JPH10282147A5 - - Google Patents

Info

Publication number
JPH10282147A5
JPH10282147A5 JP1997097890A JP9789097A JPH10282147A5 JP H10282147 A5 JPH10282147 A5 JP H10282147A5 JP 1997097890 A JP1997097890 A JP 1997097890A JP 9789097 A JP9789097 A JP 9789097A JP H10282147 A5 JPH10282147 A5 JP H10282147A5
Authority
JP
Japan
Prior art keywords
power supply
lands
support base
line
land
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997097890A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10282147A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9789097A priority Critical patent/JPH10282147A/ja
Priority claimed from JP9789097A external-priority patent/JPH10282147A/ja
Publication of JPH10282147A publication Critical patent/JPH10282147A/ja
Publication of JPH10282147A5 publication Critical patent/JPH10282147A5/ja
Pending legal-status Critical Current

Links

JP9789097A 1997-04-02 1997-04-02 平板状被検査体の試験用ヘッド Pending JPH10282147A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9789097A JPH10282147A (ja) 1997-04-02 1997-04-02 平板状被検査体の試験用ヘッド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9789097A JPH10282147A (ja) 1997-04-02 1997-04-02 平板状被検査体の試験用ヘッド

Publications (2)

Publication Number Publication Date
JPH10282147A JPH10282147A (ja) 1998-10-23
JPH10282147A5 true JPH10282147A5 (cg-RX-API-DMAC7.html) 2005-01-20

Family

ID=14204358

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9789097A Pending JPH10282147A (ja) 1997-04-02 1997-04-02 平板状被検査体の試験用ヘッド

Country Status (1)

Country Link
JP (1) JPH10282147A (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4490521B2 (ja) * 1999-01-29 2010-06-30 東京エレクトロン株式会社 回転駆動機構及び被検査体の載置機構並びに検査装置
JP2008003049A (ja) 2006-06-26 2008-01-10 Micronics Japan Co Ltd プローブ組立体
JP5086783B2 (ja) * 2007-12-05 2012-11-28 日本電子材料株式会社 カンチレバー型プローブカード
CN103543298B (zh) * 2012-07-13 2016-03-23 旺矽科技股份有限公司 探针固持结构及其光学检测装置

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