JPH10303080A - Method for manufacturing solid electrolytic capacitor - Google Patents

Method for manufacturing solid electrolytic capacitor

Info

Publication number
JPH10303080A
JPH10303080A JP12313797A JP12313797A JPH10303080A JP H10303080 A JPH10303080 A JP H10303080A JP 12313797 A JP12313797 A JP 12313797A JP 12313797 A JP12313797 A JP 12313797A JP H10303080 A JPH10303080 A JP H10303080A
Authority
JP
Japan
Prior art keywords
layer
electrolytic capacitor
solid electrolytic
oxide film
polymer compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12313797A
Other languages
Japanese (ja)
Inventor
Kazuhiko Fukushi
和彦 福士
Yasuo Sakai
康雄 酒井
Mika Itou
美香 伊藤
Toshikatsu Terao
俊勝 寺尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Towa Electron Ltd
Original Assignee
Fujitsu Towa Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Towa Electron Ltd filed Critical Fujitsu Towa Electron Ltd
Priority to JP12313797A priority Critical patent/JPH10303080A/en
Publication of JPH10303080A publication Critical patent/JPH10303080A/en
Pending legal-status Critical Current

Links

Landscapes

  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)

Abstract

PROBLEM TO BE SOLVED: To manufacture a solid electrolytic capacitor superior to leak current characteristic under high temperature without losing high frequency characteristic. SOLUTION: In a method for manufacturing a solid electrolytic capacitor wherein a dielectric oxide film 2, a conductive polymer compound layer 3, a graphite layer 4 as a conductive layer and a silver paste layer 5 are successively formed on surface of a valve action metal 1 as an anode, and the dielectric layer is one electrode (cathode) 6 and the anode 1 is the other electrode (anode) 7, the dielectric oxide film is conversion-repaired after forming the graphite layer 4.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、固体電解コンデン
サの製造方法に関し、更に詳しくは、導電性高分子化合
物を固体電解質とした固体電解コンデンサの製造法に関
するものである。
The present invention relates to a method for manufacturing a solid electrolytic capacitor, and more particularly, to a method for manufacturing a solid electrolytic capacitor using a conductive polymer compound as a solid electrolyte.

【0002】[0002]

【従来の技術】通常、固体電解コンデンサは、タンタル
或いはアルミニウム等の弁作用金属の多孔質成形体を陽
極とし、その酸化皮膜を誘電体とし、そして二酸化マン
ガンや7、7、8、8−テトラシアノキノジメタン(T
CNQ)錯塩等の固体電解質を陰極の一部とする構造を
有している。この場合、固体電解質には多孔質成形体内
部の誘電体全面と電極リードとの間を電気的に接続する
機能を有するが、その上に誘電体酸化皮膜の絶縁欠陥に
起因する電気的短絡を修復する機能を有することが望ま
しい。そのような要請から、導電率は高いが誘電体修復
機能がない金属は固体電解質としては不適当であり、従
来、短絡電流による熱等によって絶縁体に移転する二酸
化マンガン等が固体電解質として用いられてきた。
2. Description of the Related Art In general, a solid electrolytic capacitor is formed by using a porous molded body of a valve metal such as tantalum or aluminum as an anode, an oxide film as a dielectric, and manganese dioxide, 7, 7, 8, 8-tetratetrafluoroethylene. Cyanoquinodimethane (T
It has a structure in which a solid electrolyte such as CNQ) complex salt is part of the cathode. In this case, the solid electrolyte has a function of electrically connecting the entire surface of the dielectric inside the porous molded body and the electrode leads, and furthermore, an electrical short circuit caused by an insulation defect of the dielectric oxide film is formed thereon. It is desirable to have a function to repair. Due to such demands, metals having high conductivity but no dielectric repair function are unsuitable as solid electrolytes.Conventionally, manganese dioxide or the like, which is transferred to an insulator by heat or the like due to short-circuit current, has been used as a solid electrolyte. Have been.

【0003】しかしながら、二酸化マンガンを電極の一
部とするものは、その導電率が充分低くないので、高周
波域でのインピーダンスが大きい。一方、TCNQ錯塩
を電極の一部とするものは、TCNQ錯塩が熱分解し易
いので、耐熱性に劣っている等、これらを用いた固体電
解コンデンサには種々の解決課題が残っていた。そこ
で、近年、高分子の分野において、新しい固体電解質材
料の開発が進められ、その結果、ポリピロール、ポリチ
オフェン、ポリアニリン等の共役系高分子化合物に電子
供与性や電子吸引性化合物(ドーパント)をドーピング
した導電性高分子化合物を固体電解質として用いた固体
電解コンデンサが種々提案され、また、これらの固体電
解コンデンサとしての漏れ電流を減少させることを目的
とした技術開発が行われている。例えば、酸化皮膜上に
二酸化マンガンを形成し、その上に導電性高分子化合物
層を形成した後、再化成を行うことにより、漏れ電流を
減少させる固体電解コンデンサが知られている(例え
ば、特開平2−219211号公報参照)。また、酸化
皮膜形成のための化成を硫酸溶液中という限定された条
件下で行うことにより、漏れ電流を改善するという技術
が知られている(例えば、特開平3−285321号公
報参照)。
However, those using manganese dioxide as a part of the electrode have a large impedance in a high frequency range because their conductivity is not sufficiently low. On the other hand, when the TCNQ complex salt is used as a part of the electrode, the TCNQ complex salt is easily decomposed by heat, so that the solid electrolytic capacitor using them has various problems such as poor heat resistance. In recent years, new solid electrolyte materials have been developed in the field of polymers, and as a result, conjugated polymer compounds such as polypyrrole, polythiophene, and polyaniline have been doped with electron-donating and electron-withdrawing compounds (dopants). Various solid electrolytic capacitors using a conductive polymer compound as a solid electrolyte have been proposed, and technical developments aimed at reducing the leakage current of these solid electrolytic capacitors have been made. For example, a solid electrolytic capacitor that reduces leakage current by forming manganese dioxide on an oxide film, forming a conductive polymer compound layer on the manganese dioxide layer, and then performing re-chemical formation is known (for example, Japanese Patent Application Laid-Open Publication No. H11-163873). See JP-A-2-219211). Further, a technique is known in which the formation of an oxide film is performed under a limited condition in a sulfuric acid solution to thereby improve the leakage current (for example, see Japanese Patent Application Laid-Open No. 3-285321).

【0004】[0004]

【発明が解決しようとする課題】ところで、固体電解質
として導電性高分子化合物を用いた固体電解コンデンサ
においては、コンデンサとしての漏れ電流改善のため
に、いろいろな技術開発が試みられているが、高温下に
置いた場合、或いは高温に曝した後直後には、漏れ電流
が増大するという観点では完璧ではない。
In a solid electrolytic capacitor using a conductive polymer compound as a solid electrolyte, various techniques have been developed to improve the leakage current of the capacitor. When placed underneath, or immediately after exposure to high temperatures, it is not perfect in terms of increased leakage current.

【0005】本発明は、このような現況に鑑みなされた
もので、その目的とするところは、高周波特性を損ねる
ことなく、高温下での漏れ電流特性に優れた固体電解コ
ンデンサを製造する方法を提供することにある。
The present invention has been made in view of such a situation, and an object of the present invention is to provide a method of manufacturing a solid electrolytic capacitor having excellent leakage current characteristics at high temperatures without deteriorating high frequency characteristics. To provide.

【0006】[0006]

【課題を解決するための手段】この目的を達成するた
め、本発明者らは、鋭意研究した結果、陽極体としての
弁作用を有する金属を化成して表面に誘電体酸化皮膜を
形成し、この酸化皮膜上にポリピロール、ポリチオフェ
ン、ポリアニリン等の共役系高分子化合物に電子供与性
や電子吸引性化合物をドーピングした導電性高分子化合
物層を形成した後、陰極となる導電体層としてのグラフ
ァイト層を形成し、後に誘電体酸化皮膜を化成修復する
ことにより問題が解決できることを見出した。本発明の
構成上の特徴は、陽極体としての弁作用金属の表面に誘
電体酸化皮膜、共役系高分子化合物の導電性高分子化合
物層、導電体層を順次形成し、該導電体層を一方の電極
とし、前記弁作用金属を他方の電極とする固体電解コン
デンサの製造方法において、前記導電体層の一部である
グラファイト層を形成後、前記誘電体酸化皮膜を化成修
復処理することにある。
Means for Solving the Problems In order to achieve this object, the present inventors have made intensive studies and as a result, formed a metal having a valve action as an anode body to form a dielectric oxide film on the surface, After forming a conductive polymer compound layer obtained by doping a conjugated polymer compound such as polypyrrole, polythiophene, or polyaniline with an electron-donating or electron-withdrawing compound on this oxide film, a graphite layer serving as a conductor layer serving as a cathode is formed. It has been found that the problem can be solved by forming and then repairing the dielectric oxide film by chemical conversion. The structural feature of the present invention is that a dielectric oxide film, a conductive polymer compound layer of a conjugated polymer compound, and a conductor layer are sequentially formed on the surface of a valve metal as an anode body, and the conductor layer is formed. In the method for manufacturing a solid electrolytic capacitor in which one electrode is used and the valve metal is used as the other electrode, after forming a graphite layer which is a part of the conductor layer, the dielectric oxide film may be subjected to a chemical conversion treatment. is there.

【0007】本発明における陽極体としての弁作用を有
する金属としては、アルミニウム、タンタルから選ば
れ、表面積を増大するためにエッチングまたは焼結処理
したものを用い、この弁作用金属に酸化皮膜を形成する
にはアジピン酸、ホウ酸水溶液等を用いて電気化学的な
手段により通常の方法で形成することができる。酸化皮
膜上に共役系高分子化合物の導電性高分子化合物層を形
成した後、導電体層としてのグラファイト層および銀ペ
ースト層を順次形成する。
The metal having a valve action as the anode body in the present invention is selected from aluminum and tantalum, and is used by etching or sintering to increase the surface area. An oxide film is formed on the valve action metal. For this purpose, it can be formed by an ordinary method by electrochemical means using an aqueous solution of adipic acid or boric acid. After forming a conductive polymer compound layer of a conjugated polymer compound on the oxide film, a graphite layer and a silver paste layer as a conductor layer are sequentially formed.

【0008】導電性高分子化合物層の形成方法は、化学
重合法で合成した導電性高分子層をプレコート層とし、
その上に電解重合することにより形成される。なお、電
解重合により形成される導電性高分子は特に限定されな
いが、重合反応の容易さからピロール、チオフェン、ア
ニリン或いはそれらの誘導体を繰り返し単位とするもの
が好ましく、また、酸化剤を用いて化学酸化重合したポ
リピロール或いはポリアニリン、ポリチオフェンのいず
れか、或いはそれらの誘導体のいずれかが望ましく、更
には、ポリアニリン、ポリチオフェン、ポリピロールの
いずれかを組合せても良い。
The conductive polymer compound layer is formed by using a conductive polymer layer synthesized by a chemical polymerization method as a precoat layer,
It is formed by electrolytic polymerization on it. The conductive polymer formed by electrolytic polymerization is not particularly limited, but is preferably a compound having pyrrole, thiophene, aniline or a derivative thereof as a repeating unit because of the ease of the polymerization reaction. Oxidatively-polymerized polypyrrole, polyaniline, or polythiophene, or any of their derivatives is desirable, and further, any of polyaniline, polythiophene, and polypyrrole may be combined.

【0009】上記したグラファイト層形成後の酸化皮膜
の化成修復処理はアジピン酸、サリチル酸、リン酸等の
1%以下の希釈溶液中において導電性高分子化合物層を
通して行う。
The above-mentioned chemical conversion repair treatment of the oxide film after the formation of the graphite layer is performed through a conductive polymer compound layer in a dilute solution of 1% or less of adipic acid, salicylic acid, phosphoric acid or the like.

【0010】[0010]

【発明の実施の形態】発明の実施の形態について説明す
る。図1は、本発明方法によって得られた固体電解コン
デンサの断面構造の模式図であって、同図において、陽
極体としての弁作用を有する金属1の表面は非常に拡面
化されており、その表面積は大きくされている。この細
孔壁面に沿って金属酸化物の誘電体2を形成する。次
に、該誘電体酸化皮膜2の表面に導電性高分子化合物層
3を形成する。次に、この導電性高分子化合物層3の上
に陰極となる導電体層としてのグラファイト層4を形成
した後、誘電体酸化皮膜2の化成修復を行い、次に、銀
ペースト層5を形成し、導電体層からは陰極リード6
を、弁作用金属1からは陽極リード7をそれぞれ引き出
した後、外装エポキシ樹脂8で封止して固体電解コンデ
ンサとする。これにより、高周波特性を損なうことな
く、高温下における漏れ電流特性に優れた固体電解コン
デンサが得られる。
Embodiments of the present invention will be described. FIG. 1 is a schematic diagram of a cross-sectional structure of a solid electrolytic capacitor obtained by the method of the present invention. In FIG. 1, the surface of a metal 1 having a valve action as an anode body is greatly enlarged. Its surface area is increased. The metal oxide dielectric 2 is formed along the wall surfaces of the pores. Next, a conductive polymer compound layer 3 is formed on the surface of the dielectric oxide film 2. Next, after a graphite layer 4 as a conductor layer serving as a cathode is formed on the conductive polymer compound layer 3, a chemical conversion repair of the dielectric oxide film 2 is performed, and then a silver paste layer 5 is formed. And a cathode lead 6 from the conductive layer.
After the anode leads 7 are respectively pulled out from the valve metal 1, they are sealed with an exterior epoxy resin 8 to obtain a solid electrolytic capacitor. As a result, a solid electrolytic capacitor having excellent leakage current characteristics at high temperatures can be obtained without deteriorating high-frequency characteristics.

【0011】[0011]

【実施例】以下に具体的実施例について説明する。 実施例1 タンタル粉末を焼結して形成した角形陽極体(2.1×
1.0×1.2mm)1をリン酸水溶液中で陽極酸化(5
0V)し、焼結体表面にタンタル酸化皮膜2を形成し
た。このタンタル酸化皮膜2を形成した陽極体1をピロ
ールとエタノールとを重量比30:70の割合で含有す
るピロール液に浸漬した。次に、ドデシルヘンゼンスル
ホン第二鉄とエタノールとを重量比で40:60の割合
で含有する温度15℃の酸化剤溶液に浸漬し、反応終了
後、未反応の酸化剤と過剰の酸とを水洗によって洗浄
し、50℃で1時間、真空中で乾燥した。この重合を4
回繰り返し、所定の厚さの導電性高分子化合物層3を形
成させた。次に、形成した導電性高分子化合物層3上に
導電体層としてのグラファイト層4を形成後、アジピン
酸0.3%水溶液中で35Vの酸化皮膜の化成修復を行
い、水洗し、乾燥した。次に、銀ペースト層5を形成
し、導電体層からは陰極リード6を、陽極体1からは陽
極リード7をそれぞれ引き出した後、陽極体1の全周面
を外装エポキシ樹脂材8にてモールド封止して固体電解
コンデンサを完成させた。
EXAMPLES Specific examples will be described below. Example 1 A square anode body (2.1 ×) formed by sintering tantalum powder
1.0 × 1.2 mm) 1 in an aqueous phosphoric acid solution
0V) to form a tantalum oxide film 2 on the surface of the sintered body. The anode body 1 on which the tantalum oxide film 2 was formed was immersed in a pyrrole solution containing pyrrole and ethanol at a weight ratio of 30:70. Next, it is immersed in an oxidizing agent solution at a temperature of 15 ° C. containing dodecyl benzene sulfone ferric acid and ethanol at a weight ratio of 40:60. Was washed with water and dried in vacuo at 50 ° C. for 1 hour. This polymerization is
This was repeated twice to form a conductive polymer compound layer 3 having a predetermined thickness. Next, after a graphite layer 4 as a conductor layer was formed on the formed conductive polymer compound layer 3, a 35 V oxide film was repaired in a 0.3% aqueous solution of adipic acid by chemical conversion, washed with water, and dried. . Next, a silver paste layer 5 is formed, and a cathode lead 6 is drawn out from the conductor layer, and an anode lead 7 is drawn out from the anode body 1. Then, the entire peripheral surface of the anode body 1 is covered with an exterior epoxy resin material 8. The mold was sealed to complete a solid electrolytic capacitor.

【0012】実施例2 エッチングによって拡面(25μF/cm2)厚さ95μ
m、面積5×3mmのアルミニウム箔(陽極)1をホウ酸
アンモニウム中、50Vで陽極酸化して誘電体酸化皮膜
2を形成した。このアルミニウム酸化皮膜2を形成した
陽極体1を3,4−エチレンジオキシ−チオフェンの溶
液中に浸漬した。次に、メタンスルホン酸鉄(III)3
gを水15gに混合した酸化剤溶液中に浸漬した。反応
終了後、未反応の酸化剤を水洗によって洗浄し、50℃
で1時間、真空中で乾燥した。所定の厚さになるまで、
この重合を4回繰り返し、導電性高分子化合物層3を形
成させた。次に、形成した導電性高分子化合物層3上に
導電体層としてのグラファイト層4を形成後、アジピン
酸0.3%水溶液中で35Vの酸化皮膜の化成修復を行
い、水洗し、乾燥した。次に、銀ペースト層5を形成
し、導電体層からは陰極リード6を、陽極体1からは陽
極リード7をそれぞれ引き出した後、陽極体1の全周面
を外装エポキシ樹脂材8にてモールド封止して固体電解
コンデンサを完成させた。
Example 2 Etched surface (25 μF / cm 2 ) Thickness 95 μm
An aluminum foil (anode) 1 having a size of 5 × 3 mm and an area of 5 × 3 mm was anodized in ammonium borate at 50 V to form a dielectric oxide film 2. The anode body 1 on which the aluminum oxide film 2 was formed was immersed in a solution of 3,4-ethylenedioxy-thiophene. Next, iron (III) methanesulfonate 3
g was immersed in an oxidizing agent solution mixed with 15 g of water. After the reaction is completed, the unreacted oxidizing agent is washed with water, and
For 1 hour in vacuo. Until the specified thickness
This polymerization was repeated four times to form the conductive polymer compound layer 3. Next, after a graphite layer 4 as a conductor layer was formed on the formed conductive polymer compound layer 3, a 35 V oxide film was repaired in a 0.3% aqueous solution of adipic acid by chemical conversion, washed with water, and dried. . Next, a silver paste layer 5 is formed, and a cathode lead 6 is drawn out from the conductor layer, and an anode lead 7 is drawn out from the anode body 1. Then, the entire peripheral surface of the anode body 1 is covered with an exterior epoxy resin material 8. The mold was sealed to complete a solid electrolytic capacitor.

【0013】実施例3 実施例1と同じ陽極体1を用いて、実施例1と同様な方
法で誘電体2を形成した。次に、誘電体2を形成後、ア
ニリンとエタノールとを重量比30:70の割合で含有
するアニリン溶液に浸漬し、次いで、過硫酸アンモニウ
ム、トルエンスルホン酸およびエタノールを重量比で2
0:20:60の割合で含有する温度15℃の酸化剤に
浸漬し、導電性高分子化合物層3を重合させた。反応終
了後、実施例1と同様な方法で洗浄、乾燥して、この重
合を5回繰り返し、所定の厚さの導電性高分子化合物層
3を形成させた。次に、実施例1と同様にグラファイト
層4を形成後、化成修復して実施例1と同様に固体電解
コンデンサを完成させた。
Example 3 Using the same anode body 1 as in Example 1, a dielectric 2 was formed in the same manner as in Example 1. Next, after the dielectric 2 is formed, it is immersed in an aniline solution containing aniline and ethanol at a weight ratio of 30:70, and then ammonium persulfate, toluenesulfonic acid and ethanol are added at a weight ratio of 2%.
The conductive polymer compound layer 3 was polymerized by immersion in an oxidizing agent at a temperature of 15 ° C. in a ratio of 0:20:60. After completion of the reaction, the polymer was washed and dried in the same manner as in Example 1, and this polymerization was repeated five times to form a conductive polymer compound layer 3 having a predetermined thickness. Next, after forming the graphite layer 4 in the same manner as in the first embodiment, the material was repaired by chemical conversion to complete a solid electrolytic capacitor in the same manner as in the first embodiment.

【0014】実施例4 実施例2と同じ陽極体1を用いて、実施例2と同様の方
法で誘電体2を形成した。次に、誘電体2を形成後、ド
ジシルベンゼンスルホン酸鉄(III)とピロールとの混
合溶液中に浸漬し、プレコート層を形成し、次いで、ピ
ロール濃度0.05モル/L、支持電解質として0.1
モル/Lのテトラブチルアンモニウムパークロレートを
含むアセトニトリル溶液中で、作用電極であるステンレ
ス線をプレコート層に軽く接触させ、白金を対電極とし
て定電圧3.5Vを印加して30分間電解重合を行い、
導電性高分子化合物層3を重合させた。反応終了後、実
施例2と同様な方法で洗浄、乾燥し、グラファイト層4
を形成後、化成修復して固体電解コンデンサを完成させ
た。
Example 4 Using the same anode body 1 as in Example 2, a dielectric 2 was formed in the same manner as in Example 2. Next, after forming the dielectric 2, it is immersed in a mixed solution of iron (III) dodecylbenzenesulfonate and pyrrole to form a precoat layer, and then has a pyrrole concentration of 0.05 mol / L and a supporting electrolyte. 0.1
In an acetonitrile solution containing mol / L of tetrabutylammonium perchlorate, a stainless wire as a working electrode is lightly contacted with the precoat layer, and a constant voltage of 3.5 V is applied using platinum as a counter electrode to carry out electrolytic polymerization for 30 minutes. ,
The conductive polymer compound layer 3 was polymerized. After the completion of the reaction, washing and drying were performed in the same manner as in Example 2, and the graphite layer 4
Was formed and repaired by chemical conversion to complete a solid electrolytic capacitor.

【0015】以上の実施例1、実施例2、実施例3、実
施例4のそれぞれにおいて、グラファイト層4の形成後
の化成修復を行わないこと以外は、各実施例におけると
同様の手順で完成させた固体電解コンデンサ(比較例
1、比較例2、比較例3、比較例4)と比較した。
In each of Embodiments 1, 2, 3, and 4, except that the chemical conversion repair after the formation of the graphite layer 4 is not performed, completion is performed in the same procedure as in each embodiment. Of the solid electrolytic capacitors (Comparative Example 1, Comparative Example 2, Comparative Example 3, and Comparative Example 4).

【0016】実施例1〜実施例4と比較例1〜比較例4
の各固体電解コンデンサにつき、そ静電容量、誘電損失
(tanδ)、等価直列抵抗、漏れ電流の初期値と高温
寿命試験後の値を表1に示す。
Examples 1 to 4 and Comparative Examples 1 to 4
Table 1 shows the initial values of the capacitance, the dielectric loss (tan δ), the equivalent series resistance, the leakage current, and the values after the high-temperature life test for each solid electrolytic capacitor.

【0017】[0017]

【表1】 [Table 1]

【0018】この表1から明らかなように、本発明の各
実施例は、いずれも高周波域における等価直列抵抗特性
に優れ、かつ高温寿命試験においても漏れ電流が増大す
ることがない良好な結果が得られたことが判る。
As is clear from Table 1, each of the examples of the present invention has excellent excellent equivalent series resistance characteristics in a high frequency range and good results in which the leakage current does not increase even in a high temperature life test. It turns out that it was obtained.

【0019】[0019]

【発明の効果】しかして、本発明によれば、優れた周波
数特性を損ねることなく、高温寿命試験において、漏れ
電流の増大のない安定した高品質の固体電解コンデンサ
を製造することができる。
As described above, according to the present invention, it is possible to manufacture a stable and high-quality solid electrolytic capacitor without increasing leakage current in a high-temperature life test without deteriorating excellent frequency characteristics.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明により製造された固体電解コンデンサの
一例での模式的断面図である。
FIG. 1 is a schematic sectional view of an example of a solid electrolytic capacitor manufactured according to the present invention.

【符号の説明】[Explanation of symbols]

1 陽極体としての弁作用金属 2 誘電体酸化皮膜 3 導電性高分子化合物層 4 グラファイト層 5 銀ペースト層 6 陰極リード 7 陽極リード 8 外装樹脂材 DESCRIPTION OF SYMBOLS 1 Valve metal as an anode body 2 Dielectric oxide film 3 Conductive polymer compound layer 4 Graphite layer 5 Silver paste layer 6 Cathode lead 7 Anode lead 8 Exterior resin material

───────────────────────────────────────────────────── フロントページの続き (72)発明者 伊藤 美香 神奈川県横浜市港北区新横浜3丁目18番3 号 富士通東和エレクトロン株式会社内 (72)発明者 寺尾 俊勝 神奈川県横浜市港北区新横浜3丁目18番3 号 富士通東和エレクトロン株式会社内 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Mika Ito 3-18-3 Shin-Yokohama, Kohoku-ku, Yokohama, Kanagawa Prefecture Inside Fujitsu Towa Electron Limited (72) Toshikatsu Terao 3-18 Shin-Yokohama, Kohoku-ku, Yokohama, Kanagawa No. 3 Inside Fujitsu Towa Electron Limited

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 陽極体としての弁作用金属の表面に誘電
体酸化皮膜、共役系高分子化合物の導電性高分子化合物
層、導電体層を順次形成し、該導電体層を一方の電極と
し、前記弁作用金属を他方の電極とする固体電解コンデ
ンサの製造方法において、 前記導電体層の一部であるグラファイト層を形成後、前
記誘電体酸化皮膜を化成修復処理することを特徴とする
固体電解コンデンサの製造方法。
1. A dielectric oxide film, a conductive polymer compound layer of a conjugated polymer compound, and a conductor layer are sequentially formed on the surface of a valve metal serving as an anode body, and the conductor layer is used as one electrode. A method for manufacturing a solid electrolytic capacitor using the valve metal as the other electrode, wherein after forming a graphite layer which is a part of the conductor layer, the dielectric oxide film is subjected to chemical conversion treatment. Manufacturing method of electrolytic capacitor.
JP12313797A 1997-04-25 1997-04-25 Method for manufacturing solid electrolytic capacitor Pending JPH10303080A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12313797A JPH10303080A (en) 1997-04-25 1997-04-25 Method for manufacturing solid electrolytic capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12313797A JPH10303080A (en) 1997-04-25 1997-04-25 Method for manufacturing solid electrolytic capacitor

Publications (1)

Publication Number Publication Date
JPH10303080A true JPH10303080A (en) 1998-11-13

Family

ID=14853111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12313797A Pending JPH10303080A (en) 1997-04-25 1997-04-25 Method for manufacturing solid electrolytic capacitor

Country Status (1)

Country Link
JP (1) JPH10303080A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10321472A (en) * 1997-05-22 1998-12-04 Nichicon Corp Solid electrolytic capacitor and its manufacture
JP2001148328A (en) * 1999-11-19 2001-05-29 Nec Corp Manufacturing method for solid electrolytic capacitor
JPWO2013179996A1 (en) * 2012-05-29 2016-01-21 昭和電工株式会社 Method for manufacturing solid electrolytic capacitor element

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10321472A (en) * 1997-05-22 1998-12-04 Nichicon Corp Solid electrolytic capacitor and its manufacture
JP2001148328A (en) * 1999-11-19 2001-05-29 Nec Corp Manufacturing method for solid electrolytic capacitor
JPWO2013179996A1 (en) * 2012-05-29 2016-01-21 昭和電工株式会社 Method for manufacturing solid electrolytic capacitor element

Similar Documents

Publication Publication Date Title
KR100334918B1 (en) Solid electrolytic capacitor using a conducting polymer and method of making same
JP2765462B2 (en) Solid electrolytic capacitor and method of manufacturing the same
JP3065286B2 (en) Solid electrolytic capacitor and method of manufacturing the same
JPH07135126A (en) Solid electrolytic capacitor and its manufacture
JP3202668B2 (en) Method for manufacturing solid electrolytic capacitor
JPH07130579A (en) Manufacture of solid electrolytic capacitor
JP3228323B2 (en) Solid electrolytic capacitor and method of manufacturing the same
JPH10247612A (en) Solid electrolytic capacitor
KR20000053593A (en) Method for producing a solid electrolytic capacitor
JPH0682592B2 (en) Method for manufacturing solid electrolytic capacitor
JP3846760B2 (en) Solid electrolytic capacitor and manufacturing method thereof
JPH10303080A (en) Method for manufacturing solid electrolytic capacitor
JP2002134363A (en) Solid capacitor and its manufacturing method
JP3864651B2 (en) Solid electrolytic capacitor and manufacturing method thereof
JP3974706B2 (en) Manufacturing method of solid electrolytic capacitor
KR100753612B1 (en) Solid Electrolyte Capacitor and Method for Producing the Same
JP3750476B2 (en) Manufacturing method of solid electrolytic capacitor
JPH10303075A (en) Manufacture of solid electrolytic capacitor
JP2001203128A (en) Method of manufacturing solid electrolytic capacitor
JP3454733B2 (en) Method for manufacturing solid electrolytic capacitor
JP2003268082A (en) Electroconductive composition, method for producing the same, capacitor using the electroconductive composition and method for producing the same
JP2003297672A (en) Method of manufacturing solid electrolytic capacitor
JPH06325984A (en) Solid electrolytic capacitor and manufacture thereof
JPH10303074A (en) Method for manufacturing solid electrolytic capacitor
JP2000106330A (en) Capacitor and its manufacture