JPH0318752B2 - - Google Patents
Info
- Publication number
- JPH0318752B2 JPH0318752B2 JP60041271A JP4127185A JPH0318752B2 JP H0318752 B2 JPH0318752 B2 JP H0318752B2 JP 60041271 A JP60041271 A JP 60041271A JP 4127185 A JP4127185 A JP 4127185A JP H0318752 B2 JPH0318752 B2 JP H0318752B2
- Authority
- JP
- Japan
- Prior art keywords
- main discharge
- preliminary
- corona discharge
- main
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000010355 oscillation Effects 0.000 claims description 5
- 239000011295 pitch Substances 0.000 claims 1
- 239000003990 capacitor Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
[発明の技術分野]
本発明は予備放電方式のガスレーザ発振装置に
関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a preliminary discharge type gas laser oscillation device.
[発明の技術的背景とその問題点]
ガスレーザ発振装置の一つであるTEA
(Transversely Exicited Atomospheric
Pressure)CO2レーザやエキシマレーザではレー
ザガス媒体の動作圧力として大気圧以上の圧力を
用いるために、均一放電発生用の予備電離手段が
必要である。この手段の一つに荷電粒子および紫
外線を供給するコロナ放電が用いられている。コ
ロナ放電方式の予備電離手段を備えたTEACO2
レーザの一例を第4図に示す。すなわち、1は気
密容器でCO2、N2、He等の混合ガスからなるレ
ーザガス媒体が1気圧近傍の圧力に維持されて封
入されている。容器1内にはレーザガス媒体の雰
囲気下に主放電電極を構成しているかまぼこ状の
陰極2とこれとほぼ同形の陽極3とが対向して配
置され、パルス電圧を供給する電源4に接続され
ている。陰極2の陽極3側に対向する面には均等
のピツチになる数条のV溝5が長手方向へ互いに
平行になつて該設されている。これらV溝5には
ガラスパイプ6内に芯線7を納めた構造の予備コ
ロナ放電電極8がそれぞれ設けられている。予備
コロナ放電電極8の芯線は一本の線にまとめられ
て陽極3に接続されている。また、陰極2と陽極
3との間には短いリード線で短絡する形でピーキ
ングキヤパシタ9が設けられている。[Technical background of the invention and its problems] TEA, which is one of the gas laser oscillation devices
(Transversely Excited Atmospheric
Pressure) CO 2 lasers and excimer lasers use a pressure higher than atmospheric pressure as the operating pressure of the laser gas medium, so pre-ionization means for uniform discharge generation is required. One such means uses corona discharge, which supplies charged particles and ultraviolet light. TEACO 2 with corona discharge preionization means
An example of a laser is shown in FIG. That is, 1 is an airtight container in which a laser gas medium consisting of a mixed gas of CO 2 , N 2 , He, etc. is sealed and maintained at a pressure of around 1 atmosphere. Inside the container 1, in an atmosphere of a laser gas medium, a semicylindrical cathode 2 constituting a main discharge electrode and an anode 3 having substantially the same shape as the cathode 2 are arranged facing each other, and are connected to a power source 4 that supplies a pulse voltage. ing. On the surface of the cathode 2 facing the anode 3, several V-grooves 5 of equal pitch are provided parallel to each other in the longitudinal direction. Each of these V-grooves 5 is provided with a preliminary corona discharge electrode 8 having a structure in which a core wire 7 is housed in a glass pipe 6. The core wires of the preliminary corona discharge electrode 8 are combined into one wire and connected to the anode 3. Further, a peaking capacitor 9 is provided between the cathode 2 and the anode 3 in a short-circuited manner with a short lead wire.
上記の構成において、予備コロナ放電電極8
は、主放電部の幅いつぱいとなる数に設定されて
いる。ところで、このような予備コロナ放電電極
の配置では配置中央部分の予備電離が強くなり、
主放電域10における電流密度も上記中央部分が
高くなる。このような主放電作用で得られたレー
ザビームの強度分布は第5図に示すように山なり
の強度分布となつてしまい、たとえばマーキング
加工その他のレーザ加工では加工ムラが生じてし
まう問題があつた。 In the above configuration, the preliminary corona discharge electrode 8
is set to a number that narrows the width of the main discharge section. By the way, with this arrangement of preliminary corona discharge electrodes, preliminary ionization becomes stronger in the central part of the arrangement,
The current density in the main discharge region 10 is also high in the central portion. The intensity distribution of the laser beam obtained by such a main discharge action becomes a mountainous intensity distribution as shown in Fig. 5, which causes problems such as uneven processing in marking and other laser processing. Ta.
[発明の目的]
本発明は主放電部の電流密度を調整し、平坦な
強度分布をもつレーザビームが得られるガスレー
ザ発振装置を提供することを目的とする。[Object of the Invention] An object of the present invention is to provide a gas laser oscillation device that can adjust the current density of the main discharge part and obtain a laser beam with a flat intensity distribution.
[発明の概要]
上記目的を達成するために、主放電部の中央部
に非主放電域を形成させる予備放電を起こさしめ
るように複数の予備コロナ放電電極を配置したも
のである。[Summary of the Invention] In order to achieve the above object, a plurality of preliminary corona discharge electrodes are arranged so as to cause a preliminary discharge to form a non-main discharge region in the center of the main discharge section.
[発明の実施例]
以下、本発明を実施例を示す図面に基いて説明
する。なお、第5図と共通する部分には同一符号
を付し説明は省略する。[Embodiments of the Invention] The present invention will be described below with reference to drawings showing embodiments. Note that parts common to those in FIG. 5 are designated by the same reference numerals, and explanations thereof will be omitted.
すなわち、主要部分を示す第1図における実施
例では配置された多数の予備コロナ放電電極8の
うち、中央の1本を取り除いた配置にしたもので
ある。すなわち、取り除いた箇所を中心にして側
面方向からみて左右に二つの予備コロナ放電電極
群8a,8bが形成されたことになる。なお、こ
の実施例では電源、ピーキングキヤパシタ等への
接続は省略されているが、それらは第5図に示す
ものと同様の構成になつている。 That is, in the embodiment shown in FIG. 1 showing the main parts, one of the many preliminary corona discharge electrodes 8 is removed from the center. That is, two preliminary corona discharge electrode groups 8a and 8b are formed on the left and right sides when viewed from the side with the removed portion as the center. In this embodiment, connections to the power supply, peaking capacitor, etc. are omitted, but they have the same configuration as shown in FIG. 5.
以上の構成により、電源から陰極2に加えられ
たパルス電圧の前半において、まず、電極間隔の
せまい各予備コロナ放電電極8と陰極2との間で
コロナ放電が発生する。これにより、陰極2の表
面近傍は十分予備電離される。このとき、二つの
予備コロナ放電電極群8a,8bが形成されてい
るので、上記予備電離域も二つに分れ、その結
果、同図に示すように二つに分れた主放電域11
a,11bが形成されていることになる。そし
て、上記の取り除いた部分では予備電離が行われ
ないので、この部分は主放電の生じない非主放電
域12が形成される。上記二つに分離した主放電
域11a,11bの電流密度はそれぞれの中央部
分が大となる。以上の放電作用によつて励起され
た光共振器(図示せず)の一方から出力されたレ
ーザ光は第2図に示すように、レーザ光の中央部
が低く周辺部が高い強度分布13となる。この強
度分布13は予備コロナ放電電極群8a,8bを
可及的に近接し非主放電域12の間隔をより狭く
なるようにすれば、第3図に示すように均一な強
度分布14が得られる。 With the above configuration, in the first half of the pulse voltage applied to the cathode 2 from the power source, corona discharge first occurs between each of the preliminary corona discharge electrodes 8 and the cathode 2 with a narrow electrode interval. As a result, the vicinity of the surface of the cathode 2 is sufficiently pre-ionized. At this time, since two preliminary corona discharge electrode groups 8a and 8b are formed, the preliminary ionization area is also divided into two, and as a result, the main discharge area 11 is divided into two as shown in the figure.
a, 11b are formed. Since preliminary ionization is not performed in the removed portion, a non-main discharge region 12 in which no main discharge occurs is formed in this portion. The current density of the two separated main discharge regions 11a and 11b is large in the center of each region. The laser light output from one of the optical resonators (not shown) excited by the above discharge action has an intensity distribution 13 in which the center part of the laser light is low and the peripheral part is high, as shown in FIG. Become. This intensity distribution 13 can be obtained by placing the preliminary corona discharge electrode groups 8a and 8b as close as possible and making the interval between the non-main discharge regions 12 narrower, so that a uniform intensity distribution 14 can be obtained as shown in FIG. It will be done.
なお、上記実施例では予備コロナ放電電極の取
り除いた部分の陰極2表面のV溝5をそのままに
したが、あらかじめこの部分にはV溝を形成しな
いで平坦にしておいても作用および効果的にはほ
ぼ変らないものである。また、いうまでもなく取
り除く予備コロナ放電電極については銅線7のみ
を除去しても同じことになる。 In the above embodiment, the V-groove 5 on the surface of the cathode 2 in the removed portion of the preliminary corona discharge electrode was left as it is, but the function and effectiveness may be improved even if the V-groove is not formed in this portion in advance and the surface is made flat. remains almost unchanged. Furthermore, it goes without saying that the same result will occur even if only the copper wire 7 is removed regarding the preliminary corona discharge electrode.
[発明の効果]
以上詳述したように、強い電流密度の主放電域
がなくなり、均一な強度分布を有するレーザ光が
得られるため、加工ムラのないエネルギの利用効
率が高い加工を達成された。このエネルギの利用
効率が高いことは、不均一な強度分布をもつレー
ザ光による加工と同等の加工を行う場合、低いエ
ネルギで行えることを意味している。レーザ出力
エネルギは電源回路の主コンデンサに蓄えられた
電荷量に比例するが、低いレーザ出力エネルギで
所望の加工ができれば、コンデンサの容量、充電
用電源の電圧および容量が節約でき、小形化でき
るとともに、ギヤツプスイツチ、サイラトロンな
どのスイツチ素子への要求も緩和される。[Effects of the invention] As detailed above, the main discharge region with strong current density is eliminated and laser light with a uniform intensity distribution is obtained, so processing with high energy utilization efficiency without processing unevenness is achieved. . This high energy utilization efficiency means that processing equivalent to processing using a laser beam with a non-uniform intensity distribution can be performed with low energy. The laser output energy is proportional to the amount of charge stored in the main capacitor of the power supply circuit, but if the desired processing can be performed with a low laser output energy, the capacity of the capacitor, the voltage and capacity of the charging power supply can be saved, and the device can be made smaller. , gear switches, thyratrons, and other switch elements are also relaxed.
第1図は本発明の一実施例を示す要部側面図、
第2図および第3図はエネルギ分布図、第4図は
従来例を示す構成図、第5図は従来例で得られた
レーザ光のエネルギ分布図である。
1……気密容器、2……陰極、3……陽極、8
……予備コロナ放電電極、8a,8b……予備コ
ロナ放電電極群、11a,11b……主放電域、
12……非主放電域。
FIG. 1 is a side view of essential parts showing one embodiment of the present invention;
2 and 3 are energy distribution diagrams, FIG. 4 is a configuration diagram showing a conventional example, and FIG. 5 is an energy distribution diagram of laser light obtained in the conventional example. 1... Airtight container, 2... Cathode, 3... Anode, 8
... Preliminary corona discharge electrode, 8a, 8b ... Preliminary corona discharge electrode group, 11a, 11b ... Main discharge area,
12...Non-main discharge area.
Claims (1)
ジ部が曲面に形成されたほぼ平板状をなし上記気
密容器内に対向配置される一対の主放電電極と、
連続した主放電域を形成するピツチで少なくとも
上記主放電電極の一方の放電面に配置され主放電
電極の他方の放電面に対向した複数の予備コロナ
放電電極とを備えたガスレーザ発振装置におい
て、上記予備コロナ放電電極は上記配置の中央部
を欠如され上記主放電域の中央部に非主放電域を
形成したことを特徴とするガスレーザ発振装置。1. an airtight container enclosing a gas laser medium; a pair of main discharge electrodes each having a substantially flat plate shape with curved edges and disposed opposite to each other in the airtight container;
A gas laser oscillation device comprising a plurality of preliminary corona discharge electrodes disposed on at least one discharge surface of the main discharge electrode and facing the other discharge surface of the main discharge electrode at pitches forming a continuous main discharge region, the above-mentioned A gas laser oscillation device characterized in that the preliminary corona discharge electrode is omitted at the center of the arrangement to form a non-main discharge region at the center of the main discharge region.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4127185A JPS61201489A (en) | 1985-03-04 | 1985-03-04 | Gas laser oscillator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4127185A JPS61201489A (en) | 1985-03-04 | 1985-03-04 | Gas laser oscillator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61201489A JPS61201489A (en) | 1986-09-06 |
JPH0318752B2 true JPH0318752B2 (en) | 1991-03-13 |
Family
ID=12603773
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4127185A Granted JPS61201489A (en) | 1985-03-04 | 1985-03-04 | Gas laser oscillator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61201489A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0746737B2 (en) * | 1985-08-02 | 1995-05-17 | 株式会社東芝 | Laser oscillator |
JPS6468991A (en) * | 1987-09-09 | 1989-03-15 | Toshiba Corp | Gas laser device |
CN106953225B (en) * | 2016-01-06 | 2019-10-08 | 北京礴德恒激光科技有限公司 | A kind of lath electric discharge preionization transversely-excited atmosphere-pressure laser |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57173991A (en) * | 1981-04-20 | 1982-10-26 | Mitsubishi Electric Corp | Transverse directional excitation type laser oscillator |
-
1985
- 1985-03-04 JP JP4127185A patent/JPS61201489A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57173991A (en) * | 1981-04-20 | 1982-10-26 | Mitsubishi Electric Corp | Transverse directional excitation type laser oscillator |
Also Published As
Publication number | Publication date |
---|---|
JPS61201489A (en) | 1986-09-06 |
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