JPH1065242A - Gas laser oscillator - Google Patents

Gas laser oscillator

Info

Publication number
JPH1065242A
JPH1065242A JP22341496A JP22341496A JPH1065242A JP H1065242 A JPH1065242 A JP H1065242A JP 22341496 A JP22341496 A JP 22341496A JP 22341496 A JP22341496 A JP 22341496A JP H1065242 A JPH1065242 A JP H1065242A
Authority
JP
Japan
Prior art keywords
discharge
time
laser
timer
command output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22341496A
Other languages
Japanese (ja)
Inventor
Takayuki Yamashita
隆之 山下
Hiroyuki Hayashikawa
洋之 林川
Satoshi Eguchi
聡 江口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP22341496A priority Critical patent/JPH1065242A/en
Publication of JPH1065242A publication Critical patent/JPH1065242A/en
Pending legal-status Critical Current

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  • Lasers (AREA)

Abstract

PROBLEM TO BE SOLVED: To stop a discharge, when a disturbance due to atmospheric leak is present by counting the time when a value, obtained by amplifying a laser light detection signal from a photodetector with a specified amplification factor, drops below a set ratio of a command output and stopping a DC high-voltage source, when the time thus counted exceeds a set time of a timer. SOLUTION: A command output is set by a signal P1 attenuator 11 at a set ratio. When an arc-like discharge takes place due to a disturbance, discharge excitation is hardly performed. Since a laser output light detection signal P2 is substantially Ow, a timer 13 performs counting, if the result of comparison with the set ratio from a comparator 12, i.e., a laser light detection signal P2 ×b, is lower than the set ratio of a command output signal P1 . If it exceeds a set time, a DC high-voltage source 2 is turned OFF to interrupt the discharge. More specifically, the DC high-voltage source 2 is turned off by detecting an unstable discharge due to atmospheric leak or the like, and the discharge is stopped.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は外乱による異常放電
から安全に保護するためのガスレーザ発振装置に関する
ものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas laser oscillating device for safe protection from abnormal discharge due to disturbance.

【0002】[0002]

【従来の技術】従来のガスレーザ装置を図3に沿って説
明する。図3において、1は気体レーザ媒質、2は直流
高電圧電源、3a,3bはそれぞれ前記直流高電圧電源
2に接続された放電電極、4は光増幅しレーザ光を取出
す部分透過型反射ミラ、5は光検出器6へ入射する微少
なレーザ光を取出す部分透過型反射ミラ、7はレーザ
管、8は光検出器6からのレーザ光検出信号を増幅する
増幅器、9は指令出力信号を出力する指令出力設定器、
10は光検出器6からのレーザ出力検出信号を増幅器8
で増幅し、増幅した信号と指令出力を比較し、直流高電
圧電源2にフィードバックをかける制御装置である。
2. Description of the Related Art A conventional gas laser device will be described with reference to FIG. In FIG. 3, 1 is a gas laser medium, 2 is a DC high-voltage power supply, 3a and 3b are discharge electrodes respectively connected to the DC high-voltage power supply 2, 4 is a partially transmitting reflection mirror for amplifying light and taking out laser light, Reference numeral 5 denotes a partially transmitting reflection mirror for extracting minute laser light incident on the photodetector 6, reference numeral 7 denotes a laser tube, reference numeral 8 denotes an amplifier for amplifying the laser light detection signal from the photodetector 6, and reference numeral 9 outputs a command output signal. Command output setting device,
Reference numeral 10 designates a laser output detection signal from the photodetector 6 as an amplifier 8
Is a control device that compares the amplified signal with the command output and feeds back the DC high-voltage power supply 2.

【0003】次に従来のガスレーザ発振装置の動作につ
いて説明する。まず直流高電圧電源2に接続された放電
電極3a,3bから放電させる。これにより気体レーザ
媒質1は放電エネルギーを得て励起され、その励起され
た気体レーザ媒質は、部分透過反射ミラ4,5により形
成された光共振器で共振状態となり部分透過反射型ミラ
4よりレーザ光が出力される。このレーザ光が溶接や切
断などの加工に用いられる。また部分透過型ミラ5によ
り微少なレーザ光を取出し光検出器7で検出し、そのレ
ーザ出力信号と指令出力設定器からの指令出力信号を制
御装置により比較演算し、所定のレーザ出力が得られる
ようにパワーフィードバック制御を行っている。
Next, the operation of the conventional gas laser oscillation device will be described. First, discharge is performed from the discharge electrodes 3a and 3b connected to the DC high-voltage power supply 2. As a result, the gas laser medium 1 is excited by obtaining discharge energy, and the excited gas laser medium is brought into a resonance state by the optical resonator formed by the partial transmission reflection mirrors 4 and 5, and the laser is transmitted from the partial transmission reflection type mirror 4. Light is output. This laser light is used for processing such as welding and cutting. Further, a minute laser beam is extracted by the partial transmission type mirror 5, detected by the photodetector 7, and the laser output signal is compared with the command output signal from the command output setting device by the control device to obtain a predetermined laser output. The power feedback control is performed as follows.

【0004】[0004]

【発明が解決しようとする課題】上記従来の構成のガス
レーザ発振装置においては、大気リークやレーザガスボ
ンベの接続、ミスなどの外乱によりレーザ媒質の状態が
変化し、放電状態が不安定となり、その不安定状態を維
持し続ける問題点を有していた。
In the gas laser oscillation device having the above-mentioned conventional configuration, the state of the laser medium changes due to disturbances such as atmospheric leak, connection of a laser gas cylinder, and mistakes, and the discharge state becomes unstable. There was a problem of maintaining a stable state.

【0005】本発明は前記従来の問題点を解消すること
を目的とする。
An object of the present invention is to solve the above-mentioned conventional problems.

【0006】[0006]

【課題を解決するための手段】この目的を達成するため
に、本発明はレーザ光の出力を検出する光検出器と、前
記光検出器のレーザ光検出信号を所定の増幅率で増幅し
た値が指令出力の設定比以下になった場合にその時間を
カウントするタイマと、タイマ設定時間以上になったと
きに直流高電圧電源を停止する制御装置を備えたもので
ある。
In order to achieve this object, the present invention provides a photodetector for detecting the output of a laser beam, and a value obtained by amplifying a laser beam detection signal of the photodetector at a predetermined amplification factor. The timer includes a timer that counts the time when the value becomes equal to or less than the set ratio of the command output, and a control device that stops the DC high-voltage power supply when the time exceeds the timer set time.

【0007】[0007]

【発明の実施の形態】上記構成により、本発明のガスレ
ーザ発振装置は、外乱によりレーザ媒質の状態が変化
し、放電が不安定になった場合、それを検知し、放電を
停止する作用を有する。以下、本発明の実施の形態につ
き、図1および図2に沿って説明する。図1において、
符号1ないし10は従来と同じであるので、説明を省略
する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS With the above configuration, the gas laser oscillation device of the present invention has a function of detecting when the state of the laser medium changes due to disturbance and making the discharge unstable, and stopping the discharge. . Hereinafter, embodiments of the present invention will be described with reference to FIG. 1 and FIG. In FIG.
Reference numerals 1 to 10 are the same as those in the related art, and a description thereof will be omitted.

【0008】11は指令出力設定器9からの指令出力信
号P1を設定比aに減衰する減衰器、12は前記減衰器
11からの指令出力信号(P1×a)と、レーザ光検出
信号P2を増幅器8により所定の増幅比bで増幅したレ
ーザ光検出信号(P2×b)とを比較する比較器で、
(イ)P1×a≧P2×bまたは(ロ)P1×a<P2
×bのいずれかの比較出力信号を出力する。13はノイ
ズによる誤動作を防ぐため設定時間t(例えば3秒)を
カウントするタイマで、P1×a≧P2×bが(ハ)設
定時間t以上の場合、または(ニ)設定時間t未満の場
合のいずれかの比較出力信号を出力する。14は比較器
12からの比較出力信号(ロ)あるいはタイマ13から
の比較出力信号(ハ),(ニ)により、直流高電圧電源
2を制御する装置で、制御出力信号(ハ)の場合は直流
高電圧電源2をOFFし、比較出力信号(ロ),(ニ)
の場合は直流高電圧電源2をONし続けるものである。
Reference numeral 11 denotes an attenuator for attenuating the command output signal P1 from the command output setter 9 to a set ratio a. Reference numeral 12 denotes a command output signal (P1 × a) from the attenuator 11 and a laser beam detection signal P2. A comparator for comparing the laser light detection signal (P2 × b) amplified by the amplifier 8 with a predetermined amplification ratio b,
(A) P1 × a ≧ P2 × b or (B) P1 × a <P2
× b is output as one of the comparison output signals. A timer 13 counts a set time t (for example, 3 seconds) to prevent malfunction due to noise. When P1 × a ≧ P2 × b is longer than (c) the set time t, or (d) is shorter than the set time t. Is output. Reference numeral 14 denotes a device for controlling the DC high-voltage power supply 2 based on the comparison output signal (b) from the comparator 12 or the comparison output signals (c) and (d) from the timer 13. In the case of the control output signal (c), The DC high voltage power supply 2 is turned off, and the comparison output signal (b), (d)
In this case, the DC high-voltage power supply 2 is kept ON.

【0009】つぎに、図2に沿ってその動作を説明す
る。まず、指令出力を信号P1(例えば1kw)減衰器
11により設定比a(例えば1/10)に設定する。外
乱により放電がアーク状になった場合には、放電励起は
ほとんど行われず、レーザ出力光検出信号P2(例えば
20w)が約0wとなるため、設定比1/10で比較器
12で比較した結果レーザ光検出信号P2×bが指令出
力信号P1の1/10以上であれば、直流高電圧電源2
をON状態に維持し、1/10未満であれば、タイマ1
3によりカウントを行い、設定時間t(例えば3秒)以
上になると、放電を直流高電圧電源2をOFFし放電を
停止させる。
Next, the operation will be described with reference to FIG. First, the command output is set to a set ratio a (for example, 1/10) by the signal P1 (for example, 1 kW) attenuator 11. When the discharge becomes an arc due to disturbance, the discharge is hardly excited, and the laser output light detection signal P2 (for example, 20w) becomes about 0w. If the laser light detection signal P2 × b is 1/10 or more of the command output signal P1, the DC high voltage power supply 2
Is maintained in the ON state, and if less than 1/10, the timer 1
The counting is performed by 3, and when the set time t or more (for example, 3 seconds) or more is reached, the DC high-voltage power supply 2 is turned off to stop the discharge.

【0010】以上の動作により、大気リーク等により放
電が不安定になったことを検出し、直流高電圧電源2を
OFFにして放電を停止することができる。
With the above operation, it is possible to detect that the discharge has become unstable due to air leakage or the like, and to turn off the DC high-voltage power supply 2 to stop the discharge.

【0011】[0011]

【発明の効果】本発明のガスレーザ発振装置は、レーザ
光の出力を検出する光検出器と、前記検出器のレーザ光
検出信号を所定の増幅率で増幅した値が指定出力の設定
比以下になった場合に、その時間をカウントするタイマ
と、タイマ設定時間以上になったときに直流高電圧電源
を停止する制御装置を備えたもので、大気リーク等によ
る外乱による放電の不安定を検出し、放電を停止させる
ことができるので、ガスレーザ発振装置の構成部品の損
傷を防止する優れた効果を奏するものである。
According to the present invention, there is provided a gas laser oscillating device, comprising: a photodetector for detecting an output of a laser beam; and a value obtained by amplifying a laser beam detection signal of the detector at a predetermined amplification ratio to a set ratio of a designated output. A timer that counts the time when the time has elapsed and a control device that stops the DC high-voltage power supply when the time exceeds the timer set time. Since the discharge can be stopped, an excellent effect of preventing damage to components of the gas laser oscillation device can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施の形態におけるガスレーザ発振装
置の概略ブロック構成図
FIG. 1 is a schematic block diagram of a gas laser oscillation device according to an embodiment of the present invention.

【図2】同実施の形態におけるフローチャートFIG. 2 is a flowchart according to the embodiment;

【図3】従来例におけるガスレーザ発振装置の概略ブロ
ック図
FIG. 3 is a schematic block diagram of a conventional gas laser oscillation device.

【符号の説明】[Explanation of symbols]

6 光検出器 8 増幅器 9 指令出力設定器 11 減衰器 12 比較器 13 タイマ 14 制御装置 Reference Signs List 6 photodetector 8 amplifier 9 command output setter 11 attenuator 12 comparator 13 timer 14 controller

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】ガスレーザ媒質を高圧直流電源で放電励起
し、連続またはパルス状にレーザ光を発生するガスレー
ザ発振装置であって、そのレーザ光の出力を検出する光
検出器と、前記光検出器のレーザ光検出信号を所定の増
幅率で増幅した値が指令出力信号の設定比率以下になっ
た場合にその時間をカウントするタイマと、タイマ設定
時間以上になったときに直流高電圧電源を停止する制御
装置を備えたガスレーザ発振装置。
1. A gas laser oscillating device which discharges and excites a gas laser medium with a high-voltage DC power supply to generate laser light in a continuous or pulsed manner, wherein the photodetector detects an output of the laser light, and the photodetector. A timer that counts the time when the value obtained by amplifying the laser light detection signal at a predetermined amplification rate falls below the set ratio of the command output signal, and stops the DC high-voltage power supply when the time exceeds the timer set time Gas oscillation device provided with a control device for performing the operation.
JP22341496A 1996-08-26 1996-08-26 Gas laser oscillator Pending JPH1065242A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22341496A JPH1065242A (en) 1996-08-26 1996-08-26 Gas laser oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22341496A JPH1065242A (en) 1996-08-26 1996-08-26 Gas laser oscillator

Publications (1)

Publication Number Publication Date
JPH1065242A true JPH1065242A (en) 1998-03-06

Family

ID=16797779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22341496A Pending JPH1065242A (en) 1996-08-26 1996-08-26 Gas laser oscillator

Country Status (1)

Country Link
JP (1) JPH1065242A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014170885A (en) * 2013-03-05 2014-09-18 Fanuc Ltd Laser device capable of estimating sealing property of laser gas container

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014170885A (en) * 2013-03-05 2014-09-18 Fanuc Ltd Laser device capable of estimating sealing property of laser gas container
US9490602B2 (en) 2013-03-05 2016-11-08 Fanuc Corporation Laser system able to estimate hermetic seal of laser gas container

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