JPH10331624A - Harmful gas exhauster - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a harmful gas exhauster not required to stop an exhaust function even when a harm removing cylinder is broken through. SOLUTION: A harmful gas exhauster 1 has an exhaust pipe 13 on which an exhaust pump 11 is provided, a first harm removing cylinder 15 provided on the exhaust pipe 13, a preliminary exhaust pipe 27 connected to the exhaust pipe 13 through change-over valves 23, 25 in a state to be in parallel with the first harm removing cylinder 15 and a second har removing cylinder provided on the preliminary exhaust pipe 27. Regeneration of the first harm removing cylinder 15 is carried out while making gas harmless by a second harm removing cylinder 29 by blocking a part of the exhaust pipe 13 on which the first harm removing cylinder 15 is provided and opening the preliminary exhaust pipe 27 on which the second harm removing cylinder 29 is provided by operating the change-over valves 23, 25.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a harmful gas exhaust device provided in various treatment apparatuses for discharging harmful gas.

[0002]

2. Description of the Related Art FIG. 3 is a block diagram of a harmful gas exhaust device 8 provided in various processing devices 9 for discharging harmful gases such as a film forming device and an etching device used in a semiconductor device manufacturing process. As shown in this figure, the harmful gas exhaust device 8 is composed of an exhaust pipe 13 provided with an exhaust pump 11 and a harm removal tube 15 provided in the exhaust pipe 13. The abatement cylinder 15 is, for example, a tubular body filled with an abatement agent such as an adsorbent for removing harmful substances in the gas discharged from the processing device 9. On both sides of the abatement cylinder 15 in the exhaust pipe 13, on-off valves 17 and 19 are provided.
Is provided downstream of the abatement cylinder 15 in the exhaust pipe 13 to indicate that the adsorption of the harmful substance to the abatement agent in the abatement cylinder 15 is saturated (that is, the abatement agent has passed). A breakthrough sensor 21 for detecting is provided.

According to the harmful gas exhaust device 8, the gas generated in the processing device 9 is sent into the exhaust pipe 13 by the operation of the exhaust pump 11, and is exhausted from the exhaust pipe 13 after passing through the abatement cylinder 15. Is done. For this reason, the gas detoxified by passing through the abatement cylinder 15 is exhausted from the exhaust pipe 13.

[0004]

However, in the above-mentioned harmful gas exhaust system, since only one abatement cylinder is provided in the exhaust pipe, the abatement agent in the abatement cylinder breaks through or becomes harmful. If any trouble occurs in the cylinder, it becomes impossible to detoxify the gas discharged from the processing device in the abatement cylinder. For this reason, it is necessary to immediately stop the operation of the processing apparatus to suppress the generation of gas, to close the on-off valve, and to perform the replacement work of the abatement cylinder and other regeneration work. This causes a reduction in the operating rate of the processing apparatus provided with the harmful gas exhaust device.

[0005]

According to the present invention, there is provided a harmful gas exhaust system including an exhaust pipe and a detoxification cylinder provided in the exhaust pipe. In the harmful gas exhaust device of the first aspect, a first exhaust pipe provided in the exhaust pipe and a preliminary exhaust connected to the exhaust pipe via a switching valve in a state of being in parallel with the first exhaust pipe. It is characterized by having a pipe and a second abatement cylinder provided in the auxiliary exhaust pipe.

In the harmful gas exhaust device according to the first aspect, the exhaust pipe portion provided with the first abatement cylinder and the spare exhaust pipe provided with the second exhaust tube are branched by a switching valve. ing. For this reason, only the exhaust pipe portion provided with the first abatement cylinder is opened by the switching valve, or only the spare exhaust pipe provided with the second abatement cylinder is brought into the open state. The gas supplied into the exhaust pipe is detoxified in one of the abatement cylinder and the second abatement cylinder. Therefore, the supply of gas to either the first abatement cylinder or the second abatement cylinder is stopped while the supply of gas into the exhaust pipe and the detoxification of the gas are continued, and the abatement of each abatement cylinder is stopped. Playback is performed.

Further, in the harmful gas exhaust device according to the second aspect, an exhaust pipe, a first abatement cylinder provided on the exhaust pipe, and a second exhaust pipe provided on the exhaust pipe on a downstream side of the exhaust pipe. And a harmful cylinder. A first spare exhaust pipe is connected to the exhaust pipe via a switching valve in a state of being parallel to only the first abatement cylinder, and is in a state of being parallel to the second abatement cylinder. The second preliminary exhaust pipe is connected via a switching valve.

In the harmful gas exhaust device according to the second aspect, each switching valve opens the exhaust pipe portion provided with the first abatement cylinder and the second auxiliary exhaust pipe, and the second spare exhaust pipe is opened. The exhaust pipe portion provided with the abatement cylinder is closed, or the exhaust pipe portion provided with the first abatement cylinder is closed,
The first preliminary exhaust pipe and the exhaust pipe portion provided with the second abatement cylinder are opened. Therefore, in the same manner as the harmful gas exhaust device according to the first aspect, any one of the first abatement cylinder and the second abatement cylinder is provided while the supply of the gas into the exhaust pipe and the detoxification of the gas are continued. Gas supply to
Regeneration of each abatement cylinder is performed.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a harmful gas exhaust device according to the present invention will be described below with reference to the drawings.
The same components as those of the conventional harmful gas exhaust device described with reference to FIG. In each embodiment, the same components are denoted by the same reference numerals, and redundant description will be omitted.

(First Embodiment) FIG. 1 is a configuration diagram of a harmful gas exhaust device according to a first embodiment. The harmful gas exhaust device 1 shown in FIG. 1 is provided in various processing devices 9 that discharge harmful gases, such as a film forming device and an etching device used in a semiconductor device manufacturing process. That is, the harmful gas exhaust device 1 further includes, in addition to the exhaust pipe 13 provided with the exhaust pump 11 and the abatement cylinder (hereinafter referred to as the first abatement cylinder) 15 provided in the exhaust pipe 13, It comprises a spare exhaust pipe 27 connected to the exhaust pipe 13 via the switching valves 23 and 25, and a spare abatement cylinder (hereinafter referred to as a second abatement cylinder) 29.

The exhaust pipe 11 has one end connected to the exhaust port of the processing apparatus 9 and has an exhaust pump 13 connected in series along the exhaust pipe 11.
The first abatement cylinder 15 is provided, for example, in the middle of the exhaust pipe 11 on the downstream side of the exhaust pump 13 so as to be connected in series to the exhaust pipe 11. The first detoxifying cylinder 15 is for detoxifying the gas discharged from the processing apparatus 9 and is similar to an adsorbent or an absorbent (absorbing liquid) for removing harmful substances in the gas. It may be a cylindrical body filled with an abatement agent or a means for decomposing a gas having a harmful composition.

The preliminary exhaust pipe 27 connected to the exhaust pipe 13 via the switching valves 23 and 25 is arranged in parallel with the exhaust pipe 13 provided with the first abatement cylinder 15.
That is, both ends are connected to the exhaust pipe 13 so as to bypass the exhaust pipe 13 provided with the first abatement cylinder 15. Further, the switching valve 23,
Reference numeral 25 denotes a two-port that opens the exhaust pipe 13 or closes a part of the exhaust pipe 13 (the part where the first abatement cylinder 15 is provided) to open between the exhaust pump 11 and the auxiliary exhaust pipe 27. Shall consist of a valve. The switching valve 23,
Reference numeral 25 denotes a configuration including four on-off valves disposed between the connection portion between the exhaust pipe 13 and the preliminary exhaust pipe 27 and the first abatement cylinder 15 and the second abatement cylinder 29, respectively. good.

The second abatement cylinder 29 is provided in the pre-exhaust pipe 27 in the middle of the pre-exhaust pipe 27 so as to be connected to the pre-exhaust pipe 27 in series. This second abatement cylinder 29
The gas is made harmless in the same manner as the first detoxifying cylinder 15, and has a gas processing capacity similar to that of the first detoxifying pipe 15, or a gas processing capacity that is higher than the first detoxifying pipe 15. May be smaller.

Further, a breakthrough sensor 21 for detecting breakthrough of the first abatement cylinder 15 or the second abatement cylinder 29 is provided at a portion of the exhaust pipe 13 downstream of a connection portion of the preliminary exhaust pipe 27. Was. Here, when the switching valves 23 and 25 are electromagnetic valves, and the breakthrough sensor 21 detects breakthrough of the first abatement cylinder 15 or the second abatement cylinder 29, the switching valves 23 and 25 are used.
The connection state between the exhaust pipe 13 and the auxiliary exhaust pipe 27 by the switch 25 may be automatically switched.

In the harmful gas exhaust device 1 configured as described above, the exhaust pipe 13 provided with the first abatement cylinder 15 is provided.
The portion and the preliminary exhaust pipe 27 provided with the second exhaust pipe 29 are branched by switching valves 23 and 25. For this reason, the second abatement cylinder 29 is switched by the switching valves 23 and 25.
The first exhaust pipe 1 is closed by closing the preliminary exhaust pipe 27 provided with
The exhaust pipe portion 15 provided with the first exhaust pipe 15 is opened or the exhaust pipe 13 provided with the first exhaust pipe 15 is closed and the second exhaust pipe 29 is provided as a spare exhaust pipe. 27 can be opened.

For this reason, the gas from the processing device 9 is supplied to only one of the first abatement cylinder 15 and the second abatement cylinder 29, and the gas is supplied from the processing apparatus 9 into the exhaust pipe 13. Gas can be rendered harmless. Therefore, the processing device 9
While the supply of gas into the exhaust pipe 13 and the detoxification of the gas continue, the supply of gas to one of the first abatement cylinder 15 or the second abatement cylinder 29 is stopped, Each of the abatement cylinders 15 and 29 can be regenerated.

At this time, first, for example, the switching valves 23, 2
5, the preliminary exhaust pipe 27 is closed, and the exhaust pipe 13 is opened to operate the processing apparatus 9. Thereby, the gas from the processing device 9 is supplied to the first abatement cylinder 15 provided in the exhaust pipe 13, and the first abatement cylinder 1 is provided.
The gas detoxified in 5 is exhausted from the exhaust pipe 13.

In the process of continuously performing the above processing, if the breakthrough of the first abatement cylinder 15 is detected by the breakthrough sensor 21, the switching valves 23 and 25 are operated to perform the first removal. The exhaust pipe 13 provided with the harmful cylinder 15 is closed and the preliminary exhaust pipe 27 is opened. Then, the gas from the processing device 9 is supplied to the preliminary exhaust pipe 27 to supply the gas to the second abatement cylinder 29.
And exhausted from the exhaust pipe 13. During this time, since the portion of the exhaust pipe 13 provided with the first abatement cylinder 15 is closed, the first abatement cylinder 15 that has passed through can be regenerated (replaced in some cases).

Then, the breakage sensor 21 detects the second abatement cylinder 2
9 is detected, the switching valves 23 and 25 are detected.
Is operated to close the preliminary exhaust pipe 27, and the first abatement cylinder 15
The exhaust pipe 13 provided with is opened. Thus, the gas from the processing device 9 can be rendered harmless by the first detoxification tube 15 and the second detoxification tube 29 that has passed through can be replaced without stopping the operation of the processing device 9.

(Second Embodiment) FIG. 2 is a configuration diagram of a harmful gas exhaust device according to a second embodiment. The harmful gas exhaust device 2 shown in this figure is provided in the processing device 9,
Exhaust pipe 13 and first abatement cylinder 1 similar to the first embodiment.
5 and a preliminary exhaust pipe (hereinafter referred to as a first preliminary exhaust pipe) 27 connected to the exhaust pipe 13 via the switching valves 23 and 25.
And a spare abatement cylinder (hereinafter referred to as a second abatement cylinder) 31 and an exhaust pipe 1 via switching valves 33 and 35.
3 and a second preliminary exhaust pipe 37 connected to the second exhaust pipe 37.
However, the first preliminary exhaust pipe 27 is in parallel with only the exhaust pipe 13 provided with the first abatement cylinder 15,
It is connected to the exhaust pipe 13.

The second abatement cylinder 31 is provided in the exhaust pipe 13 on the downstream side of the first abatement cylinder 15 in a state of being connected to the exhaust pipe 13 in series. . The second detoxification cylinder 31 is used to detoxify gas in the same manner as the first detoxification cylinder 15.
It may have a gas processing capacity similar to that described above, or may have a gas processing capacity smaller than that of the first abatement cylinder 15.

The second preliminary exhaust pipe 37 connected to the exhaust pipe 13 via the switching valves 33 and 35 is arranged in parallel with only the exhaust pipe 13 provided with the second abatement cylinder 31. In other words, the second in the exhaust pipe 13
Both ends are connected to the exhaust pipe 13 so as to bypass the connecting portion of the abatement cylinder 31. The switching valves 33 and 35 are two-port valves that open the exhaust pipe 13 provided with the second abatement cylinder 31 or open the second preliminary exhaust pipe 37. The switching valves 23, 25, 33, and 35 are connected to the first exhaust pipe 15 and the second pre-exhaust pipe 37 from the respective connecting portions of the exhaust pipe 13 and the first preliminary exhaust pipe 27 and the second preliminary exhaust pipe 37, respectively. A configuration may be made up of four on-off valves respectively arranged up to the abatement cylinder 29 and two on-off valves arranged on the first preliminary exhaust pipe 27 and the second preliminary exhaust pipe 37.

The first abatement cylinder 1 is provided at a portion of the exhaust pipe 13 downstream of the connection portion of the second preliminary exhaust pipe 37.
A breakthrough sensor 21 for detecting breakthrough of the fifth or second abatement cylinder 31 is provided. Here, the switching valves 23, 25, 3
When the breakthrough sensor 21 detects breakthrough of the first abatement cylinder 15 or the second abatement cylinder 31, the exhaust pipes by the switching valves 23, 25, 33, and 35 are solenoid valves. 1
A configuration may be adopted in which the connection state between the third and the first preliminary exhaust pipe 27 and the second preliminary exhaust pipe 37 is automatically switched.

In the harmful gas exhaust device 2 configured as described above, the exhaust pipe 13 provided with the first abatement cylinder 15 is provided.
Parts and the first auxiliary exhaust pipe 27 are connected to the switching valves 23, 25
And the exhaust pipe 13 provided with the second exhaust pipe 31
The part and the second preliminary exhaust pipe 37 are branched by switching valves 33 and 35. For this reason, these switching valves 23, 2
5, 33, 35, the first preliminary exhaust pipe 27 and the second
The exhaust pipe 13 provided with the abatement cylinder 31 is closed to open the exhaust pipe 13 provided with the first abatement cylinder 15 and the second preliminary exhaust pipe 37, or The exhaust pipe 13 provided with the first preliminary exhaust pipe 27 and the second exhaust pipe 31 is closed by closing the exhaust pipe 13 provided with the first exhaust pipe 15 and the second preliminary exhaust pipe 37. The part can be opened.

For this reason, one of the first abatement cylinder 15 and the second abatement cylinder 31 is connected to the exhaust pipe 13 by the processing apparatus 9.
The gas supplied into the inside can be rendered harmless and discharged from the exhaust pipe 13. Then, while continuing to supply the gas into the exhaust pipe 13 and detoxify the gas, the supply of the gas to one of the first abatement cylinder 15 and the second abatement cylinder 31 is stopped. The abatement cylinders 15 and 31 can be regenerated.

At this time, first, for example, the switching valves 23, 2
5, 33 and 35 are operated to close the first preliminary exhaust pipe 27 and the exhaust pipe 13 provided with the second abatement cylinder 31 and to provide the first abatement cylinder 15. The processing apparatus 9 is set with the exhaust pipe 13 and the second preliminary exhaust pipe 37 open.
To work. As a result, the gas from the processing device 9 is supplied only to the first abatement cylinder 15, and the first abatement cylinder 1 is supplied.
The gas detoxified in 5 is exhausted from the exhaust pipe 13.

When the breakthrough of the first abatement cylinder 15 is detected by the breakthrough sensor 21 in the process of continuously performing the above processing, the switching valves 23, 25, 33, 35 are operated. The exhaust pipe 13 provided with the first abatement cylinder 15 and the second preliminary exhaust pipe 37 are closed, and the exhaust pipe provided with the first preliminary exhaust pipe 27 and the second abatement cylinder 31 13 is opened. Then, the gas from the processing device 9 is
It is rendered harmless by the second detoxification cylinder 31 and exhausted from the exhaust pipe 13. During this time, the exhaust pipe 13 provided with the first abatement cylinder 15 is provided.
First abatement cylinder 1
5 can be regenerated (and possibly replaced).

Then, the second abatement cylinder 3 is detected by the breakthrough sensor 21.
When breakthrough 1 is detected, the switching valves 23, 2
By operating 5, 33, 35 to close the exhaust pipe 31 portion provided with the second abatement cylinder 31 and to open the exhaust pipe 13 portion provided with the first abatement cylinder 15, The second detoxifying cylinder 31 that has passed through can be replaced without stopping the operation of the processing device 9.

In the first and second embodiments, the switching valve is constituted by an electromagnetic valve and the breakthrough sensor 21 is provided.
When linked, the operation of the switching valve is performed automatically.

[0030]

As described above, according to the first aspect of the present invention,
According to the harmful gas exhaust device of the present invention, a spare exhaust pipe and two abatement cylinders are provided in an exhaust pipe such that gas is supplied to one abatement cylinder and the other abatement cylinder is closed. Thus, even if one of the abatement cylinders breaks through or causes a trouble, it is possible to regenerate the abatement cylinders while detoxifying the gas. Therefore, while maintaining the harmful gas exhaust device, the operation of the harmful gas exhaust device and the processing apparatus provided with the device can be continued, and the operation rate can be improved.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a harmful gas exhaust device according to a first embodiment.

FIG. 2 is a configuration diagram of a harmful gas exhaust device according to a second embodiment.

FIG. 3 is a configuration diagram of a conventional harmful gas exhaust device.

[Explanation of symbols]

1,2 ... Hazardous gas exhaust device, 13 ... Exhaust pipe, 15 ... First
Abatement cylinder, 23, 25, 33, 35 ... switching valve, 27
... preliminary exhaust pipe, first preliminary exhaust pipe, 29, 31 ... second abatement cylinder, 37 ... second preliminary exhaust pipe

Claims (2)

[Claims] An exhaust pipe, a first abatement cylinder provided on the exhaust pipe, and a connection to the exhaust pipe via a switching valve in a state parallel to the first abatement cylinder. A harmful gas exhaust device, comprising: a spare exhaust pipe provided; and a second abatement cylinder provided in the preliminary exhaust pipe. 2. An exhaust pipe, a first abatement cylinder provided on the exhaust pipe, a second abatement cylinder provided on the exhaust pipe downstream of the first abatement cylinder, In a state in which only the first abatement cylinder is in parallel, a first auxiliary exhaust pipe connected to the exhaust pipe via a switching valve is in parallel with the second abatement cylinder. And a second auxiliary exhaust pipe connected to the exhaust pipe via a switching valve in a state.