JPH10335963A - Crystal oscillator - Google Patents

Crystal oscillator

Info

Publication number
JPH10335963A
JPH10335963A JP15744197A JP15744197A JPH10335963A JP H10335963 A JPH10335963 A JP H10335963A JP 15744197 A JP15744197 A JP 15744197A JP 15744197 A JP15744197 A JP 15744197A JP H10335963 A JPH10335963 A JP H10335963A
Authority
JP
Japan
Prior art keywords
resin
base
silicone resin
sealing
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15744197A
Other languages
Japanese (ja)
Inventor
Susumu Sunaba
進 砂場
Yuichi Morizumi
勇一 森住
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP15744197A priority Critical patent/JPH10335963A/en
Publication of JPH10335963A publication Critical patent/JPH10335963A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To absorb moisture and gas molecules, to reduce frequency difference before and after sealing and to improve yield by enclosing and arranging an absorbing material which mixes absorbing particles with a soft host resin which is less than specific rigidity in an enclosed container. SOLUTION: This surface mounting oscillator has an excitation electrode that consists of silver electrode and leader electrode 1 in a resin-sealed container which consists of a base 3 and a cover 4 which are both made of ceramics, and a crystal piece 2 whose both ends are held by the base 3 with conductive adhesive 8 is enclosed. A recessed part 9 is provided in the base 3, and an absorbing material 10 which mixes absorbing particles 12 with silicone resin 11, whose rigidity is less than HB in the case of pencil rigidity with a prescribed allocation ratio is filled. With this, mesh of silicone resin is made large, and permeability is made good. Grains such as moisture and organic solvent are passed through, the particles 12 absorb sufficiently, moisture, etc., is prevented from attaching to the oscillator, and the change in frequencies before and after sealing is suppressed.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は水晶振動子を利用分野と
し、特に密閉容器の封止前後の周波数差を減じた表面実
装型水晶振動子(以下、面実装振動子とする)に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a crystal resonator, and more particularly to a surface mount type crystal resonator (hereinafter referred to as a surface mount resonator) having a reduced frequency difference between before and after sealing a sealed container.

【0002】[0002]

【従来の技術】[Prior art]

(発明の背景)水晶振動子は、共振特性に優れることか
ら、周波数及び時間の基準源あるいはフィルタ素子等と
して、各種の装置に多く用いられている。近年では、各
特性の規格も厳しく、例えばAV用の面実装振動子では
常温での周波数偏差は±10ppm以内としたものの要
求がある。
(Background of the Invention) Quartz resonators are often used in various devices as frequency and time reference sources or filter elements because of their excellent resonance characteristics. In recent years, the standards for each characteristic are strict. For example, there is a demand for a surface mount resonator for AV having a frequency deviation at room temperature within ± 10 ppm.

【0003】(従来技術の一例)第3図は一従来例を説
明する面実装振動子の図である。面実装振動子は、密閉
容器1内に水晶片2を封入してなる。密閉容器1は、い
ずれもセラミックとした平板状のベース3と凹状のカバ
ー4からなる。ベース3とカバー4とは、水晶片2の封
入後、カバー4の外周に塗布した接合樹脂5を約150
℃で加熱溶融して封止される。接合樹脂5は例えばエポ
キシ樹脂からなる。
FIG. 3 is a diagram of a surface-mount vibrator for explaining a conventional example. The surface mount vibrator has a crystal blank 2 sealed in a sealed container 1. The hermetically sealed container 1 includes a flat base 3 made of ceramic and a concave cover 4. After enclosing the crystal blank 2, the base 3 and the cover 4 are coated with the bonding resin 5 applied to the outer periphery of the cover 4 for about 150 minutes.
Heated and melted at ℃ and sealed. The joining resin 5 is made of, for example, an epoxy resin.

【0004】水晶片2は例えばATカットとし、第2図
に示したように、両主面の励振電極6(ab)から両端
部に引出電極7(ab)を延出してなる。励振電極6及
び引出電極7は例えば蒸着により形成される銀電極から
なる。そして、ベース3の表面に水晶片2を面対向させ
て、導電性接着剤8により、両端部を固着して保持され
る。
[0004] The crystal blank 2 is, for example, an AT cut, and as shown in Fig. 2, a lead electrode 7 (ab) extends from the excitation electrode 6 (ab) on both main surfaces to both ends. The excitation electrode 6 and the extraction electrode 7 are, for example, silver electrodes formed by vapor deposition. Then, the crystal blank 2 is opposed to the surface of the base 3, and both ends are fixed and held by the conductive adhesive 8.

【0005】[0005]

【発明が解決しようとする解決課題】[Problem to be Solved by the Invention]

(従来技術の問題点)しかしながら、上記構成の面実装
振動子では、水晶片2の封入前後すなわちベース3とカ
バー4との封止前後において、振動周波数が変化する現
象があった。すなわち、ベース3とカバー4を接合樹脂
5の加熱溶融により封止する際、接合樹脂5からの水分
や有機溶剤等の微粒子が飛散して励振電極6(ab)上
に付着し、その結果、質量負荷効果により振動周波数が
低下する現象があった。特に、銀電極の場合には金電極
等に比較して微粒子を取り込みやすく、その傾向が強か
った。
(Problems of the prior art) However, in the surface mount resonator having the above configuration, there was a phenomenon in which the vibration frequency changes before and after the sealing of the crystal blank 2, that is, before and after the sealing of the base 3 and the cover 4. That is, when the base 3 and the cover 4 are sealed by heating and melting the joining resin 5, fine particles such as water and an organic solvent from the joining resin 5 scatter and adhere to the excitation electrode 6 (ab). There was a phenomenon that the vibration frequency decreased due to the mass load effect. In particular, in the case of a silver electrode, fine particles were easily taken in as compared with a gold electrode or the like, and the tendency was strong.

【0006】このようなことから面実装振動子は、予
め、振動周波数を高めに設定して封止するようにしてい
たが、封止前後のばらつきも大きく、量産時にその全数
を常温における規定の周波数偏差内に収めることが困難
なすなわち歩留まりが悪い問題があった。なお、銀電極
を金電極にすることも考えられたが、金は高価であり、
特に量産用の場合には経済的な問題を引き起こす。
[0006] For this reason, the surface mount resonator has been sealed beforehand by setting the vibration frequency to a higher value. There is a problem that it is difficult to keep the frequency deviation within the frequency deviation, that is, the yield is poor. Although it was considered that the silver electrode was replaced by a gold electrode, gold was expensive.
Especially in the case of mass production, it causes an economic problem.

【0007】(発明の目的)本発明は、封止前後の周波
数差を減じて、歩留まりを向上したた水晶振動子を提供
することを目的とする。
(Object of the Invention) It is an object of the present invention to provide a crystal resonator having an improved yield by reducing a frequency difference before and after sealing.

【0008】[0008]

【発明が解決しようとする手段】Means to be Solved by the Invention

(発明の着目点)本発明では、実開昭2−113430
号公報の技術に着目した。すなわち、吸湿剤により容器
内に進入する水分及び気体分子を吸着して特性を安定に
維持する点に着目した。なお、吸湿剤は母体樹脂をエポ
キシ樹脂として、これに吸着粒子(合成ゼオライト)を
混在させている。
(Points of interest in the invention)
Attention was paid to the technology of the publication. That is, attention was paid to the point that moisture and gas molecules entering the container were adsorbed by the desiccant and the characteristics were stably maintained. The hygroscopic agent uses a base resin as an epoxy resin and adsorbed particles (synthetic zeolite) mixed therein.

【0009】(解決手段)本発明は、母体樹脂を鉛筆硬
度でHB以下の軟性としたシリコーン系樹脂とし、これ
に吸着粒子を混在させた吸着材を、密閉容器内に配置し
たことを基本的な解決手段とする。
(Solution Means) The present invention is basically based on the fact that a matrix resin is made of a soft silicone resin having a pencil hardness of HB or less, and an adsorbent in which adsorbed particles are mixed is disposed in a closed container. It is an important solution.

【0010】[0010]

【作用】本発明では、母体樹脂を鉛筆硬度でHB以下の
軟性としたシリコーン系樹脂としたので、シリコーン系
樹脂の分子構造である、あみ目構造の各あみ目間が大き
くなり、透過性が向上する。したがって、水分や有機溶
剤等の微粒子が通過しやすく、もってシリコーン系樹脂
内の吸着粒子に十分に取り込まれる作用がある。以下、
本発明の一実施例を説明する。
According to the present invention, since the matrix resin is a silicone resin having a pencil hardness of HB or less, the gap between each net of the net structure, which is the molecular structure of the silicone resin, is increased, and the permeability is increased. improves. Therefore, fine particles such as moisture and organic solvents can easily pass through, and thus have the effect of being sufficiently taken in by the adsorbed particles in the silicone resin. Less than,
An embodiment of the present invention will be described.

【0011】[0011]

【実施例】第1図は本発明の一実施例を説明する面実装
振動子の図である。なお、前従来例と同一部分には同番
号を付与してその説明は簡略する。面実装振動子は、前
述同様に、いずれもセラミックとしたベース3とカバー
4からなる樹脂封止による密閉容器1内に、銀電極から
なる励振電極6(ab)及び引出電極7(ab)を有し
て、導電性接着剤8により両端部をベース3に保持され
た水晶片2を封入してなる。
FIG. 1 is a view of a surface-mount vibrator for explaining an embodiment of the present invention. The same parts as those in the prior art are denoted by the same reference numerals, and description thereof will be simplified. As described above, the surface-mounting vibrator includes an excitation electrode 6 (ab) composed of a silver electrode and an extraction electrode 7 (ab) in a hermetically sealed container 1 composed of a base 3 and a cover 4, both of which are made of ceramic. The quartz pieces 2 whose both ends are held on the base 3 by the conductive adhesive 8 are sealed.

【0012】そして、この実施例では、ベース3に窪み
9を設け、吸着材10を充填してなる。吸着材10は母
体樹脂としてのシリコーン樹脂11に吸着粒子12を混
在させてなる。両者(シリコーン樹脂11と吸着粒子1
2)の配合比(重量比)は、ここでは4:6とする。ま
た、シリコーン樹脂11の硬度は鉛筆硬度で6Bとす
る。なお、吸着粒子12を母体樹脂に混在させて吸着材
10とする理由は、吸着粒子12自体には接着作用がな
いためである。
In this embodiment, a depression 9 is provided in the base 3 and an adsorbent 10 is filled. The adsorbent 10 is formed by mixing adsorbed particles 12 with a silicone resin 11 as a base resin. Both (silicone resin 11 and adsorbed particles 1
Here, the blending ratio (weight ratio) of 2) is 4: 6. The hardness of the silicone resin 11 is 6B in pencil hardness. The reason why the adsorbent particles 12 are mixed with the base resin to form the adsorbent 10 is that the adsorbent particles 12 themselves have no adhesive action.

【0013】下表1は、吸着材10なしの従来例の場合
(A)、本発明の着目した吸着材10の母体樹脂をエポ
キシ樹脂とした場合(B)、及び本実施例による吸着材
10の母体樹脂をシリコーン樹脂とした場合(C)の、
封止前後の周波数偏差Δf/f(ppm)を示す、実験
結果である。なお、fは振動子の公称周波数、Δfは封
止前後の振動周波数f1、f2の周波数差(f2−f01
ある。この例での公称周波数は32MHzであり、サン
プル個数はそれぞれ30個である。
Table 1 below shows the case of the conventional example without the adsorbent 10 (A), the case where the base resin of the adsorbent 10 of the present invention is an epoxy resin (B), and the adsorbent 10 according to the present embodiment. When the base resin of (C) is a silicone resin,
It is an experimental result showing a frequency deviation Δf / f (ppm) before and after sealing. Note that f is the nominal frequency of the vibrator, Δf is the frequency difference between the vibrating frequencies f 1 and f 2 before and after sealing (f 2 −f 01. The nominal frequency in this example is 32 MHz, and the number of samples is respectively There are 30.

【0014】 Δf/f A B C 平均値(ppm) −27.3 −15.0 2.8 最大値(同) −22.9 −10.3 5.1 最小値(同) −33.7 −17.4 −1.2Δf / f ABC Average value (ppm) −27.3 −15.0 2.8 Maximum value (same) −22.9 −10.3 5.1 Minimum value (same) −33.7 -17.4 -1.2

【0015】これらの表から、明らかなとおり、本実施
例の場合(C)は、平均値の比較で、吸着材10のない
従来例の場合(A)の対して約1/10以下、母体樹脂
をエポキシ樹脂とした場合(B)に対しては1/5以下
の周波数偏差となる。また、最大値と最小値のバラツキ
は、従来例の場合(A)は約11ppm、エポキシ樹脂
の場合(B)は7ppm、本実施例の場合(C)は6p
pmとなる。
As is apparent from these tables, in the case of the present embodiment (C), the average value is about 1/10 or less of that of the conventional example without the adsorbent 10 (A). When the resin is an epoxy resin, the frequency deviation becomes 1/5 or less with respect to (B). The variation between the maximum value and the minimum value is about 11 ppm in the case of the conventional example (A), 7 ppm in the case of the epoxy resin (B), and 6 p in the case of the present example (C).
pm.

【0016】なお、本実施例(C)の場合、封止後の振
動周波数は+方向に変化しているが、これは微粒子の付
着(負荷質量)による周波数変動より、例えば封止時の
熱による導電性接着剤の収縮等による−方向への周波数
変動要因が勝るためである。これに対し、従来例(A)
及びエポキシ樹脂(B)の場合は、周波数上昇要因より
も負荷質量による周波数上昇要因が勝るため、振動周波
数が−方向に変化する。
In the case of the present embodiment (C), the vibration frequency after sealing changes in the positive direction. This is because the frequency fluctuation factor in the negative direction due to the contraction of the conductive adhesive due to the above is superior. In contrast, the conventional example (A)
In the case of the epoxy resin (B), the vibration frequency changes in the negative direction because the frequency rise factor due to the load mass is superior to the frequency rise factor.

【0017】以上の実験につき、考察したところ、次の
結論を得た。すなわち、従来例の場合(A)は、前述し
たように、封止時の接合樹脂5から飛散する微粒子が励
振電極6(ab)上に付着して負荷質量効果により、封
止後の周波数が大幅に低下する。また、吸着材10を用
いた場合(BC)には、微粒子が吸着粒子12により取
り込まれ、励振電極6(ab)への付着を軽減する。し
たがって、従来例に比較して封止前後の周波数偏差を小
さくする。
The following conclusions were obtained by considering the above experiment. That is, in the case of the conventional example (A), as described above, the fine particles scattered from the bonding resin 5 at the time of sealing adhere to the excitation electrode 6 (ab) and the frequency after sealing is reduced by the load mass effect. It drops significantly. Further, when the adsorbent 10 is used (BC), the fine particles are taken in by the adsorbed particles 12 and the adhesion to the excitation electrode 6 (ab) is reduced. Therefore, the frequency deviation before and after sealing is reduced as compared with the conventional example.

【0018】そして、吸着粒子12を混在する母体樹脂
をエポキシ樹脂及びシリコーン樹脂とした場合を比較す
ると、次のように推察される。すなわち、エポキシ樹脂
の場合には、あみ目構造となる分子構造が密で、微粒子
の透過性が悪い。したがって、微粒子13は、第2図
(a)に模式的に示したように、吸着材10の表面近傍
上の吸着粒子12に取り込まれるのみで、吸着効率を低
下させる。
A comparison of a case where the base resin containing the adsorbed particles 12 is an epoxy resin and a silicone resin is presumed as follows. That is, in the case of an epoxy resin, the molecular structure of the net structure is dense, and the permeability of fine particles is poor. Therefore, as shown schematically in FIG. 2 (a), the fine particles 13 are merely taken into the adsorbed particles 12 on the vicinity of the surface of the adsorbent 10, thereby lowering the adsorption efficiency.

【0019】これに対し、シリコーン樹脂11の場合に
は、あみ目構造とする分子構造が一般に疎となる。すな
わち、あみ目間が大きい。したがって、微粒子の透過性
を良好にする。なお、柔軟なほど分子構造が疎となる。
このようなことから、微粒子13は内部の奥深くまで侵
入し、万遍なく吸着粒子12に取り込まれるので「第2
図(b)」、吸着効率を高めることができる、と推察さ
れる。
On the other hand, in the case of the silicone resin 11, the molecular structure of the net structure is generally sparse. That is, the gap between the nets is large. Therefore, the permeability of the fine particles is improved. The more flexible the molecular structure becomes.
For this reason, the fine particles 13 penetrate deep into the inside and are taken into the adsorbed particles 12 evenly.
FIG. 2 (b) indicates that the adsorption efficiency can be increased.

【0020】 このように、樹脂母体を柔軟性のあ
るシリコーン樹脂とした吸着材10を適用した構成であ
れば、前述のように封止前後の周波数偏差を小さくでき
る。したがって、封止前の周波数見込み量も少ないこと
から調整作業を容易にして、封止前後の誤差も小さくす
る。このことから、特に量産の場合には、ほぼ全数を良
品として規格内に収め、歩留まりを向上することができ
る。また、ばらつきも小さくさらに歩留まりを向上す
る。
As described above, with the configuration using the adsorbent 10 in which the resin matrix is a flexible silicone resin, the frequency deviation before and after sealing can be reduced as described above. Therefore, since the expected frequency before sealing is small, the adjustment operation is facilitated, and the error before and after sealing is reduced. From this, especially in the case of mass production, almost all the products can be set within the standard as non-defective products, and the yield can be improved. Further, the variation is small and the yield is further improved.

【0021】また、この実施例では、ベース3に窪み9
を設けて吸着材10を充填したので、面実装振動子の高
さ寸法を小さく維持できる。なお、窪み9を設けても、
外周の厚みは同じなので、ベース3自体の強度は維持さ
れる。
In this embodiment, the base 3 has a recess 9.
Is provided and the adsorbent 10 is filled, so that the height dimension of the surface-mount vibrator can be kept small. In addition, even if the recess 9 is provided,
Since the thickness of the outer periphery is the same, the strength of the base 3 itself is maintained.

【0022】[0022]

【他の事項】上記実施例では、シリコーン樹脂11と吸
着粒子12との配合比を4:6としたが、シリコーン樹
脂11は接着作用を有すればよく3:7程度でも十分で
ある。
[Other Matters] In the above embodiment, the mixing ratio of the silicone resin 11 and the adsorbed particles 12 was set to 4: 6. However, the silicone resin 11 only has to have an adhesive action, and about 3: 7 is sufficient.

【0023】また、シリコーン樹脂11の鉛筆硬度は6
Bとしたが、エポキシ樹脂(3〜9H程度)に比較して
一般にその硬度は小さい。本発明では、シリコーン樹脂
11の鉛筆硬度をHB以下と規定したが、これは一般に
軟質と呼ばれる分子構造の硬度であり、軟質の樹脂であ
れば実施例と同様の効果を期待できることから、これを
目安として規定してある。なお、純粋のシリコーン樹脂
11に拘わらず、鉛筆硬度をHB以下とするシリコーン
系の樹脂であってもよい。
The pencil hardness of the silicone resin 11 is 6
B was used, but its hardness was generally lower than that of epoxy resin (about 3 to 9H). In the present invention, the pencil hardness of the silicone resin 11 is specified to be HB or less, but this is a hardness of a molecular structure generally called soft, and if a soft resin is used, the same effect as that of the embodiment can be expected. It is specified as a guide. Note that, regardless of the pure silicone resin 11, a silicone resin having a pencil hardness of HB or less may be used.

【0024】また、シリコーン系の樹脂と規定したが、
例えばエポキシ樹脂を変性して硬度をHB程度として
も、この場合は耐熱性に欠けて実用にそぐわないことに
起因する。
[0024] Also, the silicone resin is defined as a silicone resin.
For example, even if the epoxy resin is modified to have a hardness of about HB, in this case, heat resistance is lacking and is not suitable for practical use.

【0025】また、ベース3に窪み9を設けて吸着材1
0を充填したが、窪み9を設けることなく、平板状のベ
ース3上に固着してもよい。また、面実装振動子に適用
して説明したが、これに限定されることなく、例えば抵
抗溶接等による密閉容器1であったとしても同様に適用
できる。
Further, a depression 9 is provided in the base 3 so that the adsorbent 1
Although 0 is filled, it may be fixed on the flat base 3 without providing the depression 9. In addition, the description has been given by applying the present invention to the surface mount resonator. However, the present invention is not limited to this.

【0026】本発明は、このようにその趣旨を逸脱しな
い範囲で適宜変更でき、要は、鉛筆硬度でHB以下とし
たシリコーン系樹脂を母体樹脂とする吸着材10を密閉
容器1内に配置し、封止前後の周波数変化を防止したも
のは、本発明の技術的範囲に属する。なお、封止後に密
閉容器1内に侵入する湿気等の微粒子を吸着してエージ
ング(経時変化)特性を向上することもも勿論である。
The present invention can be appropriately modified without departing from the spirit of the present invention. In short, an adsorbent 10 having a silicone resin having a pencil hardness of HB or less as a base resin is disposed in the closed container 1. The one that prevents the frequency change before and after sealing belongs to the technical scope of the present invention. It is needless to say that the aging (time-dependent change) characteristics can be improved by adsorbing fine particles such as moisture entering the closed container 1 after the sealing.

【0027】[0027]

【発明の効果】本発明は、鉛筆硬度でHB以下の軟性と
したシリコーン系樹脂に吸着粒子を混在させて吸着材と
し、これを密閉容器内に配置したので、封止前後の周波
数差を減じて、歩留まりを向上したた水晶振動子を提供
できる。
According to the present invention, the adsorbent is formed by mixing adsorbent particles in a silicone resin having a pencil hardness of less than HB or less, and the adsorbent is disposed in a closed container. As a result, it is possible to provide a crystal resonator having an improved yield.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例を説明する面実装振動子の断
面図である。
FIG. 1 is a cross-sectional view of a surface-mount vibrator for explaining an embodiment of the present invention.

【図2】本発明の一実施例の作用を説明する模式的な吸
着材の図である。
FIG. 2 is a schematic diagram of an adsorbent for explaining the operation of one embodiment of the present invention.

【図3】従来例を説明する面実装振動子の断面図であ
る。
FIG. 3 is a cross-sectional view of a surface-mount vibrator for explaining a conventional example.

【図4】従来例を説明する水晶片の図である。FIG. 4 is a view of a crystal piece for explaining a conventional example.

【符号の説明】[Explanation of symbols]

1 密閉容器、2水晶片、3 ベース、4 カバー、5
接合樹脂、6 励振電極、7 引出電極、8 導電性
接着剤、9 窪み、10 吸着材、11 シリコーン樹
脂、12 吸着粒子、13 微粒子.
1 Closed container, 2 crystal pieces, 3 bases, 4 covers, 5
Bonding resin, 6 excitation electrode, 7 extraction electrode, 8 conductive adhesive, 9 depression, 10 adsorbent, 11 silicone resin, 12 adsorbed particles, 13 fine particles.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】吸着粒子を母体樹脂に混在させた吸着材を
密閉容器内に配置した水晶振動子において、前記母体樹
脂をシリコーン系として、鉛筆硬度でHB以下の軟性と
したことを特徴とする水晶振動子。
1. A quartz oscillator in which an adsorbent in which adsorbed particles are mixed with a matrix resin is disposed in a closed container, wherein the matrix resin is made of silicone and has a pencil hardness of HB or less. Crystal oscillator.
【請求項2】請求項1の記載において、上記密閉容器は
平板状のベースと凹状のカバーからなり、前記ベースの
表面に窪みを設けて、該窪みに上記吸着材を充填したこ
とを特徴とする水晶振動子。
2. The airtight container according to claim 1, wherein the closed container comprises a flat base and a concave cover, and a depression is provided on a surface of the base, and the depression is filled with the adsorbent. Crystal oscillator.
JP15744197A 1997-05-30 1997-05-30 Crystal oscillator Pending JPH10335963A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15744197A JPH10335963A (en) 1997-05-30 1997-05-30 Crystal oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15744197A JPH10335963A (en) 1997-05-30 1997-05-30 Crystal oscillator

Publications (1)

Publication Number Publication Date
JPH10335963A true JPH10335963A (en) 1998-12-18

Family

ID=15649728

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15744197A Pending JPH10335963A (en) 1997-05-30 1997-05-30 Crystal oscillator

Country Status (1)

Country Link
JP (1) JPH10335963A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011254545A (en) * 2011-09-05 2011-12-15 Seiko Epson Corp Oscillation element, oscillation unit, and oscillator
WO2018074216A1 (en) * 2016-10-20 2018-04-26 株式会社村田製作所 Piezoelectric oscillator

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011254545A (en) * 2011-09-05 2011-12-15 Seiko Epson Corp Oscillation element, oscillation unit, and oscillator
WO2018074216A1 (en) * 2016-10-20 2018-04-26 株式会社村田製作所 Piezoelectric oscillator
JP6372631B1 (en) * 2016-10-20 2018-08-15 株式会社村田製作所 Piezoelectric vibrator
US11063574B2 (en) 2016-10-20 2021-07-13 Murata Manufacturing Co., Ltd. Piezoelectric resonator unit

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