JPH10303556A - Manufacture of printed wiring board - Google Patents

Manufacture of printed wiring board

Info

Publication number
JPH10303556A
JPH10303556A JP11131597A JP11131597A JPH10303556A JP H10303556 A JPH10303556 A JP H10303556A JP 11131597 A JP11131597 A JP 11131597A JP 11131597 A JP11131597 A JP 11131597A JP H10303556 A JPH10303556 A JP H10303556A
Authority
JP
Japan
Prior art keywords
wiring board
printed wiring
linear expansion
substrate
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11131597A
Other languages
Japanese (ja)
Inventor
Kimiaki Saito
公昭 齊藤
Keiji Shibata
圭史 柴田
Munetoshi Yamada
宗勇 山田
Tomoki Takazoe
智樹 高添
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP11131597A priority Critical patent/JPH10303556A/en
Publication of JPH10303556A publication Critical patent/JPH10303556A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method of a printed wiring board wherein two boards and a prepreg formed by impregnating glass cloth with thermosetting resin are used, the prepreg is sandwiched between the boards and laminated, heated and pressed, and a printed wiring board of small warp can be obtained. SOLUTION: In the method for laminating boards 11a, 11b, the two boards are so laminated that the directions L1, L2 wherein the coefficients of linear expansion of the respective boards are large intersect with each other, In other case, two boards are so laminated that the coefficient of linear expansion of one board in the X direction is larger than that of the other board in the X direction, and that the coefficient of linear expansion of the one board in the Y direction is larger than that of the other board in the Y direction.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、電気・電子機器等
に使用されるプリント配線板の製造方法に関するもので
ある。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a printed wiring board used for electric and electronic equipment.

【0002】[0002]

【従来の技術】電子部品や半導体装置を実装するための
プリント配線板として、複数の導体層を有する多層のプ
リント配線板が用いられている。この多層のプリント配
線板の製造方法としては、例えば、図6(a)に示すよ
うな、一方の面の全面に金属層32を有する有機系の第
一の基板31aと、一方の面に内層用の導体パターン3
3を有すると共に、他方の面には全面に金属層32を有
する有機系の第二の基板31bと、エポキシ樹脂等の熱
硬化性樹脂をガラスクロス等の基材に含浸して製造した
プリプレグ35を用いる。
2. Description of the Related Art A multilayer printed wiring board having a plurality of conductor layers has been used as a printed wiring board for mounting electronic components and semiconductor devices. As a method of manufacturing this multilayer printed wiring board, for example, as shown in FIG. 6A, an organic first substrate 31a having a metal layer 32 on one entire surface and an inner layer Conductor pattern 3
And a prepreg 35 made by impregnating a base material such as a glass cloth with a thermosetting resin such as an epoxy resin and a thermosetting resin such as an epoxy resin. Is used.

【0003】そして、内層用の導体パターン33がプリ
プレグ35と接するように、第一の基板31aと第二の
基板31bの間にプリプレグ35を挟んで積層した後、
加熱・加圧してプリプレグ35中の熱硬化性樹脂を流動
させることにより、導体パターン33間の凹部をその熱
硬化性樹脂で埋めながら一体化して、図6(b)に示す
ような、多層の積層板を製造する。
After the prepreg 35 is laminated between the first substrate 31a and the second substrate 31b such that the conductor pattern 33 for the inner layer is in contact with the prepreg 35,
By heating and pressurizing to flow the thermosetting resin in the prepreg 35, the concave portions between the conductor patterns 33 are integrated while being filled with the thermosetting resin, thereby forming a multilayered structure as shown in FIG. Manufacture laminates.

【0004】次いで、図6(c)に示すように、この積
層板に穴あけをした後、メッキ処理を行ってこの穴に内
層用の導体パターン33及び外層の金属層(32)を導
通するスルホールメッキ皮膜37を形成し、次いで、外
層の金属層をエッチングして外層用の導体パターン38
を形成することによりプリント配線板は製造されてい
る。
[0006] Next, as shown in FIG. 6 (c), a hole is formed in the laminated plate, and then a plating process is performed to form a through hole for conducting the inner conductor pattern 33 and the outer metal layer (32) to the hole. A plating film 37 is formed, and then the outer metal layer is etched to form a conductor pattern 38 for the outer layer.
The printed wiring board is manufactured by forming.

【0005】しかしこの方法で製造したプリント配線板
は、図6(c)に示すように、内層用の導体パターン3
3の間に気泡39が残る場合があり、吸湿耐熱性や電気
的信頼性が低いという問題があった。
However, as shown in FIG. 6C, the printed wiring board manufactured by this method has a conductor pattern 3 for the inner layer.
In some cases, bubbles 39 may remain between the layers 3, and there is a problem that heat resistance to moisture absorption and electrical reliability are low.

【0006】そのため、図7に示すように、第二の基板
31bの表面に有する内層用の導体パターン33,33
間に、熱硬化性樹脂を塗布した後、硬化させて、導体パ
ターン33,33間を樹脂硬化物34で埋め、次いで、
この間を樹脂硬化物34で埋められた導体パターン3
3,33がプリプレグ35と接する側になるように積層
することにより、得られるプリント配線板の内層用の導
体パターン33,33の間に気泡(39)が残り難くす
る方法が検討されている。
Therefore, as shown in FIG. 7, the conductor patterns 33 for the inner layer on the surface of the second substrate 31b.
In the meantime, a thermosetting resin is applied and then cured, and the space between the conductor patterns 33, 33 is filled with a cured resin 34.
During this time, the conductor pattern 3 filled with the resin cured material 34
A method is considered in which the air bubbles (39) are less likely to remain between the conductor patterns 33, 33 for the inner layer of the obtained printed wiring board by laminating the layers 3 and 33 so as to be in contact with the prepreg 35.

【0007】なお、上記基板31a,31bは、ガラス
クロス及び樹脂硬化物よりなっており、エポキシ樹脂等
の熱硬化性樹脂をガラスクロスに含浸して製造したプリ
プレグを所用枚数積層した後、その片面又は両面に銅箔
等の金属箔を積層し、次いで、加熱・加圧してプリプレ
グ中の熱硬化性樹脂を硬化させる方法で一般に製造され
ている。
The substrates 31a and 31b are made of a glass cloth and a cured resin, and after laminating a required number of prepregs manufactured by impregnating a glass cloth with a thermosetting resin such as an epoxy resin, the one side thereof is formed. Alternatively, it is generally manufactured by laminating a metal foil such as a copper foil on both sides, and then heating and pressing to cure the thermosetting resin in the prepreg.

【0008】これらの基板やプリプレグの製造に用いら
れるガラスクロスは、縦糸の間に横糸を通過させる方法
で製造されているため、加熱・加圧して積層板を製造す
る時の寸法収縮率の縦横差が生じやすく、複数の基板を
用いる場合には、ガラスクロスの縦糸の方向を全て揃え
るように積層して積層板は製造されている。
[0008] The glass cloth used in the production of these substrates and prepregs is produced by a method in which the weft passes between the warp yarns. When a plurality of substrates are used and a plurality of substrates are used, a laminated board is manufactured by laminating the glass cloth so that all the warp directions are aligned.

【0009】なお、基板の間にプリプレグを挟んで積層
した後、加熱・加圧して得られる積層板は反りが大きく
なりやすく、更にこの反りの大きな積層板を用いて製造
したプリント配線板も反りが大きくなりやすいという問
題があった。
A laminate obtained by heating and pressing after laminating a prepreg between substrates is likely to have a large warp, and a printed wiring board manufactured using the large warp laminate is also warped. There is a problem that it is easy to grow.

【0010】そのため、基板の間にプリプレグを挟んで
積層した後、加熱・加圧して製造するプリント配線板の
製造方法であって、反りが小さいプリント配線板が得ら
れるプリント配線板の製造方法が求められている。
Therefore, a method for manufacturing a printed wiring board is described in which a prepreg is sandwiched between substrates and laminated, and then heated and pressed to produce a printed wiring board with a small warpage. It has been demanded.

【0011】[0011]

【発明が解決しようとする課題】本発明は、上記問題点
を改善するために成されたもので、その目的とするとこ
ろは、ガラスクロス及び樹脂硬化物よりなる基板と、熱
硬化性樹脂をガラスクロスに含浸したプリプレグとを用
いて、基板の間にプリプレグを挟んで積層した後、加熱
・加圧して製造するプリント配線板の製造方法であっ
て、反りが小さいプリント配線板が得られるプリント配
線板の製造方法を提供することにある。
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide a substrate made of glass cloth and a cured resin, and a thermosetting resin. A method for manufacturing a printed wiring board in which a prepreg impregnated in a glass cloth is used and laminated by sandwiching the prepreg between substrates, and then heating and pressing are performed. An object of the present invention is to provide a method for manufacturing a wiring board.

【0012】[0012]

【課題を解決するための手段】本発明の請求項1に係る
プリント配線板の製造方法は、その中の少なくとも1枚
には、間を樹脂硬化物で埋められた複数の導体パターン
を表面に有する、ガラスクロス及び樹脂硬化物よりなる
2枚の基板と、熱硬化性樹脂をガラスクロスに含浸した
プリプレグとを用いて、間を樹脂硬化物で埋められた導
体パターンがプリプレグと接する側になるように、基板
の間にプリプレグを挟んで積層した後、加熱・加圧して
製造するプリント配線板の製造方法において、基板を積
層する方法が、2枚の基板を、それぞれの線膨張率の大
きな方向が交差するように積層する方法であることを特
徴とする。
According to a first aspect of the present invention, there is provided a method for manufacturing a printed wiring board, wherein at least one of the printed wiring boards has a plurality of conductor patterns filled with a cured resin on the surface. Using two substrates made of a glass cloth and a cured resin, and a prepreg in which a thermosetting resin is impregnated in a glass cloth, the conductor pattern filled with the cured resin is in contact with the prepreg. As described above, in a method for manufacturing a printed wiring board manufactured by heating and pressing after laminating a prepreg between substrates, the method of laminating the substrates is such that two substrates have large linear expansion coefficients. The method is characterized in that the layers are stacked so that the directions intersect.

【0013】本発明の請求項2に係るプリント配線板の
製造方法は、請求項1記載のプリント配線板の製造方法
において、それぞれの基板の、線膨張率の大きな方向が
交差する交差角が、30〜90度であることを特徴とす
る。
According to a second aspect of the present invention, there is provided a method for manufacturing a printed wiring board according to the first aspect, wherein each of the substrates has an intersection angle at which a direction having a large coefficient of linear expansion intersects. The angle is 30 to 90 degrees.

【0014】本発明の請求項3に係るプリント配線板の
製造方法は、その中の少なくとも1枚には、間を樹脂硬
化物で埋められた複数の導体パターンを表面に有する、
ガラスクロス及び樹脂硬化物よりなる2枚の基板と、熱
硬化性樹脂をガラスクロスに含浸したプリプレグとを用
いて、間を樹脂硬化物で埋められた導体パターンがプリ
プレグと接する側になるように、基板の間にプリプレグ
を挟んで積層した後、加熱・加圧して製造するプリント
配線板の製造方法において、基板を積層する方法が、一
方の基板のX方向の線膨張率を、他方の基板のX方向の
線膨張率より大きくなるように積層すると共に、上記一
方の基板の、X方向と直交する方向であるY方向の線膨
張率を、上記他方の基板のY方向の線膨張率より、大き
くなるように積層する方法であることを特徴とする。
According to a third aspect of the present invention, there is provided a method for manufacturing a printed wiring board, wherein at least one of the printed wiring boards has a plurality of conductive patterns on its surface, the conductive patterns being filled with a cured resin.
Using two substrates composed of a glass cloth and a cured resin, and a prepreg in which a thermosetting resin is impregnated in a glass cloth, so that the conductor pattern filled with the cured resin is on the side in contact with the prepreg. In a method of manufacturing a printed wiring board manufactured by laminating a prepreg between substrates and then heating and applying pressure, the method of laminating the substrates is such that the coefficient of linear expansion of one substrate in the X direction is determined by the other substrate. Are laminated so as to be larger than the linear expansion coefficient in the X direction, and the linear expansion coefficient of the one substrate in the Y direction, which is a direction orthogonal to the X direction, is calculated from the linear expansion coefficient of the other substrate in the Y direction. , Characterized in that it is a method of laminating so as to be large.

【0015】2枚の基板を積層した後、加熱・加圧する
と、その加熱によって、各基板は膨張する。この膨張量
は、それぞれの各辺の線膨張率の大きさと比例するた
め、プリプレグ中の熱硬化性樹脂が硬化するとき、各基
板の各辺は、異なった膨張量の状態のまま接着されて一
体化する。なお、このとき加圧されているため、平面形
状に成形される。そのため、その後冷却すると共に、常
圧に戻して得られる積層板は、線膨張率の大きな辺がよ
り大きく収縮し、その辺が湾曲するため、反りが発生す
ると考えられる。
When two substrates are stacked and heated and pressed, each substrate expands due to the heating. Since the amount of expansion is proportional to the magnitude of the linear expansion coefficient of each side, when the thermosetting resin in the prepreg cures, each side of each substrate is adhered in a state of a different amount of expansion. Integrate. In addition, since it is pressurized at this time, it is formed into a planar shape. Therefore, it is considered that, after cooling and returning to normal pressure, the side of the laminate having a large linear expansion coefficient shrinks more and the side is curved, so that warpage occurs.

【0016】しかし本発明によると、得られるプリント
配線板は、各辺が全て湾曲して、鞍形に反った形状や、
お碗形に反った形状となり、平面形状に近い形状に矯正
された形状となるため、従来の方法と比較して反りが小
さなプリント配線板となる。
However, according to the present invention, the printed wiring board obtained has a shape in which all sides are curved and which is warped in a saddle shape,
The printed wiring board has a shape that is warped into a bowl shape and has a shape corrected to a shape close to a planar shape.

【0017】[0017]

【発明の実施の形態】本発明に係るプリント配線板の製
造方法を図面に基づいて説明する。図1は本発明の請求
項1に係るプリント配線板の製造方法の、一実施の形態
を示す図であり、(a)は積層を説明する斜視図、
(b)は積層を説明する断面図、(c)は加熱・加圧後
を説明する断面図である。図2は本発明の請求項1に係
るプリント配線板の製造方法の、他の実施の形態を示す
図であり、(a)は積層を説明する斜視図、(b)は反
りを説明する斜視図である。図3は本発明の請求項3に
係るプリント配線板の製造方法の、一実施の形態を示す
図であり、(a)は積層を説明する斜視図、(b)は反
りを説明する斜視図である。図4は従来のプリント配線
板の製造方法を示す図であり、(a)は積層を説明する
斜視図、(b)は反りを説明する斜視図である。図5は
反りを説明する図であり、(a)は本発明の請求項1に
係るプリント配線板を説明する図、(b)は従来のプリ
ント配線板を説明する図である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS A method for manufacturing a printed wiring board according to the present invention will be described with reference to the drawings. FIG. 1 is a view showing one embodiment of a method for manufacturing a printed wiring board according to claim 1 of the present invention, (a) is a perspective view for explaining lamination,
(B) is a cross-sectional view for explaining lamination, and (c) is a cross-sectional view for explaining after heating and pressing. 2A and 2B are diagrams showing another embodiment of the method for manufacturing a printed wiring board according to claim 1 of the present invention, wherein FIG. 2A is a perspective view illustrating lamination, and FIG. 2B is a perspective view illustrating warpage. FIG. 3A and 3B are views showing one embodiment of a method for manufacturing a printed wiring board according to claim 3 of the present invention, wherein FIG. 3A is a perspective view illustrating lamination, and FIG. 3B is a perspective view illustrating warpage. It is. 4A and 4B are views showing a conventional method for manufacturing a printed wiring board, wherein FIG. 4A is a perspective view illustrating lamination, and FIG. 4B is a perspective view illustrating warpage. FIGS. 5A and 5B are diagrams illustrating warpage, FIG. 5A is a diagram illustrating a printed wiring board according to claim 1 of the present invention, and FIG. 5B is a diagram illustrating a conventional printed wiring board.

【0018】[本発明の請求項1,2に係るプリント配
線板の製造方法]本発明の請求項1に係るプリント配線
板の製造方法の一実施の形態は、図1(a)及び図1
(b)に示すような、一方の面の全面に金属層12を有
する第一の基板11aと、一方の面に間を樹脂硬化物1
4で埋められた複数の内層用の導体パターン13を有す
ると共に、他方の面には全面に金属層12を有する第二
の基板11bと、熱硬化性樹脂をガラスクロスに含浸し
て製造したプリプレグ15を用いる。
[Method of Manufacturing Printed Wiring Board According to Claims 1 and 2 of the Present Invention] One embodiment of the method of manufacturing a printed wiring board according to claim 1 of the present invention is shown in FIGS.
As shown in (b), a first substrate 11a having a metal layer 12 on one entire surface and a cured resin 1 between one surface are provided.
4, a second substrate 11b having a plurality of inner layer conductor patterns 13 and a metal layer 12 on the entire other surface, and a prepreg manufactured by impregnating a thermosetting resin into a glass cloth. 15 is used.

【0019】そして、間を樹脂硬化物14で埋められた
内層用の導体パターン13がプリプレグ15と接する側
になるように、第一の基板11aと第二の基板11bの
間に1枚のプリプレグ15を挟んで積層した後、加熱・
加圧して、図1(c)に示すように一体化し、内層に導
体パターン13を有すると共に、外層に金属層12を有
する多層の積層板10を製造する。
Then, one prepreg is placed between the first substrate 11a and the second substrate 11b such that the conductor pattern 13 for the inner layer filled with the cured resin 14 is on the side in contact with the prepreg 15. 15 after laminating, heating and
Pressing is performed to integrate as shown in FIG. 1 (c) to produce a multilayer laminate 10 having a conductor pattern 13 in the inner layer and a metal layer 12 in the outer layer.

【0020】次いで、図示しないが、必要に応じてこの
積層板に穴あけをした後、メッキ処理を行ってこの穴に
内層の導体パターン及び外層の金属層を導通するスルホ
ールメッキ皮膜を形成し、次いで、外層の金属層をエッ
チングして外層用の導体パターンを形成することにより
プリント配線板は製造される。
Next, though not shown, the laminated plate is perforated as required, and then plated to form a through-hole plating film for conducting the inner conductor pattern and the outer metal layer in the holes. The printed wiring board is manufactured by etching the outer metal layer to form a conductor pattern for the outer layer.

【0021】なお、図1(a)に示すように、積層する
2枚の基板11a,11bは、第一の基板11aの線膨
張率の大きな方向L1と、第二の基板11bの線膨張率
の大きな方向L2が、90度交差するように積層されて
いる。そのため、加熱・加圧して得られる積層板は反り
が小さくなる。そして、この反りが小さい積層板を用い
て得られるプリント配線板も、反りが小さくなる。
As shown in FIG. 1A, the two substrates 11a and 11b to be laminated have a direction L1 in which the linear expansion coefficient of the first substrate 11a is large and a linear expansion coefficient L2 of the second substrate 11b. Are stacked so that the directions L2 with the larger crosses 90 degrees. Therefore, the laminate obtained by heating and pressing has a small warpage. Also, the printed wiring board obtained by using the laminated board having a small warp also has a small warp.

【0022】従来の、ガラスクロスの縦糸の方向を全て
揃えるように基板を積層した場合、図4(a)に示すよ
うに、第一の基板11aの線膨張率の大きな方向L1
と、第二の基板11bの線膨張率の大きな方向L2は、
一般に同じ方向になる。そして、この2枚の基板11
a,11bを、それぞれの線膨張率の大きな方向L1,
L2が同じ方向になるように積層した後、加熱・加圧し
て得られる積層板10及びその積層板10を用いて得ら
れるプリント配線板は、図4(b)に示すように、一方
の方向の2辺の湾曲は小さいが、他方の方向の2辺の湾
曲は特に大きくなって、半円筒形状に反った形状とな
る。
In the conventional case where the substrates are laminated so that the warp directions of the glass cloth are all aligned, as shown in FIG. 4A, the direction L1 of the first substrate 11a where the coefficient of linear expansion is large is L1.
And the direction L2 where the coefficient of linear expansion of the second substrate 11b is large is
Generally in the same direction. Then, the two substrates 11
a, 11b are set in the directions L1,
After laminating so that L2 is in the same direction, the laminated board 10 obtained by heating and pressurizing and the printed wiring board obtained by using the laminated board 10 have one direction as shown in FIG. The curvature of the two sides is small, but the curvature of the two sides in the other direction is particularly large, resulting in a shape that is warped to a semi-cylindrical shape.

【0023】これは、第一の基板11aと第二の基板1
1bを積層した後、加熱・加圧すると、その加熱によっ
て、各基板11a,11bは膨張する。この膨張量は、
それぞれの各辺の線膨張率の大きさと比例するため、プ
リプレグ15中の熱硬化性樹脂が硬化するとき、各基板
11a,11bの各辺は、異なった膨張量の状態のまま
接着されて一体化する。なお、このとき加圧されている
ため、平面形状に成形される。そのため、その後冷却す
ると共に、常圧に戻して得られる積層板10は、線膨張
率の大きな辺がより大きく収縮し、その辺が湾曲するた
め、反りが発生すると考えられる。
This is because the first substrate 11a and the second substrate 1
When the substrates 1a and 11b are heated and pressurized after laminating the substrates 1b, the substrates 11a and 11b expand due to the heating. This expansion is
When the thermosetting resin in the prepreg 15 is cured, each side of each of the substrates 11a and 11b is adhered while being in a state of a different expansion amount and is integrally formed because the linear expansion coefficient is proportional to the magnitude of the linear expansion coefficient of each side. Become In addition, since it is pressurized at this time, it is formed into a planar shape. Therefore, it is considered that, after cooling and returning to normal pressure, the side of the laminate 10 having a large coefficient of linear expansion contracts more and the side is curved, so that warpage occurs.

【0024】そして、図4(a)に示すように、第一の
基板11aのX方向の線膨張率α1xが、Y方向(X方向
と直交する方向)の線膨張率α1yより大きく(α1x>α
1y)、第二の基板11bのX方向の線膨張率α2xが、Y
方向の線膨張率α2yより大きく(α2x>α2y)なるよう
に積層した場合には、大きな線膨張率α1x,α2xに対応
する辺の収縮量が特に大きいため、図4(b)に示すよ
うな半円筒形状となる。
Then, as shown in FIG. 4A, the linear expansion coefficient α1x in the X direction of the first substrate 11a is larger than the linear expansion coefficient α1y in the Y direction (direction orthogonal to the X direction) (α1x> α
1y), the linear expansion coefficient α2x in the X direction of the second substrate 11b is Y
When the layers are stacked so as to be larger than the linear expansion coefficient α2y in the direction (α2x> α2y), the contraction amounts of the sides corresponding to the large linear expansion coefficients α1x and α2x are particularly large, and therefore, as shown in FIG. It has a semi-cylindrical shape.

【0025】しかし、図2(a)に示すように、第一の
基板11aのY方向の線膨張率α1yが、X方向の線膨張
率α1xより大きく(α1y>α1x)、第二の基板11bの
X方向の線膨張率α2xが、Y方向の線膨張率α2yより大
きく(α2x>α2y)なるように積層することにより、2
枚の基板11a,11bを、それぞれの線膨張率の大き
な方向L1,L2が交差するように積層した後、加熱・
加圧して得られる積層板10及びその積層板10を用い
て得られるプリント配線板は、一方の基板の収縮量が大
きい場合であっても、他方の基板は小さいため平均化さ
れ、図2(b)に示すように、4つの辺が全て湾曲し
て、鞍形(背反曲率とも言う)に反った形状となる。そ
のため、図5(b)に示すような、従来の製造方法で製
造した半円筒形状に反った場合の、大きく湾曲した辺
が、図5(a)に示すように、平面形状に近い形状に矯
正された形状となり、従来の方法と比較して反りSが小
さくなる。
However, as shown in FIG. 2A, the linear expansion coefficient α1y in the Y direction of the first substrate 11a is larger than the linear expansion coefficient α1x in the X direction (α1y> α1x), and the second substrate 11b Are laminated such that the linear expansion coefficient α2x in the X direction is larger than the linear expansion coefficient α2y in the Y direction (α2x> α2y).
After laminating the substrates 11a and 11b such that the directions L1 and L2 of large linear expansion coefficients intersect, heating and
The laminated board 10 obtained by pressing and the printed wiring board obtained by using the laminated board 10 are averaged because the other substrate is small even if the contraction amount of one substrate is large, and FIG. As shown in b), all four sides are curved and have a shape that is warped in a saddle shape (also called a reciprocal curvature). Therefore, as shown in FIG. 5 (b), when curved to the semi-cylindrical shape manufactured by the conventional manufacturing method, the greatly curved side becomes a shape close to a planar shape as shown in FIG. 5 (a). The shape becomes a corrected shape, and the warpage S becomes smaller as compared with the conventional method.

【0026】なお、2枚の基板11a,11bを、それ
ぞれの線膨張率の大きな方向が交差するように積層する
方法としては、基板の線膨張率の大きさは、一般に基板
の絶縁部を形成するガラスクロスの厚みや、ガラスクロ
ス中の糸の本数や、その糸の強度や、ガラスクロスの織
り縮み量等、ガラスクロスの影響が大きいため、これら
を適宜調整して、それぞれの基板の線膨張率の大きな方
向を交差させるようにすれば良いが、同じ線膨張率の基
板を用いて、線膨張率の方向を揃えずに積層することに
より交差するようにしても良い。
As a method of laminating the two substrates 11a and 11b such that the directions of large coefficients of linear expansion intersect with each other, the magnitude of the coefficient of linear expansion of the substrate is generally determined by forming the insulating portion of the substrate. Since the influence of the glass cloth is large, such as the thickness of the glass cloth to be formed, the number of yarns in the glass cloth, the strength of the yarn, and the amount of shrinkage of the weave of the glass cloth, these are appropriately adjusted, and the line of each substrate is adjusted. It is sufficient to make the directions having a large expansion coefficient intersect, but it is also possible to make them intersect by using substrates having the same linear expansion coefficient and stacking them without aligning the direction of the linear expansion coefficient.

【0027】なお、本発明の線膨張率は、基板の絶縁部
のみの線膨張率に限定するものではなく、導体パターン
13や樹脂硬化物14や金属層12を含めた基板全体
の、線膨張率の大きな方向を表すものである。なお、導
体パターン13の形成密度等に差があり、線膨張率が面
内の位置で異なる場合には、面全体で見た線膨張率の大
きな方向を、その基板の線膨張率の大きな方向とする。
The coefficient of linear expansion of the present invention is not limited to the coefficient of linear expansion of only the insulating portion of the substrate. The coefficient of linear expansion of the entire substrate including the conductor pattern 13, the cured resin 14, and the metal layer 12 is determined. It indicates the direction in which the rate is large. If there is a difference in the formation density of the conductor patterns 13 and the coefficient of linear expansion differs at a position in the plane, the direction in which the coefficient of linear expansion in the entire surface is large is changed to the direction in which the coefficient of linear expansion of the substrate is large. And

【0028】なお、第一の基板11aの線膨張率の大き
な方向L1と、第二の基板11bの線膨張率の大きな方
向L2が交差する交差角は、90度に限定するものでは
なく、交差していれば良い。なお、その交差角のうち狭
いほうの角度が30〜90度であると、反りが特に小さ
くなり好ましい。特に45度の場合、4辺の湾曲がほぼ
同じ程度まで矯正されるため、特に反りが小さくなる。
The intersection angle at which the direction L1 of the first substrate 11a having a large coefficient of linear expansion intersects with the direction L2 of the second substrate 11b having a large coefficient of linear expansion is not limited to 90 degrees. Just do it. It is preferable that the narrower one of the intersection angles is 30 to 90 degrees, since the warpage is particularly small. In particular, in the case of 45 degrees, the curvature of the four sides is corrected to approximately the same degree, and therefore, the warpage is particularly reduced.

【0029】なお、上記実施の形態は、第一の基板11
aと第二の基板11bの間にプリプレグ15を1枚挟ん
で積層する実施の形態を説明したが、挟むプリプレグ1
5は1枚に限定するものではなく、複数枚挟むようにし
ても良い。複数枚挟む場合には、そのプリプレグ15の
縦糸の方向を、全て揃えるように積層しても良いが、揃
えずに積層すると、特に反りが小さいプリント配線板が
得られ好ましい。
In the above embodiment, the first substrate 11
Although the embodiment in which one prepreg 15 is interposed and stacked between the first prepreg 15 and the second substrate 11b has been described,
5 is not limited to one sheet, but may be a plurality of sheets. When a plurality of the prepregs 15 are sandwiched, the prepregs 15 may be laminated so that the directions of the warp yarns are all aligned.

【0030】本発明に用いる基板11a,11bは、そ
の中の少なくとも1枚には、間を樹脂硬化物14で埋め
られた複数の導体パターン13を表面に有する、ガラス
クロス及び樹脂硬化物よりなる板であり、この板として
は、例えば、ガラスクロスを所用枚数、熱硬化性樹脂で
接着し、片面又は両面に金属箔が張られている板を用い
て、表面の金属箔をエッチングして導体パターン13を
形成した後、導体パターン13間に熱硬化性樹脂を塗布
し、次いで、その熱硬化性樹脂を硬化させて、導体パタ
ーン13間を樹脂硬化物14で埋めたものや、金属箔が
張られていないガラスクロスを熱硬化性樹脂で接着した
板に金属メッキを行い、導体パターン13を形成した
後、導体パターン13間に熱硬化性樹脂を塗布し、次い
で、その熱硬化性樹脂を硬化させて、導体パターン13
間を樹脂硬化物14で埋めたもの等が挙げられる。
At least one of the substrates 11a and 11b used in the present invention is composed of a glass cloth and a cured resin having a plurality of conductor patterns 13 filled with a cured resin 14 therebetween. The plate is, for example, a predetermined number of glass cloths, bonded with a thermosetting resin, using a plate having a metal foil stretched on one or both sides, etching the metal foil on the surface, the conductor After forming the pattern 13, a thermosetting resin is applied between the conductor patterns 13, and then the thermosetting resin is cured so that the space between the conductor patterns 13 is filled with a cured resin 14 or a metal foil. Metal plating is performed on a plate to which a glass cloth that is not stretched is adhered with a thermosetting resin to form a conductor pattern 13, a thermosetting resin is applied between the conductor patterns 13, and then the thermosetting resin is applied. The cured, the conductor patterns 13
An example in which the space is filled with the cured resin 14 is given.

【0031】なお、導体パターン13を表面に有さない
基板を用いる場合の基板としては、ガラスクロスを熱硬
化性樹脂等で接着した板が挙げられる。
When a substrate having no conductive pattern 13 on its surface is used, a substrate obtained by bonding a glass cloth with a thermosetting resin or the like may be used.

【0032】上記ガラスクロスとしては、特に限定する
ものではなく、厚み0.04〜0.3mmのものが一般
に使用される。また、上記熱硬化性樹脂としては、エポ
キシ樹脂系、フェノール樹脂系、ポリイミド樹脂系、不
飽和ポリエステル樹脂系、ポリフェニレンエーテル樹脂
系等の熱硬化性樹脂や、これらの熱硬化性樹脂に無機充
填材等を配合した樹脂組成物が挙げられる。なお、基板
11a,11bに用いる熱硬化性樹脂と、導体パターン
13間を埋める樹脂硬化物14に用いる熱硬化性樹脂
は、同じでも良く、異なっていても良い。
The glass cloth is not particularly limited, and a glass cloth having a thickness of 0.04 to 0.3 mm is generally used. Further, as the thermosetting resin, epoxy resin, phenol resin, polyimide resin, unsaturated polyester resin, polyphenylene ether resin and the like thermosetting resins, and these thermosetting resins inorganic fillers And the like. The thermosetting resin used for the substrates 11a and 11b and the thermosetting resin used for the cured resin 14 filling the space between the conductor patterns 13 may be the same or different.

【0033】なお、基板11a,11bの内部には、導
体パターンやその壁面に金属皮膜を形成した穴や壁面に
金属皮膜を備えない穴等を有していてもよい。なお、本
発明に用いる基板11a,11bのプリプレグ15と接
しない側の面には、金属層を有していても良く、絶縁部
が露出するようになっていても良い。
Incidentally, inside the substrates 11a and 11b, there may be provided a hole in which a metal film is formed on the conductor pattern or the wall surface thereof, a hole having no metal film on the wall surface, or the like. It should be noted that the surfaces of the substrates 11a and 11b used in the present invention that are not in contact with the prepreg 15 may have a metal layer, and the insulating portions may be exposed.

【0034】また、導体パターン13を形成する金属と
しては、電気的信頼性より銅又は銅の表面にニッケル皮
膜等の金属皮膜を形成したものが好ましい。
The metal forming the conductor pattern 13 is preferably copper or a metal having a metal film such as a nickel film formed on the surface of copper from the viewpoint of electrical reliability.

【0035】本発明に用いるプリプレグ15は、ガラス
クロスに熱硬化性樹脂を含浸した後、必要に応じて加熱
して半硬化させ、シート状としたものである。なお、プ
リプレグ15に用いる熱硬化性樹脂は、基板11a,1
1bに用いる熱硬化性樹脂や、導体パターン13間を埋
める樹脂硬化物14に用いる熱硬化性樹脂と、同じでも
良く、異なっていても良い。
The prepreg 15 used in the present invention is formed by impregnating a glass cloth with a thermosetting resin, heating and semi-curing as necessary, and forming a sheet. The thermosetting resin used for the prepreg 15 is the same as the substrate 11a, 1
The thermosetting resin used for 1b and the thermosetting resin used for the cured resin 14 filling the space between the conductor patterns 13 may be the same or different.

【0036】基板11a,11bとプリプレグ15を積
層した後、加熱・加圧する条件としては、プリプレグ1
5中の熱硬化性樹脂が硬化する条件で適宜調整して加熱
・加圧すればよいが、加圧の圧力があまり高いと得られ
る積層板及びプリント配線板の反りが大きくなる傾向が
あるため、基板11a,11bとプリプレグ15を一体
化できる範囲内で、可能な限り低圧で加圧すると好まし
い。
After laminating the substrates 11a and 11b and the prepreg 15, the conditions for heating and pressing are as follows.
Heating and pressurizing may be appropriately performed under the conditions in which the thermosetting resin in 5 cures. However, if the pressurizing pressure is too high, the obtained laminate and printed wiring board tend to be more warped. It is preferable to apply the pressure as low as possible within a range where the substrates 11a and 11b and the prepreg 15 can be integrated.

【0037】[本発明の請求項3に係るプリント配線板
の製造方法]本発明の請求項3に係るプリント配線板の
製造方法の一実施の形態は、一方の面の全面に金属層を
有する第一の基板と、一方の面に間を樹脂硬化物で埋め
られた複数の内層用の導体パターンを有すると共に、他
方の面には全面に金属層を有する第二の基板と、熱硬化
性樹脂をガラスクロスに含浸して製造したプリプレグを
用いる。
[Method of Manufacturing Printed Wiring Board According to Claim 3 of the Present Invention] One embodiment of the method of manufacturing a printed wiring board according to claim 3 of the present invention has a metal layer on one entire surface. A first substrate having a plurality of inner layer conductor patterns filled with a resin cured material on one surface, and a second substrate having a metal layer on the entire surface on the other surface; A prepreg manufactured by impregnating a glass cloth with a resin is used.

【0038】そして、間を樹脂硬化物で埋められた内層
用の導体パターンがプリプレグと接する側になるよう
に、第一の基板と第二の基板の間にプリプレグを挟んで
積層した後、加熱加圧して一体化し、内層に導体パター
ンを有すると共に、外層に金属層を有する多層の積層板
を製造する。
Then, after laminating the prepreg between the first substrate and the second substrate such that the conductor pattern for the inner layer filled with the cured resin is in contact with the prepreg, the laminate is heated. A multi-layer laminate having a conductor pattern in the inner layer and a metal layer in the outer layer is manufactured by pressing and integrating.

【0039】次いで、必要に応じてこの積層板に穴あけ
をした後、メッキ処理を行ってこの穴に内層の導体パタ
ーン及び外層の金属層を導通するスルホールメッキ皮膜
を形成し、次いで、外層の金属層をエッチングして外層
用の導体パターンを形成することによりプリント配線板
は製造される。
Next, the laminated plate is perforated if necessary, and then a plating process is performed to form a through-hole plating film in the perforated hole for conducting the inner conductor pattern and the outer metal layer. A printed wiring board is manufactured by etching a layer to form a conductor pattern for an outer layer.

【0040】なお、各基板の線膨張率は、図3(a)に
示すように、X方向の線膨張率は、第一の基板11aの
線膨張率α1xより、第二の基板11bの線膨張率α2xが
大きく(α2x>α1x)、かつ、そのX方向と直交する方
向であるY方向は、第一の基板11aの線膨張率α1yよ
り、第二の基板11bの線膨張率α2yが大きく(α2y>
α1y)なるように積層されている。そのため、図2
(b)に示すように、加熱・加圧して得られる積層板1
0は、4つの辺が全て同じ方向に湾曲して、お碗形に反
った形状となる。
As shown in FIG. 3 (a), the coefficient of linear expansion of each substrate is greater than the coefficient of linear expansion α1x of the first substrate 11a. In the Y direction, in which the expansion coefficient α2x is large (α2x> α1x) and orthogonal to the X direction, the linear expansion coefficient α2y of the second substrate 11b is larger than the linear expansion coefficient α1y of the first substrate 11a. (Α2y>
α1y). Therefore, FIG.
As shown in (b), the laminate 1 obtained by heating and pressing
0 is a bowl-shaped shape in which all four sides are curved in the same direction.

【0041】このお碗形の形状は、図4(b)に示すよ
うな、従来の製造方法で製造した半円筒形状に反った形
状と比較して、平面形状に近い形状に矯正された形状の
ため、従来の方法と比較して反りが小さな積層板10と
なる。そして、この反りが小さい積層板10を用いて得
られるプリント配線板も、反りが小さくなる。
The bowl shape is a shape corrected to a shape close to a planar shape as compared with a half-cylindrical shape manufactured by a conventional manufacturing method as shown in FIG. 4B. Therefore, the laminate 10 has a smaller warpage as compared with the conventional method. The printed wiring board obtained by using the laminated board 10 having a small warp also has a small warp.

【0042】なお、本発明の請求項3に係るプリント配
線板の製造方法に用いる基板、プリプレグ、導体パター
ン、導体パターン間を埋める樹脂硬化物、及び基板やプ
リプレグの製造に用いられる熱硬化性樹脂やガラスクロ
スとしては、本発明の請求項1に係るプリント配線板の
製造方法に用いたものと同様のものが挙げられる。ま
た、基板とプリプレグを積層した後、加熱・加圧する条
件としても、本発明の請求項1に係るプリント配線板の
製造方法と同様の方法が好ましい。
A substrate, a prepreg, a conductor pattern, a cured resin for filling between conductor patterns, and a thermosetting resin used for the production of a substrate or a prepreg used in the method of manufacturing a printed wiring board according to claim 3 of the present invention. Examples of the glass cloth include those similar to those used in the method for manufacturing a printed wiring board according to claim 1 of the present invention. Further, the conditions for heating and pressing after laminating the substrate and the prepreg are preferably the same as the method for manufacturing a printed wiring board according to claim 1 of the present invention.

【0043】[0043]

【発明の効果】本発明の請求項1に係るプリント配線板
の製造方法は、2枚の基板を、それぞれの線膨張率の大
きな方向が交差するように積層するため、反りが小さい
プリント配線板が得られる。
According to the method for manufacturing a printed wiring board according to the first aspect of the present invention, two printed wiring boards are laminated so that the directions having large linear expansion coefficients intersect with each other, so that the printed wiring board having a small warpage is obtained. Is obtained.

【0044】本発明の請求項3に係るプリント配線板の
製造方法は、一方の基板のX方向の線膨張率を、他方の
基板のX方向の線膨張率より大きくなるように積層する
と共に、上記一方の基板のY方向の線膨張率を、上記他
方の基板のY方向の線膨張率より、大きくなるように積
層するため、反りが小さいプリント配線板が得られる。
According to a third aspect of the present invention, there is provided a method of manufacturing a printed wiring board, comprising: laminating one substrate so that the coefficient of linear expansion in the X direction is larger than the coefficient of linear expansion of the other substrate in the X direction; Since the one substrate is laminated so that the coefficient of linear expansion in the Y direction of the other substrate is greater than the coefficient of linear expansion of the other substrate in the Y direction, a printed wiring board with small warpage can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の請求項1に係るプリント配線板の製造
方法の、一実施の形態を示す図であり、(a)は積層を
説明する斜視図、(b)は積層を説明する断面図、
(c)は加熱・加圧後を説明する断面図である。
FIG. 1 is a diagram showing one embodiment of a method for manufacturing a printed wiring board according to claim 1 of the present invention, wherein (a) is a perspective view illustrating lamination, and (b) is a cross section illustrating lamination. Figure,
FIG. 4C is a cross-sectional view illustrating a state after heating and pressing.

【図2】本発明の請求項1に係るプリント配線板の製造
方法の、他の実施の形態を示す図であり、(a)は積層
を説明する斜視図、(b)は反りを説明する斜視図であ
る。
FIGS. 2A and 2B are diagrams showing another embodiment of the method for manufacturing a printed wiring board according to claim 1 of the present invention, wherein FIG. 2A is a perspective view illustrating lamination, and FIG. It is a perspective view.

【図3】本発明の請求項3に係るプリント配線板の製造
方法の、一実施の形態を示す図であり、(a)は積層を
説明する斜視図、(b)は反りを説明する斜視図であ
る。
3A and 3B are diagrams showing one embodiment of a method for manufacturing a printed wiring board according to claim 3 of the present invention, wherein FIG. 3A is a perspective view illustrating lamination, and FIG. 3B is a perspective view illustrating warpage. FIG.

【図4】従来のプリント配線板の製造方法を示す図であ
り、(a)は積層を説明する斜視図、(b)は反りを説
明する斜視図である。
4A and 4B are diagrams illustrating a conventional method for manufacturing a printed wiring board, wherein FIG. 4A is a perspective view illustrating lamination, and FIG. 4B is a perspective view illustrating warpage.

【図5】反りを説明する図であり、(a)は本発明の請
求項1に係るプリント配線板を説明する図、(b)は従
来のプリント配線板を説明する図である。
FIGS. 5A and 5B are diagrams illustrating warpage, FIG. 5A is a diagram illustrating a printed wiring board according to claim 1 of the present invention, and FIG. 5B is a diagram illustrating a conventional printed wiring board.

【図6】従来の他のプリント配線板の製造方法を説明す
る工程図である。
FIG. 6 is a process diagram illustrating another conventional method for manufacturing a printed wiring board.

【図7】従来の更に他のプリント配線板の製造方法の、
工程の一部を説明する断面図である。
FIG. 7 shows another conventional method for manufacturing a printed wiring board.
It is sectional drawing explaining a part of process.

【符号の説明】[Explanation of symbols]

10 積層板 11a,11b,31a,31b 基板 12,32 金属層 13,33,38 導体パターン 14,34 樹脂硬化物 15,35 プリプレグ 37 スルホールメッキ皮膜 39 気泡 L1,L2 線膨張率の大きな方向 α1x,α1y,α2x,α2y 線膨張率 S 反り DESCRIPTION OF SYMBOLS 10 Laminated board 11a, 11b, 31a, 31b Substrate 12, 32 Metal layer 13, 33, 38 Conductive pattern 14, 34 Resin hardened material 15, 35 Pre-preg 37 Through-hole plating film 39 Bubbles L1, L2 Direction of large linear expansion coefficient α1x, α1y, α2x, α2y Linear expansion coefficient S Warp

───────────────────────────────────────────────────── フロントページの続き (72)発明者 高添 智樹 大阪府門真市大字門真1048番地松下電工株 式会社内 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Tomoki Takazoe 1048 Odakadoma, Kadoma City, Osaka Prefecture Matsushita Electric Works, Ltd.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 その中の少なくとも1枚には、間を樹脂
硬化物で埋められた複数の導体パターンを表面に有す
る、ガラスクロス及び樹脂硬化物よりなる2枚の基板
と、熱硬化性樹脂をガラスクロスに含浸したプリプレグ
とを用いて、間を樹脂硬化物で埋められた導体パターン
がプリプレグと接する側になるように、基板の間にプリ
プレグを挟んで積層した後、加熱・加圧して製造するプ
リント配線板の製造方法において、基板を積層する方法
が、2枚の基板を、それぞれの線膨張率の大きな方向が
交差するように積層する方法であることを特徴とするプ
リント配線板の製造方法。
At least one of the two substrates is made of a glass cloth and a cured resin having a plurality of conductive patterns on the surface of which are filled with a cured resin, and a thermosetting resin. Using a prepreg impregnated with a glass cloth, laminating the prepreg between the substrates so that the conductor pattern filled with the cured resin is in contact with the prepreg, and then heating and pressing In the method of manufacturing a printed wiring board to be manufactured, the method of laminating the substrates is a method of laminating two substrates so that the directions having large linear expansion coefficients cross each other. Production method.
【請求項2】 それぞれの基板の、線膨張率の大きな方
向が交差する交差角が、30〜90度であることを特徴
とする請求項1記載のプリント配線板の製造方法。
2. The method for manufacturing a printed wiring board according to claim 1, wherein the crossing angle of each substrate at which the direction having a large linear expansion coefficient crosses is 30 to 90 degrees.
【請求項3】 その中の少なくとも1枚には、間を樹脂
硬化物で埋められた複数の導体パターンを表面に有す
る、ガラスクロス及び樹脂硬化物よりなる2枚の基板
と、熱硬化性樹脂をガラスクロスに含浸したプリプレグ
とを用いて、間を樹脂硬化物で埋められた導体パターン
がプリプレグと接する側になるように、基板の間にプリ
プレグを挟んで積層した後、加熱・加圧して製造するプ
リント配線板の製造方法において、基板を積層する方法
が、一方の基板のX方向の線膨張率を、他方の基板のX
方向の線膨張率より大きくなるように積層すると共に、
上記一方の基板の、X方向と直交する方向であるY方向
の線膨張率を、上記他方の基板のY方向の線膨張率よ
り、大きくなるように積層する方法であることを特徴と
するプリント配線板の製造方法。
3. At least one of the two substrates is made of a glass cloth and a cured resin having a plurality of conductor patterns on the surface of which are filled with a cured resin, and a thermosetting resin. Using a prepreg impregnated with a glass cloth, laminating the prepreg between the substrates so that the conductor pattern filled with the cured resin is in contact with the prepreg, and then heating and pressing In the method of manufacturing a printed wiring board to be manufactured, the method of laminating the substrates is such that the linear expansion coefficient of one substrate in the X direction is determined by the X-direction of the other substrate.
While laminating so as to be larger than the linear expansion coefficient in the direction,
A method of laminating one of the substrates so that the coefficient of linear expansion in the direction Y perpendicular to the direction X is greater than the coefficient of linear expansion in the direction Y of the other substrate. Manufacturing method of wiring board.
JP11131597A 1997-04-28 1997-04-28 Manufacture of printed wiring board Pending JPH10303556A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11131597A JPH10303556A (en) 1997-04-28 1997-04-28 Manufacture of printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11131597A JPH10303556A (en) 1997-04-28 1997-04-28 Manufacture of printed wiring board

Publications (1)

Publication Number Publication Date
JPH10303556A true JPH10303556A (en) 1998-11-13

Family

ID=14558113

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11131597A Pending JPH10303556A (en) 1997-04-28 1997-04-28 Manufacture of printed wiring board

Country Status (1)

Country Link
JP (1) JPH10303556A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6846549B2 (en) 2001-04-23 2005-01-25 Fujitsu Limited Multilayer printed wiring board
JP2007317943A (en) * 2006-05-26 2007-12-06 Sumitomo Bakelite Co Ltd Substrate, and semiconductor device
US7514781B2 (en) 2005-11-25 2009-04-07 Denso Corporation Circuit substrate and manufacturing method thereof
JPWO2009008066A1 (en) * 2007-07-10 2010-09-02 イビデン株式会社 Wiring board and manufacturing method thereof
US8044306B2 (en) 2007-07-11 2011-10-25 Ibiden Co., Ltd. Wiring board and method of manufacturing the same

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6846549B2 (en) 2001-04-23 2005-01-25 Fujitsu Limited Multilayer printed wiring board
US7514781B2 (en) 2005-11-25 2009-04-07 Denso Corporation Circuit substrate and manufacturing method thereof
JP2007317943A (en) * 2006-05-26 2007-12-06 Sumitomo Bakelite Co Ltd Substrate, and semiconductor device
JPWO2009008066A1 (en) * 2007-07-10 2010-09-02 イビデン株式会社 Wiring board and manufacturing method thereof
JP5001368B2 (en) * 2007-07-10 2012-08-15 イビデン株式会社 Wiring board and manufacturing method thereof
US8044306B2 (en) 2007-07-11 2011-10-25 Ibiden Co., Ltd. Wiring board and method of manufacturing the same
US8513539B2 (en) 2007-07-11 2013-08-20 Ibiden Co., Ltd. Wiring board and method of manufacturing the same

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