JPH10333326A5 - - Google Patents
Info
- Publication number
- JPH10333326A5 JPH10333326A5 JP1997145437A JP14543797A JPH10333326A5 JP H10333326 A5 JPH10333326 A5 JP H10333326A5 JP 1997145437 A JP1997145437 A JP 1997145437A JP 14543797 A JP14543797 A JP 14543797A JP H10333326 A5 JPH10333326 A5 JP H10333326A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- acid
- branched
- optionally substituted
- photosensitive composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14543797A JP3890375B2 (ja) | 1997-06-03 | 1997-06-03 | ポジ型感光性組成物 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14543797A JP3890375B2 (ja) | 1997-06-03 | 1997-06-03 | ポジ型感光性組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH10333326A JPH10333326A (ja) | 1998-12-18 |
| JPH10333326A5 true JPH10333326A5 (OSRAM) | 2004-10-14 |
| JP3890375B2 JP3890375B2 (ja) | 2007-03-07 |
Family
ID=15385230
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14543797A Expired - Lifetime JP3890375B2 (ja) | 1997-06-03 | 1997-06-03 | ポジ型感光性組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3890375B2 (OSRAM) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3281612B2 (ja) | 1999-03-05 | 2002-05-13 | 松下電器産業株式会社 | パターン形成方法 |
| JP5544098B2 (ja) * | 2008-09-26 | 2014-07-09 | 富士フイルム株式会社 | 感活性光線性または感放射線性樹脂組成物、及び該感光性組成物を用いたパターン形成方法 |
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1997
- 1997-06-03 JP JP14543797A patent/JP3890375B2/ja not_active Expired - Lifetime