JPH10284390A5 - - Google Patents

Info

Publication number
JPH10284390A5
JPH10284390A5 JP1997097922A JP9792297A JPH10284390A5 JP H10284390 A5 JPH10284390 A5 JP H10284390A5 JP 1997097922 A JP1997097922 A JP 1997097922A JP 9792297 A JP9792297 A JP 9792297A JP H10284390 A5 JPH10284390 A5 JP H10284390A5
Authority
JP
Japan
Prior art keywords
reflecting mirror
shape
temperature distribution
control device
shape control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997097922A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10284390A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9097922A priority Critical patent/JPH10284390A/ja
Priority claimed from JP9097922A external-priority patent/JPH10284390A/ja
Publication of JPH10284390A publication Critical patent/JPH10284390A/ja
Publication of JPH10284390A5 publication Critical patent/JPH10284390A5/ja
Pending legal-status Critical Current

Links

JP9097922A 1997-04-02 1997-04-02 反射鏡の形状制御装置、形状制御方法及び露光装置 Pending JPH10284390A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9097922A JPH10284390A (ja) 1997-04-02 1997-04-02 反射鏡の形状制御装置、形状制御方法及び露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9097922A JPH10284390A (ja) 1997-04-02 1997-04-02 反射鏡の形状制御装置、形状制御方法及び露光装置

Publications (2)

Publication Number Publication Date
JPH10284390A JPH10284390A (ja) 1998-10-23
JPH10284390A5 true JPH10284390A5 (cg-RX-API-DMAC10.html) 2005-10-27

Family

ID=14205194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9097922A Pending JPH10284390A (ja) 1997-04-02 1997-04-02 反射鏡の形状制御装置、形状制御方法及び露光装置

Country Status (1)

Country Link
JP (1) JPH10284390A (cg-RX-API-DMAC10.html)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4006251B2 (ja) 2002-03-20 2007-11-14 キヤノン株式会社 ミラー装置、ミラーの調整方法、露光装置、露光方法及び半導体デバイスの製造方法
AU2002346911A1 (en) * 2002-10-15 2004-05-04 Carl Zeiss Smt Ag Optical arrangement and method of specifying and performing a deformation of an optical surface of an optical element being part of the optical arrangement
US7423765B2 (en) * 2004-07-31 2008-09-09 Carl Zeiss Smt Ag Optical system of a microlithographic projection exposure apparatus
US8029186B2 (en) * 2004-11-05 2011-10-04 International Business Machines Corporation Method for thermal characterization under non-uniform heat load
US8064151B2 (en) * 2007-08-14 2011-11-22 Asml Netherlands B.V. Lithographic apparatus and thermal optical manipulator control method
JP5401604B2 (ja) * 2009-05-16 2014-01-29 カール・ツァイス・エスエムティー・ゲーエムベーハー 光学補正構成体を備える半導体リソグラフィ用の投影露光装置
JP4935884B2 (ja) 2009-12-01 2012-05-23 三菱電機株式会社 光学反射鏡
JP6797627B2 (ja) * 2015-11-24 2020-12-09 キヤノン株式会社 インプリント装置、インプリント方法、および物品の製造方法
DE102017205405A1 (de) * 2017-03-30 2018-10-04 Carl Zeiss Smt Gmbh Spiegel, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage
JP6875925B2 (ja) * 2017-05-09 2021-05-26 キヤノン株式会社 光学装置、投影光学系、露光装置、および物品製造方法
DE102018212400A1 (de) * 2018-07-25 2020-01-30 Carl Zeiss Smt Gmbh Verfahren und Vorrichtung zum Bestimmen des Erwärmungszustandes eines optischen Elements in einem optischen System für die Mikrolithographie
DE102020205752A1 (de) * 2020-05-07 2021-11-11 Carl Zeiss Smt Gmbh Verfahren zum Betreiben eines deformierbaren Spiegels, sowie optisches System mit einem deformierbaren Spiegel
CN114815128B (zh) * 2022-05-19 2023-04-07 中国科学院长春光学精密机械与物理研究所 一种微纳遥感相机在轨实时成像调节系统

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