JPH10335196A - Method and device for manufacturing semiconductor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the occurrence of a reply message timeout, without making significant software changes. SOLUTION: A control means wherein, comprising an interface which supports a protocol to send a reply message, as required, to a sending message from a host computer, a required process is performed in response to a message 301 from a host computer which requires a process. After the process, a reply message 303 which informs of the completion of the process is sent to the host computer is provided to a semiconductor manufacturing device. The control means where a data which indicate a process time for each process is stored in advance obtains a process time for a required process from the data, when the message of process requirement is received. Based on this, the control means sends a message 302 which informs of a time period until a reply message on process completion is sent to the host computer.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor manufacturing apparatus such as a computer or a computer network which exchanges information with a semiconductor manufacturing apparatus and needs to be connected to a host which controls the semiconductor manufacturing apparatus. The present invention relates to a method for manufacturing a semiconductor.

[0002]

2. Description of the Related Art Generally, in a semiconductor manufacturing apparatus having an interface that supports a protocol for returning a reply message if necessary from a transmission message from a host, when a processing execution request message is received from the host, execution is terminated. The time up to sending a reply message notifying is specified by the communication protocol. Therefore, when processing is performed after receiving a processing execution request message from the host and returning a reply message notifying completion of execution, the time required for the processing must be within the time specified by the communication protocol. No. If a process that does not fit within the time specified by the communication protocol is performed, the host determines that a communication error has occurred due to a timeout waiting for a reply message.

[0003] Conventionally, when performing processing that does not fit within the time prescribed by the communication protocol, a return message is provisionally returned to the host before performing the processing, and after the processing is completed, the processing is performed normally. A method such as notifying the host whether the processing has been completed is adopted.

[0004]

However, the execution time of a process performed from the reception of a process execution request message from a host to the transmission of a reply message notifying the end of execution is limited by the time when the process is changed. Changes to When the execution time changes, it is necessary to check whether the execution time falls within the time specified by the communication protocol. If it does not fit, return a reply message to the host tentatively before performing the processing, and after finishing the processing, instruct the software to notify the host whether the processing was completed normally. You have to deal with it by making changes. In addition, there is a drawback that such a measure involves a significant change in software.

In addition, when such a measure is taken, there is a disadvantage that when the apparatus stops in the processing performed after receiving the processing execution request message from the host, the host cannot detect the state of the apparatus. .

An object of the present invention is to prevent the occurrence of a reply message timeout without significantly changing software in view of the problems of the prior art.

[0007]

According to the present invention, there is provided an interface supporting a protocol for transmitting a reply message, if necessary, to a message transmitted from a host computer. Depending on the message of the processing request,
In a semiconductor manufacturing apparatus having a control unit for performing a requested process and transmitting a reply message notifying the end of the process to the host computer after the end of the process, the control unit reduces a processing time for each process. Data beforehand, and when the message of the processing request is received, the processing time of the requested processing is obtained from the data, and based on this, a message indicating the time until the return message of the processing end is transmitted is transmitted. The information is transmitted to the host computer.

In addition, the apparatus has an interface that supports a protocol for transmitting a reply message, if necessary, to a message transmitted from the host computer.
A semiconductor which performs requested processing in response to a processing request message from the host computer by a control means of the semiconductor manufacturing apparatus, and transmits a reply message notifying the end of the processing to the host computer after the processing is completed. In the manufacturing method, by the control means, data indicating a processing time for each processing is stored in advance, and when a message of the processing request is received, a processing time of the requested processing is obtained from the data. A message notifying the time until the reply message of the end of the processing is transmitted is transmitted to the host computer.

Thus, the host is prevented from generating a timeout for waiting for a reply message without having to make a significant change in software.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described through examples.

[0011]

FIG. 1 is a diagram showing the relationship between a semiconductor manufacturing apparatus and a host computer according to an embodiment of the present invention. As shown in FIG. 1, a semiconductor manufacturing apparatus 101 and a host computer 102 are connected by a line 103 to perform communication. The host 102 transmits information to the apparatus 101 in units of messages, and the apparatus 101 performs processing according to the information.

FIG. 2 is a block diagram showing an electric circuit configuration in the semiconductor manufacturing apparatus 101. In the figure,
Reference numeral 201 denotes a CPU that controls the entire apparatus, and is composed of a central processing unit such as a microcomputer or a minicomputer. An external memory 202 stores programs and the like.

FIG. 3 shows a sequence of messages actually exchanged between the apparatus 101 and the host 102 in this configuration. The solid line is in the device 101 or the host 1
2 shows a flow of processing performed in the line 02, and a dotted line shows a message flowing in the line. FIG. 4 shows the details of the processing flow in the apparatus 101.

Referring to these figures, semiconductor manufacturing apparatus 1
01 will be described. Upon receiving the processing execution request message 301 from the host 102 in step 401, the semiconductor manufacturing apparatus 101 analyzes the processing in the processing execution request message in step 402, and stores the execution time corresponding to the processing from the external memory 202. read out. It is assumed that the execution time has been registered in advance.
Next, in step 403, an execution time notification message is created based on the read execution time. In the next step 404, the execution time notification message created in step 403 is transmitted to the host 102. Step 4
In step 05, the process in the process execution request message received from the host 102 in step 401 is executed. When the execution is completed, an execution end message is created in step 406, transmitted to the host 102, and the processing ends.

Next, a description will be given of an example of device manufacturing in which the semiconductor manufacturing apparatus can be used. FIG. 5 shows a micro device (a semiconductor chip such as an IC or an LSI, a liquid crystal panel, a CC)
D, thin-film magnetic head, micromachine, etc.). In step 31 (circuit design), the circuit of the semiconductor device is designed. Step 32 is a process for making a mask on the basis of the circuit pattern design.
On the other hand, in step 33 (wafer manufacture), a wafer is manufactured using a material such as silicon. Step 34 (wafer process) is referred to as a preprocess, and an actual circuit is formed on the wafer by lithography using the prepared mask and wafer. The next step 35 (assembly) is called a post-process, and is a process of forming a semiconductor chip using the wafer prepared in step 34, and includes processes such as an assembly process (dicing and bonding) and a packaging process (chip encapsulation). including. In step 36 (inspection), inspections such as an operation check test and a durability test of the semiconductor device manufactured in step 35 are performed. Through these steps, a semiconductor device is completed and shipped (step 37).

FIG. 6 shows a detailed flow of the wafer process. Step 41 (oxidation) oxidizes the wafer's surface. In step 42 (CVD), an insulating film is formed on the wafer surface. In step 43 (electrode formation), electrodes are formed on the wafer by vapor deposition. In step 44 (ion implantation), ions are implanted into the wafer. Step 45
In (resist processing), a photosensitive agent is applied to the wafer. Step 46 (exposure) uses the above-described exposure apparatus to print and expose the circuit pattern of the mask onto the wafer. In step 47 (developing), the exposed wafer is developed. In step 48 (etching), portions other than the developed resist image are removed. In step 49 (resist stripping), unnecessary resist after etching is removed. By repeating these steps, multiple circuit patterns are formed on the wafer. By using the manufacturing method of the present embodiment, a highly integrated semiconductor device, which has conventionally been difficult to manufacture, can be manufactured at low cost.

[0017]

As described above, according to the present invention, when a processing request message is received, a message notifying the time until a processing end reply message is transmitted is transmitted to the host computer. It is possible to prevent the occurrence of a reply message timeout without making a significant change in the URL.

In other words, the processing performed from the reception of the processing execution request message from the host to the transmission of the reply message notifying the end of the execution can be changed without concern for the processing time. Reply message timeout does not occur even if it does not fit within the time specified by the communication protocol. In addition, since the processing time is known on the host side, it is possible for the user to understand the state of the semiconductor manufacturing apparatus.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating a relationship between a semiconductor manufacturing apparatus and a host according to an embodiment of the present invention.

FIG. 2 is a block diagram showing an electric circuit configuration in the device of FIG.

FIG. 3 is a diagram showing a flow of messages exchanged between the semiconductor manufacturing apparatus of FIG. 1 and a host.

FIG. 4 is a flowchart of a process performed in the semiconductor manufacturing apparatus of FIG. 1;

FIG. 5 is a flowchart showing a flow of manufacturing a micro device that can be manufactured by the apparatus of FIG.

FIG. 6 is a flowchart showing a detailed flow of a wafer process in FIG. 5;

[Explanation of symbols]

101: semiconductor manufacturing apparatus, 102: host, 201: C
PU, 202: external memory, 301: processing execution request message, 302: execution time notification message, 303: processing end message.

Claims (2)

[Claims] An interface supporting a protocol for transmitting a reply message, if necessary, to a transmission message from a host computer, and performing a requested processing in response to a processing request message from the host computer. Performing the processing, and after the processing is completed, in a semiconductor manufacturing apparatus having control means for transmitting a reply message notifying the end of the processing to the host computer, the control means stores data indicating a processing time for each processing in advance. When the message of the processing request is received, the processing time of the requested processing is obtained from the data, and a message notifying the time until the return message of the processing end is transmitted to the host computer based on the data. A semiconductor manufacturing apparatus characterized in that: 2. A method according to claim 1, wherein said control means of said semiconductor manufacturing apparatus has an interface supporting a protocol for transmitting a reply message, if necessary, to a transmission message from said host computer. Performing a requested process and, after the end of the process, transmitting a reply message notifying the end of the process to the host computer. When the message of the processing request is stored in advance and the processing time of the requested processing is obtained from the data, a message notifying the time until the return message of the processing end is transmitted based on the data is sent to the host computer. Semiconductor manufacturing characterized by transmitting to Method.