JP4656009B2 - X-ray analyzer - Google Patents

Description

  The present invention relates to an X-ray analyzer such as a fluorescent X-ray analyzer, an electron probe microanalyzer (EPMA), and a scanning electron microscope (SEM), and more particularly to a wavelength dispersion (WDS) X-ray analyzer. .

  X-ray analyzers that irradiate a sample with excitation rays such as primary X-rays and electron beams, and thereby detect X-rays emitted from the sample, can be roughly classified into wavelength dispersion type (WDS) and energy dispersion type ( EDS). The wavelength dispersive X-ray analyzer has a configuration in which X-rays having a specific wavelength are selected by an X-ray spectrometer combining a spectroscopic crystal and a slit and then detected by a detector. On the other hand, the energy dispersive X-ray analyzer has a configuration in which X-rays are directly detected by a semiconductor detector or the like without performing such wavelength selection, and then a detection signal is separated for each energy (that is, wavelength). . The energy dispersive type has the advantage that X-ray intensity distribution (X-ray profile) with respect to wavelength (or energy) can be acquired in a short time because information on multiple wavelengths can be obtained simultaneously without performing wavelength scanning. The S / N ratio is relatively low. On the other hand, in the wavelength dispersion type, since the wavelength is sequentially detected with a spectroscopic crystal and then detected, an X-ray profile can be obtained with high wavelength resolution and S / N ratio.

  FIG. 7 is a schematic configuration diagram of a conventionally known X-ray analyzer (see, for example, Patent Document 1). In this X-ray analysis apparatus, a minute region (electron beam irradiation position 2) irradiated with an electron beam, a curved spectral crystal 4 and an X-ray detector 6 on the sample 1 are placed on the same reference plane (paper surface in the figure). Arranged on the Roland circle 3. Then, with the electron beam irradiation position 2 as a fixed point, the curved spectral crystal 4 and the X-ray detector 6 are moved on the Roland circle 3 by a link mechanism or the like. Specifically, the curved spectral crystal 4 is incident on the curved spectral crystal 4. X-ray wavelength scanning is performed by performing scanning so that the angle of the optical axis and the emission angle change while maintaining the same relationship. In order to perform such scanning, an arm (not shown) to which the X-ray detector 6 is fixed is rotated coaxially with the rotation axis 4 a of the curved spectral crystal 4 and at an angle twice that of the curved spectral crystal 4. By such wavelength scanning, an X-ray profile over a predetermined wide wavelength range can be obtained.

  Further, as shown in FIG. 8, the X-rays emitted from the sample 1 are converged by a multicapillary X-ray lens (sometimes called a polycapillary) 7 to be collimated and introduced into a plate-type spectral crystal 8. A configuration in which X-rays separated by the type spectroscopic crystal 8 are sent to the X-ray detector 6 for detection is also known (see Patent Document 2). Also in this case, similarly to the example of FIG. 7, wavelength scanning is performed by changing θ while maintaining the double-angle relationship (θ, 2θ) between the plate-type spectral crystal 8 and the X-ray detector 6. be able to.

  By the way, the wavelength dispersive X-ray analyzer can obtain an X-ray profile having a higher wavelength resolution than the energy dispersive apparatus. Therefore, qualitative analysis based on the position of the peak appearing in the X-ray profile and the height of the peak are possible. In addition to quantitative analysis based on, state analysis based on peak waveform shape is possible. That is, since the waveform shape of the peak of the target element differs slightly depending on the form (for example, simple substance or compound) of the element in the sample, the asymmetry at the peak position of the peak waveform shape The chemical state of the element can be identified by judging how the shoulder comes out. Of course, in order to perform such state analysis, it is necessary that the waveform shape of the peak of the target element be drawn with a somewhat high wavelength resolution.

  In a conventional wavelength dispersive X-ray analyzer, an X-ray detector is driven by driving an arm or the like in synchronism with rotation of the spectroscopic crystals 4 and 8 in order to scan a predetermined wavelength range regardless of its configuration. It is necessary to repeat the moving operation of moving 6 in increments of micro steps, and to acquire the X-ray intensity for each movement. In recent years, the speed of wavelength scanning has been increased due to improvements in the drive mechanism, etc., but there is a limit to speeding up the mechanical drive using a motor as a drive source, and there are many measurement wavelength points. It is inevitable that the measurement takes time. Although the wavelength range may be narrow in the X-ray profile for state analysis, there is a problem that it takes a long measurement time because the number of measurement wavelength points increases when attempting to increase the wavelength resolution. In addition, the increase in measurement time not only makes it difficult to increase the analysis efficiency, but also when the sample is continuously irradiated with an electron beam, such as EPMA, the sample changes in quality or changes its state. Sometimes. Therefore, for example, if the X-ray profile is measured from the long wavelength side to the short wavelength side, the irradiation time of the electron beam differs between the long wavelength side and the short wavelength side, and there is a possibility that accurate analysis may be hindered.

JP 2001-33408 A JP 2005-233670 A

  The present invention has been made to solve the above-mentioned problems, and the main object of the present invention is to provide a wavelength capable of efficiently obtaining an X-ray profile for performing state analysis on a target element in a short time. A distributed X-ray analyzer is provided.

In order to solve the above-described problems, the present invention provides a wavelength dispersion type X-ray analysis in which X-rays generated from a sample are wavelength-dispersed and detected by a spectral crystal and a detector that are scanned while maintaining a predetermined angular relationship. In the device
a) micro-driving means for rotating the spectral crystal so that the incident angle of X-rays changes;
b) control means for fixing the position of the detector near the wavelength at which the peak of the target element appears and repeatedly rotating the spectroscopic crystal within a predetermined angle range by the micro-driving means;
c) processing means for creating an X-ray profile in a wavelength range corresponding to the angular range based on a detection signal obtained by the detector in synchronization with repeated rotation by the control means;
It is characterized by having.

  In the X-ray analysis apparatus according to the present invention, the driving method by the micro driving means is not particularly limited, but for that purpose, the pivotable angle may be small, but the pivoting can be performed at high speed. desirable. For this reason, for example, a magnetic actuator or a piezoelectric actuator can be used. If such an actuator is used, the micro drive means can be reduced in size, so that it can be easily incorporated into a holder or the like for holding the spectral crystal.

  In the X-ray analyzer according to the present invention, when it is desired to acquire an X-ray profile over a wide wavelength range, it is introduced into the detector while scanning the spectroscopic crystal and the detector while maintaining a predetermined angular relationship as before. The X-ray profile is created by detecting the intensity of the detected X-rays and processing the detection signal along with the scanning. Qualitative analysis and quantitative analysis are possible based on these X-ray profiles. On the other hand, when it is desired to analyze the state of an arbitrary target element, for example, when information such as the peak wavelength of the target element or the wavelength range to be analyzed is set, the control means determines that the peak position of the target element is near. Thus, the position of the spectral crystal and the detector is determined, and with the position of the detector fixed, only the spectral crystal is repeatedly reciprocally rotated within a predetermined minute angle range by the minute driving means.

  If the spectroscopic crystal is rotated while the position of the detector is fixed, the relationship between the incident angle and the outgoing angle deviates from an ideal state (that is, a state where the Bragg condition is satisfied), so X-rays introduced into the detector The intensity decreases as compared with the case where the relationship between the incident angle and the outgoing angle is in an ideal state, and the decreasing direction increases as the rotation angle increases. That is, the X-ray profile obtained by rotating only the spectral crystal is strictly approximate. However, if the rotation angle range corresponds to a narrow wavelength range that can cover the peak of a specific element, the above-described decrease in X-ray intensity can be almost ignored. In addition, in the state analysis, the analysis can be performed by comparing the shape of the standard sample analyzed under the same conditions with the shape of the X-ray profile, so that the shape of the X-ray profile is substantially approximate as described above. Is not a problem.

  Further, it is possible to create an X-ray profile in a predetermined wavelength range by rotating the spectroscopic crystal one reciprocation (or one way once) within a predetermined angle range, but if the integration time of the X-ray intensity is short It is difficult to create a clear X-ray profile that can distinguish the waveform shape. Therefore, the control unit repeats the reciprocating rotation of the spectroscopic crystal in a predetermined minute angle range, integrates the X-ray intensity obtained at the repetition, and displays the X-ray profile created in the process of the integration. It is good to do so.

  As a result, the peak waveform shape of the X-ray profile becomes clearer and the accuracy increases as the number of repetitions of the reciprocating rotation of the spectroscopic crystal is increased, that is, as the measurement time is increased. By terminating the creation of the profile when information necessary for the state analysis is obtained, the throughput of the state analysis can be improved.

  Further, as one embodiment of the X-ray analysis apparatus according to the present invention, during the operation of acquiring an X-ray profile over a wide wavelength range by scanning the spectral crystal and the detector while maintaining a predetermined angular relationship, The control means temporarily fixes the position of the detector and repeatedly rotates the spectral crystal within a predetermined angle range by the micro drive means, and the processing means has a relatively narrow wavelength corresponding to this operation. It is preferable that the X-ray profile of the range is created.

  In such a configuration, the spectral crystal and the detector are scanned while maintaining a predetermined angular relationship to rotate the spectral crystal and parameters for obtaining an X-ray profile over a wide wavelength range. It is preferable that the analyzer includes an input unit for setting parameters for acquiring an X-ray profile in a narrow wavelength range.

  According to the above embodiment, an X-ray profile with a relatively low wavelength resolution over a wide wavelength range for quantitative / qualitative analysis and an X-ray profile with a relatively high wavelength resolution in a narrow wavelength range for state analysis. It can be acquired in a short time in parallel.

  The spectroscopic crystal may be either a curved spectroscopic crystal or a flat spectroscopic crystal. For example, the spectroscopic crystal is a flat spectroscopic crystal, and X-rays generated from the sample are condensed by a multicapillary X-ray lens to be substantially parallel. The structure can be introduced into the plate-type spectral crystal. In this configuration, X-rays emitted from the sample in response to irradiation with excitation rays can be efficiently collected with a large solid angle and used for spectroscopy and detection. Therefore, the S / N ratio of the X-ray intensity is improved, and the integration time may be shortened in order to obtain the same level of X-ray intensity, which is effective in shortening the measurement time.

  The X-ray analysis apparatus according to the present invention can acquire an X-ray profile including the peak waveform shape of the target element in a shorter time than before in order to perform state analysis. As a result, the analysis efficiency of state analysis can be improved, and the time for irradiating the sample with the excitation beam in order to emit X-rays from the sample can be shortened. Changes can be avoided or mitigated, thereby improving the accuracy of the analysis.

  Hereinafter, an electron beam probe microanalyzer (EPMA) which is an embodiment of an X-ray analyzer according to the present invention will be described with reference to the drawings. FIG. 1 is a schematic configuration diagram of a main part of the EPMA of this embodiment. The same components as those already described in FIGS. 7 and 8 are denoted by the same reference numerals, and detailed description thereof is omitted.

  The EPMA according to this embodiment is similar to the EPMA having the conventional configuration described in FIG. 7, the electron beam irradiation position 2 (incident side focal point of the curved spectral crystal 4) on the sample 1, and the crystal plane of the curved spectral crystal 4. The incident surface of the X-ray detector 6 (the exit focal point of the curved spectral crystal 4) is on the Roland circle 3, and the X-ray detector 6 is controlled by the wavelength scanning drive unit 21 controlled by the control unit 23. The fixed arm (not shown) and the curved spectral crystal 4 can be driven to rotate about a coaxial rotation axis with a rotation angle ratio of 1: 2. Thus, the wavelength (energy) of the X-ray incident on the X-ray detector 6 is scanned while the curved spectral crystal 4 and the X-ray detector 6 are scanned while maintaining a predetermined relationship, that is, a double angle relationship (θ, 2θ). ) Is scanned.

  Further, as a characteristic configuration of the present embodiment, the curved spectral crystal 4 is rotated within a predetermined micro angular range around the axis 4a on the crystal plane of the curved spectral crystal 4, for example, a micro actuator comprising a magnetic actuator. A driving unit 22 is provided, and the driving of the driving unit 22 is also controlled by the control unit 23. The control unit 23 is provided with an input unit 25. When an analyst (operator) inputs and sets various parameters as will be described later using the input unit 25, the control unit 23 executes control for performing analysis according to the parameters. . A detection signal from the X-ray detector 6 is input to the data processing unit 24, executes predetermined data processing to create an X-ray profile, and executes qualitative analysis, quantitative analysis, or state analysis based on the profile. The created X-ray profile and analysis result are displayed on the display unit 26.

  In FIG. 1, in order to acquire the X-ray detection data by the data processing unit 24 in synchronization with the turning operation of the curved spectral crystal 4 by the micro driving unit 22, the micro driving unit 22 and the data are transmitted from the control unit 23. Although a control signal is sent to the processing unit 24, a monitoring unit for monitoring the amount of displacement of the curved spectral crystal 4 is provided, and a monitor signal from the monitoring unit is input to the data processing unit 24 to input the curved spectral crystal 4. Data processing synchronized with the rotation operation may be performed.

  Next, as an example of analysis by EPMA in this embodiment, an X-ray profile in a wide wavelength range for quantitative / qualitative analysis (referred to as quantitative / qualitative analysis X-ray profile) and a narrow corresponding to a specific target element for state analysis The operation when acquiring simultaneously with the X-ray profile in the wavelength range (referred to as state analysis X-ray profile) will be described with reference to FIGS. FIG. 2 is an acquired X-ray profile, and FIG. 3 is a process flowchart for this operation.

  First, the analyst inputs and sets the wavelength range (energy range) and wavelength step width of each of the quantitative / qualitative analysis X-ray profile and state analysis X-ray profile as parameters using the input unit 25 (step S1). Here, it is assumed that the wavelength range of the quantitative / qualitative analysis X-ray profile is λ1 to λ2, the wavelength step width is Δλ1, the wavelength range of the state analysis X-ray profile is λ3 to λ4, and the wavelength step width is Δλ2. Since the waveform shape of the X-ray profile is important in the state analysis, Δλ2 is generally set to a value considerably smaller than Δλ1.

  When the measurement is started, the sample 1 is irradiated with the electron beam 12 emitted from the electron gun 10 and focused by the converging lens 11, and X-rays are emitted from the electron beam irradiation position 2 of the sample 1. Further, under the control of the control unit 23, the curved scanning crystal 4 is positioned at a position where the wavelength scanning drive unit 21 can detect the X-ray of the wavelength λ 1 that is one wavelength end of the quantitative / qualitative analysis X-ray profile. The X-ray detector 6 is initialized and wavelength scanning with a wavelength step width Δλ1 is started (step S2). That is, scanning is performed so that the wavelength of the X-ray detected by the X-ray detector 6 changes from the wavelength λ1 by the wavelength step width Δλ1, and the X-ray detection data is acquired by the data processing unit 24 for each scanning (step S3).

  Next, it is determined whether or not the wavelength scanning is completed by reaching the wavelength λ2 which is the other wavelength end of the quantitative / qualitative analysis X-ray profile (step S4). It is determined whether or not the center wavelength λ5 of wavelength scanning of the analysis X-ray profile has been reached (step S5). If the center wavelength λ5 has not yet been reached, the process returns to step S3, and the acquisition of data for quantitative / qualitative analysis is continued. When the central wavelength λ5 of the wavelength scanning is reached, the acquisition of the X-ray detection data for the quantitative / qualitative analysis X-ray profile is temporarily suspended. Then, the position (angle) of the X-ray detector 6 is fixed, and under the control of the control unit 23, the micro-driving unit 22 micro-corresponds to the wavelength range λ3 to λ4 centering on the axis 4a. The reciprocating rotation is repeated at a high speed in the angular range (step S6).

  As described above, when the curved spectral crystal 4 is rotated by a minute angle, the wavelength of the X-ray incident on the X-ray detector 6 changes up and down around the wavelength λ5. Since the change amount of the angular position of the curved spectral crystal 4 corresponds to the change amount of the wavelength from the wavelength λ5, the data processing unit 24 is synchronized with the angular position when the curved spectral crystal 4 is rotated at high speed, For each angle step corresponding to the wavelength step width Δλ2, the detection signal from the X-ray detector 6 is read and acquired as X-ray detection data (step S7). Then, based on the acquired X-ray detection data, an X-ray profile having a center wavelength of λ5 and a wavelength range of λ3 to λ4 is created (step S8) and displayed on the screen of the display unit 26.

  By repeatedly rotating the curved spectral crystal 4 and integrating the X-ray detection data obtained for each rotation for each wavelength position, the signal intensity level can be increased with time. That is, the state analysis X-ray profile is displayed on the screen of the display unit 26, and the X-ray detection data acquired by repeatedly reciprocatingly rotating the curved spectral crystal 4 is reflected in the X-ray profile. ), The signal level of the X-ray profile gradually increases, the waveform shape becomes clearer, and the accuracy is improved. The analyst determines the chemical state of the target element based on the waveform shape of the X-ray profile thus displayed.

  As described above, when the curved spectral crystal 4 is slightly rotated, the incident angle θ of X-rays to the crystal 4 changes, but the position of the X-ray detector 6 is fixed. Although the spectroscopic crystal 4 and the X-ray detector 6 have a double angle relationship (θ, 2θ), the curved spectroscopic crystal 4 becomes closer to the center wavelength λ5 (closer to λ3 and λ4 in FIG. 2B). And the X-ray detector 6 deviate from the double angle relationship (θ, 2θ), and therefore the intensity of the detection signal obtained by the X-ray detector 6 decreases. However, in the state analysis, a narrow wavelength range is set so that the waveform shape of a certain peak can be observed originally (in other words, the maximum settable wavelength range is limited so that only that wavelength range can be set). Therefore, a decrease in signal intensity due to the non-ideal relationship between the curved spectral crystal 4 and the X-ray detector 6 is almost negligible.

  In the state analysis, the waveform shape of the X-ray profile (for example, the symmetry / asymmetrical shape of the waveform with respect to the peak wavelength position, the rise of the peak shoulder, etc.) is important. This can be determined by comparison with a reference X-ray profile based on the result. Therefore, if a standard sample is analyzed under the same conditions (apparatus), the degree of decrease in signal intensity will be the same, so there will be no trouble in comparing the waveform shapes as described above, and an accurate state analysis will be performed. It can be carried out.

  Note that, as described above, the signal level of the X-ray profile increases as the number of times the curved spectral crystal 4 is repeatedly rotated, but if the waveform shape becomes clear to a certain extent that the state analysis is possible, the state becomes higher. There is no need to continue acquisition of analytical X-ray profiles. Therefore, for example, when the analyst instructs the input unit 25 to cancel the acquisition of the state analysis X-ray profile, the control unit 23 stops the rotation of the curved spectral crystal 4 at that time, and the state analysis X-ray is detected. The acquisition of the profile is terminated, the process returns to step S3, and the process returns to the acquisition of the quantitative / qualitative analysis X-ray profile. Alternatively, the curved spectral crystal 4 may be rotated at a high speed for a predetermined time or a predetermined number of repetitions without returning to such an instruction, and the process may return to step S3.

  After returning to step S3, wavelength scanning with the wavelength step width Δλ1 is resumed from the previously interrupted wavelength λ5, and X-ray detection data is acquired for each wavelength step. When the wavelength λ2 that is the other wavelength end of the quantitative / qualitative analysis X-ray profile is reached, the process proceeds to step S9, and a quantitative / qualitative analysis X-ray profile is created based on the X-ray detection data acquired so far. This is displayed on the screen of the display unit 26. Thereby, as shown in FIG. 2A, the X-ray profile over the wavelength range of λ1 to λ2 is displayed. Then, predetermined data processing, specifically peak detection, is performed on the X-ray profile, the component is qualitatively determined from the peak wavelength, and the amount (concentration) of the component is calculated from the peak height, that is, the signal intensity. .

  Note that an X-ray profile may be drawn as new X-ray detection data is obtained according to wavelength scanning, instead of after X-ray detection data over the entire wavelength range is acquired. In this case, the X-ray profile shown in FIG. 2A is drawn in order from the wavelength λ1 to the wavelength λ2 (or from the wavelength λ2 to the wavelength λ1) as time passes.

  As described above, the quantitative / qualitative analysis X-ray profile over the wavelength range of λ1 to λ2 and the state analysis X-ray profile within the narrow wavelength range of λ3 to λ4 can be acquired simultaneously. For quantitative / qualitative analysis, the waveform shape of each peak is not important, and the wavelength position and signal intensity of the peak top are important. Therefore, the wavelength step width Δλ1 can be made large enough to capture the peak top. Thereby, the time required for wavelength scanning can be shortened even in a wide wavelength range. On the other hand, since the waveform shape of the peak is important for state analysis, it is necessary to reduce the wavelength step width Δλ2, but the wavelength scanning at that time may be performed by repeatedly rotating only the spectral crystal 4 at high speed. Since it is not necessary to move the X-ray detector 6 as in the prior art, the time required for wavelength scanning can be shortened.

  In the above embodiment, the case where the quantitative / qualitative analysis X-ray profile and the state analysis X-ray profile are acquired in parallel has been described. However, first, only the quantitative / qualitative analysis X-ray profile is acquired and appears in the profile. A state analysis X-ray profile in a predetermined wavelength range including the peak may be acquired. Further, not only one target element (peak) for acquiring the state analysis X-ray profile but also a plurality of target elements may be set.

  Next, EPMA according to another embodiment of the present invention will be described with reference to FIGS. 4 is a schematic configuration diagram of the main part of the EPMA according to this embodiment, FIG. 5 is a detailed diagram of the multicapillary X-ray lens 7 in FIG. 4, and FIG. 6 is a principle diagram of X-ray transmission in the multicapillary X-ray lens. is there. In FIG. 4, the same components as those in FIG.

  In this embodiment, a part of the X-rays emitted from the electron beam irradiation position 2 on the sample 1 is incident on the multicapillary X-ray lens 7 in accordance with the electron beam 12 irradiated on the sample 1 as an excitation beam, By passing through the multicapillary X-ray lens 7, it is made substantially parallel and introduced into the plate-type spectral crystal 8. X-rays having a specific wavelength component among the diffracted X-rays dispersed by the plate-type spectral crystal 8 are selected by the solar slit 9 and enter the X-ray detector 6. In this configuration, the plate-type spectral crystal 8 is placed at the center of the goniometer and the X-ray detector 6 is arranged on the circumference of the goniometer, and the plate-type spectral crystal 8 and the X-ray detector 6 are arranged by the wavelength scanning drive unit 21. The wavelength scanning is achieved by rotating each axis about the axis 8a while maintaining a predetermined angular relationship, that is, a double angle relationship (θ, 2θ).

  The multi-capillary X-ray lens 7 has a basic structure in which a large number of capillaries (several hundreds to 1,000,000) made of borosilicate glass having a small diameter of, for example, an inner diameter of about 2 to several tens μm are bundled. As shown in FIG. 6, using the principle that X-rays incident on the inside of one capillary 7a proceed while being totally reflected from the inner peripheral surface of the glass wall at an angle less than the critical angle. , Guides X-rays efficiently. In the multicapillary X-ray lens 7 used here, each capillary is narrowed toward the central axis C so as to have a focal point at F on the incident end side, and the capillaries are bundled substantially in parallel on the emission end side. It is a parallel configuration.

  However, due to the principle of transmission of X-rays in the capillary 7a as described above, as shown in FIG. 5, the X-rays emitted from the emission end do not become completely parallel light but spread by the total reflection angle α. In this way, X-rays diffracted by X-rays hitting the plate-type spectral crystal 8 at an angle different from the original incident angle are normally removed by the solar slit 9, but the plate-type spectral crystal centering on the axis 8a. When the 8 is rotated by a minute angle, the X-rays diffracted by the X-rays which spread by the total reflection angle α and hit the flat plate-type spectral crystal 8 as described above pass through the solar slit 9 and pass through the X-ray detector 6. Is incident on. That is, in the state where the position (angle) of the X-ray detector 6 is fixed as in the above-described embodiment, the plate-type spectral crystal 8 is reciprocally rotated by a minute angle so that X in a predetermined wavelength range before and after the center wavelength. A line profile can be obtained.

  It should be noted that the above embodiment is merely an example of the present invention, and it is obvious that modifications, additions, and modifications as appropriate within the scope of the present invention are included in the scope of the claims of the present application.

The schematic block diagram of the principal part of EPMA which is one Example of the X-ray analyzer which concerns on this invention. The figure which shows an example of the X-ray profile acquired by EPMA of a present Example. The processing flowchart of the characteristic operation | movement in EPMA of a present Example. The schematic block diagram of the principal part of EPMA which is the other Example of the X-ray analyzer which concerns on this invention. FIG. 5 is a detailed view of the multicapillary X-ray lens in FIG. 4. The principle figure of transmission of X-rays in a multicapillary X-ray lens. 1 is a schematic configuration diagram of an X-ray analyzer that is generally known conventionally. The schematic block diagram of the other conventionally known X-ray analyzer.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Sample 2 ... Electron beam irradiation position 3 ... Roland circle 4 ... Curved spectroscopic crystal 4a ... Rotating shaft 6 ... X-ray detector 7 ... Multicapillary X-ray lens 7a ... Capillary 8 ... Flat plate spectrocrystal 9 ... Solar slit 10 ... Electron gun 11 ... Converging lens 12 ... Electron beam 21 ... Wavelength scanning drive unit 22 ... Small drive unit 23 ... Control unit 24 ... Data processing unit 25 ... Input unit 26 ... Display unit

Claims (4)

In a wavelength dispersive X-ray analyzer that disperses and detects X-rays generated from a sample with a spectroscopic crystal that is scanned with a predetermined angular relationship and a detector,
a) micro-driving means for rotating the spectral crystal so that the incident angle of X-rays changes;
b) control means for fixing the position of the detector near the wavelength at which the peak of the target element appears and repeatedly rotating the spectroscopic crystal within a predetermined angle range by the micro-driving means;
c) processing means for creating an X-ray profile in a wavelength range corresponding to the angular range based on a detection signal obtained by the detector in synchronization with repeated rotation by the control means;
An X-ray analysis apparatus comprising:   During the operation of acquiring an X-ray profile over a wide wavelength range by scanning the spectroscopic crystal and the detector while maintaining a predetermined angular relationship, the control means temporarily fixes the position of the detector. The spectral crystal is repeatedly rotated within a predetermined angle range by the minute driving means, and the processing means creates an X-ray profile in a relatively narrow wavelength range corresponding to this operation. The X-ray analyzer according to 1.   Parameters for obtaining an X-ray profile over a wide wavelength range by scanning the spectral crystal and the detector while maintaining a predetermined angular relationship, and X-rays in a narrow wavelength range by rotating the spectral crystal The X-ray analysis apparatus according to claim 1, further comprising an input unit for an analyst to set parameters for acquiring a profile. The spectroscopic crystal is a flat plate-type spectroscopic crystal, and X-rays generated from a sample are collected by a multicapillary X-ray lens, converted into substantially parallel light, and introduced into the flat plate-type spectroscopic crystal. The X-ray analyzer according to any one of the above.

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