JPH1038538A - Object shape measurement device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To measure surface shape viewed in a plurality of directions in a short time and to improve the conformity of the coordinate between measurement data related to the plurality of directions by measuring in a plurality of directions at a time providing a shape measuring device with a plurality of optical measurement heads. SOLUTION: An upper part measurement head 60 and a lower part measurement head 62 whose, as an optical measurement head, measurement direction is downward vertical and upward vertical, respectively are assigned, facing each other, at device's upper part and device's lower part respectively. The front side surface and the rear side surface of an object to be measured 58 placed on an XY stage 54 positioned between them are, with the object 58 not inverted inside-out, shape-measured with the measurement heads 60 and 62 at the same time. Change of measurement area is done by moving the object 58 with the XY stage 54.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an object shape measuring apparatus for measuring the shape and dimensions of an object to be measured from an image of the object to be measured. Related to shortening measurement time.

[0002]

2. Description of the Related Art There has been a conventionally used object shape measuring apparatus having an optical measuring head for processing an image of an object to be measured and measuring the surface shape of the object to be measured. This device irradiates illumination light from the front side or the back side of an object to be measured, and captures a reflected light image or a transmitted light image of the object with a CCD camera mounted on a measuring head. The output image of the CCD camera is subjected to image processing to measure a pattern and its dimensions caused by a step on the surface of the object.

FIG. 8 is a side view of a conventional object shape measuring device. The apparatus has an XY stage 4 on a support 2. The support 2 and the XY stage 4 have openings in the center. Light from the illuminator 6 arranged at the lower part of the apparatus passes through the support base 2 and the opening of the XY stage 4, and reaches the optical measuring head 8 arranged at the upper part of the apparatus. On the other hand, the measuring head 8 also has illumination means.

The device under test 10 is placed on the opening of the XY stage 4. The illuminator 6 is used, for example, when the thickness of the measured object 10 is small or when measuring the shape of a through hole, and the CCD camera captures a transmission image by the CCD camera.
On the other hand, when the illuminating means of the measuring head 8 is used, a CCD camera captures an image of a shadow caused by a step on the surface of the object 10 or a pattern caused by a difference in reflectance.
The XY stage 4 can be moved in the horizontal plane direction,
Thereby, a wide area of the DUT 10 can be measured. The device under test 10 is, for example, a printed circuit board or a resin molded product.

[0005]

A conventional measuring head is:
It is arranged vertically above the XY stage 4 and measures only one direction, that is, measures only the upper surface of the DUT 10 placed on the XY stage 4. Therefore, when measuring both the upper surface and the lower surface of an object to be measured such as a double-sided printed circuit board, the object to be measured has to be turned upside down and both sides must be measured separately. Also, the height of the step can be measured with the optical measuring head of the above-mentioned apparatus, but in order to measure the height with higher accuracy, a shape measuring apparatus equipped with another type of measuring head such as a laser displacement meter is required. Measurement had to be performed separately. As described above, in the conventional object shape measuring apparatus, since a plurality of surfaces and a plurality of measurement items are separately measured, a problem that a time required for the measurement is lengthened, and a correspondence relationship of each measurement data by the separate measurement is accurately determined. There was a problem that it could not be well defined. For example, even when the measurement is performed on the front side and the back side using the same apparatus, when the DUT 10 is turned over, its position on the XY stage 4 shifts, and the distance between the front side surface shape and the back side surface shape is changed. However, there is a problem that the relative positional relationship between the two cannot be accurately grasped.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is intended to improve the consistency between measurement data in measurement from a plurality of directions and measurement of a plurality of items, and to reduce the measurement time of an object shape. It is intended to provide a device.

[0007]

In the object shape measuring apparatus according to the present invention, a plurality of optical measuring heads are provided,
It is characterized in that the shape of the object to be measured is measured simultaneously from a plurality of measurement directions. In a preferred embodiment of the present invention,
The first and second optical measurement heads included in the plurality of optical measurement heads are characterized in that their measurement directions are opposite to each other.

According to the present invention, a plurality of measurement directions of an object to be measured, for example, a shape viewed from a front side and a back side are measured in a short time. In this case, since it is not necessary to perform an operation of re-arranging the object to be measured, for example, turning the object to be turned upside down toward the optical measuring head, a deviation due to the alignment of the object to be measured with respect to the apparatus varies between the measurement directions. Instead, the relative positional relationship of the measurement data in each measurement direction is determined with high accuracy, that is, the consistency between the measurement data is improved.

In a preferred embodiment of the present invention,
Head moving means for moving the first and second optical measuring heads independently of each other in a plane direction perpendicular to the measuring direction, and independently of the first and second optical measuring heads Moving the mode by scanning and measuring both sides of the object to be measured and the first and second optical measurement heads while matching their measurement positions in the vertical plane direction, And a movement control means for controlling the head movement means in accordance with one of the modes of scanning and measuring both sides of the head.

According to this apparatus, the object to be measured is fixed to the holder, for example, and does not move, and the first and second optical measuring heads arranged to measure the front and rear surfaces of the object to be measured are provided. You can move each. Therefore, by controlling both of these measuring heads, the operation mode in which measurement is performed without cooperation between the front and rear surfaces, and the measurement position in the surface direction between the front and rear surfaces are matched, that is, measurement is performed while cooperating. Operating modes are provided. According to the former of these operation modes, the measurement in the case where the position of the measurement target area in the plane direction is different between the normal and reverse sides can be performed in parallel, and the measurement time is reduced. According to the latter, the measurement having the consistency between the measurement data on both surfaces is performed.

In a preferred aspect of the present invention, there is further provided a head relative position detecting means for detecting a relative position between the first optical measuring head and the second optical measuring head in the vertical plane direction. It is characterized by the following. In the aspect, the first and second optical measurement heads each include an illuminator that irradiates light to be focused and a sensor that detects that the light is focused on the surface of the object to be measured.
The head relative position detecting means is provided in the irradiator of the first optical measuring head, a means for projecting a registration pattern, and the sensor of the second optical measuring head, Means for detecting an optical image of a registration pattern, wherein a relative position between the first optical measuring head and the second optical measuring head is obtained and output from the position of the optical image. .

According to the present apparatus, a change in the relative positional relationship between the first and second optical measuring heads caused by the fact that the first and second optical measuring heads can move independently of each other is detected by the head relative position detecting means. Based on the detected relative position, it is possible to correct the position in the plane direction between the measurement data on the front and rear sides, and the consistency between the measurement data is improved.

In a preferred aspect of the present invention, there is provided an object moving means for moving the object in a plane direction perpendicular to the measuring direction of each of the first and second optical measuring heads. The first and second optical measuring heads are fixed to face each other, and the object to be measured is moved in the vertical plane direction by the object to be measured moving means, so that both sides of the object to be measured are moved. It is characterized by scanning and measuring.

According to this apparatus, the first and second optical measuring heads arranged to measure both the front and rear surfaces of the object to be measured are fixed with respect to the plane direction, and the scanning of the object to be measured is performed. Is performed by moving the object to be measured by an object to be measured moving means such as an XY stage. Therefore, since the relative positional relationship between the two measurement heads in the plane direction does not change, the consistency between the measurement data on both sides is always ensured.

According to a preferred aspect of the present invention, the first optical measuring head includes an irradiator that illuminates the object to be measured by epi-illumination, and the irradiator transmits light when measured by the second optical measuring head. It is characterized by being used as lighting. According to the present apparatus, the types of illumination that can be used for measurement increase. Multiple types of illumination, such as epi-illumination, transmitted illumination,
By providing the oblique illumination, for example, it is possible to select illumination that forms an image having a clear boundary between shapes, thereby improving the accuracy of shape measurement.

An object shape measuring apparatus according to the present invention has another type of measuring head for measuring surface information of an object to be measured from the same measuring direction as the optical measuring head. The surface of the object to be measured is measured by using the measuring head in a complementary manner.

According to the present invention, with respect to a measurement item which cannot be measured with the optical measuring head or whose accuracy cannot be obtained,
The measurement is performed simultaneously from the same measurement direction as that of the optical measurement head by using another type of measurement head that is good at the measurement item. Thereby, a plurality of measurement items are measured in a short time. Further, at this time, since the operation of transferring the object to be measured to another measuring apparatus equipped with, for example, another type of measuring head is not required, the displacement due to the alignment of the object to be measured with respect to the apparatus does not occur between the respective measurement items. The relative positional relationship of the measurement data of each measurement item is determined with high accuracy, that is, the consistency between the measurement data is improved.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, a preferred embodiment of the present invention will be described with reference to the drawings.

[Embodiment 1] FIG. 1 is a side view of a machine main body of an object shape measuring apparatus according to the present invention used for measuring the shape of a double-sided printed circuit board. The apparatus is configured by, for example, a small computer or the like, which measures the object to be measured and outputs measurement data such as an image, as shown in FIG. And a controller (not shown), which is a circuit for controlling the operation of the machine body.

The machine body has an XY stage 54 on a support 52. The support 52 and the XY stage 54 have an opening 56 at the center. On the opening 56 of the XY stage 54, a double-sided printed circuit board 5
8 is placed.

The present apparatus has two optical measuring heads, an upper measuring head 60 and a lower measuring head 62.
The upper measuring head 60 is vertically movable by an arm 66 from a column 64, while the lower measuring head 62 is vertically movable below the device. The measuring direction of the upper measuring head 60 is vertically downward, and the measuring port 60
From A, the shape of a wiring pattern or the like formed on the front side of the double-sided printed board 58 is imaged. The measurement direction of the lower measurement head 62 is vertically upward, opposite to the measurement direction of the upper measurement head 60. The lower measuring head 62 is mounted on the support table 52, X
An image of the wiring pattern and the like on the back surface of the double-sided printed circuit board 58 is taken from the measurement port 62A through the opening 56 of the Y stage 54.

The measuring heads 60 and 62 are arranged so as to face each other, and the horizontal coordinates of the respective measuring positions of the measuring heads coincide with each other. That is, the lower measurement head 62
At the same time, the position just behind the position where the upper measuring head 60 is measuring is simultaneously measured. In reality, it is conceivable that there is a slight difference between the horizontal coordinates of each measurement position of both measurement heads.However, such a difference is based on a standard that has a matching pattern at the same horizontal position on each side. It is grasped by measuring an object. This recognized difference is corrected at the stage of processing the image output from the measuring head. Therefore, in this device, the shape of the front side and the back side of the double-sided printed circuit board are measured simultaneously by the two measurement heads, and since their horizontal coordinates are aligned, the mutual relationship between the shapes of both sides is accurately measured. can do.

Each of the measuring heads 60 and 62 has a measuring optical system including an image pickup means such as a CCD camera and an illumination means for illuminating the object to be measured. As the illumination means, for example, a ring illumination light source which is disposed on the outer periphery of the measurement ports 60A and 62A and can perform oblique illumination, and a vertical incident illumination light source emitted from a lens system of a CCD camera are provided. As these light sources, for example, halogen lamps and the like are used.
Both measuring heads are fixed in the horizontal direction,
It is configured to be movable in the vertical direction so that focusing on the surface of the object to be measured can be performed.

Next, the operation of the present apparatus will be described. The illuminating means of each of the measuring heads 60 and 62 illuminates the surface of the double-sided printed circuit board 58, and the reflected light image is taken by each CCD camera. The imaging target position of the substrate is instructed from the data processing unit to the controller unit. Controller part is XY stage 5
By controlling the drive system of No. 4, the XY stage 54 is moved in the horizontal direction (ie, the X direction or the Y direction), and a desired portion of the double-sided printed circuit board 58 is brought into the imaging range of the CCD camera. In the present apparatus, a joystick box can be connected to the controller unit, and the XY stage 54 can be moved by the joystick operation of the measurer instead of the data processing unit.

The CCD camera outputs an image including a shadow caused by a step on the substrate surface and a pattern caused by a difference in reflectance depending on the material. The data processing unit first detects whether or not the focus of the CCD camera is on the substrate surface from the contrast of light and dark in this image,
If they do not match, the measuring optical system is moved vertically to focus on the substrate surface. Next, the data processing unit processes the focused image to extract a shape such as a step edge. The dimensions of the shape are determined based on the imaging magnification.
Further, the height of the step can be measured, for example, on the order of microns from the amount of vertical fluctuation of the measuring optical system.

In this apparatus, the illumination means of one measuring head can be used as a transmitted illumination light source for the other measuring head. If measured with transmitted illumination, for example,
Since the transmitted light image of the through hole of the printed circuit board has better contrast than the reflected light image, more accurate measurement of the shape, position, and the like of the through hole can be performed.

As described above, the present apparatus can simultaneously measure the shape of both sides of a double-sided printed circuit board. In consideration of the fact that the operation of turning over the object to be measured is not required in the present apparatus, the measurement time is reduced to half or less compared to the conventional apparatus that measures one surface at a time. Also, if you turn the DUT over,
The displacement of the object to be measured before and after that in the XY stage 54 becomes extremely large compared to the accuracy of the present apparatus itself.
In other words, while the positional relationship in the horizontal direction is unknown in the order of microns, this device measures both surfaces simultaneously without turning over the object to be measured, so the relative positions in the horizontal direction of these measured shapes of both surfaces are measured. The relationship is clear,
Surface profile measurement matched between the front side and the back side is realized.

In this apparatus, both the upper and lower measuring heads are optical measuring heads. However, for example, one of them may be a measuring head of another type such as a laser displacement meter.

[Embodiment 2] FIG. 2 is a side view of a machine main body of an object shape measuring apparatus embodying the present invention. In the figure, the same components as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted. As in the first embodiment, this device includes a data processing unit (not shown) and a controller unit (not shown) in addition to the machine main unit. The present device differs from the device of the first embodiment in that a side measurement head 70 is provided. The side face measuring head 70 images a horizontal measuring direction from the measuring port 70A. This side measurement head 70
Is provided, the side surface viewed from one direction can be simultaneously measured in addition to the top surface and the bottom surface of the measured object 72, and measurement in multiple directions can be performed quickly. In addition, a measuring head is further provided,
An apparatus that simultaneously performs measurements in more directions is also possible.

[Embodiment 3] FIG. 3 is a side view of a machine main body of an object shape measuring apparatus embodying the present invention. As in the first embodiment, this device includes a data processing unit (not shown) and a controller unit (not shown) in addition to the machine main unit.

The main body of the machine has a support base 92 installed on a lower housing 90. The support base 92 has an opening 94 at the center, and an object 96 to be measured is placed on the opening 94. The apparatus has two optical measuring heads, an upper measuring head 98 and a lower measuring head 100. Each of these optical measuring heads has the same internal configuration as the two measuring heads 60 and 62 of the first embodiment, but differs from the above-described embodiment in that they are arranged so as to be movable independently of each other in the horizontal plane direction. FIG. 4 is a schematic perspective view showing an example of a moving unit of the upper measuring head 98. The two columns 102 are slidably mounted via ball screws 104 provided at both ends of the lower housing 90, and are moved in the X-axis direction by rotating the ball screws 104 by a motor. A ball screw 10 in the Y-axis direction is provided between the two supports 102.
6 is passed. The upper measuring head 98 is a ball screw 106
Is mounted so as to be slidable on a sliding surface (not shown) via a motor, and is moved in the Y-axis direction by rotating the ball screw 106 with a motor. By such a moving means, the upper measuring head 98 can freely move in the horizontal plane direction. On the other hand, the lower measuring head 100 is arranged on an XY stage 110 provided in the lower housing 90,
Thereby, it can move freely in the X direction and the Y direction. The moving means may use another mechanism.

Upper measuring head 98, lower measuring head 10
0 has the vertical downward and vertical upward measurement directions, respectively, as in the above embodiment, but since both measurement heads 98 and 100 can move independently of each other, the respective measurement ports 98A and 100A are not necessarily directly opposite. Absent. The lower measuring head 100 measures the object 96 via the opening 94. The control unit and the data processing unit provide movement control means for controlling the movement means of both measurement heads. The movement target position information of each measurement head is passed from the data processing unit to the control unit, and the control unit controls the movement means of each measurement head.

The movement control means has, as operation modes, a non-interlocking mode in which the two measuring heads are moved independently of each other, and an interlocking mode in which the measuring positions of the two measuring heads are moved while matching the positions in the horizontal plane. According to the interlocking mode, the measurement is performed while maintaining the consistency in the horizontal plane direction between the front side and the back side of the DUT, as in the apparatus of the above embodiment. On the other hand, if the non-interlocking mode is used, when the position in the horizontal plane direction of the region to be measured is different between the front side and the back side of the measured object, they can be measured in parallel, as in the above embodiment. The measurement time is reduced as compared with the case of using a simple device or the above-mentioned interlocking mode.

In the present apparatus, since the two measuring heads 98 and 100 are independently movable, the relative positional relationship between the two measuring heads in the horizontal plane may vary due to, for example, an assembling error between the upper and lower heads. is there. That is, the upper measuring head 98 and the lower measuring head 10
Even if 0 is moved to the same coordinates in the horizontal plane, their positions in the horizontal plane may actually be shifted. The amount is small, but when the purpose is to accurately measure the correlation between the shapes of both surfaces of the object to be measured as in the present apparatus, it may cause performance degradation. Therefore, in this apparatus, head relative position detecting means for detecting the relative position of the measuring head is provided, and the control error of the movement control means is corrected based on the detected relative position.

FIG. 5 is a schematic diagram showing the principle of an example of the head relative position detecting means. Each of the measuring heads 98 and 100 includes a CCD camera 130 as an imaging unit and a halogen lamp 132 as a vertical epi-illumination light source. The optical axis of the vertical epi-illumination and the optical axis of the reflected light to be imaged are on the same line outside each measurement head, but these two optical axes are separated using the half mirror 134 in the measurement head. That is, a part of the light beam emitted from the halogen lamp 132 is bent in a right angle direction by the half mirror 134 and goes vertically to the measured object. The CCD camera 130 is arranged on the same line as the light beam and behind the half mirror 134, and the half mirror 1
At 34, a component that travels straight without being reflected is received.

In order to constitute the head relative position detecting means,
In the configuration of the measurement head, a mask 140 for an alignment pattern formed of a transmissive liquid crystal panel is arranged on one of the measurement heads (the lower measurement head 100 in the present apparatus). The mask 140 is arranged between the halogen lamp 132 and the half mirror 134 of the lower measurement head 100, and when a relative position of the measurement head is measured, a voltage signal is applied to generate an alignment pattern as shown in FIG. I do. This alignment pattern is obtained by dividing a plane into four regions by two orthogonal straight lines. Brightness and darkness of the four regions are defined alternately so that the intersection of the two straight lines, and thus the intersection of the two straight lines, which is the center of the alignment pattern, can be easily processed by image processing. The alignment pattern may be another pattern as long as the center can be easily found by image processing.

The illumination light from the halogen lamp 132 is focused on the position of the mask 140 by the lens 142, and the lenses 144 and 146 form an optical image 148 by the transmitted light of the mask 140 on the measurement direction line of the measurement head 100. The position of the alignment pattern of the lower measurement head 100 with respect to the CCD camera 130 is determined in advance by capturing the light image 148 projected on the object.

The measurement of the relative positions of the upper and lower measuring heads in the horizontal plane is performed with the measuring ports of both measuring heads facing each other by the movement control means in a state where light can pass between the upper and lower measuring heads. . That is, the coordinates in the horizontal plane of both measurement heads are the same on the movement control means. In this state,
The upper measuring head 98 moves up and down, and moves its imaging focus position up and down to detect the light image 148 of the mask 140. In the data processing section, C of the upper measuring head 98
Relative position calculation processing is performed to determine the center position of the registration pattern in the image output from the CD camera 130 and determine the difference between the center position and the center position of the lower measurement head 100 previously determined as the relative position of the two measurement heads. Do.

By correcting the horizontal coordinates of the measurement data of the front and back sides of the measured object obtained by each measuring head using the above-described relative positions, the consistency of the shapes on both sides in the horizontal plane direction is corrected. Obtainable. The measurement of the relative position between the two measurement heads is performed, for example, at the start or end of the measurement in the above-described interlocking mode, with the object 96 not to be placed in the opening 94 of the support base 92, or when the measurement is performed on the support base 92. An opening for relative position measurement may be provided separately from the opening 94 for mounting the object 96, and the opening may be appropriately used in the middle of shape measurement using the opening. According to the above-described head relative position detection means, it is not necessary for a measurer to put a reference measurement object for alignment on the support base 92, so that the relative position measurement can be automated.

[Embodiment 4] FIG. 7 is a side view of a machine main body of an object shape measuring apparatus embodying the present invention. This device is configured to include a data processing unit (not shown) and a controller unit (not shown), in addition to the machine main unit, as in the above embodiment.

The machine body has an XY stage 154 on a support 152. These supports 152, XY
The stage 154 has an opening 156 at the center. This X
An object to be measured 158 is placed on the opening 156 of the Y stage 154.

This device has two upper measuring heads.
The first upper measuring head is an optical measuring head 160. The second upper measuring head is a laser displacement meter 162. A transmitted illumination light source 164 used for measurement by the optical measuring head 160 is disposed below the apparatus. The optical measuring head 160 is disposed on the upper part of the apparatus by the arm 168 from the support 166 and directly facing the transmitted illumination light source 164, while the laser displacement meter 162 is moved by the arm 168 to the optical measuring head 160 and the transmitted illumination light source 164. Is supported beside the optical axis 170.

The laser displacement meter 162 reflects the laser emitted in the horizontal direction from the measurement port 162A vertically downward by the half mirror 172 arranged on the optical axis 170. The laser beam reflected by the object 158 is reflected by the half mirror 1
The light is reflected at 72 and enters the laser displacement meter 162. For example, the laser light is slightly tilted from the vertical
When the laser beam is incident on the laser beam 58, the deviation between the position of the reflected image of the laser beam from the object 158 and the position of the laser beam emitted from the laser displacement meter 162 is proportional to the optical path length of the laser beam. This shift is CC
The object to be measured 1 is detected from the light receiving position on the D line sensor.
The vertical position of the reflection point on 58 can be measured. In addition, the measurement port 162A is generated by the emitted laser light and reflection.
A laser displacement meter that detects a change in the phase difference from the laser light returned to the above and detects the vertical displacement of the reflection point of the object 158 to be measured is also conceivable. The laser displacement gauge 162 can measure the height more accurately than the optical measuring head 160.

The optical measuring head 160 captures and outputs a surface image of an object to be measured from the measuring port 160A using light traveling straight through the half mirror 172. Then, the data processing unit processes the image and measures the surface shape. That is, although the optical measuring head 160 and the laser displacement meter 162 are located at different positions, the measurement target 1 is moved from the same optical axis 172.
Measure the surface of 58.

In the present apparatus, a plurality of types of surface information of an object to be measured are simultaneously sampled using a plurality of types of measuring heads from the same measuring direction. That is, in the present apparatus, the optical measuring head 16
0 accurately measures the shape in the horizontal plane from the image, while the laser displacement meter 162 assists the height measurement by focusing the optical measurement head 160 to realize accurate height measurement. Thereby, the surface shape of the object to be measured can be accurately measured both horizontally and vertically.

As described above, the present apparatus simultaneously measures a plurality of measurement items such as a plane dimension, a height dimension, and a shape with a plurality of types of measurement heads, thereby shortening the measurement time and reducing the time between data of each measurement item. Is ensured in the horizontal direction. The other type of measuring head used in combination with the optical measuring head may be other than a laser displacement meter, for example, a touch probe.

[0047]

According to the object shape measuring device of the present invention, by simultaneously measuring from a plurality of directions with a plurality of optical measuring heads, the surface shape can be measured from a plurality of directions in a short time. Further, an effect of improving the consistency of coordinates between the measurement data in the plurality of directions can be obtained. Further, according to the object shape measuring apparatus of the present invention, by simultaneously measuring from the same direction with a plurality of measuring heads of different types, the measurement of the surface information of a plurality of items is performed in a short time, and the measurement of the plurality of items is performed. The effect of improving the consistency of coordinates between measurement data is obtained.

[Brief description of the drawings]

FIG. 1 is a side view of a machine main body of an object shape measuring apparatus according to a first embodiment of the present invention.

FIG. 2 is a side view of a machine main body of an object shape measuring device according to a second embodiment of the present invention.

FIG. 3 is a side view of a machine main body of an object shape measuring apparatus according to a third embodiment of the present invention.

FIG. 4 is a schematic perspective view showing an example of a moving unit of an upper measuring head according to a third embodiment.

FIG. 5 is a schematic diagram illustrating the principle of an example of a head relative position detection unit.

FIG. 6 is a schematic diagram showing an example of a matching pattern.

FIG. 7 is a side view of a machine main body of an object shape measuring apparatus according to a fourth embodiment of the present invention.

FIG. 8 is a side view of a conventional object shape measuring device.

[Explanation of symbols]

52, 152 support base, 54, 154, 110 XY stage, 60, 98 upper measuring head, 62, 100 lower measuring head, 70 side measuring head, 72, 96, 1
58 DUT, 90 Lower housing, 92 Support base, 10
4,106 ball screw, 130 CCD camera, 132
Halogen lamp, 134,172 half mirror, 14
0 Mask for alignment pattern, 160 Optical measuring head, 162 Laser displacement meter, 164 Transmission illumination light source.

Claims (8)

[Claims] An object shape measuring apparatus for processing image information output from an optical measuring head for imaging an object to measure a surface shape of the object viewed from an arbitrary measurement direction, An object shape measuring apparatus, wherein a plurality of the optical measuring heads are provided, and the shape of the object to be measured is simultaneously measured from a plurality of the measuring directions. 2. The object shape according to claim 1, wherein the first and second optical measurement heads included in the plurality of optical measurement heads have the measurement directions opposite to each other. measuring device. 3. A head moving means for moving the first and second optical measuring heads independently of each other in a plane direction perpendicular to the measuring direction thereof, and the first and second optical measuring heads. A mode in which the measuring heads are moved independently of each other to scan and measure both sides of the object to be measured, and the first and second optical measuring heads are caused to coincide with each other at the measurement positions in the vertical plane direction. 3. A moving control means for controlling the head moving means in accordance with one of a mode of moving and scanning both sides of the object to be measured and measuring.
An object shape measuring apparatus according to claim 1. 4. A head relative position detecting means for detecting a relative position between the first optical measuring head and the second optical measuring head in the vertical plane direction. Item 3. The object shape measuring device according to Item 3. 5. The method according to claim 1, wherein the first and second optical measuring heads include:
An illuminator for irradiating light to be focused and a sensor for detecting that the light is focused on the surface of the device to be measured, wherein the head relative position detecting means comprises: Means for projecting an alignment pattern, provided on the irradiator, and means for detecting an optical image of the alignment pattern by the sensor of the second optical measuring head, wherein the position of the optical image is The object shape measuring apparatus according to claim 4, wherein a relative position between the first optical measuring head and the second optical measuring head is obtained and output from the following. 6. An object moving means for moving the object to be measured in a plane direction perpendicular to the measuring direction of each of the first and second optical measuring heads, wherein the first and second optical measuring heads are provided. 2 each optical measuring head is fixed to face each other, scanning and measuring both sides of the measured object by moving the measured object in the vertical plane direction by the measured object moving means; The object shape measuring apparatus according to claim 2, wherein: 7. The apparatus according to claim 1, wherein the first optical measuring head includes an irradiator that illuminates the object under illumination, and the irradiator is used as transmitted illumination in the measurement by the second optical measuring head. The object shape measuring device according to claim 2, wherein 8. An object shape measuring apparatus for processing image information output from an optical measuring head for imaging an object to measure the surface shape of the object viewed from an arbitrary measurement direction, The optical measuring head has another type of measuring head that measures the surface information of the object to be measured from the same measuring direction as the optical measuring head, and these optical measuring heads and the other types of measuring heads are used in a complementary manner. An object shape measuring device for measuring a surface of an object to be measured.