JPH1029212A - Slurry scattering preventing cover of wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cover fitted with a grooved roller of a wire saw capable of easily performing maintenance work and capable of preventing the scattering of a slurry at the time of trial operation. SOLUTION: A pair of guide rails 44, 44 are arranged to the outer peripheries of both end parts of grooved rollers 18A-18C and a freely extensible cover 54 is provided to a pair of the guide rails 44, 44 in a freely slidable manner. When maintenance work is performed, the grooved rollers 18A-18C are opened forwardly by the cover 54. By this constitution, the tensioning work of wire rows 20 can be easily performed without obstructing work. At a time of trial operation, the cover 54 covers the front parts of the grooved rollers 18A-18C. By this constitution, the scattering of a slurry to the periphery can be prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cover for preventing slurry scattering of a wire saw, and more particularly to a cover of wire saw for cutting brittle materials such as silicon, glass and ceramics.

[0002]

2. Description of the Related Art A wire saw presses a workpiece while supplying a slurry (a working fluid containing abrasive grains) to a high-speed running wire row, and a large number of workpieces are wrapped by the lapping action of the abrasive grains. This is a device for cutting into wafers. The wire row is formed by sequentially winding a wire running between a pair of wire reels around a plurality of grooved rollers having a large number of grooves formed at a constant pitch on the peripheral surface.

[0003] In the above-mentioned wire saw, the wire is worn as the cutting is repeated, so it is necessary to replace the wire periodically. In addition, since a grooved roller that forms a wire row and a guide roller that guides a wire also wear, it is necessary to periodically replace these members and perform maintenance. At the time of this maintenance, a trial operation of the wire saw is performed to check whether the newly stretched wire is correctly stretched, whether other devices operate normally, whether the cutting state is good, and the like. In this test run, it is necessary to confirm the cutting condition of the work, etc., so the cover of the cutting part (the cutting part of the wire saw is covered with a cover in order to prevent the slurry from scattering around. Must be removed. For this reason, there is a problem that the slurry scatters around.

In order to solve this problem, in the conventional wire saw, the periphery of the grooved roller is covered with a removable cover to prevent the slurry from scattering around.

[0005]

However, the detachable cover has a drawback that it is difficult to form a structure surrounding the grooved roller due to the structure of the cut portion, and it is not possible to sufficiently prevent the scattering of slurry. there were. Further, there is a disadvantage that maintenance and the like of the removed cover are troublesome.

The present invention has been made in view of such circumstances, and provides a slurry scattering prevention cover of a wire saw that can easily perform maintenance work and prevent slurry scattering during test operation. The purpose is to:

[0007]

According to the present invention, a wire running between a pair of wire reels is wound around a plurality of grooved rollers installed in a processing chamber covered with an outer cover. By forming a wire row by hanging, and pressing the workpiece while supplying slurry to the wire row,
In a wire saw for cutting the workpiece into a large number of wafers, guide rails are provided around a plurality of grooved rollers installed in the processing chamber, and a bendable slurry scattering prevention on the guide rails is prevented. The cover is slidably provided.

According to the present invention, the grooved roller installed in the processing chamber is covered with a slidable cover around the grooved roller. As a result, when the wire saw is operated in a state where the processing chamber is opened for a trial operation or the like, the periphery of the grooved roller can be covered with the cover, thereby preventing the slurry from scattering around. In addition, when performing maintenance work such as stretching a wire row, the cover can be moved to open the front surface of the grooved roller and work can be performed, so that work can be easily performed without disturbing the work. be able to.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a method for cutting a workpiece of a wire saw according to the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is a perspective view of an embodiment of a wire saw 10 to which a slurry scattering prevention cover according to the present invention is applied.

As shown in FIG. 1, a wire 14 wound around a wire reel 12 includes a plurality of guide rollers 16, 16,
Are wound around three grooved rollers 18A, 18B, 18C via a wire running path formed by. A large number of grooves are formed at a constant pitch on the peripheral surface of each of the grooved rollers 18A to 18C. A horizontal wire row 20 is formed on the upper surface by sequentially winding the wires 14 around these grooves. Is done. Slurry scattering prevention cover 40 according to the present invention
Are formed so as to surround the three grooved rollers 18A to 18C. The configuration will be described later in detail.

The wire running path is formed symmetrically with respect to the wire row 20. The wire 14 forming the wire row 20 passes through the wire running path on the other side and the wire 14 on the other side (not shown). It is wound on a reel. In the wire running path formed on both sides of the wire row 20,
A wire guide device 22, a dancer roller 24, and a wire cleaning device 26 are provided (only one side is shown). The wire guide device 22 guides the wire 14 from the wire reel 12 at a constant pitch, and the dancer roller 24 applies a constant tension to the traveling wire 14. Further, the wire cleaning device 26 removes the slurry attached to the wire 14.

The pair of wire reels 12 and the grooved rollers 18C are connected to motors (not shown) that can rotate forward and backward, respectively. The wires 14 drive these motors synchronously, The wire reel 12
Travels back and forth at high speed. A work feed table 28 that moves vertically with respect to the wire row 20 is installed above the wire row 20. The work feed table 28 is provided with a tilting device 30, and an ingot 32 as a workpiece is held at a lower portion of the tilting device 30 and set at an arbitrary tilt angle.

In the wire saw 10 configured as described above, cutting of the ingot 32 is performed by lowering the work feed table 28 holding the ingot 32 and pressing the ingot 32 against the high-speed running wire row 20. At this time, a slurry is supplied to the wire row 20 from a slurry tank 34 through a nozzle (not shown), and the ingot 32 is cut into wafers by a lapping action of abrasive grains contained in the slurry.

The slurry used for processing the ingot 32 is as follows:
The oil is collected in the slurry tank 34 via an oil pan 38 provided below the wire array 20, and is recycled while replenishing the shortage. At this time, the temperature of the slurry is increased by absorbing heat generated during processing, and the recovered slurry is cooled to a constant temperature by the heat exchanger 36. As shown by a two-dot broken line in the figure, the cutting is performed in a processing chamber covered with an openable and closable outer cover 39 to prevent the slurry from scattering around.

FIG. 2 is a side view of an embodiment of a slurry scattering prevention cover according to the present invention. As shown in the figure, the three grooved rollers 18A to 18C are connected to a pair of support plates 4 fixed to a body frame 10F of a wire saw.
Bearings 42A, 42A, 42B, 42B, 42 at 0 and 40
It is rotatably supported via C and 42C. This 3
The three grooved rollers 18A to 18C are arranged so as to form an inverted triangle, and the ingot 32 is pressed against a horizontal wire row 20 formed by the three grooved rollers 18A to 18C. Is cut into wafers. Hereinafter, the three grooved rollers 18 </ b> A to 18 </ b> C arranged to form the inverted triangle are referred to as a cutting unit 18.

On the outer periphery of both ends of the cutting unit 18,
A pair of guide rails 44 are arranged along the cutting unit 18. This pair of guide rails 44, 4
4 are fixed to the support plates 40, 40 via brackets 46, 46,. As shown in FIG.
The guide rail 44 has a C-shaped cross section, and has a number of sliders 48 formed in a disk shape therein.
48 are slidably fitted. Each of the sliders 48, 4 fitted in the pair of guide rails 44, 44
8, ... are connected to each other by connecting rods 50, 50,
Thus, the connecting rods 50, 50,.
Move along 4,44.

Are connected to each other by vinyl sheets 52, 52,... Having a predetermined length, and the vinyl sheets 52, 52,. It is formed. The cover 54 configured as described above slides along the guide rails 44, 44 as the connecting rods 50, 50,... Move along the guide rails 44, 44.
By changing the interval of 0, 50,..., The length is variable.

FIG. 2 shows the fixing position of the cover 54 during maintenance. As shown in the figure, at the time of maintenance, the cover 54 is retracted to the rear side (right side in the figure) of the cutting unit 18 so that the worker can easily perform a wire stretching operation or the like. The front surface 18 (left side in the figure) is open. On the other hand, FIG.
4 shows the fixing position. As shown in the figure, a cover 54 is located on the front surface of the cutting unit 18 to prevent the slurry from scattering forward during the test operation.

The fixing of the cover 54 at each position in the drawing P ₁ of each guide rail 44, 44, P _2, a stopper 56 provided at a position of P _3, carried out ... at. Stopper 5
6 restricts the movement of the cover 54 by locking the slider 48 with a stopper pin 58 protruding into the guide groove 44A of the guide rail 44, as shown in FIG.

The stopper pin 58 has a cylindrical guide block 60 fixed to the side of the guide rail 44.
Slidably supported by This guide block 60
A compression spring 62 is incorporated therein, and the stopper pin 58 is urged by the compression spring 62 to protrude into the guide groove 44A. Therefore, usually, the stopper pin 58 is in a state of protruding into the guide groove 44A, and only when the cover 54 is moved, pulls the knob 58A provided at the base end thereof and retreats from the guide groove 44A.

A slide provided on the guide rail 44 on the other side
Topper 56 and other positions (P_Two, P _Three)
The toppers 56, 56 are also configured in the same configuration.
The bar 54 is fixed as follows. That is, in FIG.
As shown in FIG.
P in the figure₁Is fixed with the stopper 56 located at
Medium P_TwoIs fixed by the stopper 56 located at the position.

Further, as shown in FIG. 3, when commissioning fixes the one end of the cover 54 by the stopper 56 located in the drawing P _2, is fixed by a stopper 56 located in the drawing P ₃ and the other end . The operation of the embodiment of the slurry scattering prevention cover of the wire saw according to the present invention configured as described above is as follows.

As shown in FIG. 2, during normal operation, the cover 5
The ingot 32 is cut in a state in which 4 is positioned in front of the cutting unit 18 (between P _{1 and} P _{2 in the} figure). As described above, since the cutting of the ingot 32 is performed in the closed processing chamber 39, the slurry does not scatter around (see FIG. 1). On the other hand, as shown in FIG. 2, when performing maintenance such as replacement of the wire 14, the cover 54 is located behind the cutting unit 18 (between P _{2 and} P _{3 in the} figure). Thereby, the front of the cutting unit 18 is opened, so that the worker can easily perform the stretching work and the like.

The following effects can be obtained by enclosing the cutting unit 18 from the lower part to the rear with the cover 54. That is, usually, the wire 14 is stretched by winding the necessary amount of wire 14 from one wire reel 12 in advance on a small wire reel and winding the wound wire 14 around the guide roller 16 sequentially. However, if the wire reel that has taken up the wire 14 accidentally falls out of the hands of the worker when forming the wire row 20, it is conventionally placed in a narrow place where the worker cannot reach. Sometimes she fell off. However, by enclosing the cutting unit 18 from the lower portion to the rear with the cover 54 as in the present embodiment, even if the wire reel falls from the hand of the worker, the dropped wire reel is received by the cover 54, The conventional problem does not occur.

After the replacement of the wire 14 and the maintenance, the test operation is performed to check the tension of the wire 14 and the like. When the test operation is performed, as shown in FIG. Is positioned in front of the cutting unit 18 (between P _{1 and} P _{2 in the} figure). During the test run, it is necessary to check details such as the cutting state and the tension of the wire 14, so that the processing chamber 39 is in an open state. Thereby, the scattering of the slurry can be prevented, and the operator can perform the checking operation without being soiled.

As described above, according to the slurry scattering prevention cover of the present embodiment, by surrounding the cutting unit 18 with the openable and closable cover 54, it is possible to reliably prevent the slurry from scattering during the test operation. In addition, work can be easily performed during maintenance. Further, since the structure is provided on the wire saw 10, it is not necessary to store the removed cover as in the related art. In the present embodiment, the cover 54 is configured to be able to expand and contract. However, the cover 54 may be configured to be bendable so as to be movable along the guide rail 44. In this case, when the cover 54 is positioned behind the cutting unit 18, the lower part of the cutting unit 18 cannot be covered, but the cutting unit 1
This problem can be solved by providing a fixed cover at the rear of 8 to compensate for the shortage. The rear of the cutting unit 18 may be covered with a fixed cover, and only the lower part and the front of the cutting unit 18 may be covered with a movable cover.

[0027]

As described above, according to the present invention,
By surrounding the grooved roller forming the wire row with a slidable cover, it is possible to reliably prevent the slurry from scattering at the time of test operation, and to easily perform the work at the time of maintenance.

[Brief description of the drawings]

FIG. 1 is an overall configuration diagram of a wire saw.

FIG. 2 is a side view of the embodiment of the slurry scattering prevention cover according to the present invention (when opened forward).

FIG. 3 is a side view of the embodiment of the slurry scattering prevention cover according to the present invention (when closed forward).

FIG. 4 is an enlarged view of a main part of a slurry scattering prevention cover.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Wire saw 12 ... Wire reel 14 ... Wire 16 ... Guide roller 18A-18C ... Grooved roller 20 ... Wire row 32 ... Ingot 44 ... Guide rail 54 ... Cover

Claims (1)

[Claims] 1. A wire row is formed by winding a wire running between a pair of wire reels around a plurality of grooved rollers installed in a processing chamber covered with an outer cover, and a slurry is supplied to the wire row. By pressing the workpiece while
In a wire saw for cutting the workpiece into a large number of wafers, a guide rail is provided around a plurality of grooved rollers installed in the processing chamber, and a bendable slurry scattering prevention on the guide rail is provided. A cover for slidable movement of a wire saw, wherein the cover is slidably provided.