JPH102808A - Temperature sensor and manufacture of the same, and alarm device using the sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a temperature sensor which can measure temperature at high temperature by using diffusion, manufacture of the same and an alarm device using the sensor. SOLUTION: A temperature sensor comprises diffusion pair 1, 1 on which two kinds of alloy material of different composition are laminated and heating temperature T is estimated from thickness of a mutual diffusion layer 2 formed on a surface of a diffusion pair 1, 1. Powder of the alloy material which contains one kind of Ni, Co, Cr and Fe having different composition from a plate is coated on the plate selected from the alloy material which contains one kind of Ni, Co, Cr and Fe by gas flame coating and the like. An alarm device is formed by providing with the diffusion pair temperature sensor that two kinds of alloy material of different composition are laminated on moving vanes, stationary vanes and the like of a gas turbine.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a temperature sensor and a method of manufacturing the same utilizing an oxidation in a high-temperature environment and an interdiffusion phenomenon at an interface between different materials, and an alarm device using the sensor.

[0002]

2. Description of the Related Art As is well known, in a high-temperature environment exceeding 500 ° C., temperature measurement using a thermocouple or a radiation thermometer is performed. Thermocouples are used to measure the temperature of the contact point between two types of metals, and are used for measuring the thermoelectromotive force generated between the two types of metals, and are the most reliable as a temperature measuring means at high temperatures.

On the other hand, a radiation thermometer measures the intensity of radiation radiated from a high-temperature object, and its principle is based on the Stefan-Boltzmann rule for blackbody radiation. The feature is that temperature measurement by non-contact is possible,
It is used for temperature measurement in high temperature measurement that cannot be measured by a thermocouple.

[0004]

However, temperature measurement using a thermocouple or a radiation thermometer has the following disadvantages. First, in temperature measurement using a thermocouple, the usable atmosphere and the range of applicable temperature are limited depending on the type of the thermocouple.
For example, platinum rhodium (R) that can measure temperature at the highest temperature
Can measure up to 1200 ° C, but can only be used in a vacuum or inert gas atmosphere. Although chromel allomer (K) is known as a thermocouple that can be used up to the highest temperature in an oxidizing atmosphere, the measurement temperature range is at most about 1000 ° C., and it is difficult to measure a temperature higher than that with a thermocouple. .

[0005] Further, since a thermocouple always requires an electrical connection for monitoring the electromotive force, it is necessary to limit the temperature measurement locations, to route the cord, and to prepare a cord inlet. It is difficult to apply to temperature measurement of a moving object such as a rotating body.

On the other hand, a radiation thermometer can perform temperature measurement in a non-contact manner, but on the other hand, it is necessary to install a radiation thermometer at a position where the measurement point can be seen, so that the measurement point is often limited to a thermocouple or more. Usually, the object to be measured is not a black body (emissivity is 1) but has a certain emissivity of 1 or less. The emissivity depends not only on the material to be measured, but also on the unevenness and oxidation state of the surface, and may change during the measurement. For metals that undergo oxidation during heating, it is difficult to specify the emissivity.

[0007] In the temperature measurement of the radiation thermometer, infrared light with little attenuation in the air is used. However, when the distance from the measurement point to the radiation thermometer is large, or when there is a glass window in the middle, etc. Attenuation cannot be ignored. Therefore, accurate measurement of the temperature by the radiation thermometer cannot be expected unless the emissivity and the attenuation rate are accurately grasped.

The present invention has been made in view of such circumstances, and enables temperature measurement at a high temperature by utilizing a diffusion phenomenon and an oxidation phenomenon. The position can be set finely, and by selecting the appropriate alloy material and diffusion pair, the atmosphere such as oxidation or inertness can be freely selected, and the temperature can be measured without limitation of the applicable temperature range. It is an object of the present invention to provide a temperature sensor having no problem even if a target is a moving object such as a rotating body, a method of manufacturing the temperature sensor, and an alarm device using the sensor.

[0009]

According to a first aspect of the present invention, there is provided a temperature sensor comprising a diffusion pair formed by laminating two layers of alloy materials having different compositions. It is characterized in that a physical quantity that can be converted to the thickness of the formed interdiffusion layer is measured, and the heating temperature is estimated based on the measured value.

According to a second aspect of the present invention, in the temperature sensor according to the first aspect, an electric resistance between a diffusion pair in which two alloy materials having different compositions are stacked is measured, and the electric resistance is formed at the diffusion pair interface. It is characterized in that it is converted into the determined interdiffusion layer thickness.

According to a third aspect of the present invention, in the temperature sensor according to the first aspect, two layers of alloy materials having different compositions selected from alloy materials containing at least one of Ni, Co, Cr, and Fe are provided. It is characterized by using a stacked diffusion pair.

According to a fourth aspect of the present invention, in the temperature sensor according to the first aspect, any one of an atmospheric plasma spraying method and a reduced pressure plasma spraying method is applied as a manufacturing process of the diffusion pair. .

According to a fifth aspect of the present invention, in the temperature sensor of the first aspect, a physical quantity that can be converted into a thickness of an oxide layer formed on the surface of the alloy material is measured, and an oxidizing atmosphere is measured based on the measured value. Is characterized by estimating the heating temperature at.

According to a sixth aspect of the present invention, in the temperature sensor of the fifth aspect, the mass of the alloy material is measured by a balance,
It is characterized in that the oxidation increase of the mass of the alloy material is converted into an oxide layer thickness.

According to a seventh aspect of the present invention, in the temperature sensor according to the fifth aspect, the strain on the alloy material surface due to the growth of the surface oxide layer is measured by a gauge, and the measured value is converted into an oxide layer thickness. Features.

According to an eighth aspect of the present invention, in the temperature sensor according to the fifth aspect, the displacement of the alloy material surface due to the growth of the surface oxide layer is measured by a displacement meter, and the measured value is converted into an oxide layer thickness. It is characterized by.

According to a ninth aspect of the present invention, in the temperature sensor of the eighth aspect, an alloy material selected from alloy materials containing at least one of Ni, Co, Cr, and Fe is used. .

[0018] The alarm device according to the tenth aspect of the present invention,
A temperature sensor according to claim 5, which is mounted around a high temperature component of a gas turbine, such as a combustor, a moving blade, a stationary blade, and the like, and when a temperature rise exceeds an allowable temperature, an alarm is issued based on a detection output of the temperature sensor. Operating the machine.

The temperature sensor according to the eleventh aspect of the present invention is a temperature sensor comprising a diffusion pair formed by stacking two layers of alloy materials having different compositions selected from alloy materials containing at least one of Ni, Co, Cr and Fe. The heating temperature and the heating time are both estimated based on the thickness of at least two interdiffusion layers formed at the diffusion pair interface.

According to a twelfth aspect of the present invention, there is provided a temperature sensor comprising at least three layers of alloy materials having different compositions selected from alloy materials containing at least one of Ni, Co, Cr and Fe. And the heating temperature and the heating time are both estimated from the thickness of the interdiffusion layer at the diffusion pair interface.

According to a thirteenth aspect of the present invention, there is provided a temperature sensor comprising a diffusion pair in which two layers of alloy materials having different compositions are stacked, the thickness of an interdiffusion layer at the interface between the diffusion pair and the thickness of an oxide layer at the surface of the alloy material. It is characterized by estimating both the heating temperature and the heating time from.

According to a fourteenth aspect of the present invention, there is provided a temperature sensor comprising two layers of alloy materials having different compositions selected from alloy materials containing at least one of Ni, Co, Cr and Fe. And the heating temperature and the heating time are both estimated from the thickness of the interdiffusion layer and the thickness of the oxide layer at the diffusion pair interface.

According to a fifteenth aspect of the present invention, there is provided a method for manufacturing a temperature sensor, wherein a plate material selected from an alloy material containing at least one of Ni, Co, Cr and Fe has a composition different from that of the plate material. A powder of an alloy material containing at least one of different Ni, Co, Cr, and Fe is coated by a gas flame spraying method or a plasma spraying method.

As described above, the temperature sensor according to the present invention applies the diffusion phenomenon, mainly the diffusion phenomenon of the alloy material to the interdiffusion phenomenon at the interface and the oxidation phenomenon on the alloy material surface. Here, for real-time temperature measurement, it is necessary to measure a physical quantity that can be converted into a diffusion layer thickness or an oxide layer thickness. In order to repeatedly measure the temperature, it is also important to select a method that does not destroy the alloy material (for example, observation of a cross-sectional structure using an optical microscope) as a method for measuring the physical quantity.

In the present invention, the thickness of the diffusion layer is estimated based on the change in the electric resistance between the diffusion pair accompanying the growth of the diffusion layer, and the thickness of the oxide layer is estimated from the change in volume and the increase in the oxidation accompanying the growth of the oxide layer. Alternatively, the thickness of the diffusion layer or the thickness of the oxide layer is estimated from the results of observation of the cross-sectional structure and weight measurement. Therefore, in principle, any system that causes interdiffusion or surface oxidation can be used as a temperature sensor. However, in practice, the thickness is 10 to 500 μm, which is easy to observe with an optical microscope.
It is convenient to select an interdiffusion layer, a diffusion couple in which an oxide layer is generated in the temperature range of measurement, or an alloy material. It is not necessary to increase the size of the diffusion pair or alloy material used as the main body of the temperature sensor thus selected, and temperature measurement can be performed even if the size is reduced to 1 to 2 mm. By using such a small diffusion pair or alloy that does not affect the surroundings, it is possible not only to freely select the temperature measurement location, but also to finely set the temperature measurement location.

Further, by selecting an appropriate alloy or diffusion pair, an atmosphere such as oxidation or inertness can be freely selected, and the limitation of the applicable temperature range can be reduced. Furthermore, if the temperature sensor is removed from the measurement target at regular intervals and the above-described method of measuring the physical quantity is adopted,
Since a cable necessary for the thermocouple is not required, the temperature of a moving object such as a rotating body can be measured.

[0027]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows an embodiment of the temperature sensor according to the present invention. As shown in the figure, this temperature sensor comprises diffusion pairs 1 and 1 in which two kinds of alloy materials having different compositions are laminated, and an interdiffusion layer 2 formed at the interface between the diffusion pairs 1 and 1.
The heating temperature is estimated from the thickness w.

[0029] The diffusion phenomenon is usually critically influenced by the heating temperature. This is due to the fact that the diffusion phenomenon is a thermal activation process, and its temperature dependence can be arranged in an Arrhenius type. Further, considering that the thickness of the interdiffusion layer 2 is proportional to the square root of the heating time from the parabolic side regarding the diffusion phenomenon, the thickness w of the interdiffusion layer 2 can be expressed by the following equation.

[0030]

(Equation 1) Here, T is a heating temperature, t is a heating time, k0 and c are experimental constants.

Now, when the equation (1) is differentiated with respect to time, the following equation (2) is obtained.

[0032]

(Equation 2) When the equation (2) is further arranged by the temperature T, the following equation (3) is derived.

[0033]

(Equation 3) If the experimental constants k0 and c are obtained in advance by a diffusion experiment, the diffusion layer thickness w and the rate of change dw / dt are obtained.
From this, it is possible to estimate the heating temperature. Equation (3)
Is the basic expression for estimating the heating temperature in the present invention.

FIG. 2 shows another embodiment of the present invention. That is, a temperature sensor is configured by utilizing an oxidation phenomenon in addition to the diffusion-interfacial mutual diffusion phenomenon. This temperature sensor estimates the heating temperature in an oxidizing atmosphere from the thickness of the oxide layer 4 on the surface of the alloy material 3. Also in this embodiment, similarly to the temperature sensor using the diffusion pairs 1 and 1, the heating temperature is estimated based on Expression (3). However, in this case, w in the equation (3) is the thickness of the oxide layer.

FIG. 3 shows still another embodiment of the present invention. In this embodiment, as shown in FIG. 3, a temperature sensor is configured to measure the temperature by measuring the electric resistance at both ends of the diffusion pairs 1 and 1 each composed of a two-layer laminate. As shown in the figure, this temperature sensor connects a constant voltage power supply 5 and an ammeter 6 in series with the diffusion pairs 1 and 1, and measures the electric resistance between the diffusion pairs 1 and 1. The characteristic of this temperature sensor is that, as shown in FIG. 4, the electric resistance R changes according to the thickness w of the interdiffusion layer 2 generated at the interface between the diffusion pairs. The increase in electric resistance is proportional to the increase in entropy accompanying the growth of the diffusion layer, and is a generally observed phenomenon. In this embodiment, a material system having a large rate of change in electrical resistance accompanying the growth of the interdiffusion layer 2, ie, Ni,
A diffusion pair was selected from an alloy material containing at least one of Co, Cr, and Fe. Using this characteristic, the thickness of the interdiffusion layer can be estimated by measuring the electric resistance.

Next, an embodiment of a method of manufacturing a diffusion pair which is a main body of a temperature sensor according to the present invention will be described with reference to FIG. FIG. 5 is an explanatory diagram showing the manufacturing method. In this embodiment, any one of the atmospheric plasma spraying method, the gas flame plasma spraying method, and the reduced pressure plasma spraying method is applied to the manufacture of the diffusion pair of the temperature sensor. Specifically, first, Ni, C
A plate material 7 (FIG. 5A) selected from an alloy material containing at least one of o, Cr, and Fe is prepared.
Surface is roughened by blasting (FIG. 5 (b)), and thereafter, powder 8 of an alloy material containing at least one of Ni, Co, Cr and Fe having a composition different from that of the plate material 7 is sprayed with atmospheric plasma. Coating by any one of the plasma spraying method, gas flame plasma spraying method, and reduced pressure plasma spraying method (FIG. 5).
(C)).

In the method of the present embodiment, the temperature rise during the manufacturing is reduced by 150 to 50 compared to other manufacturing methods (diffusion heat treatment, brazing, etc.) by employing the above-described low-temperature process.
It can be kept as low as 0 ° C. That is, since the initial thickness of the diffusion layer 2 can be reduced as compared with the thickness at the time of heating, the error included in the estimated temperature at the time of heating can be suppressed to a small value.

Also, the adhesion between the diffusion pairs is as high as other manufacturing methods, and no oxide layer is formed at the diffusion layer interface during the production of the diffusion pairs. It won't be.

FIG. 6 shows the respective chemical compositions of the two-layer stacked diffusion pair manufactured as an example of the temperature sensor according to the present embodiment. Here, a temperature sensor was used, in which one alloy had the composition shown in (a) of the table of FIG. 6 and the other alloy had the diffusion pair (b) of the table as the main body. Equation (1) showing the diffusion layer behavior in this temperature sensor, ie,

(Equation 4) Among them, k0 = 6.3 m / (s1 / ² ), c = 1.8 × 10
It has been confirmed from the diffusion experiments a ⁴ K. Assuming a maximum heating time of 24000 hours, the operating temperature range of this thermometer is 800 to 1000 ° C. Further, when one of the alloys of the diffusion pair is fixed to one having the composition shown in FIG. 6A and the composition of the other alloy is changed, the experimental constant k0,
The value of c changes. For example, the values of the experimental constants k0 and c when the composition of the other alloy is (c) to (e) in the table of FIG. 6 are summarized in the table of FIG. Naturally, the operating temperature range changes with the change in the values of the experimental constants k0 and c. Thus, by using several types of diffusion pairs, the measurement temperature range can be set to 800 to
It can be widely covered at 1400 ℃.

FIG. 4 shows the relationship between the thickness of the diffusion layer and the electrical resistance (specific resistance). This relationship is shown by (a) and (b) in the table shown in FIG.
Is a characteristic of a diffusion pair made of a material having the following composition. Since the thickness of the diffusion layer is several tens to several hundreds μm, the thickness of the diffusion pair is 1
mm is desirable. In addition, since the temperature drift of the electric resistance is about 10 times larger than the change of the electric resistance due to the growth of the thickness of the diffusion layer, the electric resistance needs to be measured after the diffusion pair is removed from the object to be measured. The diffusion pair removed from the measurement target is sandwiched between electrodes (copper). At this time, a conductive paste is applied to the surface of the electrode to reduce the contact resistance, so that the contact area between the electrode and the diffusion pair can be reduced to about 10 mm ² .

However, in order to increase the accuracy, it is preferable to increase the contact area. As described above, the shape of the diffusion pair can be reduced to between 10 mm ² × 1 mmt, and no electrical connection is required, so that the temperature measurement location can be freely selected and the temperature measurement location can be set finely. It is also possible. It is also possible to measure the temperature of a moving object such as a rotating body.

FIG. 8 shows another embodiment of the temperature sensor according to the present invention, in which the mass of the alloy material 3 is measured by a balance 9 and the oxidized increase of the mass accompanying the growth of the oxide layer 4 formed on the surface is measured. Shows the configuration of a temperature sensor for measuring the temperature. In this embodiment, the generated oxide layer 4 is made of the alloy material 3
Material system that is difficult to peel off from the surface, that is, Ni, Co, C
Alloy materials were selected from materials containing at least one of r and Fe. By polishing the surface of the alloy material in advance, the initial thickness of the oxide layer 4 can be reduced, and the error included in the estimated temperature at the time of heating can be reduced.

FIG. 16 shows a chemical composition of an alloy material manufactured as an example of another embodiment of the temperature sensor according to the present invention. Equation (1) showing the diffusion layer behavior in this temperature sensor, ie,

(Equation 5) Among them, k0 = 10.2 m / (s1 / ² ), c = 2.0 × 10 ⁴ K
Was confirmed from the diffusion experiment. Assuming a maximum heating time of 24000 hours, the operating temperature range of this temperature sensor is 800 to 1000 ° C. Furthermore, by using several kinds of alloy materials having different compositions, the operating temperature range is 800 to 14
It can be extended to 00 ° C.

FIG. 9 shows the relationship between the oxide layer thickness and the increase in oxidation. From the viewpoint of ease of handling, the thickness of the alloy material is preferably about several mm. In addition, the oxidation increase can be measured even when it is not removed from the object to be measured, and can be measured even when it is removed from the object to be measured. Considering the measurement limit of the scale, the size of the alloy material can be reduced to about 10 mm ² . However, it is desirable to increase the alloy material in order to increase the accuracy. As described above, since the shape of the diffusion pair can be reduced between 10 mm ² × 1 mmt, the temperature measurement location can be freely selected and the temperature measurement location can be set finely. Also, the temperature measurement of a moving object such as a rotating body is also possible only when removing the measurement object and measuring the oxidation increase.

The above-described temperature sensor according to the present invention is specifically mounted around a high-temperature component of a gas turbine, that is, around a combustor, a moving blade, a stationary blade, or the like. The present invention can be applied to an alarm device that activates an alarm. Thereby, the reliability of the gas turbine and the like can be improved as compared with the related art.

Next, still another embodiment of the temperature sensor according to the present invention will be described with reference to FIGS. Figure 10
FIG. 12 is a diagram showing a sensor configuration. As shown in these figures, a case is considered in which two layers at the same time clearly show the dependence of the heating temperature and the heating time on the thickness.

For example, as shown in FIG.
There is an interdiffusion layer 12 at the interface of
In the case where there is an oxide layer 14 on the surface of the diffusion layer, as shown in FIG. 11, when there are two diffusion layers 14 at the interface between the diffusion pairs 10 and 10, and as shown in FIG. This is a case where two interdiffusion layers 12 are provided, one at each of two interfaces of pairs 10 and 10.

The thicknesses w1 and w2 of the two layers described above are:

(Equation 6)

(Equation 7) It can be expressed as. However, k10, k20, c1, c2
Is an experimental constant determined by oxidation and diffusion experiments.
Now, after dividing both sides by k10 and k20, and taking the natural logarithm, equations (4) and (5) are

(Equation 8) And can be transformed. Equations (6) and (7) are two simultaneous equations including unknowns t and T, and the heating time t
And the heating temperature T at the same time.

As an embodiment of the temperature sensor according to the present invention, a temperature sensor having a diffusion pair in which two layers of an alloy containing at least one of Ni, Co, Cr and Fe are stacked.
The feature of this diffusion pair is that a different layer is formed as an interdiffusion layer at the interface of the diffusion pair. That is, the interdiffusion layer can be clearly observed by polishing or etching the sectional structure. Conveniently, an optical microscope is sufficient for such observations.

FIG. 15 shows a method for manufacturing a diffusion pair constituting the temperature sensor shown in FIGS. As shown in FIG. 15, it is effective to use thermal spraying such as gas flame spraying or plasma spraying for manufacturing. In particular,
First, the surface of a plate material 6 (FIG. 15A) selected from an alloy material containing at least one of Ni, Co, Cr, and Fe is roughened by blasting (FIG. 15B). A powder 7 of an alloy material containing at least one of Ni, Co, Cr, and Fe having a different composition from that of the powder 6 is coated by a gas flame spraying method or a plasma spraying method (FIG. 15).
(C)). In the present embodiment, compared to other manufacturing methods (diffusion heat treatment, brazing, etc.), the temperature rise during the manufacturing is reduced by 150 to 500 ° C. by employing the above-described low-temperature process.
And can be kept low. Since the initial interdiffusion layer thickness or the oxide layer thickness can be made smaller than the thickness at the time of heating, the error included in the estimated heating temperature is small. Also, the adhesion between the diffusion pairs is as high as in other manufacturing methods, and no oxide layer is formed at the diffusion layer interface during the production of the diffusion pairs, so that the diffusion pair interface does not hinder mutual diffusion.

As another example of the embodiment of the temperature sensor according to the present invention, at least one of Ni, Co, Cr and Fe
The above-described diffusion couple in which two layers of alloys containing seeds are stacked is exemplified. Here, one alloy of the diffusion pair has a composition shown in (a) of the table shown in FIG. 13, and the other alloy has a composition shown in (b) of the table shown in FIG. In this temperature sensor, equation (1), that is,

(Equation 9) K0 and c in are 6.3 m / (s ^1/2 ) and 1.8 × 10 ⁴ K. However, k0 and c are obtained from a diffusion experiment. Assuming a maximum heating time of 24000 hours, the operating temperature range of this thermometer is 800 to 1000 ° C.

Further, when one alloy of the diffusion pair is fixed to the composition shown in FIG. 13A and the composition of the other alloy is changed, the experimental constants k0 and c in the equation (1) are obtained. Changes. For example, the composition of the alloy is shown in FIG.
FIG. 14 shows k0 and c in the case of (e). Naturally k0
, C, the operating temperature range also changes. By using a temperature sensor composed of several types of diffusion pairs in this manner, the measurement temperature range can be extended to 800 to 1400 ° C. The melting point of the above alloy is at most 1600 ° C., and the upper limit of the temperature that can be used as a temperature sensor is 1400 ° C.

[0053]

As described in detail above, according to the temperature sensor of the present invention, the diffusion phenomenon, mainly the diffusion of the alloy material, the interdiffusion phenomenon at the interface and the oxidation phenomenon on the alloy material surface are applied. It has the following advantages over thermocouples and radiation thermometers that are conventional thermometers. That is,
(1) The temperature measurement location can be freely selected.
(2) The temperature measurement position can be set finely. (3) By selecting an appropriate alloy material and a diffusion pair, an atmosphere such as oxidation or inertness can be freely selected. (4) It is possible to eliminate the limitation of the applicable temperature range. (5) There is no problem even if the temperature measurement target is a moving object such as a rotating body.

According to the method of manufacturing a temperature sensor according to the present invention, the above-described temperature sensor can be manufactured effectively.

Further, according to the alarm device of the present invention,
An accurate alarm is generated based on the detection value of the temperature sensor, which can contribute to improvement in reliability of, for example, a gas turbine.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing an embodiment of a temperature sensor using a mutual diffusion phenomenon according to the present invention.

FIG. 2 is a configuration diagram showing an embodiment of a temperature sensor using an oxidation phenomenon according to the present invention.

FIG. 3 is a configuration diagram showing another embodiment of the temperature sensor according to the present invention.

FIG. 4 is a characteristic diagram showing a relationship between a diffusion layer thickness and electric resistance of the temperature sensor shown in FIG.

FIGS. 5A, 5B, and 5C are explanatory views showing a temperature sensor manufacturing method according to the present invention.

FIG. 6 is a table showing respective chemical compositions of two-layer stacked diffusion pairs manufactured as an embodiment of the temperature sensor according to the present invention.

7 is a table showing the relationship between each diffusion pair and the values of the experimental constants k0 and c in Equation (1) when a combination of each alloy in the table shown in FIG. 6 is applied as a diffusion pair.

FIG. 8 is a configuration diagram showing another embodiment of the temperature sensor according to the present invention.

9 is a characteristic diagram showing a relationship between an oxide layer thickness and an increase in oxidation of the temperature sensor shown in FIG.

FIG. 10 is a configuration diagram showing another embodiment of the temperature sensor according to the present invention.

FIG. 11 is a configuration diagram showing another embodiment of the temperature sensor according to the present invention.

FIG. 12 is a configuration diagram showing another embodiment of the temperature sensor according to the present invention.

FIG. 13 is a table showing respective chemical compositions of two-layer stacked diffusion pairs manufactured as an embodiment of the temperature sensor according to the present invention.

FIG. 14 shows each diffusion pair and equation (1) when a combination of each alloy in the table shown in FIG. 13 is applied as a diffusion pair.
Is a table showing the relationship between the experimental constants k0 and c of FIG.

FIGS. 15 (a), (b) and (c) are explanatory views showing a method for manufacturing a diffusion pair of the temperature sensor according to the present invention.

FIG. 16 is a table showing a chemical composition of an alloy material manufactured as another embodiment of the temperature sensor according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Diffusion pair 2 Interdiffusion layer 3 Alloy material 4 Oxidation layer 5 Constant voltage power supply 6 Ammeter 7 Plate 8 Sprayed powder 9 Scale 10 Diffusion pair 12 Interdiffusion layer 14 Oxidation layer

 ──────────────────────────────────────────────────の Continued on the front page (72) Inventor Masahiro Saito 2-4, Suehirocho, Tsurumi-ku, Yokohama-shi, Kanagawa Inside Toshiba Keihin Works

Claims (15)

[Claims] 1. A diffusion pair comprising two layers of alloy materials having different compositions stacked on each other, a physical quantity that can be converted into a thickness of an interdiffusion layer formed at the interface of the diffusion pair is measured, and a heating temperature is calculated based on the measured value. A temperature sensor for estimating the temperature. 2. The method according to claim 1, further comprising measuring an electric resistance between a diffusion pair in which two alloy materials having different compositions are stacked, and converting the electric resistance into a thickness of an interdiffusion layer formed at the interface between the diffusion pair. The temperature sensor according to claim 1. 3. A diffusion pair comprising two layers of alloy materials having different compositions selected from alloy materials containing at least one of Ni, Co, Cr and Fe. Temperature sensor. 4. The temperature sensor according to claim 1, wherein one of an atmospheric plasma spraying method and a reduced pressure plasma spraying method is applied as a manufacturing process of the diffusion pair. 5. A temperature sensor which measures a physical quantity which can be converted into a thickness of an oxide layer formed on a surface of an alloy material, and estimates a heating temperature in an oxidizing atmosphere based on the measured value. 6. The temperature sensor according to claim 5, wherein the mass of the alloy material is measured by a balance, and the oxidation increase of the mass of the alloy material is converted into an oxide layer thickness. 7. The temperature sensor according to claim 5, wherein a strain on the surface of the alloy material due to the growth of the surface oxide layer is measured by a gauge, and the measured value is converted into an oxide layer thickness. 8. The temperature sensor according to claim 5, wherein a displacement of the surface of the alloy material due to the growth of the surface oxide layer is measured by a displacement meter, and the measured value is converted into an oxide layer thickness. 9. The temperature sensor according to claim 8, wherein an alloy material selected from alloy materials containing at least one of Ni, Co, Cr, and Fe is used. 10. A temperature sensor according to claim 5, which is mounted around a high temperature component of a gas turbine, such as a combustor, a moving blade, a stationary blade, and the like, and detects the temperature sensor when the temperature rise exceeds an allowable temperature. An alarm device for operating an alarm based on an output. 11. A diffusion pair formed by laminating two layers of alloy materials having different compositions selected from alloy materials containing at least one of Ni, Co, Cr, and Fe, and at least two layers at the interface of the diffusion pair. A temperature sensor for estimating both a heating temperature and a heating time based on a thickness of a formed interdiffusion layer. 12. A diffusion pair comprising at least three stacked layers of alloy materials having different compositions selected from alloy materials containing at least one of Ni, Co, Cr, and Fe,
A temperature sensor that estimates both the heating temperature and the heating time from the thickness of the interdiffusion layer at the diffusion pair interface. 13. A diffusion pair comprising two layers of alloy materials having different compositions, and the heating temperature and the heating time are both estimated from the thickness of the interdiffusion layer at the interface of the diffusion pair and the thickness of the oxide layer on the surface of the alloy material. A temperature sensor, characterized in that: 14. A diffusion pair formed by laminating two layers of alloy materials having different compositions selected from alloy materials containing at least one of Ni, Co, Cr, and Fe, and an interdiffusion layer at an interface of the diffusion pair. A temperature sensor for estimating both a heating temperature and a heating time from a thickness and an oxide layer thickness. 15. On a plate material selected from alloy materials containing at least one of Ni, Co, Cr, and Fe,
A method of manufacturing a temperature sensor, comprising coating a powder of an alloy material containing at least one of Ni, Co, Cr, and Fe having a different composition from the plate material by a gas flame spraying method or a plasma spraying method.