JPH10339800A - Fluorescent x-ray analyzer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable spectroscopic adjustment (θadjustment and 2θ adjustment) easily and quickly without disassembling a spectroscope case and an installation part for an analyzing crystal. SOLUTION: A base 6 supporting an analyzing crystal 7 in the front is supported in a spectroscope case 5, so that the base 6 can rotate around a fulcrum P which traverses and passes the surface or the vicinity of the analyzing crystal 7 and can go forward and backward in the direction of a crystal supporting surface. Then, elasticity is imparted toward the back of the base 6 by a spring and the base 6 is caught and supported from the back of it by one or more pairs of adjusting screws 13 and 14 placed on both sides of the fulcrum P for the rotation of the base 6 and fitted into the spectroscope case 5. The angle of the base 6 is adjusted by manipulating the adjusting screw on one side of the rotation fulcrum P, and the advance and retreat of the base 6 is controlled by manipulating the adjusting screws 13 and 14 on both sides of the rotation fulcrum P at the same time.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a simultaneous X-ray fluorescence analyzer for performing X-ray fluorescence analysis by setting and adjusting a detection wavelength to a wavelength corresponding to an element to be analyzed.

[0002]

2. Description of the Related Art FIG. 3 illustrates a conventional example of a simultaneous X-ray fluorescence analyzer. This fluorescent X-ray analyzer irradiates a sample 3 on a sample stage 2 with excited X-rays from an X-ray tube 1,
The fluorescent X-rays reflected from the sample 3 are guided into the spectroscope case 5 through the entrance slit 4, hit the surface of the spectral crystal 7 in the case, and emit the fluorescent X-rays of a predetermined wavelength separated by the spectral crystal 7. A fulcrum P which is configured to be guided to a detector 9 through a slit 8, and that supports a spectral crystal 7 on the front surface thereof and that passes through or near the surface of the spectral crystal 7.
Is supported by the spectroscope case 5 so as to be rotatable around the center, and the six bases are pressed by a spring 21 below the fulcrum P to be urged to rotate in a fixed direction (clockwise in the drawing), and Above the fulcrum P, the base 6 is received and supported from the back by an adjusting screw 22, and the angle of the base 6 is adjusted by adjusting the adjusting screw 22. The spectral adjustment corresponding to the element to be analyzed. So-called θ adjustment (angle adjustment between the light incident side and the spectral crystal)
And 2θ adjustment (angle adjustment between the light incident side and the detector) was performed in the following procedure.

(1) First, the adjusting screw 22 is operated in a state where the spectral crystal 7 is directly supported on the base table 6, and the angle is set so that the X-ray intensity detected by the detector 9 has a maximum peak.

(2) Next, spacers 23 of various thicknesses (for example, 0.5, 1.0, 1.5, 2.0 mm) are sequentially inserted and arranged between the dispersive crystal 7 and the base table 6, and each time the adjusting operation is performed. Is performed, and the maximum X-ray intensity for each spacer 23 is measured.

(3) When the distribution characteristic of the maximum X-ray intensity with respect to the thickness of the spacer is obtained, the maximum X
Determine the spacer thickness that results in line strength.

(4) The adjusting screw 22 is operated again with the spacer 23 having a thickness capable of obtaining the maximum X-ray intensity interposed therebetween.
The angle of the base 6 is adjusted so that the detected X-ray intensity has a maximum peak.

With the above, the θ adjustment and the 2θ adjustment are completed, and the component analysis of the supplied sample 3 becomes possible.

[0008]

In the above adjustment process, each time the spacer 23 is replaced, the mounting portions of the spectrometer case 5 and the spectral crystal 7 must be disassembled, which makes the adjustment operation complicated and requires adjustment. It took a lot of time. During measurement, the inside of the spectrometer case is evacuated and the constant temperature is adjusted.
Each time the spacer 23 is replaced, it is necessary to perform evacuation and temperature adjustment, and this also requires time and effort for the adjustment operation.

The present invention has been made in view of such a point, and the spectral adjustment (θ) can be performed easily and quickly without disassembling the spectroscope case and the mounting portion of the spectral crystal.
It is an object of the present invention to provide a fluorescent X-ray analyzer capable of performing the adjustment and the 2θ adjustment).

[0010]

The X-ray fluorescence spectrometer according to the present invention is capable of rotating a base table supporting a spectroscopic crystal on its front surface around a fulcrum passing through or near the surface of the spectroscopic crystal, In addition, after being supported by the spectroscope case so as to be able to advance and retreat in the direction of the crystal support surface, it is elastically biased toward the back of the base table, and the base table is positioned on both sides of the base table rotation fulcrum. It is characterized in that it is received and supported from the back of the base table by a pair or more than one pair of adjustment screws attached to the spectrometer case, and thereby, the rotation fulcrum of the adjustment screws supporting the base table is provided. By turning the adjustment screw on one side from outside the spectrometer case, the angle of the base table can be adjusted around the fulcrum, and the adjustment screws can be adjusted in the same direction. In It is possible to advance and retreat adjust the scan table,
The angle adjustment and the front-back position adjustment of the spectral crystal can be performed by screw adjustment from outside the spectrometer case.

[0011]

FIG. 1 is a longitudinal sectional side view of the basic structure of a fluorescent X-ray analyzer according to the present invention, and FIG.
A cross-sectional plan view of the relevant part along the line is shown.

The basic configuration of this X-ray fluorescence analyzer is the same as that of the conventional X-ray fluorescence analyzer. Excitation X-rays from an X-ray tube 1 are radiated to a sample 3 on a sample stage 2, and the fluorescent X-ray The light is guided into the spectroscope case 5 through the entrance slit 4, and the fluorescent X-rays incident on the surface of the spectroscopic crystal 7 supported via the base 6 in the spectroscope case 5 are applied to the spectroscopic crystal 8. It is configured to guide the separated fluorescent X-rays of a predetermined wavelength to a detector 9 via an emission slit 8.

A fulcrum shaft 10 is formed on both sides of the base table 6 supporting the spectroscopic crystal 7 on the front surface thereof to form a fulcrum P passing transversely near the surface of the spectroscopic crystal 7. The two fulcrum shafts 10 are engaged with the front and rear long holes 11 formed in the spectroscope case 5 so that the base table 6 can rotate about the fulcrum P and can advance and retreat along the front and rear long holes 11. It is supported by.

The base table 6 is urged backward by a spring 12 acting on both fulcrum shafts 10 in a direction opposite to the crystal support surface, and is provided on two peripheral walls of the back of the spectroscope case 5. It is received and supported from the back by the adjusting screws 13 and 14.

Here, the two adjusting screws 13 and 14 are distributed to the upper side and the lower side of the fulcrum P, and the lower adjusting screw 14 has its tip directly abutting on the rear surface of the base 6. At the same time, a support bracket 15 bent in a U-shape is attached to the tip of the upper adjustment screw 13 so as to be capable of relative rotation only, and the left and right legs 15a of the support bracket 15 are provided.
Are made to abut against the back surface of the base 7 respectively. That is, the base table 6 is stably received and supported in a three-point contact state on the rear surface thereof. A guide 16 is provided on the inner surface of the spectroscope case 5.
Are protruded and inserted into the support bracket 15 so that the support bracket 15 does not rotate together with the rotation of the adjustment screw 13.

The X-ray fluorescence spectrometer of the present invention is configured as described above, and adjusts the angle of the base 6 by adjusting the angle and the front-back position (angle adjustment between the light incident side and the spectral crystal). ) And 2θ adjustment (angle adjustment between the light incident side and the detector) can be performed by screw adjustment from outside the spectroscope case 5, and the adjustment procedure is as follows.

(1) First, the upper adjustment screw 13 is rotationally adjusted to rotate the base 6 around the fulcrum P, and the detector 9 is rotated.
The angle of the base table 6 is adjusted so that the intensity of the fluorescent X-rays guided to the maximum becomes maximum.

(2) Next, after operating the lower adjustment screw 14 to advance it by a predetermined size (for example, 0.5 mm), the upper adjustment screw 13 is rotated and adjusted, and the fluorescence guided to the detector 9 is adjusted. The angle of the base 6 is adjusted so that the X-ray intensity is maximized.

(3) The above operation (2) is performed each time the lower adjustment screw 14 is advanced by a predetermined dimension (for example, 0.5 mm) so that the intensity of the fluorescent X-ray becomes maximum at each advance position. Then, adjust the angle of the base 6.

(4) After adjusting the lower adjusting screw 14 to the advanced position where the maximum X-ray intensity is obtained among the advanced positions, the upper adjusting screw 13 is again adjusted to rotate. The angle of the base 6 is adjusted so that the intensity of the fluorescent X-rays guided to the detector 9 is maximized.

With the above, θ adjustment and 2θ adjustment are completed, and component analysis of the supplied sample 3 becomes possible.

In the above-described embodiment, a pair of adjustment screws 13 and 14 are provided. However, a pair of adjustment screws or more may be provided. In short, the present invention can be configured by distributing and arranging the adjusting screws on both sides of the fulcrum, and the same effect can be obtained.

Further, in the above embodiment, the base table 6 is elastically urged by the spring 12, but the elastic urge means may be another urging means such as elastic rubber. Needless to say.

The two adjusting screws 13 and 14 are independently and remotely rotatable by motors, so that both motors can be operated based on information from the detector 9 in accordance with the above-described adjusting procedure. If the control is performed based on a program, the adjustment can be performed fully automatically, and the adjustment time can be further reduced.

[0025]

As is apparent from the above description, according to the present invention, the spectral adjustment by changing the angle and the front / rear position of the spectral crystal can be performed outside the case without disassembling the spectroscope case and the crystal mounting portion. It is possible to reduce the number of adjustments and the adjustment time.

[Brief description of the drawings]

FIG. 1 is a vertical sectional side view showing a schematic configuration of a fluorescent X-ray analyzer according to the present invention.

FIG. 2 is a cross-sectional plan view of a main part along line AA.

FIG. 3 is a vertical sectional side view showing a schematic configuration of a conventional fluorescent X-ray analyzer.

[Explanation of symbols]

 5 Spectrometer case 6 Base stand 7 Dispersion crystal 13 Adjustment screw 14 Adjustment screw P Support

Claims (1)

[Claims] 1. A base table supporting a spectral crystal on a front surface thereof,
After being supported on the spectrometer case so that it can rotate around the fulcrum that passes across or near the surface of the spectral crystal, and can move forward and backward in the direction of the crystal support surface, it is elastically biased toward the back of the base table. The fluorescent X is further characterized in that the base table is positioned on both sides of the base table rotation fulcrum and is received and supported from the back of the base table by a pair or one or more pairs of adjustment screws mounted on the spectroscope case. Line analyzer.