JPH10313140A - Laser oscillator - Google Patents
Laser oscillatorInfo
- Publication number
- JPH10313140A JPH10313140A JP9135797A JP13579797A JPH10313140A JP H10313140 A JPH10313140 A JP H10313140A JP 9135797 A JP9135797 A JP 9135797A JP 13579797 A JP13579797 A JP 13579797A JP H10313140 A JPH10313140 A JP H10313140A
- Authority
- JP
- Japan
- Prior art keywords
- return member
- laser
- flow path
- gas flow
- laser oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Lasers (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、入力電力を非常に
狭い強力なコヒーレントなレーザ光に変換するレーザ発
振器に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser oscillator for converting input power into a very narrow and powerful coherent laser beam.
【0002】[0002]
【従来の技術】レーザ発振器は、加工熱源として加工や
改質などに利用され、特に放電回路のインダクタンスを
下げて発振効率を上げ大出力を得るようにしている。2. Description of the Related Art A laser oscillator is used as a processing heat source for processing, reforming, and the like. In particular, the oscillation efficiency is increased by lowering the inductance of a discharge circuit to obtain a large output.
【0003】図9は、繰返し発振をしないかあるいは1
pps以下程度の繰返し発振を行うレーザ発振器の説明
図である。電源からの高電圧は高電圧導入板1に入力さ
れ、その電源から高圧電圧導入板1に供給された電荷
は、ピーキングコンデンサ2に蓄えられながら予備電離
ピン3aと予備電離ピン3bとの間で予備電離放電を起
こす。次に、ピーキングコンデンサ2の電荷が主電極4
a及び主電極4bとの間で主放電を行いリターン部材5
を通ってアースへ流れる。FIG. 9 shows that no repetitive oscillation occurs or one
FIG. 3 is an explanatory diagram of a laser oscillator that performs repetitive oscillation of about pps or less. The high voltage from the power supply is input to the high-voltage introduction plate 1, and the electric charge supplied to the high-voltage introduction plate 1 from the power supply is stored in the peaking capacitor 2 while flowing between the preliminary ionization pins 3 a and 3 b. Preliminary ionization discharge occurs. Next, the electric charge of the peaking capacitor 2 is
a main discharge between the main member 4a and the main electrode 4b.
Through to ground.
【0004】このような低繰り返しレーザ発振器におい
ては、その発振効率を上げるために放電回路のインダク
タンスを下げる必要がある。そこで、放電後の電流をア
ース電位に戻すためにリターン部材5が設けられてお
り、このリターン部材5は、一般に主電極4の長手方向
に平行に金属板として取付けられている。In such a low repetition rate laser oscillator, it is necessary to reduce the inductance of the discharge circuit in order to increase the oscillation efficiency. Therefore, a return member 5 is provided to return the discharged current to the ground potential. The return member 5 is generally mounted as a metal plate in parallel with the longitudinal direction of the main electrode 4.
【0005】これに対して、高繰り返し発振を行うレー
ザ発振器では、次の発振を行うまでに発振後の汚れたレ
ーザガスを排出しておく必要がある。図10は、高繰り
返しレーザ発振器の説明図である。図10に示すよう
に、このような高繰り返しレーザ発振器では、発振後の
汚れたレーザガスを強制的に流してしまわないと次の発
振が行えないことから、ガス流路を確保するためにリタ
ーン部材5はレーザガスの流れを妨げないように光軸方
向の端部に配置される。つまり、主電極5の長手方向
(光軸方向)に直行する方向にレーザガスを流し、発振
効率を向上させるようにしている。従って、リターン部
材5を含む放電回路の長さは長くなる。On the other hand, in a laser oscillator that performs high repetition oscillation, it is necessary to discharge the contaminated laser gas after oscillation before the next oscillation. FIG. 10 is an explanatory diagram of a high repetition rate laser oscillator. As shown in FIG. 10, in such a high-repetition-rate laser oscillator, the next oscillation cannot be performed unless the contaminated laser gas after oscillation is forced to flow, so that the return member is required to secure a gas flow path. Reference numeral 5 is disposed at the end in the optical axis direction so as not to hinder the flow of the laser gas. That is, the laser gas is caused to flow in a direction perpendicular to the longitudinal direction (optical axis direction) of the main electrode 5 to improve the oscillation efficiency. Therefore, the length of the discharge circuit including the return member 5 becomes longer.
【0006】また、長さを短縮するために、図9に示し
たレーザ発振器と同じ位置にリターン部材5を配置する
場合は、図11に示すようにリターン部材5として円柱
状の細い棒を複数本通すことが多かった。When the return member 5 is arranged at the same position as the laser oscillator shown in FIG. 9 in order to reduce the length, a plurality of cylindrical thin rods are used as the return member 5 as shown in FIG. I often passed through.
【0007】[0007]
【発明が解決しようとする課題】しかしながら、従来の
低繰り返しレーザ発振器では、放電回路のインダクタン
スを下げるために長手方向側面にリターン部材5を設け
ると、レーザ発振の繰返しを上げることができない。ま
た、繰返し発振のためにリターン部材をレーザガス流の
妨げとならないように光軸方向の側面に配置すると、電
荷の流れる距離が長くなりインダクタンスが大きくな
る。However, in the conventional low repetition rate laser oscillator, if the return member 5 is provided on the side surface in the longitudinal direction in order to reduce the inductance of the discharge circuit, the repetition of laser oscillation cannot be increased. Further, when the return member is arranged on the side surface in the optical axis direction so as not to hinder the laser gas flow for the repetitive oscillation, the distance over which the charge flows becomes longer and the inductance becomes larger.
【0008】また、高周波の発振では電荷が物質表面近
くを流れるため、円柱状のリターン部材は距離を短くす
るために長手方向に配置しても、電流の流れる部分の表
面積が狭くなる。このため、やはり、インダクタンスが
大きくなり、発振効率が下がる。In addition, in the case of high-frequency oscillation, electric charges flow near the surface of the substance. Therefore, even if the columnar return member is arranged in the longitudinal direction to shorten the distance, the surface area of the portion through which current flows becomes narrow. For this reason, the inductance also increases, and the oscillation efficiency decreases.
【0009】本発明の目的は、インダクタンスを小さく
した上でレーザガス流の妨げにもならず、大出力で高繰
り返し発振のできるレーザ発振器を提供することであ
る。SUMMARY OF THE INVENTION An object of the present invention is to provide a laser oscillator which has a small inductance and does not hinder the flow of a laser gas, and is capable of high power and high repetition oscillation.
【0010】[0010]
【課題を解決するための手段】請求項1の発明に係わる
レーザ発振器は、レーザ発振器の放電部での放電後の電
流がアースへ流れるための経路を形成するリターン部材
を、複数個の板状部材で構成すると共に主電極の長手方
向に平行するように配置する。そして、レーザガスのガ
ス流路の中央部におけるリターン部材の板面をガス流路
に対し90゜の方向に向けたものである。According to a first aspect of the present invention, there is provided a laser oscillator comprising a plurality of plate-like return members which form a path through which a current after discharge in a discharge unit of the laser oscillator flows to the ground. It is composed of a member and arranged so as to be parallel to the longitudinal direction of the main electrode. The plate surface of the return member at the center of the gas flow path of the laser gas is oriented at 90 ° to the gas flow path.
【0011】請求項2の発明に係わるレーザ発振器は、
請求項1の発明において、リターン部材は、ガス流路の
両端部で同一方向にねじってガス流路に対する90゜の
方向の板面を形成したものである。The laser oscillator according to the second aspect of the present invention comprises:
In the first aspect of the present invention, the return member is formed by twisting in the same direction at both ends of the gas flow path to form a plate surface in a direction of 90 ° with respect to the gas flow path.
【0012】請求項3の発明に係わるレーザ発振器は、
請求項1の発明において、リターン部材は、ガス流路の
両端部で逆方向にねじってガス流路に対する90゜の方
向の板面を形成したものである。A laser oscillator according to a third aspect of the present invention comprises:
In the first aspect of the present invention, the return member is formed by twisting in opposite directions at both ends of the gas flow path to form a plate surface in a direction of 90 ° with respect to the gas flow path.
【0013】請求項4の発明に係わるレーザ発振器は、
請求項1の発明において、リターン部材は、ガス流路の
いずれか一方の端部でねじってガス流路に対する90゜
の方向の板面を形成したものである。A laser oscillator according to a fourth aspect of the present invention comprises:
In the invention of claim 1, the return member is formed by twisting at one end of the gas flow path to form a plate surface in a direction of 90 ° with respect to the gas flow path.
【0014】請求項5の発明に係わるレーザ発振器は、
請求項1の発明において、リターン部材は、板状部材を
つぶすことでガス流路に対する90゜の方向の板面を形
成したものである。A laser oscillator according to a fifth aspect of the present invention comprises:
According to the first aspect of the present invention, the return member forms a plate surface in a direction of 90 ° with respect to the gas flow path by crushing the plate member.
【0015】請求項6の発明に係わるレーザ発振器は、
請求項1の発明において、リターン部材は、ガス流路に
対する90゜の方向の板面を波打った形状としたもので
ある。A laser oscillator according to a sixth aspect of the present invention comprises:
According to the first aspect of the present invention, the return member has a shape in which a plate surface in a direction of 90 ° with respect to the gas flow path is wavy.
【0016】請求項7の発明に係わるレーザ発振器は、
請求項1の発明において、リターン部材は、その両端部
にガス流路に対する90゜の方向の板面に垂直な取付面
部を形成したものである。A laser oscillator according to a seventh aspect of the present invention comprises:
According to the first aspect of the present invention, the return member has a mounting surface portion perpendicular to the plate surface in a direction of 90 ° with respect to the gas flow path at both ends.
【0017】請求項8の発明に係わるレーザ発振器は、
請求項1の発明おいて、リターン部材は、その板面をレ
ーザガスを集めたい方向に向けて角度をつけたものであ
る。The laser oscillator according to the invention of claim 8 is:
According to the first aspect of the present invention, the return member is formed such that its plate surface is angled in a direction in which the laser gas is to be collected.
【0018】請求項9の発明に係わるレーザ発振器は、
請求項1の発明において、リターン部材は、レーザガス
がレーザ光の光軸方向に均等になるように、その間隔を
変えて配置したものである。According to a ninth aspect of the present invention, there is provided a laser oscillator comprising:
In the first aspect of the present invention, the return members are arranged at different intervals so that the laser gas becomes uniform in the optical axis direction of the laser light.
【0019】[0019]
【発明の実施の形態】以下、本発明の実施の形態を説明
する。図1は本発明の第1の実施の形態を示すレーザ発
振器の構成図である。図1において、電源から高電圧導
入板1に供給された電荷は、ピーキングコンデンサ2に
蓄えられながら予備電離ピン3aと予備電離ピン3bと
の間で予備電離放電を起こす。次にピーキングコンデン
サ2の電荷が主電極4aと主電極4bとの間で主放電を
行いリターン部材5を通ってアースへ流れる。Embodiments of the present invention will be described below. FIG. 1 is a configuration diagram of a laser oscillator according to a first embodiment of the present invention. In FIG. 1, the electric charge supplied from the power supply to the high-voltage introduction plate 1 causes a preliminary ionization discharge between the preliminary ionization pins 3a and 3b while being stored in the peaking capacitor 2. Next, the electric charge of the peaking capacitor 2 performs a main discharge between the main electrode 4a and the main electrode 4b and flows to the ground through the return member 5.
【0020】リターン部材5は複数個の板状部材で構成
され、レーザガスのガス流路の中央部におけるリターン
部材5の板面は、ガス流路に対し90゜の方向に向けて
形成されている。The return member 5 is composed of a plurality of plate-like members, and the plate surface of the return member 5 at the center of the gas flow path of the laser gas is formed to be oriented at 90 ° to the gas flow path. .
【0021】図2は、リターン部材5の第1の実施例の
説明図である。図2に示すように、リターン部材5は、
帯状の板を途中の2箇所でねじって形成されている。す
なわち、ガス流路の両端部で同一方向にねじってガス流
路に対する90゜の方向の板面を形成している。これに
より、放電電流の流れる断面積を確保した上で、ガス流
路に当たる部分の面積を最小限にしている。従って、レ
ーザガスの流れを妨げることがない。また、このような
リターン部材5では、同方向に2回ねじっているのでレ
ーザガスの流れに方向性をつけることができる。FIG. 2 is an explanatory view of the first embodiment of the return member 5. As shown in FIG. As shown in FIG. 2, the return member 5
It is formed by twisting a belt-like plate at two places in the middle. In other words, both ends of the gas flow path are twisted in the same direction to form a plate surface in a 90 ° direction with respect to the gas flow path. Thus, the area of the portion corresponding to the gas flow path is minimized while securing the cross-sectional area where the discharge current flows. Therefore, the flow of the laser gas is not hindered. Further, since the return member 5 is twisted twice in the same direction, the flow of the laser gas can be made directional.
【0022】図3は、リターン部材5の第2の実施例の
説明図である。図3に示すように、リターン部材5は、
帯状の板を途中の2箇所でねじって形成されている。す
なわち、ガス流路の両端部で逆方向にねじってガス流路
に対する90゜の方向の板面を形成している。FIG. 3 is an explanatory view of a second embodiment of the return member 5. As shown in FIG. As shown in FIG. 3, the return member 5
It is formed by twisting a belt-like plate at two places in the middle. That is, the gas flow path is twisted in opposite directions at both ends to form a plate surface in a 90 ° direction with respect to the gas flow path.
【0023】このように、レーザガスの流路に当たる部
分の両端でリターン部材5の板面が90°ずつ逆方向へ
ずれているので、レーザガス流を広い間口から、狭い間
口に導くことができ、レーザガスを広い所から狭い所
(主電極間)へ導くことが可能となる。As described above, since the plate surface of the return member 5 is shifted in the opposite direction by 90 ° at both ends of the portion corresponding to the flow path of the laser gas, the laser gas flow can be guided from the wide frontage to the narrow frontage. Can be guided from a wide place to a narrow place (between the main electrodes).
【0024】以上の説明は、板状のリターン部材5を2
箇所でねじるようにしたが、ガス流路のいずれか一方の
端部でねじってガス流路に対する90゜の方向の板面を
形成することも可能である。この場合は、リターン部材
5の取付け方を変えることになる。In the above description, the plate-like return member 5 is
Although twisting is performed at the point, it is also possible to twist at one end of the gas flow path to form a plate surface in a direction of 90 ° with respect to the gas flow path. In this case, the method of attaching the return member 5 is changed.
【0025】図4は、リターン部材5の第3の実施例の
説明図である。図4に示すように、リターン部材5は、
板状部材を潰すことでガス流路に対する90゜の方向の
板面を形成している。このように、板状部材がねじれて
なく、つぶすことで90°ねじれた板面を作り出すの
で、ねじった場合と同様の断面積を確保でき、ねじれが
無いため、レーザガス流を変化させることなくリターン
部材5の前面部と同じ状態のまま流すことができる。FIG. 4 is an explanatory view of a third embodiment of the return member 5. As shown in FIG. 4, the return member 5
By crushing the plate member, a plate surface in a direction of 90 ° with respect to the gas flow path is formed. As described above, since the plate-shaped member is not twisted and a 90 ° twisted plate surface is created by crushing, the same cross-sectional area as when twisted can be secured, and since there is no twist, the return without changing the laser gas flow is performed. The flow can be performed in the same state as the front surface of the member 5.
【0026】図5は、リターン部材5の第4の実施例の
説明図である。図5に示すように、リターン部材5は、
ガス流路に対する90゜の方向の板面を波打った形状で
構成されている。このように、2箇所のねじれ(または
つぶれ)の間の板面を波打たせることで、主電極4の間
を流れるレーザガスを放電方向でより均一になるように
している。つまり、この第4の実施例でのリターン部材
5では、主電極4aと主電極4bとの間を結ぶ軸に平行
な方向に関して、レーザガス流の陰になるところが無く
なるので、主電極4の間を流れるレーザガスを放電方向
でより均一になる。FIG. 5 is an explanatory view of a fourth embodiment of the return member 5. As shown in FIG. 5, the return member 5
The plate is formed in a wavy shape in the direction of 90 ° with respect to the gas flow path. In this manner, the laser surface flowing between the main electrodes 4 is made more uniform in the discharge direction by waving the plate surface between the two twists (or crushes). That is, in the return member 5 in the fourth embodiment, there is no shadow of the laser gas flow in the direction parallel to the axis connecting the main electrode 4a and the main electrode 4b. The flowing laser gas becomes more uniform in the discharge direction.
【0027】図6は、リターン部材5の第5の実施例の
説明図である。図6(a)は正面図、図6(b)は平面
図、図6(c)は側面図である。図6に示すように、リ
ターン部材5の両端部には、ガス流路に対する90゜の
方向の板面に垂直な取付面部6a、6bが設けられてい
る。すなわち、リターン部材5には2個の互いに垂直な
板である取付面部6a、6bが両端に付いた形状となっ
ており、この取付面部6によりリターン部材5は放電回
路部に取り付けられる。FIG. 6 is an explanatory view of a fifth embodiment of the return member 5. 6A is a front view, FIG. 6B is a plan view, and FIG. 6C is a side view. As shown in FIG. 6, at both ends of the return member 5, mounting surface portions 6a and 6b perpendicular to the plate surface in a direction of 90 ° with respect to the gas flow path are provided. That is, the return member 5 has two mounting surfaces 6a and 6b, which are plates perpendicular to each other, attached to both ends. The mounting surface 6 allows the return member 5 to be mounted on the discharge circuit.
【0028】このように、第5の実施例では、レーザガ
ス流の流れやすいリターン部材5を両端の曲げ加工のみ
によって作るので、その製作が簡単である。つまり、1
枚のリターン部材5の両端を互いに垂直になるように折
り曲げただけで簡単に作ることができる。As described above, in the fifth embodiment, since the return member 5 through which the laser gas flow easily flows is formed only by bending at both ends, its manufacture is simple. That is, 1
It can be easily made simply by bending both ends of the return members 5 so as to be perpendicular to each other.
【0029】次に、本発明の第2の実施の形態を説明す
る。図7は本発明の第2の実施の形態におけるレーザ発
振器のリターン部材5の配置を示す説明図である。この
第2の実施の形態では、リターン部材の板面をレーザガ
スを集めたい方向に向けて角度をつけたものである。す
なわち、リターン部材5の2箇所のねじれの中間部分が
光軸方向に垂直な方向に対して角度をつけて配置されて
いる。リターン部材5の板面を光軸方向に対して傾けて
配置することにより、レーザガスを集めたい方向に向け
られる。Next, a second embodiment of the present invention will be described. FIG. 7 is an explanatory view showing the arrangement of the return member 5 of the laser oscillator according to the second embodiment of the present invention. In the second embodiment, the plate surface of the return member is angled toward the direction in which the laser gas is to be collected. That is, the intermediate portion of the two twists of the return member 5 is arranged at an angle to the direction perpendicular to the optical axis direction. By arranging the plate surface of the return member 5 so as to be inclined with respect to the optical axis direction, the return gas can be directed in a direction in which the laser gas is to be collected.
【0030】次に、本発明の第3の実施の形態を説明す
る。図8は本発明の第3の実施の形態におけるレーザ発
振器のリターン部材5の配置を示す説明図である。この
第3の実施の形態では、リターン部材5をレーザガスが
レーザ光の光軸方向に均等になるように、その間隔を変
えて配置したものである。すなわち、リターン部材5の
配置のピッチを適当に変えて、電気又はレーザガスを光
軸方向でより均等に流せるようにする。このように、リ
ターン部材5の配置のピッチを適当に変えて、電気又は
レーザガスを光軸方向でより均等に流せるようにするの
で、効率を上げた大出力の発振が可能となる。Next, a third embodiment of the present invention will be described. FIG. 8 is an explanatory view showing the arrangement of the return member 5 of the laser oscillator according to the third embodiment of the present invention. In the third embodiment, the return members 5 are arranged at different intervals so that the laser gas becomes uniform in the optical axis direction of the laser light. That is, the arrangement pitch of the return members 5 is appropriately changed so that the electric or laser gas can flow more uniformly in the optical axis direction. As described above, by appropriately changing the arrangement pitch of the return members 5 so that electricity or laser gas can flow more uniformly in the optical axis direction, large-output oscillation with increased efficiency can be achieved.
【0031】[0031]
【発明の効果】以上説明したとおり、本発明によれば、
レーザ発振器の放電部で板状のリターン部材を途中で平
面の向きを変える構造としているので、放電回路のイン
ダクタンスを低く押さえることができる。また、レーザ
ガスの流れを妨げることがなく高繰り返し大出力のレー
ザ光を得ることができる。As described above, according to the present invention,
Since the plate-like return member is configured to change the direction of the plane in the middle of the discharge portion of the laser oscillator, the inductance of the discharge circuit can be suppressed low. In addition, laser light with high repetition and high output can be obtained without obstructing the flow of the laser gas.
【図1】本発明の第1の実施の形態に係わるレーザ発振
器の構成図。FIG. 1 is a configuration diagram of a laser oscillator according to a first embodiment of the present invention.
【図2】本発明の第1の実施の形態におけるリターン部
材の第1の実施例の説明図。FIG. 2 is an explanatory view of a first example of a return member according to the first embodiment of the present invention.
【図3】本発明の第1の実施の形態におけるリターン部
材の第2の実施例の説明図。FIG. 3 is an explanatory diagram of a second example of the return member according to the first embodiment of the present invention.
【図4】本発明の第1の実施の形態におけるリターン部
材の第3の実施例の説明図。FIG. 4 is an explanatory view of a third example of the return member according to the first embodiment of the present invention.
【図5】本発明の第1の実施の形態におけるリターン部
材の第4の実施例の説明図。FIG. 5 is an explanatory diagram of a fourth example of the return member according to the first embodiment of the present invention.
【図6】本発明の第1の実施の形態におけるリターン部
材の第5の実施例の説明図。FIG. 6 is an explanatory view of a fifth example of the return member according to the first embodiment of the present invention.
【図7】本発明の第2の実施の形態におけるレーザ発振
器のリターン部材の配置を示す説明図。FIG. 7 is an explanatory diagram showing an arrangement of a return member of a laser oscillator according to a second embodiment of the present invention.
【図8】本発明の第3の実施の形態におけるレーザ発振
器のリターン部材の配置を示す説明図。FIG. 8 is an explanatory diagram showing an arrangement of a return member of a laser oscillator according to a third embodiment of the present invention.
【図9】従来の低繰り返しレーザ発振器の説明図。FIG. 9 is an explanatory diagram of a conventional low repetition rate laser oscillator.
【図10】光軸方向にリターン部材を取付けた従来の高
繰り返しレーザ発振器の説明図。FIG. 10 is an explanatory view of a conventional high repetition rate laser oscillator having a return member attached in the optical axis direction.
【図11】主電極の長手方向と平行にリターン部材を取
付けた従来の高繰り返しレーザ発振器の説明図。FIG. 11 is an explanatory view of a conventional high repetition rate laser oscillator in which a return member is attached in parallel with a longitudinal direction of a main electrode.
1 高電圧導入板 2 ピーキングコンデンサ 3 予備電離ピン 4 主電極 5 リターン部材 6 取付面部 DESCRIPTION OF SYMBOLS 1 High-voltage introduction board 2 Peaking capacitor 3 Pre-ionization pin 4 Main electrode 5 Return member 6 Mounting surface
Claims (9)
がアースへ流れるための経路を形成するリターン部材が
主電極の長手方向に平行するように配置されていたレー
ザ発振器において、前記リターン部材を複数個の板状部
材で構成し、レーザガスのガス流路の中央部における前
記リターン部材の板面を前記ガス流路に対し90゜の方
向に向けたことを特徴とするレーザ発振器。1. A laser oscillator according to claim 1, wherein a return member for forming a path for a current after discharging in a discharge portion of the laser oscillator to flow to the ground is arranged parallel to a longitudinal direction of the main electrode. Is constituted by a plurality of plate members, and a plate surface of the return member at a central portion of a gas flow path of the laser gas is oriented in a direction of 90 ° with respect to the gas flow path.
端部で同一方向にねじって前記ガス流路に対する90゜
の方向の板面を形成したことを特徴とする請求項1に記
載のレーザ発振器。2. The laser according to claim 1, wherein the return member is twisted in the same direction at both ends of the gas flow path to form a plate surface in a direction of 90 ° with respect to the gas flow path. Oscillator.
端部で逆方向にねじって前記ガス流路に対する90゜の
方向の板面を形成したことを特徴とする請求項1に記載
のレーザ発振器。3. The laser according to claim 1, wherein the return member is twisted in opposite directions at both ends of the gas flow path to form a plate surface in a direction of 90 ° with respect to the gas flow path. Oscillator.
ずれか一方の端部でねじって前記ガス流路に対する90
゜の方向の板面を形成したことを特徴とする請求項1に
記載のレーザ発振器。4. The return member twists at one end of the gas flow path and has a 90
2. The laser oscillator according to claim 1, wherein a plate surface in the direction of ゜ is formed.
ぶすことで前記ガス流路に対する90゜の方向の板面を
形成したことを特徴とする請求項1に記載のレーザ発振
器。5. The laser oscillator according to claim 1, wherein the return member forms a plate surface in a direction of 90 ° with respect to the gas flow path by crushing the plate member.
する90゜の方向の板面を波打った形状としたことを特
徴とする請求項1に記載のレーザ発振器。6. The laser oscillator according to claim 1, wherein the return member has a shape in which a plate surface in a direction of 90 ° with respect to the gas flow path is wavy.
ガス流路に対する90゜の方向の板面に垂直な取付面部
を形成したことを特徴とする請求項1に記載のレーザ発
振器。7. The laser oscillator according to claim 1, wherein the return member has, at both ends thereof, mounting surfaces perpendicular to a plate surface in a direction of 90 ° with respect to the gas flow path.
ーザガスを集めたい方向に向けて角度をつけたことを特
徴とする請求項1に記載のレーザ発振器。8. The laser oscillator according to claim 1, wherein the return member is formed so that its plate surface is angled toward a direction in which the laser gas is to be collected.
前記レーザ光の光軸方向に均等になるように、その間隔
を変えて配置したことを特徴とする請求項1に記載のレ
ーザ発振器。9. The laser oscillator according to claim 1, wherein the return members are arranged at different intervals so that the laser gas becomes uniform in the optical axis direction of the laser light.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9135797A JPH10313140A (en) | 1997-05-12 | 1997-05-12 | Laser oscillator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9135797A JPH10313140A (en) | 1997-05-12 | 1997-05-12 | Laser oscillator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH10313140A true JPH10313140A (en) | 1998-11-24 |
Family
ID=15160057
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9135797A Pending JPH10313140A (en) | 1997-05-12 | 1997-05-12 | Laser oscillator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH10313140A (en) |
-
1997
- 1997-05-12 JP JP9135797A patent/JPH10313140A/en active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH10313140A (en) | Laser oscillator | |
JP3796038B2 (en) | Gas laser oscillator | |
JP2001177173A (en) | Gas laser oscillator | |
JP2810082B2 (en) | Axial gas laser with auxiliary electrode | |
JPS6197983A (en) | Gas laser oscillator | |
JPH02281670A (en) | High frequency excitation gas laser oscillation device | |
JPH0318752B2 (en) | ||
JPS631086A (en) | Gas laser oscillator | |
JPH07221359A (en) | Piezoelectric transformer | |
JPS61251087A (en) | Discharge excitation type short pulse laser device | |
JP2680441B2 (en) | Gas laser device | |
JPH0337318B2 (en) | ||
US20040227468A1 (en) | Klystron-type devices | |
JPS6321885A (en) | Discharge type gas laser | |
JPH07202302A (en) | Pulse laser oscillator | |
JPH03246981A (en) | Discharge-pumped pulse laser apparatus | |
JP2925024B2 (en) | Discharge excitation method and discharge excitation device for laser oscillator | |
JP2946363B2 (en) | High frequency acceleration focusing device | |
JP2666149B2 (en) | Ultraviolet preionization electrode for discharge-excited gas laser device. | |
JPH0484474A (en) | Laser apparatus | |
JPS61189683A (en) | Discharge-excited short pulse laser device | |
JPH02130973A (en) | Laser oscillator | |
JPS63228776A (en) | Gas laser device | |
JPH03155683A (en) | Gas laser oscillator | |
JPH0774412A (en) | Capacitor and pulse laser device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040303 |
|
A621 | Written request for application examination |
Effective date: 20040303 Free format text: JAPANESE INTERMEDIATE CODE: A621 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20060707 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20060724 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060915 |
|
A131 | Notification of reasons for refusal |
Effective date: 20061212 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070208 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20070312 |
|
A61 | First payment of annual fees (during grant procedure) |
Effective date: 20070315 Free format text: JAPANESE INTERMEDIATE CODE: A61 |
|
R150 | Certificate of patent (=grant) or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110330 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110330 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130330 Year of fee payment: 6 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140330 Year of fee payment: 7 |