JPH10318703A - Dimension measuring apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a dimension measuring apparatus, by which the dimension of an object to be measured can be measured precisely even when the object to be measured is easy to deform by an external force. SOLUTION: In a state that an object 2 to be measured is placed on a lower base 3, an upper base 4 is lowered. The upper base 4 comes into contact with the object 2 to be measured. The interval between the upper base 4 and the lower base 3 is detected at a point of time when an electronic force balance (a load measuring means) 1 detects a prescribed load value which does not deform the object 2 to be measured. Thus, the dimension H of the object 2 to be measured is found. Alternatively, a laser displacement meter (a noncontact distance sensor) is arranged and installed at the upper base 4. The upper base 4 comes into contact with an object 2 to be measured. The interval between the upper base 4 and a lower base 3 is detected by the noncontact distance sensor at a point of time when an electronic force balance (a load measuring means) 1 detects a prescribed load value which does not deform the object 2 to be measured. As a result, the dimension of the object 2 to be measured is found.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dimension measuring device for measuring a dimension of an object to be measured such as an electronic component.
The present invention relates to a dimension measuring apparatus for accurately measuring the dimensions of an object to be measured which is easily deformed by an external force without causing distortion.

[0002]

2. Description of the Related Art For example, when measuring the size of an object to be measured such as a thin and curved ceramic work, conventionally, as shown in FIG. Probe 5 of thickness measuring instrument 53
A method of measuring the dimension (thickness and the like) of the object 52 by hand by bringing the device 1 into contact with the object 52 and a method of measuring using a three-dimensional measuring device (not shown) are common. It is used regularly.

However, in the method using a probe contact type measuring instrument, when an object to be measured is easily deformed by an external force such as a thin ceramic work or the like, distortion is generated by the pressure of the probe, and It is difficult to measure the size of the object. Usually, measurement at multiple points is necessary, and it takes time to measure. For example, as shown in FIG. In such a case, there is a problem that measurement omission is likely to occur (the maximum dimension may not be detected).

In addition, the method using a three-dimensional measuring device is expensive because the measuring device is expensive, resulting in an increase in cost. The three-dimensional measuring device includes not only a non-contact type but also a probe contact type. In such a case, there is a problem that the same problem as in the case of using the probe contact type measuring device 53 as shown in FIG. 3 occurs.

An object of the present invention is to provide a dimension measuring apparatus capable of accurately measuring the dimensions of an object to be measured even when the measured object is easily deformed by an external force. With the goal.

[0006]

In order to achieve the above object, a dimensional measuring apparatus according to the present invention is provided with a load measuring means for detecting a minute load, and is provided on the load measuring device. A lower base mounted on the lower base, an upper base arranged to be able to ascend and descend above the lower base, and upper base elevating means for elevating and lowering the upper base. When the upper base is lowered with the measurement object mounted thereon, the upper base comes into contact with the object to be measured, and the load measuring means detects a predetermined load value that does not cause deformation of the object to be measured. Wherein the distance between the upper base and the lower base is detected to determine the dimension of the object to be measured.

The upper base is lowered while the object to be measured is placed on the lower base, and the upper base comes into contact with the object to be measured, and the load measuring means performs a predetermined load which does not cause deformation of the object to be measured. By detecting the distance between the upper base and the lower base at the time when the value is detected, it is possible to reliably measure the dimensions of the object without causing deformation.

Further, in the dimension measuring device according to the present invention, the load measuring means has a load data output function of outputting detected load data, and the upper base elevating means raises and lowers the upper base. And a position output function for outputting the position of the upper base.

By using a load measuring means having a load data output function for outputting detected load data, an upper base elevating means having a lifting function for raising and lowering the upper base and a position output function for outputting a position of the upper base. ,
The output of the load data and the position data can be easily performed, and the present invention can be made effective.

Further, the dimension measuring apparatus of the present invention is characterized in that the upper base elevating means uses a servomotor.

By using a servo motor having a position output function as the upper base lifting / lowering means, the upper base can be reliably raised / lowered and its position output can be easily performed. The invention can be made more effective.

Further, in the dimension measuring device according to the present invention, a non-contact type distance sensor is provided on the upper base, and the load measuring means detects a predetermined load value which does not cause deformation of the measured object. At this time, the distance between the upper base and the lower base is detected by the non-contact distance sensor to determine the size of the object to be measured.

When a non-contact type distance sensor is provided on the upper base, the distance between the upper base and the lower base can be detected by the non-contact type distance sensor. By raising and lowering the upper base using the upper base raising / lowering means capable of detecting the position, it is not necessary to detect the position of the upper base, and the dimension of the object to be measured can be measured more efficiently and more accurately. That is, by disposing the non-contact type distance sensor on the upper base, it is possible to use various driving means such as a stepping motor, an induction motor, an air cylinder, and a hydraulic cylinder as the upper base elevating means.

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described, and features thereof will be described in more detail.

[First Embodiment] FIG. 1 is a diagram showing a configuration of a dimension measuring apparatus according to an embodiment of the present invention.
This dimension measuring device is provided with an electronic balance (load measuring means) 1 for detecting a minute load, and a lower part on which the thin plate-shaped ceramic work (measured object) 2 is placed. A base (reference base) 3, an upper base 4, which is arranged above the lower base 3 so as to be able to move up and down, and an upper base elevating means 5 for moving the upper base 4 up and down.

The electronic balance 1 is placed on a table 6,
The lower base 3 is held on a slide shaft 7 so as to be slidable in the vertical direction.

Further, the lower base 3 and the upper base 4 are required to have predetermined flatness and parallelism in a predetermined direction (for example, a distance of 50 mm parallel to the surface of the lower base 3 or the upper base 4). Is 0.001 mm or less).

The upper base raising / lowering means 5 includes a servomotor 8, a ball screw 9, and an arithmetic unit (CPU) 10 connected to the servomotor 8.
The upper base 4 is partially engaged with a ball screw 9, and is configured to move up and down by driving the ball screw 9 by the servo motor 8. , The position of the upper base 4 can be output.

Next, an operation for measuring the dimension (here, thickness (height)) H of the object to be measured by using the dimension measuring apparatus configured as described above will be described. First, the DUT 2 is set on the lower base 3 and the electronic balance 1 is offset. Then, the upper base 4 is gradually lowered. When the upper base 4 descends and comes into contact with the DUT 2, a load is applied to the DUT 2. When the electronic balance 1 detects a set predetermined load value (for example, 0.5 g), it outputs it. Then, when a predetermined load value (for example, 0.5 g) is detected and outputted, the position of the upper base 4 at that moment is outputted. Then, the dimension (height) H of the DUT 2 is measured from the distance between the upper base 4 and the lower base 3 at this time.

As described above, in the dimension measuring apparatus of this embodiment, the upper base 4 is lowered with the DUT 2 set on the lower base 3, and the upper base 4 comes into contact with the DUT 2. Since the dimensions of the DUT 2 are detected from the distance between the upper base 4 and the lower base 3 when the electronic balance 1 detects a predetermined load value, the deformation of the DUT 2 is prevented. The dimensions can be accurately and reliably measured.

Further, according to the dimension measuring apparatus of this embodiment, it is possible to perform the dimension measurement in a shorter time as compared with the case of using a three-dimensional measuring device or a probe contact type measuring device.

Further, according to the dimension measuring apparatus of this embodiment, for example, as shown in FIG. 4, even when the object to be measured has a partial protrusion, the maximum external dimension of the object to be measured can be reliably determined. Can be measured.

[Embodiment 2] FIG. 2 is a view showing a dimension measuring apparatus according to another embodiment of the present invention. In the dimension measuring device of this embodiment, a laser displacement meter 11 is attached to the upper base 4 as a non-contact type distance sensor. Other configurations are the same as those of the dimension measuring apparatus of the first embodiment.

That is, in the dimension measuring device of this embodiment, the laser displacement meter 11 is used.
In the dimension measuring device of the first embodiment, a structure that is necessary for detecting the position of the upper base 4 and outputting the position data, such as using the servo motor 8 and the arithmetic unit 10 in combination, is unnecessary. The lifting means 5 includes
A stepping motor 12 is used. However, it is also possible to use an induction motor, an air cylinder, a hydraulic cylinder, or the like instead of the stepping motor. In FIG. 2, the same reference numerals are given to the same or corresponding parts as in FIG.

Next, the operation when measuring the dimension (height) of an object to be measured using the dimension measuring apparatus of this embodiment will be described.

The operation of the dimension measuring apparatus of the first embodiment is the same as that of the dimension measuring apparatus of the first embodiment. In the above, a predetermined load value (for example, 0.5 g) is detected. When it is output, the distance between the upper base 4 and the lower base 3 at that moment is detected by the laser displacement meter 11, and from the detected data, the dimension (height) of the workpiece (thin-plate-shaped ceramic work) 2 is measured. H) H is required.

In the dimension measuring device of this embodiment,
Upper base 4 and lower base 3 by laser displacement meter 11
Is measured, the dimensions of the object to be measured can be measured more accurately than in the case of the first embodiment.

In the second embodiment, a case has been described in which a laser displacement meter is used as the non-contact type distance sensor. However, the non-contact type distance sensor is not limited to a laser displacement meter, but may be a capacitance type displacement sensor. It is also possible to use other non-contact distance sensors such as an air micrometer.

Further, in the first and second embodiments, the case where the object to be measured is a thin plate-shaped ceramic work has been described. The present invention is not limited to this case, and can be used as a dimension measuring device for measuring objects of various shapes made of various materials.

Further, in the first and second embodiments, the case where the electronic scale is used as the load measuring means for detecting a minute load has been described. However, the load measuring means is not limited to this. And other various load measuring means can be used.

The present invention is not limited to the above-described embodiment in other respects, but relates to the shapes of the lower base and the upper base, the specific structure of the upper base elevating means, and the like. Various applications and modifications can be made within the scope.

[0032]

As described above, in the dimension measuring device of the present invention, the upper base is lowered while the object to be measured is placed on the lower base, and the upper base comes into contact with the object to be measured. By detecting the distance between the upper base and the lower base at the time when a predetermined load value that does not cause deformation of the DUT is detected, the size of the DUT can be reduced without causing deformation of the DUT. It can be measured reliably.

In addition, a load measuring means having a load data output function for outputting detected load data, an upper base elevating means having an elevating function for elevating the upper base and a position output function for outputting a position of the upper base are used. Thereby, it becomes possible to easily output the load data and the position data, and the present invention can be made effective.

Further, by using a servo motor having a position output function as the upper base raising / lowering means, it is possible to surely raise and lower the upper base and easily output the position. The present invention can be made more effective.

When a non-contact distance sensor is provided on the upper base, the distance between the upper base and the lower base can be detected by the non-contact distance sensor. By raising and lowering the upper base using the upper base lifting / lowering means capable of detecting the position using the device, it is not necessary to detect the position, and the dimension of the object to be measured can be measured efficiently and more accurately.

[Brief description of the drawings]

FIG. 1 is a diagram showing a dimension measuring device according to an embodiment of the present invention.

FIG. 2 is a view showing a dimension measuring device according to another embodiment of the present invention.

FIG. 3 is a perspective view showing a conventional dimension measuring method.

FIG. 4 is a perspective view showing an example of the shape of an object to be measured.

[Explanation of symbols]

REFERENCE SIGNS LIST 1 electronic balance (load measuring means) 2 thin ceramic work (measured object) 3 lower base (reference base) 4 upper base 5 upper base lifting / lowering means 6 units 7 slide shaft 8 servo motor 9 ball screw 10 arithmetic unit (CPU 11) Laser displacement meter (non-contact distance sensor) 12 Stepping motor H Dimension (height) of the object to be measured

Claims (4)

[Claims] 1. A load measuring means for detecting a minute load, a lower base provided on the load measuring device, on which an object to be measured is placed, and a lower base arranged above and below the lower base so as to be movable up and down. And an upper base elevating means for elevating and lowering the upper base. The upper base is lowered while a device under test is placed on the lower base, and the upper base is At the time when the load measuring means detects a predetermined load value that does not cause deformation of the object to be measured, the distance between the upper base and the lower base is detected to detect the distance between the upper base and the lower base. A dimension measuring device configured to determine a dimension. 2. The apparatus according to claim 1, wherein said load measuring means has a load data output function of outputting detected load data, and said upper base elevating means raises and lowers an upper base, and a position of said upper base. 2. The dimension measuring device according to claim 1, further comprising a position output function for outputting the position information. 3. The dimension measuring apparatus according to claim 1, wherein said upper base raising / lowering means uses a servomotor. 4. A non-contact distance sensor is provided on the upper base, and the upper base and the upper base at the time when the load measuring means detects a predetermined load value that does not cause deformation of the object to be measured. 2. The dimension measuring device according to claim 1, wherein the distance from the lower base is detected by the non-contact type distance sensor to determine the dimension of the measured object.