether the link-shaped member has been securely fitted into the circumferential groove.

(C) According to the third aspect of the present invention, when the ring-shaped member is attached to the peripheral groove, the ring-shaped member is guided by the downward tapered surface of the holding member and is always guided in the direction of the step. The installation work becomes extremely easy.

(D) According to the invention of claim 4, it is possible to prevent the plate-shaped seal member from falling off and deforming by a simple operation using the thin notched ring-shaped member. In addition, since the thin notch ring-shaped member is only in contact with the short protrusion on the lower surface of the plate-shaped seal member, when the valve is open, the protrusion and the ring-shaped member may deeply enter the gas outlet. In addition, the exhaust capacity as a high vacuum device is also improved.

[0042]

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a main part of a vacuum valve according to a first embodiment of the present invention.

FIG. 2 is an enlarged sectional view of a main part of the vacuum valve showing the first embodiment of the present invention.

FIG. 3 is an assembly view of a vacuum valve according to the first embodiment of the present invention.

FIG. 4 is a plan view of an E-shaped ring according to the first embodiment of the present invention.

FIG. 5 is an enlarged sectional view of a main part of a vacuum valve showing a second embodiment of the present invention.

FIG. 6 is an assembly view of a vacuum valve showing a third embodiment of the present invention.

FIG. 7 is a plan view of a concentric ring according to another embodiment of the present invention.

FIG. 8 is a plan view of a C-ring according to another embodiment of the present invention.

FIG. 9 is a sectional view of a main part of a conventional vacuum valve.

FIG. 10 is a sectional view of a main part of another conventional vacuum valve.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Vacuum valve 2 Gas inlet 3 Gas outlet 4 Valve box 4a Valve seat 5,25 Valve 5a Upper surface center holder 5b Upper surface 5c, 25c Annular opening groove (lower opening) 5d, 25d Opening side 5e, 25e Bottom side 5f Step 5g, 25g Projection 5h, 25h Peripheral groove 5i Side wall 6 Stem 7 Air cylinder 8 Bellows 9 O-ring (annular seal member) 10, 15 O-ring stopper (holding member) 10a Step 10b Inclined surface 10c Through hole 10d Step 10e Tapered surface 11 E-shaped ring (thin notched ring-shaped member) 12 Vacuum pump 13 Vacuum chamber 15a Step 15b Step 29 Plate gasket (plate-shaped sealing member) 31 Concentric ring (thin notched ring-shaped member) ) 41 C-shaped ring (thin notched ring-shaped member)

Claims (7)

[Claims] 1. A valve body which controls opening and closing of a gas outlet in a valve box, and is provided with a projection having a peripheral groove formed in a center portion on a valve seat side thereof; An annular seal member that seals the outlet, a holding member that fits into the protrusion and is attached to the lower surface opening of the valve body, and that contacts the inside of the annular seal member; A vacuum valve, comprising: a thin notch ring-shaped member that is insertable and abuts on the lower surface of the holding member when engaged with the peripheral groove. 2. The vacuum valve according to claim 1, wherein a step portion with which the ring-shaped member is engaged is formed at a periphery of the lower surface side fitting portion of the holding member. 3. A step portion for engaging the ring-shaped member is formed around the lower surface side fitting portion of the holding member, and a downward tapered surface is formed outside the corresponding contact step portion. The vacuum valve according to claim 1, wherein 4. A valve body which controls opening and closing of a gas outlet in a valve box, and has a projection formed with a circumferential groove in a center portion on a valve seat side thereof; A plate-shaped sealing member that seals the outlet, a thin notch ring-shaped member that can be inserted into the peripheral groove from a lateral direction, and when engaged with the peripheral groove, abuts against the lower surface of the plate-shaped sealing member. A vacuum valve comprising: 5. The vacuum valve according to claim 1, wherein the thin notched ring-shaped member is an E-shaped ring. 6. The vacuum valve according to claim 1, wherein the thin notched ring-shaped member is a concentric ring. 7. The vacuum valve according to claim 1, wherein the thin notched ring-shaped member is a C-shaped ring.