JPH10277860A - Structure of valve of adsorptive type table - Google Patents

Structure of valve of adsorptive type table

Info

Publication number
JPH10277860A
JPH10277860A JP10276097A JP10276097A JPH10277860A JP H10277860 A JPH10277860 A JP H10277860A JP 10276097 A JP10276097 A JP 10276097A JP 10276097 A JP10276097 A JP 10276097A JP H10277860 A JPH10277860 A JP H10277860A
Authority
JP
Japan
Prior art keywords
suction
recess
concave portion
type table
blind lid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10276097A
Other languages
Japanese (ja)
Inventor
Hiroshi Kawase
宏 川瀬
Koichi Hocchi
康一 発知
Hisayoshi Sato
尚義 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
YASAKA TEKKO KK
Original Assignee
YASAKA TEKKO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by YASAKA TEKKO KK filed Critical YASAKA TEKKO KK
Priority to JP10276097A priority Critical patent/JPH10277860A/en
Publication of JPH10277860A publication Critical patent/JPH10277860A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To mount and dismantle a blind lid quickly to/from a recess into which the lid is fitted, of a suction hole and increase the suction attachment force for a work piece to be processed through enlargement of the suction area of each suction hole. SOLUTION: A table 10 of an adsorptive type is provided at a specified pitch with step-form suction holes 12 which has internally a negative pressure chamber 11 and has a large diametric recess 12a and a small diametric communication hole 12b in the upper and lower parts of the upper wall 10a, and a blind lid 14 is fitted removably into the recess 12a. In this valve structure of the suction type table, the oversurface of the upper wall 10a is equipped with an operating recessed part 13 extending outward in the radial direction from the periphery of the recess 12a.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、板材等の被加工物
をテーブルの上面に吸引保持する吸着型テーブルの弁部
の構造に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure of a valve portion of a suction type table for holding a workpiece such as a plate material on an upper surface of the table by suction.

【0002】[0002]

【従来の技術】従来の技術として、図11〜図13に示
すものがあった。図11において、1は内部に負圧室2
を有するテーブルであり、その上部壁1aに負圧室2と
連通する多数の吸引孔4を所定ピッチで形成する。各吸
引孔4は上部に大径の凹部4aを有する段付き孔に形成
する。上記凹部4aに円板状の盲蓋5を着脱可能に嵌合
させる。この盲蓋5は、凹部4aの内径よりも若干小径
にかつ該凹部4aの深さよりも若干薄く形成し、図12
及び図13に示すように、金属板等の磁性体からなる主
体5aの下面にスポンジ等のシート5bを固着してな
る。3は吸引ブロワ(図示省略)に接続される接続口で
ある。
2. Description of the Related Art FIGS. 11 to 13 show a conventional technique. In FIG. 11, reference numeral 1 denotes a negative pressure chamber 2 inside.
A plurality of suction holes 4 communicating with the negative pressure chamber 2 are formed at a predetermined pitch in an upper wall 1a of the table. Each suction hole 4 is formed as a stepped hole having a large-diameter concave portion 4a at the top. A disc-shaped blind lid 5 is detachably fitted into the recess 4a. The blind lid 5 is formed to have a slightly smaller diameter than the inner diameter of the concave portion 4a and slightly smaller than the depth of the concave portion 4a.
As shown in FIG. 13, a sheet 5b such as a sponge is fixed to the lower surface of a main body 5a made of a magnetic material such as a metal plate. Reference numeral 3 denotes a connection port connected to a suction blower (not shown).

【0003】そして、上記各吸引孔4のうち、被加工物
Wと対面する所定の吸引孔4−1は盲蓋5を除去してこ
れを開口させ、残余の吸引孔4−2はその凹部4aに盲
蓋5を嵌合させてこれを閉塞する。この状態で吸引ブロ
ワを作動させ、上記吸引孔4−1を介して被加工物Wを
吸着保持する。
[0003] Of the suction holes 4, a predetermined suction hole 4-1 facing the workpiece W removes the blind lid 5 and opens it, and the remaining suction hole 4-2 has a concave portion. The blind lid 5 is fitted to 4a and closed. In this state, the suction blower is operated to suck and hold the workpiece W through the suction hole 4-1.

【0004】[0004]

【発明が解決しようとする課題】上記従来のものは、盲
蓋5の外径が吸引孔4の凹部4aの内径に接近していた
ので、この盲蓋5に指を掛けて凹部4aから離脱させる
ことができず、磁石付きの工具(図示省略)で盲蓋5を
吸着して凹部4aから離脱させるようにしていた。この
ため、特殊な工具を要するとともに、盲蓋5の凹部4a
からの離脱作業が迅速にできない欠点があった。また、
小さな塵埃(切り屑)が盲蓋5の外周と凹部4aの内周
との間に介入すると、盲蓋5が凹部4aから離脱し難く
なる欠点があった。さらに、盲蓋5の大きさは、取り扱
い等の関係で大きさが限定され、吸引孔4の凹部4aの
面積、即ち吸引孔4の1個当たりの吸引力を大きくする
ことができず、テーブル1の単位面積当たりの吸引力を
所定値に保持するためには、吸引孔4の個数を増す必要
があり、盲蓋5の数量が増えてこれの着脱作業に手数を
要する欠点があった。本発明は上記欠点を解消した新規
な吸着型テーブルの盲蓋部の構造を得ることを目的とす
る。
In the prior art, the outer diameter of the blind cover 5 was close to the inner diameter of the concave portion 4a of the suction hole 4, and the finger was put on the blind cover 5 to separate from the concave portion 4a. In this case, the blind lid 5 is attracted by a tool with a magnet (not shown) to be separated from the recess 4a. For this reason, a special tool is required, and the recess 4a of the blind lid 5 is required.
There was a drawback that the operation of detaching from the vehicle could not be performed quickly. Also,
When small dust (swarf) intervenes between the outer periphery of the blind lid 5 and the inner periphery of the recess 4a, there is a disadvantage that the blind cover 5 is hard to be detached from the recess 4a. Further, the size of the blind lid 5 is limited due to handling and the like, and the area of the concave portion 4a of the suction hole 4, that is, the suction force per suction hole 4 cannot be increased. In order to maintain the suction force per unit area at a predetermined value, it is necessary to increase the number of suction holes 4, and the number of blind lids 5 is increased, so that there is a disadvantage that the work of attaching and detaching the blind lids is troublesome. SUMMARY OF THE INVENTION It is an object of the present invention to obtain a novel structure of a blind lid portion of a suction-type table which has solved the above-mentioned disadvantages.

【0005】[0005]

【課題を解決するための手段】本発明は上記目的を達成
するために、以下の如く構成したものである。即ち、内
部に負圧室を有し、上部壁に大径の凹部と小径の連通口
とを上下に有する段状の吸引孔を所定ピッチで明けてな
る吸着型のテーブルを設け、前記各吸引孔の凹部に盲蓋
を着脱可能に嵌合させてなる吸着型テーブルの弁部の構
造において、前記上部壁の上面に前記凹部の外周から半
径方向外方に延出する操作凹部を設ける構成にしたもの
である。前記操作凹部の深さは、吸引孔の凹部よりも浅
くかつ凹部に嵌合された盲蓋の上面よりも低位置にする
とよい。また、前記操作凹部は、前記凹部の外周の一部
から半径方向外方に延出させて形成してもよく、あるい
は凹部の外周の略全域から該凹部と同芯状に半径方向外
方に延出させて形成してもよい。また、前記盲蓋の外周
の上部に前記操作凹部方向に突出する指掛け部を設ける
とよく。さらに、前記盲蓋の中心部に下方に突出して前
記吸引孔の連通口に嵌合する栓部を設けるとよい。
Means for Solving the Problems In order to achieve the above object, the present invention is configured as follows. That is, there is provided a suction-type table having a negative pressure chamber therein, and a stepped suction hole having a large-diameter concave portion and a small-diameter communication port formed in the upper wall at upper and lower sides at predetermined pitches, and the suction type table is provided. In the structure of the valve portion of the suction type table in which the blind lid is detachably fitted in the concave portion of the hole, an operation concave portion extending radially outward from the outer periphery of the concave portion is provided on the upper surface of the upper wall. It was done. Preferably, the depth of the operation concave portion is shallower than the concave portion of the suction hole and lower than the upper surface of the blind lid fitted in the concave portion. Further, the operation concave portion may be formed so as to extend radially outward from a part of the outer periphery of the concave portion, or radially outward coaxially with the concave portion from substantially the entire outer periphery of the concave portion. It may be formed by extending. In addition, it is preferable to provide a finger hook protruding in the direction of the operation concave portion at an upper portion of the outer periphery of the blind lid. Further, it is preferable to provide a stopper that projects downward at the center of the blind lid and fits into the communication port of the suction hole.

【0006】[0006]

【発明の実施の形態】以下本発明の実施例を図面に基い
て説明する。図において、図1は本発明の第1実施例を
示す要部断面図、図2は図1の平面図、図3本発明の第
2実施例を示す要部断面図、図4は図3の平面図、図5
は本発明の第3実施例を示す要部断面図、図6は図5の
平面図、図7は本発明による盲蓋の第1実施例を示す側
面図、図8は図7の平面図、図9は本発明による盲蓋の
第2実施例を示す側面図、図10は本発明による盲蓋の
第3実施例を示す側面図である。
Embodiments of the present invention will be described below with reference to the drawings. 1 is a sectional view of a main part showing a first embodiment of the present invention, FIG. 2 is a plan view of FIG. 1, FIG. 3 is a sectional view of a main part showing a second embodiment of the present invention, and FIG. Plan view, FIG. 5
FIG. 6 is a sectional view of a main part showing a third embodiment of the present invention, FIG. 6 is a plan view of FIG. 5, FIG. 7 is a side view showing a first embodiment of a blind lid according to the present invention, and FIG. FIG. 9 is a side view showing a second embodiment of the blind lid according to the present invention, and FIG. 10 is a side view showing a third embodiment of the blind lid according to the present invention.

【0007】図1〜図2において、10は内部に負圧室
11が形成されたテーブルであり、負圧室11は底部壁
に明けた接続口11aを介してブロワー(図示省略)の
吸引側に接続されている。上記テーブル10の上部壁1
0aに外部から負圧室11に連通する吸引孔12を所定
のピッチで多数形成する。各吸引孔12は大径かつ円形
の凹部12aと小径かつ円形の連通口12bとを上下に
同芯に有する段付き孔に形成する。
1 and 2, reference numeral 10 denotes a table in which a negative pressure chamber 11 is formed. The negative pressure chamber 11 is connected to a suction port of a blower (not shown) through a connection port 11a opened in a bottom wall. It is connected to the. Upper wall 1 of the table 10
At 0a, a large number of suction holes 12 communicating with the negative pressure chamber 11 from outside are formed at a predetermined pitch. Each suction hole 12 is formed as a stepped hole having a large-diameter and circular concave portion 12a and a small-diameter and circular communication port 12b vertically concentric.

【0008】上記凹部12aの外周部に作業者の指が嵌
入できる操作凹部13を形成する。この操作凹部13
は、上記凹部12aよりも若干浅くするとともに、図1
〜図2に示すように、凹部12aの外周の右半部から右
方に延出させて形成する。そして、上記凹部12aに円
板状の盲蓋14を着脱可能に嵌合させる。この盲蓋14
は、金属板からなる主体14aの下面にスポンジ等、軟
質性のシート15を固着してなり、凹部12aの内径よ
りも若干小径にかつ該凹部12aの深さよりも若干薄く
形成し、凹部12aに嵌合させた際に主体14aの上部
が操作凹部13の底面よりも上方に位置するようにす
る。
An operation recess 13 into which a worker's finger can be fitted is formed on the outer periphery of the recess 12a. This operation recess 13
Is slightly shallower than the recess 12a, and
As shown in FIG. 2, it is formed to extend rightward from the right half of the outer periphery of the concave portion 12a. Then, a disc-shaped blind cover 14 is detachably fitted into the recess 12a. This blind lid 14
Is formed by fixing a soft sheet 15, such as a sponge, to the lower surface of a main body 14a made of a metal plate. The upper portion of the main body 14a is positioned above the bottom surface of the operation concave portion 13 when fitted.

【0009】そして、上記各吸引孔12のうち、被加工
物Wと対面する所定の吸引孔12−1は盲蓋14を除去
してこれを開口させ、残余の吸引孔12−2はその凹部
12aに盲蓋14を嵌合させてこれを閉塞する。この場
合、吸引孔12−1から盲蓋14を除去する際には、吸
引孔12−1の操作凹部13に指を入れ、この部から該
当する盲蓋14の上縁部に指を掛けて該盲蓋14を凹部
12aから離脱させる。上記各吸引孔12の開閉作業か
終了した後、吸引ブロワを作動させ、負圧室11内の負
圧を吸引孔12−1を介して上記被加工物Wに作用さ
せ、該被加工物Wを吸着する。この場合、吸引孔12−
1の吸引面積は、凹部12aと操作凹部13との和とな
り、被加工物Wの吸着力が増すことになる。
[0009] Of the above-mentioned suction holes 12, a predetermined suction hole 12-1 facing the workpiece W removes the blind cover 14 and opens it, and the remaining suction holes 12-2 are recessed. A blind lid 14 is fitted to 12a and closed. In this case, when removing the blind cover 14 from the suction hole 12-1, a finger is put into the operation concave portion 13 of the suction hole 12-1, and a finger is put on the upper edge of the corresponding blind cover 14 from this portion. The blind lid 14 is detached from the recess 12a. After the opening / closing operation of the suction holes 12 is completed, the suction blower is operated to apply the negative pressure in the negative pressure chamber 11 to the workpiece W through the suction holes 12-1. To adsorb. In this case, the suction hole 12-
The suction area of 1 is the sum of the concave portion 12a and the operation concave portion 13, and the suction force of the workpiece W is increased.

【0010】図3及び図4は第2実施例を示す。このも
のは、操作凹部13を吸引孔12の凹部12aよりも若
干浅くするとともに、該凹部12a外周の全域から該凹
部12aと同芯状に半径方向外方に延出させて形成す
る。また、上記凹部12aに着脱可能に嵌合する盲蓋1
4は、図7に示すように、主体14a外周の厚さ方向中
間部に環状溝14bを形成し、該環状溝14bにより主
体14a外周の上部に半径方向外方(操作凹部13方
向)に突出する指掛け部14cを形成する。
FIGS. 3 and 4 show a second embodiment. This is formed by making the operation recess 13 slightly shallower than the recess 12a of the suction hole 12 and extending radially outward from the entire outer periphery of the recess 12a concentrically with the recess 12a. Further, the blind cover 1 detachably fitted in the concave portion 12a.
4, as shown in FIG. 7, an annular groove 14 b is formed at the middle part in the thickness direction of the outer periphery of the main body 14 a, and protrudes outward in the radial direction (in the direction of the operation recess 13) on the outer periphery of the main body 14 a by the annular groove 14 b. The finger hook 14c is formed.

【0011】上記第2実施例によれば、操作凹部13が
吸引孔12の外周部の全域に存在するので、盲蓋14を
除去する際の指の嵌入位置が限定されなくなる。また、
盲蓋14の外周の上部に指掛け部14cが形成されてい
るので、盲蓋14の除去作業がより容易に行なえること
になる。
According to the second embodiment, since the operation concave portion 13 exists in the entire outer peripheral portion of the suction hole 12, the position where the finger is inserted when the blind cover 14 is removed is not limited. Also,
Since the finger hook 14c is formed on the upper part of the outer periphery of the blind lid 14, the work of removing the blind lid 14 can be performed more easily.

【0012】図5及び図6は第3実施例を示す。このも
のは、凹部12aの外周から扇状に広がって半径方向外
方に延出する操作凹部13(13a)を円周方向に4個
形成し、各操作凹部13a間に小幅のリブ10bを形成
する。各操作凹部13aの深さは吸引孔12の凹部12
aよりも若干浅くし、また、各リブ10bの高さはテー
ブル10の上部壁10aと同一高さとする。
FIGS. 5 and 6 show a third embodiment. In this device, four operation recesses 13 (13a) extending in a fan shape from the outer periphery of the recess 12a and extending radially outward are formed in the circumferential direction, and a small width rib 10b is formed between each operation recess 13a. . The depth of each operation concave portion 13a is the concave portion 12 of the suction hole 12.
a, and the height of each rib 10 b is the same as the height of the upper wall 10 a of the table 10.

【0013】また、上記凹部12aに着脱可能に嵌合す
る盲蓋14は、図9に示すように、上記主体14a下面
の中心部に下方に突出して吸引孔12の連通口12bに
嵌合可能の半球状の栓部14dを一体に形成し、主体1
4a外周の厚さ方向中間部に環状溝14bを形成し、該
環状溝14bにより主体14a外周の上部に半径方向外
方(操作凹部13方向)に突出する指掛け部14cを形
成する。
As shown in FIG. 9, the blind cover 14 detachably fitted in the recess 12a is projected downward at the center of the lower surface of the main body 14a so as to be fitted in the communication port 12b of the suction hole 12. Of the main body 1
An annular groove 14b is formed at an intermediate portion in the thickness direction of the outer periphery of 4a, and a finger hook 14c protruding radially outward (toward the operation recess 13) is formed at an upper portion of the outer periphery of the main body 14a by the annular groove 14b.

【0014】上記第3実施例によれば、各操作凹部13
a間に小幅のリブ10bが存在するので、該リブ10b
が被加工物Wの吸着部を支持することになり、薄い被加
工物Wが吸着部で下方に湾曲し難くなる。また、盲蓋1
4の下面に形成した栓部14dが吸引孔12の連通口1
2bに嵌合しているので、エアーガンによる噴出空気に
よってテーブル上の切り屑を除去する際に、凹部12a
に嵌合した盲蓋14が上記噴出空気によって不用意に離
脱しなくなる。また、各操作凹部13aが吸引孔12の
外周部の略全域に存在するので、盲蓋14を除去する際
の指の嵌入位置が限定されなくなるとともに、盲蓋14
の外周の上部に指掛け部14cが形成されているので、
盲蓋14の除去作業がより容易に行なえることになる。
According to the third embodiment, each operation recess 13
a, there is a small width rib 10b between the ribs 10b.
Supports the suction portion of the workpiece W, and the thin workpiece W is less likely to curve downward at the suction portion. In addition, blind cover 1
4 is formed on the lower surface of the communication hole 1 of the suction hole 12.
2b, when removing chips on the table by the air jetted by the air gun, the concave portion 12a
The blind lid 14 fitted to the above is prevented from being inadvertently detached by the jet air. Further, since each of the operation concave portions 13a exists in substantially the entire outer peripheral portion of the suction hole 12, the position where the finger is inserted when the blind cover 14 is removed is not limited.
Is formed at the upper part of the outer periphery of
The operation of removing the blind lid 14 can be performed more easily.

【0015】なお、盲蓋14は、図10に示すように、
円板状の主体14a下面の中心部に連通口12bに嵌合
可能の半球状の栓部14dを一体に形成し、主体14a
外周面を平滑にして指掛け部14cを省略し、主体14
aの下面に軟質性のシート15を固着するようにしても
よい。
The blind lid 14 is, as shown in FIG.
A hemispherical plug 14d that can be fitted into the communication port 12b is integrally formed at the center of the lower surface of the disk-shaped main body 14a, and the main body 14a
The outer peripheral surface is smoothed and the finger hook 14c is omitted,
The soft sheet 15 may be fixed to the lower surface of a.

【0016】[0016]

【発明の効果】以上の説明から明らかな如く、本発明
は、盲蓋が嵌合する吸引孔の凹部の外周に指が嵌合する
操作凹部を設けたので、盲蓋を上記凹部から離脱させる
際に、これを直接手作業で行なえることができ、吸引孔
の開閉作業が迅速に行なえることになる。しかも、吸引
孔の吸引面積は上記凹部と操作凹部との和となり、被加
工物の吸着力が増すことになる。また、盲蓋の外周の上
部に指掛け部を設けるようにしたので、上記盲蓋の離脱
が迅速に行なえることになる。さらに、盲蓋に吸引孔の
連通口に嵌合する栓部を設けたので、噴出空気によって
テーブル上の切り屑を除去する際に、盲蓋が上記凹部か
ら不用意に離脱しなくなる等の効果を奏する。
As is apparent from the above description, according to the present invention, since the operation concave portion into which the finger is fitted is provided on the outer periphery of the concave portion of the suction hole into which the blind lid is fitted, the blind lid is detached from the concave portion. At this time, this can be performed directly by hand, and the operation of opening and closing the suction hole can be performed quickly. In addition, the suction area of the suction hole is the sum of the concave portion and the operation concave portion, and the suction force of the workpiece increases. In addition, since the finger cover is provided on the upper part of the outer periphery of the blind lid, the blind lid can be quickly removed. Furthermore, since the blind lid is provided with a plug portion that fits into the communication port of the suction hole, the effect that the blind lid does not accidentally come off from the recess when removing chips on the table by jetting air is provided. To play.

【図面の簡単な説明】[Brief description of the drawings]

【図1】図1は本発明の第1実施例を示す要部断面図で
ある。
FIG. 1 is a sectional view of a main part showing a first embodiment of the present invention.

【図2】図1の平面図である。FIG. 2 is a plan view of FIG.

【図3】本発明の第2実施例を示す要部断面図である。FIG. 3 is a sectional view showing a main part of a second embodiment of the present invention.

【図4】図3の平面図である。FIG. 4 is a plan view of FIG. 3;

【図5】本発明の第3実施例を示す要部断面図である。FIG. 5 is a sectional view showing a main part of a third embodiment of the present invention.

【図6】図5の平面図である。FIG. 6 is a plan view of FIG. 5;

【図7】本発明による盲蓋の第1実施例を示す側面図で
ある。
FIG. 7 is a side view showing a first embodiment of a blind lid according to the present invention.

【図8】図7の平面図である。FIG. 8 is a plan view of FIG. 7;

【図9】本発明による盲蓋の第2実施例を示す側面図で
ある。
FIG. 9 is a side view showing a second embodiment of the blind lid according to the present invention.

【図10】本発明による盲蓋の第3実施例を示す側面図
である。
FIG. 10 is a side view showing a third embodiment of the blind lid according to the present invention.

【図11】従来例を示す要部断面図である。FIG. 11 is a sectional view of a main part showing a conventional example.

【図12】従来例による盲蓋の側面図である。FIG. 12 is a side view of a blind lid according to a conventional example.

【図13】図12の平面図である。FIG. 13 is a plan view of FIG.

【符号の説明】[Explanation of symbols]

10 テーブル 10a 上部壁 11 負圧室 11a 接続口 12 吸引孔 12a 凹部 12b 連通口 13 操作凹部 14 盲蓋 14a 主体 14b 環状溝 14c 指掛け部 14d 栓部 15 シート W 被加工物 Reference Signs List 10 Table 10a Upper wall 11 Negative pressure chamber 11a Connection port 12 Suction hole 12a Depression 12b Communication port 13 Operation depression 14 Blind lid 14a Main body 14b Annular groove 14c Finger hook 14d Plug 15 Sheet W Workpiece

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】内部に負圧室(11)を有し、上部壁(1
0a)に大径の凹部(12a)と小径の連通口(12
b)とを上下に有する段状の吸引孔(12)を所定ピッ
チで明けてなる吸着型のテーブル(10)を設け、前記
各吸引孔(12)の凹部(12a)に盲蓋(14)を着
脱可能に嵌合させてなる吸着型テーブルの弁部の構造に
おいて、前記上部壁(10a)の上面に前記凹部(12
a)の外周から半径方向外方に延出する操作凹部(1
3)を設けたことを特徴とする吸着型テーブルの弁部の
構造。
A negative pressure chamber (11) is provided inside, and an upper wall (1) is provided.
0a), a large-diameter concave portion (12a) and a small-diameter communication port (12a).
b) is provided with a suction-type table (10) in which stepped suction holes (12) having upper and lower portions are formed at a predetermined pitch, and a blind lid (14) is formed in a concave portion (12a) of each suction hole (12). In the structure of the valve portion of the suction type table, which is detachably fitted, the concave portion (12) is formed on the upper surface of the upper wall (10a).
a) The operation concave portion (1) extending radially outward from the outer periphery of (a).
(3) The structure of the valve portion of the suction type table, wherein (3) is provided.
【請求項2】前記操作凹部(13)の深さは、吸引孔
(12)の凹部(12a)よりも浅くかつ凹部(12
a)に嵌合された盲蓋(14)の上面よりも低位置とし
たことを特徴とする請求項1記載の吸着型テーブルの弁
部の構造。
2. The operation recess (13) is shallower than the recess (12a) of the suction hole (12) and has a depth (12).
2. The structure of the valve portion of the suction type table according to claim 1, wherein the position is lower than the upper surface of the blind lid (14) fitted in a).
【請求項3】前記操作凹部(13)は、前記凹部(12
a)の外周の一部から半径方向外方に延出させて形成し
たことを特徴とする請求項1又は2記載の吸着型テーブ
ルの弁部の構造。
3. The operating recess (13) is provided with the recess (12).
3. The structure of the valve portion of the suction-type table according to claim 1, wherein the valve portion is formed so as to extend radially outward from a part of the outer periphery of a).
【請求項4】前記操作凹部(13)は、前記凹部(12
a)の外周の略全域から該凹部(12a)と同芯状に半
径方向外方に延出させて形成したことを特徴とする請求
項1,2又は3記載の吸着型テーブルの弁部の構造。
4. The operating recess (13) is provided with the recess (12).
4. The valve part of a suction type table according to claim 1, wherein the valve part is formed so as to extend radially outward concentrically with the concave part (12a) from substantially the entire area of the outer periphery of a). Construction.
【請求項5】前記盲蓋(14)の外周の上部に前記操作
凹部(13)方向に突出する指掛け部(14c)を設け
たことを特徴とする請求項1〜4いずれか記載の吸着型
テーブルの弁部の構造。
5. The suction type according to claim 1, wherein a finger hook (14c) protruding in the direction of the operation recess (13) is provided at an upper portion of an outer periphery of the blind lid (14). Table valve structure.
【請求項6】前記盲蓋(14)の中心部に下方に突出し
て前記吸引孔(12)の連通口(12b)に嵌合する栓
部(14d)を設けたことを特徴する請求項1〜5いず
れか記載の吸着型テーブルの弁部の構造。
6. A stopper (14d) is provided at the center of the blind lid (14) to protrude downward and fit into the communication port (12b) of the suction hole (12). 6. The structure of the valve section of the suction-type table according to any one of items 1 to 5.
JP10276097A 1997-04-03 1997-04-03 Structure of valve of adsorptive type table Pending JPH10277860A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10276097A JPH10277860A (en) 1997-04-03 1997-04-03 Structure of valve of adsorptive type table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10276097A JPH10277860A (en) 1997-04-03 1997-04-03 Structure of valve of adsorptive type table

Publications (1)

Publication Number Publication Date
JPH10277860A true JPH10277860A (en) 1998-10-20

Family

ID=14336159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10276097A Pending JPH10277860A (en) 1997-04-03 1997-04-03 Structure of valve of adsorptive type table

Country Status (1)

Country Link
JP (1) JPH10277860A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013136088A (en) * 2011-12-28 2013-07-11 Mitsubishi Electric Corp Holding device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013136088A (en) * 2011-12-28 2013-07-11 Mitsubishi Electric Corp Holding device

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