JPH10321689A - Inspecting equipment of optical component - Google Patents

Abstract

PROBLEM TO BE SOLVED: To set an incident angle in a wide range as well as a specified incident angle, and enable characteristics inspection of an optical component, by installing an annular light source which is installed in a state covering the obliquely upper part of the optical component and casts a light toward the optical component obliquely from above the optical component. SOLUTION: A diffusion light source 2 is equipped with a diffusion plate 2a which casts a diffusion light from above an optical component D. An annular light source 3 is installed in a state covering the obliquely upper part of the optical component D, and casts a light obliquely from above toward the optical component D. The light source 2 and the annular light source 3 are switched by a switch 4. An inspecting substrate 10 is equipped with a circuit which gives a driving signal to the optical component D and can obtain an output signal from the optical component D when the diffusion light is received. A control unit 11 controls the light quantities and the like of the diffusion light source 2 and the annular light source 3, and calculates specified inspection results, on the basis of the output signal from the optical components D which is obtained by controlling the inspecting substrate 10.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for inspecting an optical component such as a solid-state image pickup device having a lens on a light receiving section.

[0002]

2. Description of the Related Art In an optical component such as a CCD (Charge Coupled Device), a lens (on-chip lens) is provided on a light receiving portion thereof so as to enhance the light collecting property. In recent years, in a camera using a CCD, the distance between the camera lens and the CCD has been shortened due to miniaturization. In order to cope with this, various types of camera lens configurations have been used. Therefore, various types of CCD on-chip lenses are considered depending on the type of lens configuration of the camera.

FIG. 3 shows a configuration of a conventional inspection apparatus for inspecting the characteristics of such an optical component such as a CCD. That is,
This inspection apparatus 1 'includes a diffusion light source 2 having a diffusion plate 2a for irradiating diffusion light from above an optical component D to be inspected.
A test board 10 having a circuit for providing a drive signal to the optical component D and obtaining an output signal from the optical component D when receiving the diffused light; And a control unit 11 for calculating a predetermined inspection result based on an output signal from the optical component D obtained by controlling the control unit 10.

In order to inspect the characteristics of the optical component D using the inspection apparatus 1 ', first, the control unit 11
Is supplied from the inspection board 10 to the optical component D to drive the optical component D.

Next, in this state, the control section 11 controls the diffusion light source 2 to irradiate a predetermined amount of parallel light to the diffusion plate 2a and irradiate the diffusion light to the optical component D from above. The optical component D receives the diffused light via the on-chip lens, converts the diffused light into a predetermined electric signal, and outputs the electric signal. This output signal is passed to the control unit 11 via the inspection board 10. The control unit 11 performs a predetermined calculation or determination based on an output signal from the optical component D to calculate an inspection result.

If the result of this inspection is "good", the optical component D is determined to be non-defective, and if the result is "defective", the optical component D is determined to be defective. Good products will be distinguished.

[0007]

However, such an optical component inspection apparatus has the following problems. That is, in the conventional inspection apparatus, since the diffused light is emitted from above, the angle of incidence on the optical component is limited to that which is perpendicular or slightly inclined with respect to the light receiving surface. For this reason, the incident angle with respect to the on-chip lens is also limited, and it is difficult to accurately measure an optical component having a component other than the specific on-chip lens.

For example, when the exit pupil distance of the lens system formed before the optical path of the optical component is negative (when the exit pupil of the lens system is located before the light receiving surface on the optical path), the optical path to the on-chip lens is reduced. Light enters in a direction that spreads from the front, and can be dealt with by the diffused light of the above inspection device. However, when the exit pupil distance of the lens system is plus (when the exit pupil of the lens system is behind the light path from the light receiving surface) In (2), light enters the on-chip lens in a direction narrowing from just before the optical path, and it is difficult to reproduce light having such an incident angle with diffused light.

Particularly, in recent years, as the size of the camera has been reduced, the lens configuration has become diversified, and optical components corresponding to various lens systems such as those having a minus exit pupil distance and those having a plus exit pupil distance are required. Since the conventional inspection apparatus can only irradiate diffused light having a limited incident angle, there is a problem that it cannot cope with various optical components.

[0010]

SUMMARY OF THE INVENTION The present invention is an apparatus for inspecting an optical component which has been made to solve such a problem.
That is, the present invention is a device for inspecting an optical component having a lens on a light receiving unit, and is provided in a state surrounding the optical component obliquely upward, and irradiates light toward the optical component from obliquely above the optical component. It has a light source.

In the present invention, light can be emitted from the obliquely above the optical component toward the optical component by the ring-shaped light source. become able to.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of an optical component inspection apparatus according to the present invention will be described below with reference to the drawings. FIG.
1 is a configuration diagram illustrating an optical component inspection apparatus according to the present embodiment, and FIG. 2 is a bottom view illustrating the present embodiment.

That is, the inspection apparatus 1 of the present embodiment targets an optical component D such as a CCD having an on-chip lens as an inspection target and inspects the characteristics of the optical component D.
A diffusion light source 2 having a diffusion plate 2a for irradiating diffused light from above the optical component D; and a ring-shaped light source provided to surround the diagonally upper portion of the optical component D and irradiating light toward the optical component D from diagonally above. 3, a switching unit 4 for switching between the diffused light source 2 and the ring-shaped light source 3, and an optical component D which supplies a drive signal to the optical component D and receives diffused light.
A test board 10 provided with a circuit for obtaining an output signal from the optical disc D, a predetermined amount based on an output signal from an optical component D obtained by controlling the test board 10 while controlling the amount of light of the diffused light source 2 and the ring-shaped light source 3 Control unit 11 that calculates the inspection result of
And a configuration including

As shown in FIG. 2, the ring-shaped light source 3 is a substantially circular light source that surrounds an obliquely upper part of the optical component D, and is made of glass fiber. In the inspection apparatus 1, it is possible to select whether to perform an inspection using the diffused light source 2 or an inspection using the ring-shaped light source 3 by the operation of the switching unit 4. In the example shown in FIG. 1, the switching unit 4 is provided as an independent configuration.
For example, the switching operation may be performed in the control unit 11 under the control of the control unit 11.

Next, an optical component D using the inspection apparatus 1
A characteristic inspection method will be described. First, when the inspection is performed using the diffused light source 2, it is set so that the diffused light can be irradiated from the diffused light source 2 to the optical component D by the operation of the switching unit 4.

Next, the control section 11 controls the inspection board 10 to supply a predetermined drive signal from the inspection board 10 to the optical component D, thereby driving the optical component D. Then, in this state, the diffusion light source 2 is controlled by the control unit 11 and the diffusion light is emitted from above the optical component D.

The optical component D receives the diffused light via an on-chip lens, converts the diffused light into a predetermined electric signal, and outputs the electric signal.
This output signal is passed to the control unit 11 via the inspection board 10. The control unit 11 performs a predetermined calculation or determination based on an output signal from the optical component D to calculate an inspection result.

The inspection using the diffused light source 2 is mainly applied to the inspection of the optical component D which is set at a position where the exit pupil distance of the lens system formed before the optical path of the optical component D is negative. . That is, when the exit pupil distance is negative, light enters the on-chip lens in a direction that spreads from just before the optical path.
Since the actual incident light can be reproduced by using the diffused light emitted from the light source, accurate measurement can be performed.

Next, when an inspection is performed using the ring-shaped light source 3, the setting is made so that light can be emitted from the ring-shaped light source 3 to the optical component D by the operation of the switching unit 4. afterwards,
The control unit 11 controls the inspection board 10 to give a predetermined drive signal to the optical component D from the inspection board 10 to drive the optical component D. In this state, the control unit 11 controls the ring light source 3 to Light is emitted from the light source 3 to the optical component D.

The optical component D receives the light incident obliquely from above via an on-chip lens, converts the light into a predetermined electric signal, and outputs the signal. This output signal is passed to the control unit 11 via the inspection board 10. The control unit 11 performs a predetermined calculation or determination based on an output signal from the optical component D to calculate an inspection result.

The inspection using the ring-shaped light source 3 is mainly applied when inspecting an optical component D set to a lens system having a positive exit pupil distance of a lens system formed before the optical path of the optical component D. You. That is, when the exit pupil distance is positive, the direction becomes narrower from the front of the optical path to the on-chip lens (the direction toward the outside or inside of the optical component D).
In this case, light having an incident angle similar to the angle of the actually incident light can be reproduced by using the light emitted from the ring-shaped light source 3 and accurate measurement can be performed. Becomes

By switching between the diffusion light source 2 and the ring-shaped light source 3 in this manner, it is possible to select an accurate incident light according to the type of the optical component D to be inspected, and to match the actual incident light. Characteristic inspection can be performed.

In this embodiment, the diffusion light source 2 is mainly used.
The example of the inspection apparatus 1 including both the light source 3 and the ring-shaped light source 3 and performing switching by the switching unit 4 has been described. However, when only the optical component D set to a lens system having a positive exit pupil distance is inspected. In this case, the inspection apparatus 1 having only the ring-shaped light source 3 can simplify the apparatus.

[0024]

As described above, the optical component inspection apparatus of the present invention has the following effects. That is,
The characteristic inspection of the optical component can be performed by setting the incident angle not only at a specific incident angle but also in a wide range, and the characteristics of the optical component having various aspects can be accurately inspected.

[Brief description of the drawings]

FIG. 1 is a configuration diagram illustrating an embodiment.

FIG. 2 is a bottom view illustrating the embodiment.

FIG. 3 is a configuration diagram illustrating a conventional example.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Inspection apparatus 2 Diffuse light source 3 Ring light source
4 Switching unit 10 Inspection board 11 Control unit D Optical component

Claims (2)

[Claims] 1. A device for inspecting an optical component having a lens on a light receiving portion, wherein the ring is provided so as to surround an obliquely upper portion of the optical component and irradiates light toward the optical component from an obliquely upper portion of the optical component. An inspection device for an optical component, comprising an optical source. 2. A light source comprising: a diffusion light source for irradiating diffused light from above the optical component toward the optical component; and a switching unit for switching between the diffused light source and the ring light source. The inspection device for an optical component according to claim 1.