JP3324947B2 - Guide device for wire saw - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw for cutting a work made of a hard and brittle material such as a semiconductor material, a magnetic material, and a ceramic using a wire.

[0002]

2. Description of the Related Art The following structure is known as a conventional wire saw of this type. That is, a column is erected on the base, and a cutting mechanism including a plurality of processing rollers is disposed on the base near one side of the column. Each processing roller has a plurality of annular grooves formed at a predetermined pitch. One wire is sequentially wound around the annular groove between the processing rollers. The column is provided with a work support mechanism for supporting the work so as to be able to move up and down.

[0003] A wire guide mechanism comprising a plurality of guide rollers is provided on the side surface of the column so as to be closely opposed to the processing roller of the cutting mechanism on the column side. Then, while the wire fed through the wire guide mechanism is running between the processing rollers, a slurry containing loose abrasive grains is supplied on the wire, and in this state, the workpiece is pressed against and brought into contact with the wire. Thus, the workpiece is subjected to processing such as cutting.

[0004]

However, in this conventional wire saw, the side surface of the column is so arranged that the wire guide mechanism composed of a plurality of guide rollers is in close proximity to the processing roller of the cutting mechanism on the column side. It is installed in. For this reason, when winding the wire around the processing roller of the cutting mechanism, a wire is wound around each guide roller, or the guide roller facing the processing roller is aligned with the annular groove on the processing roller to form the annular groove. When adjusting the movement in the forming pitch direction, it is necessary to perform the operation in a narrow space between the processing roller and the column. Therefore, there is a problem that the work of attaching the wire to the guide roller, the work of adjusting the movement of the guide roller, or the work of replacing the guide roller are very troublesome and time-consuming.

[0005] The present invention has been made by paying attention to such problems existing in the prior art. The purpose is to wrap the wire around the processing roller of the cutting mechanism, wrap the wire around the guide roller, adjust the movement of the guide roller in accordance with the annular groove of the processing roller, or replace the guide roller. An object of the present invention is to provide a wire saw guide device that can perform work easily and in a short time in an open large space. It is still another object of the present invention to provide a wire saw guide device capable of suppressing a displacement between a processing roller and a guide roller and reducing wear of the guide roller.

[0006]

In order to achieve the above object, according to the first aspect of the present invention, a column is erected on a base, and a plurality of columns are provided on the base near one side of the column. A cutting mechanism composed of a processing roller is disposed, a wire is wound around the processing roller of the cutting mechanism at a predetermined pitch, and a work supporting mechanism for supporting a work is disposed on the column so as to be able to move up and down. A wire fed through a wire guide mechanism, while running between the processing rollers, a workpiece is brought into contact with the wire to perform the processing, the wire guide mechanism of the cutting mechanism, It is disposed close to and opposite to the processing roller and on the side opposite to the column.

Further, the wire guide mechanism is configured from a wire supply side unit consisting of a plurality of guide rollers, the wire pull-out side unit consisting of a plurality of guide rollers, fitted with the units on the supporting frame of the cutting mechanism Things.

[0008] In the invention described in claim 2 is the wire saw guide device of claim 1, wherein a plurality of guide rollers in the respective units, the processing rollers and the opposing guide rollers of at least the cutting mechanism, the cutting It is mounted on a support frame of the mechanism so as to be movable and adjustable in the winding pitch direction of the wire.

[0009] In the invention described in claim 3 is the wire saw guide device in Claim 2 serial <br/> mounting, it said in a plurality of guide rollers in each unit facing the processing rollers of at least the cutting mechanism The guide roller is movably disposed between an operation position close to the processing roller and a retracted position separated from the processing roller.

In the wire saw guide device according to the first aspect, the wire guide mechanism is disposed so as to be opposed to the processing roller of the cutting mechanism on the side opposite to the column. For this reason, when winding the wire around the processing roller of the cutting mechanism, use the open large space,
The wire can be easily mounted on the guide roller of the wire guide mechanism, and the guide roller can be easily moved and adjusted to a position that matches the annular groove of the processing roller. Further, replacement work of the guide rollers can be easily performed.

Further, the wire supply side unit to guide the supply of wire to the processing rollers, and the wire pull-out side unit for guiding the drawer wire attached to the support frame of the cutting mechanism, with a simple mounting arrangement, for processing The roller can be easily arranged to face the position opposite to the column. In addition, since the processing roller and both units of the wire guide mechanism are mounted on the same surface, a positional shift between the two can be suppressed. And since the guide roller can be mounted at a position closer to the processing roller, the wire can be prevented from entering in an oblique direction due to a positional shift between the grooves of the guide roller and the processing roller,
The wear of the guide roller can be reduced.

[0012] In wire saw guide device according to claim 2, in the wire feed-side unit and the wire pull-out side unit, by changing the mounting position of the guide roller relative to the supporting frame of the cutting mechanism, for processing those guide rollers It can be easily adjusted and arranged at a position corresponding to the annular groove of the roller.

In the wire saw guide device according to the third aspect, when each processing roller of the cutting mechanism is detached from the support frame and is replaced, the guide roller of each unit facing the processing roller is set to the retracted position. If it is moved and arranged, it is possible to easily replace the processing roller without being disturbed by the guide roller.

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION

(First Embodiment) Hereinafter, a first embodiment of the present invention will be described with reference to FIGS.

As shown in FIG. 1, the wire saw of this embodiment includes a base 11, and a column 12 is provided upright on the upper surface of the base 11. The cutting mechanism 13 is mounted on the base 11 via a support frame 14 near one side of the column 12. The cutting mechanism 13 extends in parallel
The processing rollers 15, 16, 17 are provided, and a number of annular grooves 15 a, 16 a, 17 a are formed at a predetermined pitch on the outer periphery thereof.

The wire 18 made of a single wire is connected to the annular grooves 15a, 16a, 1 of the processing rollers 15, 16, 17.
7a. Wire guide mechanism 19
The supporting frame 1 is disposed so as to be opposed to the processing rollers 15, 16, 17 on the side opposite to the column 12.
4 is installed on the side. This wire guide mechanism 19
Is composed of a wire supply side unit 20 for guiding the supply of the wire 18 to the processing rollers 15, 16 and 17, and a wire extraction side unit 21 for guiding the extraction of the wire 18 from the processing rollers 15, 16 and 17. Have.

When the processing rollers 15, 16, 17 are rotated by a wire running motor (not shown), the wire 18 is supplied onto the processing rollers 15, 16, 17 via a wire guide mechanism 19. It is sent and travels at a predetermined travel speed. The traveling of the wire 18 is repeated so as to advance forward by a fixed amount (for example, 10 m) and retreat by a fixed amount (for example, 9 m), and to move forward step by step.

The work support mechanism 22 is disposed on the side surface of the column 12 so as to be able to move up and down so as to be disposed above the cutting mechanism 13, and a work 23 made of a hard and brittle material is detachably set below the work support mechanism 22. Is done. Work lifting motor 2
4 is disposed on the column 12, and the ball screw 25 is rotated by the motor 24, and the work supporting mechanism 22 is rotated.
Is raised and lowered.

During operation of the wire saw, the wire 18 is driven by the processing rollers 15, 16, 1 of the cutting mechanism 13.
7, the work support mechanism 22 is lowered toward the cutting mechanism 13. At this time, an aqueous or oily slurry containing free abrasive grains is supplied onto the wire 18 by a slurry supply mechanism (not shown), and the work 23 is pressed against the wire 18 and is brought into contact with the wire 18 so that the work 23 is sliced by the lapping action. It is cut and processed.

Next, the wire guide mechanism 19 will be described in detail. As shown in FIGS. 2 and 3, the wire supply unit 20 of the wire guide mechanism 19 includes a first guide roller 28, a second guide roller 29, and a third guide roller 30. In addition, the wire withdrawal unit 2
Similarly, 1 includes a first guide roller 31, a second guide roller 32, and a third guide roller 33. And
The first guide rollers 28 and 31 of both units 20 and 21 are supported by brackets 34 on both outer surfaces of the support frame 14 so as to be rotatable about a vertical axis.

A pair of mounting plates 35 are rotatably mounted on inner surfaces on both sides of the support frame 14 via hinge pins 36 extending vertically. And this mounting plate 35
As shown by solid lines in FIG.
And a retracted position separated from the processing rollers 15, 16, 17 as shown by a chain line in the same drawing, and can be fixed to the operating position by a pair of fixing screws 37. Has become.

The supporting plate 38 is formed on the mounting plate 35 by a pair of elongated holes 39 and mounting screws 40.
The annular grooves 15a, 16a, and 17a on the first and second gears 6 and 17 are mounted so as to be movable in the pitch direction. Adjustment screw 41
Is rotatably supported on each mounting plate 35, and by rotating the adjusting screw 41, the support plate 38 can be moved and adjusted in the longitudinal direction of the processing rollers 15, 16, and 17.

The second unit 20 and 21
Guide rollers 29 and 32 are supported on each support plate 38 so as to be rotatable about a vertical axis. The third guide rollers 30, 33 of the units 20, 21 are rotatably supported on respective support plates 38 about a horizontal axis parallel to the axes of the processing rollers 15, 16, 17.

Thus, the processing rollers 15, 16 and 17 of the cutting mechanism 13 are connected to the wire 18 via the first guide roller 28, the second guide roller 29 and the third guide roller 30 of the wire supply side unit 20. Is supplied. Further, the wires 1 from the processing rollers 15, 16, and 17 are passed through the third guide roller 33, the second guide roller 32, and the first guide roller 31 of the wire pull-out unit 21.
8 is drawn.

Next, the mounting structure of the guide rollers 28 to 30, 31 to 33 in the units 20 and 21 will be described in detail. As shown in FIG. 4, the support shaft 44 is erected on the bracket 34 or the support plate 38, and a ring 45 is fitted around the support shaft 44. The roller body 46 is rotatably supported by a support shaft 44 via a pair of bearings 48 in a state of being fitted to a cylindrical housing 47, and has a pair of annular grooves 46 around the outer periphery thereof for receiving the wire 18.
a is formed.

The bearing cap 49 has a plurality of screws 50.
Thus, it is attached to the front surface of the housing 47 and covers the front surface of the bearing 48. The roller cap 51 is attached to the front surface of the bearing cap 49 by a plurality of screws 52, and sandwiches the roller body 46 together with the housing 47. During operation of the wire saw, the caps 49 and 51 prevent the slurry containing loose abrasive grains from entering the bearing 48 from the front side thereof.

An air supply passage 53 is formed in the support shaft 44 and the ring 45. The labyrinth gap 54 is formed between the ring 45 and the housing 47, communicates with the air supply passage 53, and opens on the rear surface side of the roller body 46. Then, during operation of the wire saw, high-pressure air supplied to the labyrinth gap 54 via the air supply passage 53 is jetted toward the rear surface of the roller body 46, and the slurry containing loose abrasive particles enters the bearing 48 and thereafter. It is designed to prevent entry from the surface side.

Next, the operation of the wire saw configured as described above will be described. Now, in this wire saw, the wire 18 is connected to the processing rollers 15 to 17 of the cutting mechanism 13 via the wire supply side unit 20 of the wire guide mechanism 19.
After being fed between the processing rollers 15 to 17, it is pulled out via the wire drawing-out unit 21. Then, while a slurry containing loose abrasive particles is supplied onto the wire 18 between the processing rollers 15 to 17 by a slurry supply mechanism (not shown), the work 23 is pressed against the wire 18 by the lowering of the work support mechanism 22. Is done. Thereby, the work 23 is cut into a predetermined thickness.

As described above, the cutting of the work 23 is repeatedly performed, and the annular grooves 15 on the processing rollers 15 to 17 are formed.
When a to 17a are worn, the processing rollers 15 to 1
7 needs to be replaced. This processing roller 15 ~
At the time of attachment / detachment / replacement of 17, the attachment plates 35 of both units 20 and 21 in the wire guide mechanism 19 are rotated by hinge pins 36, and the guide rollers 29, 30, 32 and 33 facing the processing rollers 15 to 17 are moved in FIG. Is moved to the retreat position indicated by the chain line. In this state, the guide rollers 29,
The replacement work of the processing rollers 15 to 17 can be easily performed without being disturbed by 30, 32, and 33.

Thereafter, the mounting plate 3 of both units 20 and 21
5 is rotated by the hinge pin 36, and the guide rollers 29,
2, 32 and 33 are moved to the operation positions indicated by solid lines in FIG. Then, in this state, the wire 18 fed from a wire bobbin (not shown) is wound around each of the guide rollers 28 to 30 of the wire supply side unit 20 and the wire 18 is annularly grooved 15 a to 17 of the processing rollers 15 to 17.
Then, the wire 18 is wound around the guide rollers 31 to 33 of the wire drawing-out unit 21 and wound around the other wire bobbin (not shown). In this case, each unit 20, 21 of the wire guide mechanism 19
Are arranged opposite to the processing rollers 15 to 17 of the cutting mechanism 13 in the vicinity of the column 12 on the opposite side.
Each of the guide rollers 28-
The wire 18 can be easily mounted on the 30, 31 to 33.

When the wire 18 is wound around the processing rollers 15 to 17, the wire guide mechanism 1 is used.
9, the support plate 38 of each unit 20, 21
9, the guide rollers 29, 30, 32, and 33 facing the processing rollers 15 to 17 are moved and adjusted to positions matching the annular grooves 15a to 17a of the processing rollers 15 to 17. Also in this case, since the units 20 and 21 of the wire guide mechanism 19 are disposed close to and opposite to the processing rollers 15 to 17 of the cutting mechanism 13 on the side opposite to the column 12, the opening is wide. Using space,
The movement of the guide rollers 29, 30, 32, and 33 can be easily adjusted.

The effects that can be expected from the above embodiment will be described below. (A) In the guide device for a wire saw of this embodiment, the wire guide mechanism 19 is disposed so as to be opposed to the processing rollers 15, 16, 17 of the cutting mechanism 13 on the side opposite to the column 12. For this reason, when winding the wire 18 around the processing rollers 15 to 17 of the cutting mechanism 13, the wire 1 is applied to the guide rollers 28 to 30 and 31 to 33 of the wire guide mechanism 19 by using the wide open space.
8 can be easily mounted, and the guide rollers 29, 30, 32, and 33 can be easily moved and adjusted to positions matching the annular grooves 15a, 16a, and 17a of the processing rollers 15 to 17. Furthermore, guide roller 2
Replacement work of 9, 30, 32, and 33 can also be easily performed.

(B) In the guide device for a wire saw of this embodiment, the wire supply side unit 20 of the wire guide mechanism 19 for guiding the supply of the wire 18 to the processing rollers 15 to 17 and the drawing of the wire 18 are guided. The wire withdrawing unit 21 is mounted on the support frame 14 of the cutting mechanism 13. For this reason, the processing rollers 1 and 21 can be mounted in a simple mounting configuration.
5 to 17 can be easily arranged opposite to the position opposite to the column 12.

The guide rollers 2 of the units 20 and 21 of the processing rollers 15 to 17 and the wire guide mechanism 19
Since 9, 30, 32, and 33 are mounted on the same surface, displacement between them can be suppressed. And the third
The guide rollers 30, 33 can be mounted at positions closer to the processing rollers 15 to 17. Accordingly, the wire 18 is prevented from entering the wire 18 from an oblique direction due to a positional shift between the annular grooves 46a of the third guide rollers 30, 33 and the annular grooves 15a, 16a of the processing rollers 15, 16. Wear of the rollers 30, 33 can be reduced.

(C) In the guide device for a wire saw of this embodiment, in the wire supply side unit 20 and the wire extraction side unit 21, the guide rollers 29, 30, 32, facing the processing rollers 15 to 17 of the cutting mechanism 13 are used.
33 is attached to the support frame 14 of the cutting mechanism 13 so as to be movable and adjustable in the winding pitch direction of the wire 18. Therefore, the guide rollers 29, 30, 3
By changing the mounting positions of the rollers 2 and 33, the processing rollers 15 to
17 can be easily adjusted and arranged at a position corresponding to the annular grooves 15a to 17a.

(D) In the wire saw guide device of this embodiment, the cutting mechanism 1 is used in each of the units 20 and 21.
Guide roller 2 facing processing rollers 15 to 17 of No. 3
9, 30, 32, and 33 can be moved and arranged between an operating position and a retracted position. For this reason, the cutting mechanism 13
When the processing rollers 15 to 17 are detachably attached to and exchanged from the support frame 14, the guide rollers 29 and 3 of the units 20 and 21 facing the processing rollers 15 to 17 are used.
By moving 0, 32, 33 to the retreat position,
The work of replacing the processing rollers 15 to 17 can be easily performed without being disturbed by the guide rollers 29, 30, 32, and 33.

(Second Embodiment) Next, a second embodiment of the present invention will be described.
This embodiment will be described focusing on parts different from the first embodiment.

In the second embodiment, as shown in FIGS. 5 to 8, the wire supply side unit 20 of the wire guide mechanism 19 includes a first guide roller 28 and a second guide roller 29. At the same time, the wire pull-out unit 21 includes a first guide roller 31 and a second guide roller 32. That is, in the second embodiment, the third guide rollers 30, 33 in the first embodiment are omitted.

In the wire supply side unit 20, only the second guide roller 29 is supported on the support plate 38 so as to be rotatable around an inclined axis inclined at a predetermined angle with respect to the vertical axis. In addition, the wire extraction side unit 21
In the above, only the second guide roller 32 is supported on the support plate 38 so as to be rotatable around a horizontal axis.

Accordingly, in the wire guide mechanism 19 according to the second embodiment, the first roller 21 of the wire supply side unit 20 is attached to the processing rollers 15 to 17 of the cutting mechanism 13.
Via a guide roller 28 and a second guide roller 29,
A wire 18 is provided. Processing rollers 15-1
7 through the second guide roller 32 and the first guide roller 31 of the wire extraction side unit 21, the wire 18
Is pulled out.

Therefore, also in the second embodiment,
Almost the same functions and effects as those of the first embodiment can be exerted. Further, in the second embodiment, each unit 20, 21 of the wire guide mechanism 19 is
Since each of the guide rollers 28, 29, 32, and 33 is configured, the configuration of the wire guide mechanism 19 can be simplified.

The present invention can be embodied with the following modifications. (1) Each unit 20, 21 of the wire guide mechanism 19
In the above, the number of guide rollers 28 to 30, 31 to 33 to be provided is appropriately changed.

(2) In each of the units 20 and 21 of the wire guide mechanism 19, the mounting plate 35 is configured to be rotated by an actuator such as a cylinder.

[0044]

The present invention is configured as described above, and has the following effects. According to the first aspect of the present invention, when winding the wire around the processing roller of the cutting mechanism, the operation of attaching the wire to the guide roller, the operation of adjusting the movement of the guide roller according to the annular groove of the processing roller, and The replacement work of the guide rollers can be performed easily and in a short time in an open large space.

Further, the wire supply side unit to guide the supply of wire to the processing rollers, and fitted with a wire pull-out side unit to guide the withdrawal of the wire to the support frame of the cutting mechanism, with a simple mounting arrangement, for processing The roller can be easily arranged to face the position opposite to the column. In addition, the positional deviation between the processing roller and the two units of the wire guide mechanism can be suppressed, and the wire is prevented from entering in an oblique direction due to the positional deviation between the grooves of the guide roller and the processing roller. Roller wear can be reduced.

According to the second aspect of the present invention, in the wire supply side unit and the wire extraction side unit, by changing the mounting position of the guide roller with respect to the support frame of the cutting mechanism, the guide roller is processed by the processing roller. It can be easily adjusted and arranged at a position corresponding to the annular groove.

According to the third aspect of the present invention, when each processing roller of the cutting mechanism is detached from the support frame and replaced, the guide roller of each unit facing the processing roller is moved to the retracted position. By arranging, it is possible to easily replace the processing roller without being disturbed by the guide roller.

[Brief description of the drawings]

FIG. 1 is an essential part front view showing a wire saw guide device of a first embodiment.

FIG. 2 is a plan view of a main part showing the wire guide mechanism.

FIG. 3 is a side view of a main part of the wire guide mechanism.

FIG. 4 is an enlarged partial plan view showing a guide roller of the wire guide mechanism.

FIG. 5 is a plan view of a main part showing a guide device for a wire saw according to a second embodiment.

FIG. 6 is a side view of a main part of the wire guide mechanism.

FIG. 7 is a partially enlarged view taken along line 7-7 in FIG.

FIG. 8 is a partially enlarged view taken in the direction of the arrows along line 8-8 in FIG. 6;

[Explanation of symbols]

11 ... Base, 12 ... Column, 13 ... Cutting mechanism, 14 ... Support frame, 15, 16, 17 ... Processing roller, 15
a, 16a, 17a: annular groove, 18: wire, 19: wire guide mechanism, 20: wire supply side unit, 21 ...
Wire draw-out side unit, 22 ... Work support mechanism, 23 ...
Work 28, first guide roller 29, second guide roller 30, 30 third guide roller 31, 31 first guide roller 32, second guide roller 33, third guide roller 35, mounting plate 36 ... hinge pin, 38 ... support plate,
39: long hole, 41: adjusting screw.

Claims (3)

(57) [Claims] 1. A column is erected on a base, and a cutting mechanism including a plurality of processing rollers is disposed on the base near one side of the column. A wire is wound at a predetermined pitch, and a work support mechanism for supporting the work is arranged on the column so as to be able to move up and down, and the wire fed through the wire guide mechanism is caused to travel between the processing rollers. , contacting the workpiece with respect to the wire, in a wire saw which is adapted subjected to processing, the wire guide mechanism proximate facing the processing rollers of the cutting mechanism, disposed on the opposite side of the column, the wire guide mechanism Consists of multiple guide rollers
Consists of a wire supply unit and multiple guide rollers
And the wire draw-out unit.
A guide device for a wire saw in which is mounted on a support frame of a cutting mechanism . 2. A plurality of guide rods in each unit.
At least facing the processing roller of the cutting mechanism
Guide roller against the support frame of the cutting mechanism.
The wire saw guide device according to claim 1, wherein the guide device is mounted so as to be movable in a winding pitch direction of the wire. 3. A plurality of guide rollers in each unit, wherein at least a guide roller facing a processing roller of a cutting mechanism is moved to an operation position close to the processing roller.
And a retracted position separated from the processing roller.
The guide device for a wire saw according to claim 2, which is disposed .