JPH1052767A - Ultrasonic vibration joining equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable joining with the welding pressure of the weight of a pressure composing body or below. SOLUTION: In the case of holding the welding pressure for members to be joined, when the internal pressure from an air cylinder 14 of a balancer mechanism 12 to a regulator 15 having a relief valve becomes higher than the pressure set with the regulator 15, a pressurized air acting on the internal pressure is relieved outside with the relief valve of the regulator 15, an upward force acting on the pressure composing body consisting of a holder 3, resonator 9 and vibrator 10 from the balancer mechanism 12 is held constant so as to be the force for only burdening the weight of the pressure composing body, whereby members to be joined are correctly joined with the smaller welding pressure than the weight of the pressure composing body.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic vibration joining apparatus for joining superposed members by ultrasonic vibration.

[0002]

2. Description of the Related Art As disclosed in Japanese Patent Publication No. 54-13349, a member to be joined superimposed between a resonator and a mounting table coupled to a vibrator for generating ultrasonic vibration is pressurized therebetween. 2. Description of the Related Art There is known an ultrasonic vibration bonding apparatus configured to hold and transmit ultrasonic vibration from a vibrator to a resonator to bond between overlapping surfaces of members to be bonded.

[0003]

With the advancement of technology, the lightening and shortening of the workpiece, which is a workpiece, has progressed, so that the pressing force required at the time of joining has been reduced, and the weight of the pressurized structure that rises and falls at the time of joining has been reduced. May become larger than the pressing force required for joining, and joining may not be performed. Also, due to the bending of the pressure holding mechanism accompanying the reduction in the size and weight of the members to be joined, there is also a problem of displacement of the resonator with respect to the members to be joined.

Therefore, according to the present invention, the weight of the pressurizing member is borne by the fluid, and the joining can be accurately performed with a pressing force smaller than the weight of the pressurizing member. It is an object of the present invention to provide an ultrasonic vibration bonding apparatus capable of restricting bending of a mechanism at the same time, preventing displacement of a resonator with respect to a member to be joined, and joining a member to be joined at an accurate position. .

[0005]

According to a first aspect of the present invention, there is provided an ultrasonic vibration bonding apparatus, wherein a balancer means is provided which bears the weight of a pressing structure with a fluid when a member to be bonded is pressed and held. . According to the configuration of the first aspect, when the internal pressure of the fluid in the balancer mechanism is equal to or higher than the set pressure during pressurization and holding of the member to be joined, the fluid acting on the internal pressure is released to the outside, so that the balancer mechanism is released from the balancer mechanism. The upward force acting on the pressurizing component is kept constant so as to bear the weight of the pressurizing component, and the member to be joined is pressed with a pressing force smaller than the weight of the pressurizing component. Can be joined accurately. An ultrasonic vibration bonding apparatus according to a second aspect is characterized in that a bending restricting means for restricting the bending of the pressing structure when the member to be bonded is pressed and held is provided. According to the second aspect of the present invention, when the pressure is held, the deflection restricting means absorbs the deflection generated in the pressing structure, thereby preventing the resonator from being displaced with respect to the member to be joined, thereby achieving accurate positioning. Thus, the members to be joined can be appropriately joined.

[0006]

1 and 2 show a first embodiment.
In this embodiment, the resonators 9 are arranged horizontally.
1 and 2, an apparatus main body 1 is provided with an air cylinder 2 constituting a pressurizing mechanism in one half thereof. A piston rod 2 a directed upward from the air cylinder 2 is connected to the holder 3. In the case of this embodiment, the movable piece 4 in which the piston rod 2a is disposed on the lower surface of the holder 3
It is attached so that it will not fall down. The movable piece 4 is fitted to a guide rod 5 fixed to the lower surface of the holder 3 so as to be able to move up and down, and is like a coil spring mounted between the lower end of the guide rod 5 protruding from the movable piece 4 and the movable piece 4. Is urged upward by the elastic body 6. Movable piece 4
On the left and right sides of the holder 3, a guide shaft 7 constituted by a spline shaft is mounted on the lower surface of the holder 3 downward. The guide shaft 7 corresponds to the device main body 1.
And is slidably engaged with the guide bush 8 mounted on the upper surface. Each guide shaft 7 is parallel to the axis in the vibration direction X of the resonator 9 mounted on the holder 3 and
The guide groove 7a is arranged on a straight line passing through the line a, and has a guide groove 7a having a mountain-shaped cross section on the outer peripheral surface in a direction orthogonal to the straight line. Each guide groove 7a is slidably engaged with a guide projection 8a projecting from the inner peripheral surface of each guide bush 8. The guide shaft 7 and the guide bush 8 constitute a deflection restricting means. The resonator 9 includes a booster 9 a coaxially coupled to the vibrator 10,
An ultrasonic horn 9b coaxially coupled to the ultrasonic horn 9b is provided, and a joining action portion 9c protrudes from the outer peripheral surface of the ultrasonic horn 9b at the maximum vibration amplitude point f5. The booster 9a has a length of 波長 wavelength of the resonance frequency from the maximum vibration amplitude point f1 to the maximum vibration amplitude point f3 via the minimum vibration amplitude point f2,
The ultrasonic horn 9b has a length of １ ／ wavelength of the resonance frequency from the maximum vibration amplitude point f3 to the maximum vibration amplitude point f5 via the minimum vibration amplitude point f4. The imaginary line in the resonator 9 is a waveform indicating the instantaneous displacement of the vibration. A mounting table 11 is provided in the other half of the apparatus main body 1 below the joining action section 9c.

[0007] Balancer mechanism 1 provided in apparatus main body 1
2 includes a single-acting air cylinder 14 mounted on the side of the apparatus main body 1 via a bracket 13 behind the guide shaft 7, and a regulator 15 with a relief valve at the bottom of the air cylinder 14. An electric air compressor 16 is piped through,
The compressed air supplied from the air compressor 16 via the regulator 15 causes the piston rod 14
a pushes out the air in the cylinder case ahead of it and releases it to the outside (relief) to extend, and the regulator 15 from behind the piston rod 14a.
When the internal pressure in the piping up to the above becomes higher than the set pressure, the relief valve of the regulator 15 automatically releases the internal pressure air to the outside. A branch portion of a bifurcated arm 17 is rotatably connected to the bracket 13 by a pin 18. One end of the arm 17 hanging downward from the pin 18 is positioned so as to correspond to the front end of a piston rod 14 a directed forward of the air cylinder 14 in the front-rear direction. The other end of the arm 17 extending forward from the pin 18 is positioned so as to correspond to a vertical direction with a stopper 19 mounted on the bracket 13 so as to adjust the amount of protrusion. The stopper 19 regulates the lower limit position of the ultrasonic horn 9b with respect to the mounting table 11. An adjusting mechanism 20 formed by a micrometer is mounted on the holder 3 located above the other end of the arm 17. The adjusting mechanism 20 rotates the upper dial to adjust the amount of protrusion of the tip below the holder 3, so that the ultrasonic horn 9 b moves downward from the holder 3 when the ultrasonic horn 9 b is lowered by the air cylinder 2. The distal end of the ultrasonic horn 9b abuts against the other end of the arm 17, and adjusts the stroke amount as a descending amount of the ultrasonic horn 9b with respect to the mounting table 11.

According to the structure of this embodiment, as shown in FIG. 1, the extending direction of the air cylinder 2 causes the joining action portion 9c to transmit the ultrasonic vibration from the vibrator 10 to the resonator 9 (vibration direction). (The same direction as X)
After moving up a predetermined distance in the direction away from the upper part 1, the extension operation of the air cylinder 2 is stopped and the joining action part 9 c
A predetermined space is formed between the lower surface of the mounting table 11 and the upper surface of the mounting table 11 for inserting and removing the overlapping portion of the members to be joined (not shown). Also, by driving the air compressor 16,
The piston rod 14a of the air cylinder 14 is extended, the arm 17 is positioned as shown by the solid line in FIG. 1, and the weight of the pressurized structure composed of the holder 3, the resonator 9, and the vibrator 10 is moved by the balancer mechanism 12. To bear.

The balancer mechanism 12 is controlled by a set pressure set in a relief valve of the regulator 15.
At most, the entire weight of the pressurized structure consisting of the holder 3, the resonator 9, and the vibrator 10 can be borne.
In a state where the balancer mechanism 12 bears the entire weight of the pressurizing structure, after the overlapped portion of the members to be joined is mounted on the joining work area on the upper surface of the mounting table 11, the air cylinder 2 is contracted and the resonator is operated. Down 9 In this lowering process, when the holder 3 pushes down the other end of the arm 17 of the balancer mechanism 12 via the tip of the adjusting mechanism 20, the arm 17 rotates around the pin 18 in the direction indicated by the phantom line, and the arm 17 rotates. One end of 17 causes the piston rod 14a of the air cylinder 14 to contract.
Then, from the air cylinder 14 to the regulator 15
When the internal pressure of the piping up to a pressure higher than the set pressure set in the relief valve of the regulator 15, the relief valve of the regulator 15 automatically releases the internal pressure air to the outside, thereby lowering the holder 3. , The upward force acting on the holder 3 from the balancer mechanism 12 is applied to the holder 3, the resonator 9, and the vibrator 1.
It can be kept constant so that it is just enough to bear the weight of the pressurizing structure consisting of zero.

When the joining action portion 9c abuts on a member to be joined (not shown) due to the subsequent lowering of the resonator 9, the movable piece 4 compresses the elastic body 6 and descends, thereby causing the elastic body 6 to join. After absorbing the impact energy to the member to be joined (not shown in FIG. 9c), the member to be joined is connected between the joining action part 9c and the mounting table 11 by the holder 3, the resonator 9, and the vibrator 10. Pressurization can be maintained with a pressing force smaller than the weight of the pressure structure.

Either after the completion of the pressure holding or before the pressure holding, electric energy is supplied to the vibrator 10 from an ultrasonic generator (not shown) to generate ultrasonic vibration in the vibrator 10. . The supply of the electric energy for oscillating the vibrator 10 is performed by, for example, providing a sensor (not shown) in the holder 3, providing a dock in the movable piece 4, and detecting the dock when the elastic body 6 is compressed by a predetermined amount. It is also possible to start supplying electric energy from the ultrasonic generator to the vibrator 10 based on the detected signal, and to cause the vibrator 10 to oscillate. Then, the resonator 9 resonates with the ultrasonic vibration from the vibrator 10, and the bonding action portion 9 c vibrates with the maximum vibration amplitude in the direction indicated by the arrow X perpendicular to the pressurizing direction by the air cylinder 2. Non-melt joining is performed between the overlapping surfaces of the members to be joined.

In the deflection control means of this embodiment,
Resonator 9 in which each guide shaft 7 is mounted on holder 3
The guide groove 7a provided on a straight line passing through the piston rod 2a in parallel with the axis of the vibration direction X of the guide bush 8 and provided on the outer peripheral surface in a direction orthogonal to the straight line protrudes from the inner peripheral surface of each guide bush 8. Since it is in sliding contact with the projection 8a,
At the time of the pressurization and holding, the bending generated in the pressurizing structure composed of the holder 3, the resonator 9, and the vibrator 10 due to the opposing forces of the joint action portion 9c and the piston rod 2a is caused by the guide groove 7a and the guide protrusion. 8a, which can be absorbed by sliding contact with the member 8a, and can be joined to the member to be joined (not shown).
Can be prevented, and the members to be joined (not shown) can be appropriately joined at an accurate position. Although not shown, the same operation and effect can be obtained by providing a guide protrusion on the guide shaft 7 instead of the guide groove 7a and providing a guide groove on the guide bush 8 instead of the guide protrusion 8a.

FIGS. 3 and 4 show a second embodiment in which the resonator 26 is arranged vertically. FIG. 3-
In 4, the apparatus main body 21 is provided with an air cylinder 22 constituting a pressurizing mechanism in one half thereof. A piston rod 22a directed upward from the air cylinder 22 is connected via a bracket 24 to a holder 23 that supports the resonator 26 in a vertical form. In the case of this embodiment, the holder 23 is slidably engaged with a pair of partitions 21b supporting the left and right sides of a gate-shaped vertical wall 21a erected at the center of the apparatus main body 21 via a guide mechanism 25 so as to be able to move up and down. doing. The guide mechanism 25 is provided with a vertical guide rail 25a protruding from the left and right sides of the holder 23 and slidingly engaging with the guide rail 25a.
b and the slider 25b fixed vertically. The resonator 26 includes a booster 26 a coaxially coupled to a vibrator 27 and an ultrasonic horn 26 coaxially coupled thereto.
b and a booster 26c coaxially coupled thereto. The ultrasonic horn 26b changes the direction of the vibration by 90 at the minimum vibration amplitude point f14 that resonates with the ultrasonic vibration from the vibrator 27.
Degree, and the maximum vibration amplitude point f1 of the converted vibration
A joining action portion 26d protrudes from the outer peripheral surface of 8, f19. The booster 26a has a length of 波長 wavelength of the resonator frequency from the maximum vibration amplitude point f11 to the maximum vibration amplitude point f13 via the minimum vibration amplitude point f12, and the ultrasonic horn 2
6b is from the maximum vibration amplitude point f13 to the minimum vibration amplitude point f14.
Of the resonator frequency up to the maximum vibration amplitude point f15
The booster 26c has a length of two wavelengths, and the booster 26c has a half wavelength of the resonator frequency from the maximum vibration amplitude point f15 to the maximum vibration amplitude point f17 via the minimum vibration amplitude point f16. In the resonator 26, a virtual line is a waveform indicating an instantaneous displacement of the vibration. Below the joining action portion 26d,
The other half of the apparatus main body 21 has a mounting table 28.

A balancer mechanism 29 provided on the apparatus main body 21 is provided with a single-acting air cylinder 31 provided via a bracket 30 on the side of the vertical wall 21a of the apparatus main body 21 behind the vertical wall 21a. Equipped, air cylinder 3
Regulator 3 with relief valve at bottom of 1
An air compressor 33 of an electric type is piped through 2 and the piston rod 31a pushes out the air in the cylinder case ahead of the air compressor 33 by the pressure air supplied from the air compressor 33 via the regulator 32. When the internal pressure in the piping from the rear of the piston rod 31a to the regulator 32 becomes higher than the set pressure, the relief valve of the regulator 32 automatically releases the internal compressed air. Escape to the outside.

On the other hand, as shown in FIG. 4, an oscillation start mechanism 34 is provided on one side of the vertical wall 21a. Oscillation start mechanism 3
Reference numeral 4 denotes a non-contact type sensor 36 which is connected to an adjusting member 35 such as a micrometer mounted on the partition 21b so as to be able to move up and down. The adjusting member 35 rotates the upper dial to adjust the vertical position of the sensor 36 connected to the tip of the adjusting member 35, so that the ultrasonic horn 26
When the b is lowered by the air cylinder 22, the dock 37 fixed to the holder 23 approaches through the vertical hole 38 formed in the partition 21b, and the approached dog 37
Is detected by the sensor 36, and the control unit (not shown) starts the operation of the ultrasonic generator that supplies electric energy to the vibrator 27 based on the electric signal converted and output from the sensor 36.

A lowering stop mechanism 39 is provided on the other side of the vertical wall 21a. The descending stop mechanism 39 includes a stopper 41 that is connected to an adjusting member 40 such as a micrometer mounted on the partition 21b so as to be able to move up and down. Adjusting member 40
The upper dial is rotated to adjust the vertical position of a stopper 41 connected to the tip of the dial, and the stopper 41 is moved to the adjusted position by a fixing means such as a screw mechanism (not shown). By fixing the ultrasonic horn 26b to the air cylinder 22a,
When the ultrasonic horn 26 descends, the stopper 41 comes into contact with the lower end of the vertical hole 42 formed in the partition 21b.
Regulates further drop of b.

According to the structure of this embodiment, when the air cylinder 22 is extended, the joining action part 26d is moved to the
After the air cylinder 22 has been moved upward by a predetermined distance in a direction away from the air cylinder 8, the extension operation of the air cylinder 22 is stopped,
A predetermined space is formed between the lower surface of 6d and the upper surface of the mounting table 28 for inserting and removing the overlapped portion of the members to be joined (not shown). Further, the air compressor 33 is driven to extend the piston rod 31 a of the air cylinder 31, and the balancer mechanism 29 bears the weight of the pressurized structure composed of the holder 23, the resonator 26 and the vibrator 27.

The balancer mechanism 29 is controlled by a set pressure set in a relief valve of the regulator 32.
At most, the entire weight of the pressurized structure composed of the holder 23, the resonator 26, and the vibrator 27 can be borne. For example, in a state where the balancer mechanism 29 bears the entire weight of the pressurized structure, After the overlapped portion of the members to be joined is mounted on the joining work area on the upper surface of the mounting table 28, the air cylinder 22 is contracted to lower the resonator 26. During this lowering process, the holder 23 causes the piston rod 31a of the balancer mechanism 29 to perform a reducing operation via the bracket 24. When the internal pressure of the pipe from the air cylinder 31 to the regulator 32 becomes higher than the set pressure set for the relief valve in the regulator 32, the relief valve of the regulator 32 automatically releases the internal pressure air to the outside. In the downward movement of the holder 23, the upward force acting on the holder 23 from the balancer mechanism 29 is applied to the holder 23,
The lowering operation of the holder 23 is maintained constant so as to have a force enough to bear the weight of the pressurizing structure composed of the resonator 26 and the vibrator 27, and the air cylinder 2 as a pressurizing mechanism is used.
2 can be performed smoothly with the lowering operation force.

By the subsequent lowering of the resonator 26, the joining action portion 26d presses and holds a member to be joined (not shown) to the mounting table 28 between them, and after the completion of the pressure holding or immediately before the pressure holding. In any one of them, electric energy is supplied to the vibrator 27 from an ultrasonic generator (not shown) based on a signal detected by the dock 37 from the sensor 36 of the vibration start mechanism 34 to generate ultrasonic vibration in the vibrator 27. . Then, the resonator 26 resonates with the ultrasonic vibration from the vibrator 27, and the bonding action portion 26d vibrates with the maximum vibration amplitude in a direction indicated by an arrow X perpendicular to the direction of pressurization by the air cylinder 22. Non-melt joining is performed between the overlapping surfaces of the members to be joined.

After a lapse of a predetermined time from the start of the vibration of the vibrator 27, the oscillating operation of the ultrasonic generator is stopped. Thereafter, the holder 23 is lifted, and the joined members to be joined are removed from the mounting table 28, thereby completing one cycle of joining.

The oscillation of the vibrator 27 can be stopped by using a vibration start mechanism 34 accompanying the rise of the holder 23. In this case, when the ultrasonic horn 26b is lifted by the air cylinder 22, the dock 37 moves away from the sensor 36, and the output of the electric signal from the sensor 36 to the control unit (not shown) stops. Thus, the control unit (not shown) stops the operation of the ultrasonic generator. In this case, the oscillation stop mechanism 34 is an oscillation start / stop mechanism.

[Brief description of the drawings]

FIG. 1 is a side view showing a first embodiment.

FIG. 2 is a cross-sectional view showing a deflection control unit of the embodiment.

FIG. 3 is a side view showing a second embodiment.

FIG. 4 is an exemplary front view of the embodiment with the mounting table omitted;

[Explanation of symbols]

10,27 vibrator, 9,26 resonator, 11,28
Mounting base, 12, 29 balancer mechanism, 7 guide shaft (bending control mechanism), 8 guide bush (bending control mechanism).

Claims (2)

[Claims] 1. A resonator coupled to a vibrator that generates ultrasonic vibration and a mounting table press-hold a member to be joined superposed therebetween, and transmit ultrasonic vibration from the vibrator to the resonator. Thereby, in the ultrasonic vibration joining apparatus for joining between the superposed surfaces of the members to be joined, when the members to be joined are pressed and held, the balancer means for bearing the weight of the pressurized structure with the fluid is provided. Ultrasonic vibration bonding equipment. 2. A resonator coupled to a vibrator for generating ultrasonic vibration and a mounting table press-hold a member to be joined superposed therebetween, and transmit ultrasonic vibration from the vibrator to the resonator. Thereby, in the ultrasonic vibration bonding apparatus for bonding between the superposed surfaces of the members to be bonded, when holding the members to be bonded under pressure, a bending restricting means for restricting the bending of the pressing structure is provided. Ultrasonic bonding equipment.